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公开(公告)号:US11631613B2
公开(公告)日:2023-04-18
申请号:US17185443
申请日:2021-02-25
Applicant: United Microelectronics Corp.
Inventor: Chih-Kai Hsu , Ssu-I Fu , Chia-Jung Hsu , Chun-Ya Chiu , Chin-Hung Chen , Yu-Hsiang Lin
IPC: H01L27/146 , H01L21/768 , H01L27/108
Abstract: Provided is a semiconductor device, including a substrate including a pixel region, a gate structure on the substrate in the pixel region, wherein the gate structure comprises a gate dielectric layer and a gate conductive layer on the gate dielectric layer; a dielectric layer located over the substrate and the gate structure; and a contact located in the dielectric layer and electrically connected to the gate conductive layer. The contact includes a doped polysilicon layer in contact with the gate conductive layer; a metal layer located on the doped polysilicon layer, wherein a part of the metal layer is embedded in the doped polysilicon layer; a barrier layer located between the metal layer and the doped polysilicon layer; and a metal silicide layer located between the barrier layer and the doped polysilicon layer.
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112.
公开(公告)号:US11626515B2
公开(公告)日:2023-04-11
申请号:US17109153
申请日:2020-12-02
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Sheng-Yao Huang , Yu-Ruei Chen , Zen-Jay Tsai , Yu-Hsiang Lin
IPC: H01L29/78 , H01L21/265 , H01L29/06 , H01L29/66 , H01L21/28 , H01L21/8234 , H01L29/423 , H01L27/088
Abstract: A semiconductor structure includes a substrate, a buried oxide layer formed in the substrate and near a surface of the substrate, a gate dielectric layer formed on the substrate and covering the buried oxide layer, a gate structure formed on the gate dielectric layer and overlapping the buried oxide layer, and a source region and a drain region formed in the substrate and at two sides of the gate structure.
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公开(公告)号:US11476343B2
公开(公告)日:2022-10-18
申请号:US17213868
申请日:2021-03-26
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Sheng-Yao Huang , Yu-Ruei Chen , Zen-Jay Tsai , Yu-Hsiang Lin
IPC: H01L21/70 , H01L29/423 , H01L21/28 , H01L29/06
Abstract: A high-voltage transistor device includes a semiconductor substrate, an isolation structure, a gate dielectric layer, a gate, a source region and a drain region. The semiconductor substrate has a plurality of grooves extending downward from a surface of the semiconductor substrate to form a sawtooth sectional profile. The isolation structure is disposed on the outside of the plurality of grooves, and extends from the surface downwards into the semiconductor substrate to define a high-voltage area. The gate dielectric layer is disposed on the high-voltage area and partially filled in the plurality of grooves. The gate is disposed on the gate dielectric layer. The source region and the drain region are respectively disposed in the semiconductor substrate and isolated from each other.
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公开(公告)号:US20220320147A1
公开(公告)日:2022-10-06
申请号:US17844067
申请日:2022-06-20
Applicant: United Microelectronics Corp.
Inventor: Sheng-Yao Huang , Yu-Ruei Chen , Chung-Liang Chu , Zen-Jay Tsai , Yu-Hsiang Lin
IPC: H01L27/12 , H01L21/8234 , H01L29/66 , H01L29/78
Abstract: A fin transistor structure is provided. The fin transistor structure includes a first substrate. An insulation layer is disposed on the first substrate. A plurality of fin structures are disposed on the insulation layer. A supporting dielectric layer fixes the fin structures at the fin structures at waist parts thereof. A gate structure layer is disposed on the supporting dielectric layer and covers a portion of the fin structures.
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公开(公告)号:US11417685B2
公开(公告)日:2022-08-16
申请号:US16699474
申请日:2019-11-29
Applicant: United Microelectronics Corp.
Inventor: Sheng-Yao Huang , Yu-Ruei Chen , Chung-Liang Chu , Zen-Jay Tsai , Yu-Hsiang Lin
IPC: H01L27/12 , H01L21/8234 , H01L29/66 , H01L29/78
Abstract: A fin transistor structure is provided. The fin transistor structure includes a first substrate. An insulation layer is disposed on the first substrate. A plurality of fin structures are disposed on the insulation layer. A supporting dielectric layer fixes the fin structures at the fin structures at waist parts thereof. A gate structure layer is disposed on the supporting dielectric layer and covers a portion of the fin structures.
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公开(公告)号:US20220093742A1
公开(公告)日:2022-03-24
申请号:US17511586
申请日:2021-10-27
Applicant: United Microelectronics Corp.
Inventor: Chia-Jung Hsu , Chin-Hung Chen , Chun-Ya Chiu , Chih-Kai Hsu , Ssu-I Fu , Tsai-Yu Wen , Shi You Liu , Yu-Hsiang Lin
IPC: H01L29/10 , H01L21/265 , H01L29/06 , H01L29/167
Abstract: A method for fabricating of semiconductor device is provided, including providing a substrate. A first trench isolation and a second trench isolation are formed in the substrate. A portion of the substrate is etched to have a height between a top and a bottom of the first and second trench isolations. A germanium (Ge) doped layer region is formed in the portion of the substrate. A fluorine (F) doped layer region is formed in the portion of the substrate, lower than and overlapping with the germanium doped layer region. An oxidation process is performed on the portion of the substrate to form a gate oxide layer between the first and second trench isolations.
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公开(公告)号:US20220005957A1
公开(公告)日:2022-01-06
申请号:US17476461
申请日:2021-09-15
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chin-Hung Chen , Ssu-I Fu , Chih-Kai Hsu , Chun-Ya Chiu , Chia-Jung Hsu , Yu-Hsiang Lin
IPC: H01L29/786 , H01L29/06 , H01L29/423 , H01L29/66 , H01L21/306 , H01L21/02
Abstract: A manufacturing method of a semiconductor device includes the following steps. An opening is formed penetrating a dielectric layer on a semiconductor substrate. A stacked structure is formed on the dielectric layer. The stacked structure includes a first semiconductor layer partly formed in the opening and partly formed on the dielectric layer, a sacrificial layer formed on the first semiconductor layer, and a second semiconductor layer formed on the sacrificial layer. A patterning process is performed for forming a fin-shaped structure including the first semiconductor layer, the sacrificial layer, and the second semiconductor layer. An etching process is performed to remove the sacrificial layer in the fin-shaped structure. The first semiconductor layer in the fin-shaped structure is etched to become a first semiconductor wire by the etching process. The second semiconductor layer in the fin-shaped structure is etched to become a second semiconductor wire by the etching process.
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公开(公告)号:US20210202308A1
公开(公告)日:2021-07-01
申请号:US17185443
申请日:2021-02-25
Applicant: United Microelectronics Corp.
Inventor: Chih-Kai Hsu , Ssu-I Fu , Chia-Jung Hsu , Chun-Ya Chiu , Chin-Hung Chen , Yu-Hsiang Lin
IPC: H01L21/768 , H01L27/108
Abstract: Provided is a semiconductor device, including a substrate including a pixel region, a gate structure on the substrate in the pixel region, wherein the gate structure comprises a gate dielectric layer and a gate conductive layer on the gate dielectric layer; a dielectric layer located over the substrate and the gate structure; and a contact located in the dielectric layer and electrically connected to the gate conductive layer. The contact includes a doped polysilicon layer in contact with the gate conductive layer; a metal layer located on the doped polysilicon layer, wherein a part of the metal layer is embedded in the doped polysilicon layer; a barrier layer located between the metal layer and the doped polysilicon layer; and a metal silicide layer located between the barrier layer and the doped polysilicon layer.
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公开(公告)号:US20210193823A1
公开(公告)日:2021-06-24
申请号:US17197056
申请日:2021-03-10
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chin-Hung Chen , Ssu-I Fu , Chih-Kai Hsu , Chia-Jung Hsu , Yu-Hsiang Lin
IPC: H01L29/66 , H01L21/308 , H01L29/78 , H01L27/088 , H01L27/06 , H01L21/033
Abstract: A method for fabricating semiconductor device includes: forming a first semiconductor layer and an insulating layer on a substrate; removing the insulating layer and the first semiconductor layer to form openings; forming a second semiconductor layer in the openings; and patterning the second semiconductor layer, the insulating layer, and the first semiconductor layer to form fin-shaped structures.
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公开(公告)号:US20210193509A1
公开(公告)日:2021-06-24
申请号:US17190439
申请日:2021-03-03
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chih-Kai Hsu , Ssu-I Fu , Chun-Ya Chiu , Chi-Ting Wu , Chin-Hung Chen , Yu-Hsiang Lin
IPC: H01L21/762 , H01L21/8234 , H01L29/78 , H01L29/66
Abstract: A semiconductor device includes a fin-shaped structure on a substrate, a single diffusion break (SDB) structure dividing the fin-shaped structure into a first portion and a second portion as the SDB structure includes a bottom portion in the fin-shaped structure and a top portion on the bottom portion, a spacer around the top portion, a first epitaxial layer adjacent to one side of the top portion, and a second epitaxial layer adjacent to another side of the top portion.
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