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    Small scale actuators and methods for their formation and use
    112.
    发明授权
    Small scale actuators and methods for their formation and use 失效
    小型执行器及其形成和使用的方法

    公开(公告)号：US06935355B2

    公开(公告)日：2005-08-30

    申请号：US10320901

    申请日：2002-12-16

    Applicant: Jerome M. Eldridge

    Inventor： Jerome M. Eldridge

    IPC: F03G7/06 ,  F16K13/10 ,  F16K31/00

    CPC classification number: F16K99/0001 ,  B81B2201/054 ,  F03G7/06 ,  F16K13/10 ,  F16K99/0011 ,  F16K99/0017 ,  F16K99/0036 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0084 ,  Y10T137/0318 ,  Y10T137/0497 ,  Y10T137/1797 ,  Y10T137/1812 ,  Y10T137/1827 ,  Y10T137/6606 ,  Y10T137/87764

    Abstract: An actuator assembly and method for making and using an actuator assembly. In one embodiment, the assembly includes an actuator body having an actuator channel with a first region and a second region. An actuator is disposed in the actuator channel and is movable when in a flowable state between a first position and a second position. A heater is positioned proximate to the actuator channel to heat the actuator from a solid state to a flowable state. A source of gas or other propellant is positioned proximate to the actuator channel to drive the actuator from the first position to the second position. The actuator has a higher surface tension when engaged with the second region of the channel than when engaged with the first region. Accordingly, the actuator can halt upon reaching the second region of the channel due to the increased surface tension between the actuator and the second region of the channel.

    Abstract translation: 一种用于制造和使用致动器组件的致动器组件和方法。 在一个实施例中，组件包括致动器主体，其具有带有第一区域和第二区域的致动器通道。 致动器设置在致动器通道中并且当处于第一位置和第二位置之间的可流动状态时可移动。 加热器位于致动器通道附近，以将致动器从固态加热到可流动状态。 气体源或其它推进剂的位置靠近致动器通道定位，以将致动器从第一位置驱动到第二位置。 当与通道的第二区域接合时，致动器具有比与第一区域接合时更高的表面张力。 因此，由于致动器和通道的第二区域之间的表面张力增大，致动器可能在到达通道的第二区域时停止。

    Method for producing and testing a corrosion-resistant channel in a silicon device
    113.
    发明申请
    Method for producing and testing a corrosion-resistant channel in a silicon device 有权
    在硅器件中生产和测试耐腐蚀通道的方法

    公开(公告)号：US20040096992A1

    公开(公告)日：2004-05-20

    申请号：US10298847

    申请日：2002-11-18

    Inventor： James M. Harris ,  Sapna Patel

    IPC: H01L021/00

    CPC classification number: H01L22/20 ,  B81B7/0012 ,  B81B2201/054 ,  B81B2201/058 ,  B81C99/0045 ,  B81C2203/038 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0034 ,  F16K99/0036 ,  F16K99/0059 ,  F16K2099/0074 ,  H01L21/02071 ,  H01L22/24 ,  H01L22/34

    Abstract: A method for producing a corrosion-resistant channel in a wetted path of a silicon device enables such device to be used with corrosive compounds, such as fluorine. A wetted path of a MEMS device is coated with either (1) an organic compound resistant to attack by atomic fluorine or (2) a material capable of being passivated by atomic fluorine. The device is then exposed to a gas that decomposes into active fluorine compounds when activated by a plasma discharge. One example of such a gas is CF4, an inert gas that is easier and safer to work with than volatile gases like ClF3. The gas will passivate the material (if applicable) and corrode any exposed silicon. The device is tested in such a manner that any unacceptable corrosion of the wetted path will cause the device to fail. If the device operates properly, the wetted path is deemed to be resistant to corrosion by fluorine or other corrosive compounds, as applicable.

    Abstract translation: 在硅装置的润湿路径中制造耐腐蚀通道的方法使得这种装置能够与诸如氟的腐蚀性化合物一起使用。 MEMS器件的润湿路径涂覆有（1）抗原子氟侵蚀的有机化合物或（2）能够被原子氟钝化的材料。 然后将该装置暴露于当通过等离子体放电激活时分解成活性氟化合物的气体。 这种气体的一个例子是CF4，与挥发性气体如ClF3相比，更容易和更安全的惰性气体。 气体将钝化材料（如果适用）并腐蚀任何暴露的硅。 该装置以这样的方式被测试，使得湿润路径的任何不可接受的腐蚀将导致装置失效。 如果设备正常工作，则湿润路径被认为是耐氟或其他腐蚀性化合物的腐蚀，如适用的。

    Small scale actuators and methods for their formation and use
    115.
    发明授权
    Small scale actuators and methods for their formation and use 失效
    小型执行器及其形成和使用的方法

    公开(公告)号：US06672325B2

    公开(公告)日：2004-01-06

    申请号：US10320993

    申请日：2002-12-16

    Applicant: Jerome M. Eldridge

    Inventor： Jerome M. Eldridge

    IPC: F16K31122

    CPC classification number: F16K99/0001 ,  B81B2201/054 ,  F03G7/06 ,  F16K13/10 ,  F16K99/0011 ,  F16K99/0017 ,  F16K99/0036 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0084 ,  Y10T137/0318 ,  Y10T137/0497 ,  Y10T137/1797 ,  Y10T137/1812 ,  Y10T137/1827 ,  Y10T137/6606 ,  Y10T137/87764

    Abstract: An actuator assembly and method for making and using an actuator assembly. In one embodiment, the assembly includes an actuator body having an actuator channel with a first region and a second region. An actuator is disposed in the actuator channel and is movable when in a flowable state between a first position and a second position. A heater is positioned proximate to the actuator channel to heat the actuator from a solid state to a flowable state. A source of gas or other propellant is positioned proximate to the actuator channel to drive the actuator from the first position to the second position. The actuator has a higher surface tension when engaged with the second region of the channel than when engaged with the first region. Accordingly, the actuator can halt upon reaching the second region of the channel due to the increased surface tension between the actuator and the second region of the channel.

    Abstract translation: 一种用于制造和使用致动器组件的致动器组件和方法。 在一个实施例中，组件包括致动器主体，其具有带有第一区域和第二区域的致动器通道。 致动器设置在致动器通道中并且当处于第一位置和第二位置之间的可流动状态时可移动。 加热器位于致动器通道附近，以将致动器从固态加热到可流动状态。 气体源或其它推进剂的位置靠近致动器通道定位，以将致动器从第一位置驱动到第二位置。 当与通道的第二区域接合时，致动器具有比与第一区域接合时更高的表面张力。 因此，由于致动器和通道的第二区域之间的表面张力增大，致动器可能在到达通道的第二区域时停止。

    Small scale actuators and methods for their formation and use
    116.
    发明申请
    Small scale actuators and methods for their formation and use 失效
    小型执行器及其形成和使用的方法

    公开(公告)号：US20030089865A1

    公开(公告)日：2003-05-15

    申请号：US10320901

    申请日：2002-12-16

    Inventor： Jerome M. Eldridge

    IPC: F16K031/00

    CPC classification number: F16K99/0001 ,  B81B2201/054 ,  F03G7/06 ,  F16K13/10 ,  F16K99/0011 ,  F16K99/0017 ,  F16K99/0036 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0084 ,  Y10T137/0318 ,  Y10T137/0497 ,  Y10T137/1797 ,  Y10T137/1812 ,  Y10T137/1827 ,  Y10T137/6606 ,  Y10T137/87764

    Abstract: An actuator assembly and method for making and using an actuator assembly. In one embodiment, the assembly includes an actuator body having an actuator channel with a first region and a second region. An actuator is disposed in the actuator channel and is movable when in a flowable state between a first position and a second position. A heater is positioned proximate to the actuator channel to heat the actuator from a solid state to a flowable state. A source of gas or other propellant is positioned proximate to the actuator channel to drive the actuator from the first position to the second position. The actuator has a higher surface tension when engaged with the second region of the channel than when engaged with the first region. Accordingly, the actuator can halt upon reaching the second region of the channel due to the increased surface tension between the actuator and the second region of the channel.

    Abstract translation: 一种用于制造和使用致动器组件的致动器组件和方法。 在一个实施例中，组件包括致动器主体，其具有带有第一区域和第二区域的致动器通道。 致动器设置在致动器通道中并且当处于第一位置和第二位置之间的可流动状态时可移动。 加热器位于致动器通道附近，以将致动器从固态加热到可流动状态。 气体源或其它推进剂的位置靠近致动器通道定位，以将致动器从第一位置驱动到第二位置。 当与通道的第二区域接合时，致动器具有比与第一区域接合时更高的表面张力。 因此，由于致动器和通道的第二区域之间的表面张力增大，致动器可能在到达通道的第二区域时停止。

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