中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

278 records (took 0.021 seconds)

    Blank made of titanium-doped silica glass and method for the production thereof
    111.
    发明授权
    Blank made of titanium-doped silica glass and method for the production thereof 有权
    由钛掺杂的石英玻璃制成的坯料及其制造方法

    公开(公告)号：US09540271B2

    公开(公告)日：2017-01-10

    申请号：US14748344

    申请日：2015-06-24

    Applicant: Heraeus Quarzglas GmbH & Co. KG

    Inventor： Klaus Becker ,  Stefan Ochs ,  Stephan Thomas

    IPC: C03C3/06 ,  C03B23/04 ,  C03B19/14 ,  G03F1/24 ,  C03B19/06 ,  G03F7/20

    CPC classification number: C03B23/04 ,  C03B19/066 ,  C03B19/1453 ,  C03B19/1469 ,  C03B2201/06 ,  C03B2201/075 ,  C03B2201/42 ,  C03C3/06 ,  C03C2201/42 ,  C03C2203/10 ,  C03C2203/50 ,  G03F1/24 ,  G03F7/70316 ,  G03F7/7095

    Abstract: A blank made of titanium-doped silica glass for a mirror substrate for use in EUV lithography is provided. The blank includes a surface portion to be provided with a reflective film and having an optically used area (CA) over which a coefficient of thermal expansion (CTE) has a two-dimensional inhomogeneity (dCTE) distribution profile averaged over a thickness of the blank. A maximum inhomogeneity (dCTEmax) of less than 5 ppb/K is defined as a difference between a CTE maximum value and a CTE minimum value. The dCTEmax is at least 0.5 ppb/K. The CA forms a non-circular area having a centroid. The dCTE distribution profile is not rotation-symmetrical and is defined over the CA, such that straight profile sections normalized to a unit length and extending through the centroid of the area yield a dCTE family of curves forming a curve band with a bandwidth of less than 0.5×dCTEmax.

    Abstract translation: 提供了一种用于EUV光刻的用于镜面基板的掺钛石英玻璃的空白件。 坯料包括具有反射膜并具有光学用途区域（CA）的表面部分，在该区域上的热膨胀系数（CTE）在坯料的厚度上平均的二维不均匀性（dCTE）分布分布平均 。 小于5ppb / K的最大不均匀性（dCTEmax）定义为CTE最大值和CTE最小值之间的差。 dCTEmax至少为0.5 ppb / K。 CA形成具有质心的非圆形区域。 dCTE分布轮廓不是旋转对称的，并且在CA上定义，使得被归一化为单位长度并延伸穿过该区域的质心的直线剖面产生了形成带宽小于的曲线的dCTE曲线族 0.5×dCTEmax。

    METHOD OF MAKING OPTICAL FIBERS IN A REDUCING ATMOSPHERE
    112.
    发明申请
    METHOD OF MAKING OPTICAL FIBERS IN A REDUCING ATMOSPHERE 有权
    在减少大气中制造光纤的方法

    公开(公告)号：US20160009589A1

    公开(公告)日：2016-01-14

    申请号：US14734122

    申请日：2015-06-09

    Applicant: Corning Incorporated

    Inventor： Amanda Lee Billings ,  Dana Craig Bookbinder ,  Robert Brett Desorcie ,  Liam Ruan de Paor ,  Pushkar Tandon ,  Li Yang

    IPC: C03B37/014 ,  C03B37/027 ,  G02B6/02 ,  C03B37/012

    CPC classification number: C03B37/01446 ,  C03B37/01211 ,  C03B37/01248 ,  C03B37/027 ,  C03B2201/075 ,  C03B2201/20 ,  C03B2203/23 ,  G02B6/02 ,  G02B6/021 ,  G02B6/03627 ,  G02B6/0365 ,  Y02P40/57

    Abstract: A method for forming an optical fiber preform and fibers drawn from the preform. The method includes forming a soot cladding monolith, inserting a consolidated core cane into the internal cavity, and processing the resulting core-cladding assembly to form a preform. Processing may include exposing the core-cladding assembly to a drying agent and/or dopant precursor, and sintering the core-cladding assembly in the presence of a reducing agent to densify the soot cladding monolith onto the core cane to form a preform. The preform features low hydroxyl content and low sensitivity to hydrogen. Fibers drawn from the preform exhibit low attenuation losses from absorption by the broad band centered near 1380 nm.

    Abstract translation: 一种用于形成光纤预制棒的方法和从所述预成型件拉出的纤维。 该方法包括形成烟灰包覆整料，将固结的芯棒插入内部空腔中，以及处理所得到的芯 - 包层组件以形成预制件。 处理可以包括将芯包层组件暴露于干燥剂和/或掺杂剂前体，以及在还原剂存在下烧结芯 - 包层组件以将烟炱包覆整料致密化到芯棒上以形成预制件。 该预制件具有低羟基含量和对氢的低敏感性。 从预制件中抽出的纤维，由1380nm附近的宽带吸收而产生的衰减损耗低。

    Method and tubular semifinished product for producing an optical fiber
    114.
    发明授权
    Method and tubular semifinished product for producing an optical fiber 有权
    用于生产光纤的方法和管状半成品

    公开(公告)号：US09085481B2

    公开(公告)日：2015-07-21

    申请号：US13583605

    申请日：2011-03-10

    Applicant: Ralph Sattmann ,  Jan Vydra ,  Michael Huenermann

    Inventor： Ralph Sattmann ,  Jan Vydra ,  Michael Huenermann

    IPC: C03B23/047 ,  C03B37/012 ,  C03B37/027 ,  C03C13/04 ,  G02B6/036

    CPC classification number: C03B37/02754 ,  C03B37/01211 ,  C03B37/01228 ,  C03B37/01242 ,  C03B37/018 ,  C03B37/027 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/30 ,  C03B2201/31 ,  C03B2203/22 ,  C03B2203/23 ,  C03B2205/30 ,  C03C13/045 ,  C03C2201/12 ,  G02B6/03633 ,  G02B6/0365 ,  Y10T428/2935

    Abstract: Methods for producing an optical fiber by elongating a silica glass blank or a coaxial group of silica glass components, on the basis of which a fiber is obtained that comprises a core zone, an inner jacket zone enclosing the core zone and a ring zone surrounding the inner jacket zone, are known. In order to provide, proceeding from this, a method, a tubular semi-finished product and a group of coaxial components for the cost-effective production of an optical fiber, which is characterized by a high quality of the boundary between the core and jacket and by low bending sensitivity, according to the invention, the silica glass of the ring zone is provided in the form of a ring zone tube made of silica glass having a mean fluorine content of at least 6000 weight ppm and the tube has an inner tube surface and an outer tube surface, wherein via the wall of the ring zone tube, a radial fluorine concentration profile is adjusted which has an inner fluorine depletion layer with a layer thickness of at least 1 μm and no more than 10 μm, in which the fluorine content decreases toward the inner tube surface and is no more than 3000 weight ppm in a region close to the surface which has a thickness of 1 μm.

    Abstract translation: 通过使二氧化硅玻璃坯料或同轴的二氧化硅玻璃成分体组织进行拉伸来制造光纤的方法，基于该光纤获得包含芯部区域的纤维，包围芯部区域的内部护套区域和围绕该区域的环形区域 内护套区域，已知。 为了提供一种用于成本有效地生产光纤的方法，管状半成品和一组同轴部件，其特征在于芯和夹套之间的边界质量高 并且通过低弯曲灵敏度，根据本发明，环区的石英玻璃以平均氟含量为至少6000重量ppm的石英玻璃制成的环形管的形式提供，并且管具有内管 表面和外管表面，其中通过环带管的壁，调节径向氟浓度分布，其具有层厚度为至少1μm且不大于10μm的内氟耗尽层，其中 氟含量向内管表面减少，并且在接近表面厚度为1μm的区域中不超过3000重量ppm。

    Method of producing synthetic quartz glass for excimer laser
    115.
    发明授权
    Method of producing synthetic quartz glass for excimer laser 有权
    制备用于准分子激光的合成石英玻璃的方法

    公开(公告)号：US09067814B2

    公开(公告)日：2015-06-30

    申请号：US12688332

    申请日：2010-01-15

    Applicant: Shigeru Maida ,  Hisatoshi Otsuka

    Inventor： Shigeru Maida ,  Hisatoshi Otsuka

    IPC: C03B20/00 ,  C03B19/14

    CPC classification number: C03B19/1453 ,  C03B19/1469 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2207/20 ,  Y02P40/57

    Abstract: Disclosed is a method of producing a synthetic quartz glass for excimer laser by depositing on a target silica particulates obtained by subjecting a silica raw material to vapor-phase hydrolysis or oxidative decomposition in an oxyhydrogen flame in a vacuum sintering furnace to form a porous silica base material, vitrifying the porous silica base material, and subjecting the vitrified material to hot forming, an annealing treatment and a hydrogen doping treatment, wherein the vitrification of the porous silica base material includes: (a) a step of holding a vacuum pressure at or below 20.0 Pa in a temperature range from 400° C., inclusive, to 900° C., exclusive; (b) a step of holding a vacuum pressure at or below 10.0 Pa in a temperature range from 900° C., inclusive, to 1100° C., exclusive; and (c) a step of holding a vacuum pressure at or below 3.0 Pa in a temperature range from 1100° C. to a transparent-vitrification temperature.

    Abstract translation: 公开了一种通过在真空烧结炉中在氧氢火焰中使二氧化硅原料进行气相水解或氧化分解而获得的目标二氧化硅微粒上沉积以制备准分子激光的合成石英玻璃的方法，以形成多孔二氧化硅基质 材料，玻璃化多孔二氧化硅基材，以及对玻璃化材料进行热成型，退火处理和氢掺杂处理，其中多孔二氧化硅基材的玻璃化包括：（a）将真空压力保持在或 低于20.0Pa，温度范围为400℃，至900℃，独占; （b）在900℃以上至1100℃的温度范围内保持真空压力为10.0Pa以下的工序。 和（c）在1100℃的温度范围内保持真空压力等于或低于3.0Pa的步骤至透明玻璃化温度。

    METHOD FOR PRODUCING A CYLINDRICAL COMPONENT FROM SYNTHETIC QUARTZ GLASS CONTAINING FLUORINE
    116.
    发明申请
    METHOD FOR PRODUCING A CYLINDRICAL COMPONENT FROM SYNTHETIC QUARTZ GLASS CONTAINING FLUORINE 审中-公开
    从含有氟的合成石英玻璃制造圆柱形部件的方法

    公开(公告)号：US20150143851A1

    公开(公告)日：2015-05-28

    申请号：US14395468

    申请日：2013-04-16

    Applicant: Heraeus Quarzglas GmbH & Co. KG

    Inventor： Martin Trommer ,  Malte Schwerin ,  Steffen Zwarg

    IPC: C03B37/014 ,  C03B37/018

    CPC classification number: C03B37/01446 ,  C03B19/1453 ,  C03B37/01453 ,  C03B37/018 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/23

    Abstract: The following method steps are known for producing cylindrical components from synthetic quartz glass containing fluorine: producing a SiO2 soot body, removing hydroxyl groups from the soot body, loading the soot body with fluorine, post-chlorinating the soot body loaded with fluorine, and vitrifying the soot body to form the cylindrical component. In order to achieve distributions in particular of fluorine that are especially reproducibly homogeneous axially and radially, according to the invention it is proposed that a concentration of hydroxyl groups in the range of 1 to 300 weight ppm is set in the soot body upon the drying and an average fluorine content of at least 1500 weight ppm is set upon the loading with fluorine, and that loading with chlorine occurs during the post-chlorination, which loading results in an average chlorine content of at least 50 weight ppm in the synthetic quartz glass after the vitrification, under the further stipulation that the weight ratio of the contents of fluorine and chlorine is less than 30.

    Abstract translation: 以下的方法步骤已知用于由含氟的合成石英玻璃制造圆柱形部件：产生SiO 2烟炱体，从烟炱体中除去羟基，用氟装载烟炱体，对装有氟的烟炱体进行后氯化和玻璃化 烟炱体形成圆柱形部件。 为了实现特别是在轴向和径向上特别可重复地均匀分布的氟的分布，根据本发明，提出在干燥后在烟灰体中设定1〜300重量ppm范围内的羟基浓度， 在加载氟时，设定至少1500重量ppm的平均氟含量，并且在后氯化期间发生氯负载，该负载导致在合成石英玻璃中的平均氯含量至少为50重量ppm 玻璃化，进一步规定氟和氯含量的重量比小于30。

    Optical fiber, optical transmission system, and method of making optical fiber
    117.
    发明授权
    Optical fiber, optical transmission system, and method of making optical fiber 有权
    光纤，光传输系统及制造光纤的方法

    公开(公告)号：US08687936B2

    公开(公告)日：2014-04-01

    申请号：US13706458

    申请日：2012-12-06

    Applicant: Sumitomo Electric Industries, Ltd.

    Inventor： Tetsuya Nakanishi ,  Tatsuya Konishi ,  Kazuya Kuwahara

    IPC: G02B6/00

    CPC classification number: G02B6/028 ,  C03B37/02718 ,  C03B37/02727 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/23 ,  C03B2205/56 ,  C03C13/045 ,  C03C13/046

    Abstract: Provided is an inexpensive low-loss optical fiber suitably used in an optical transmission network. An optical fiber includes a core, an optical cladding, and a jacket. The core has a relative refractive index difference between 0.2% and 0.32% and has a refractive index volume between 9%·μm2 and 18%·μm2. The jacket has a relative refractive index difference between 0.03% and 0.20%. Glass constituting the core has a fictive temperature between 1400° C. and 1560° C. Stress remaining in the core is compressive stress. A cutoff wavelength measured on a fiber having a length of 2 m is 1300 nm or more and a cutoff wavelength measured on a fiber having a length of 100 m is 1500 nm or less. An effective area at a wavelength of 1550 nm is 110 μm2 or more. A attenuation at a wavelength of 1550 nm is 0.19 dB/km or less.

    Abstract translation: 提供了适用于光传输网络的便宜的低损耗光纤。 光纤包括芯，光学包层和外壳。 芯的相对折射率差为0.2％至0.32％，折射率体积在9％·μm2和18％·μm2之间。 护套的相对折射率差为0.03％至0.20％。 构成核心的玻璃具有1400℃至1560℃之间的假想温度。芯体中的应力是压应力。 在长度为2μm的光纤上测量的截止波长为1300nm以上，在长度为100μm的光纤上测定的截止波长为1500nm以下。 1550nm波长的有效面积为110μm2以上。 在1550nm波长处的衰减为0.19dB / km或更小。

    Synthetic silica glass with uniform fictive temperature
    119.
    发明授权
    Synthetic silica glass with uniform fictive temperature 有权
    具有均匀假想温度的合成石英玻璃

    公开(公告)号：US08596094B2

    公开(公告)日：2013-12-03

    申请号：US12902238

    申请日：2010-10-12

    Applicant: Carlos Duran ,  Kenneth Edward Hrdina ,  Ulrich Wilhelm Heinz Neukirch

    Inventor： Carlos Duran ,  Kenneth Edward Hrdina ,  Ulrich Wilhelm Heinz Neukirch

    IPC: C03B13/00 ,  C03B15/00 ,  C03B19/00 ,  C03B25/00 ,  C03C3/06

    CPC classification number: C03B25/02 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/22 ,  C03B2201/23

    Abstract: A method of making a silica glass having a uniform fictive temperature. The glass article is heated at a target fictive temperature, or heated or cooled at a rate that is less than the rate of change of the fictive temperature, for a time that is sufficient to allow the fictive temperature of the glass to come within 3° C. of the target fictive temperature. The silica glass is then cooled from the target fictive temperature to a temperature below the strain point of the glass at a cooling rate that is greater than the relaxation rate of the glass at the target fictive temperature. The silica glass has a fictive temperature that varies by less than 3° C. after the annealing step. A silica glass made by the method is also described.

    Abstract translation: 制造具有均匀的假想温度的二氧化硅玻璃的方法。 将玻璃制品在目标假想温度下加热，或以低于假想温度变化率的速率加热或冷却一段足以使玻璃的假想温度达到3°的时间 C.目标虚构温度。 然后将二氧化硅玻璃从目标假想温度冷却至低于玻璃应变点的温度，其冷却速率大于目标假想温度下玻璃的松弛率。 二氧化硅玻璃具有在退火步骤之后变化小于3℃的假想温度。 还描述了通过该方法制备的二氧化硅玻璃。

Patent Agency Ranking