METHODS OF FORMING AND ANALYZING DOPED SILICON
    111.
    发明申请
    METHODS OF FORMING AND ANALYZING DOPED SILICON 审中-公开
    形成和分析掺杂硅的方法

    公开(公告)号:US20150284873A1

    公开(公告)日:2015-10-08

    申请号:US14441559

    申请日:2013-12-04

    Abstract: Methods of forming and analyzing doped monocrystalline silicon each comprise the steps of providing: a vessel, particulate silicon, a dopant, and a float-zone apparatus. The vessel for each method comprises silicon and defines a cavity. The methods each further comprise the steps of combining the particulate silicon and the dopant to form treated particulate silicon, and disposing the treated particulate silicon into the cavity of the vessel. The methods yet further comprise the step of float-zone processing the vessel and the treated particulate silicon into doped monocrystalline silicon with the float-zone apparatus. The analytical method further comprises the step of providing an instrument. The analytical method yet further comprises the steps of removing a piece from the doped monocrystalline silicon, and determining the concentration of the dopant in the piece with the instrument. The methods are useful for forming and analyzing monocrystalline silicon having various types and/or concentrations of dopant(s).

    Abstract translation: 形成和分析掺杂的单晶硅的方法各自包括提供:容器,微粒硅,掺杂剂和浮区设备的步骤。 用于每种方法的容器包括硅并限定空腔。 所述方法各自还包括将颗粒状硅和掺杂剂组合以形成经处理的颗粒状硅,并将经处理的颗粒硅置于容器的空腔中的步骤。 该方法还包括使用浮区设备将容器和经处理的颗粒硅浮选处理成掺杂的单晶硅的步骤。 分析方法还包括提供仪器的步骤。 该分析方法还包括从掺杂的单晶硅中去除一片的步骤,以及用仪器确定该片中掺杂剂的浓度。 该方法可用于形成和分析具有各种类型和/或浓度的掺杂剂的单晶硅。

    DEVICE FOR CALIBRATING A SCATTEROMETER
    114.
    发明申请
    DEVICE FOR CALIBRATING A SCATTEROMETER 有权
    用于校准扫描仪的设备

    公开(公告)号:US20150077749A1

    公开(公告)日:2015-03-19

    申请号:US14372175

    申请日:2013-01-14

    Abstract: A calibration device is described for calibrating a scatterometer, which is designed in particular for measuring a particle concentration in exhaust gases of motor vehicles. The calibration device has at least one scattering body which emits scattered light having a defined intensity and distribution when irradiated with a light beam, the scattering body having an emission surface for the scattered light, to which is assigned at least one light sensor for detecting the scattered light exiting the emission surface. A screening body having at least one screen opening through which the scattered light exits in the direction of the at least one light sensor is assigned to the emission surface of the scattering body.

    Abstract translation: 描述了用于校准散射仪的校准装置,其特别用于测量机动车辆废气中的颗粒浓度。 校准装置具有至少一个散射体,该散射体在用光束照射时发射具有确定的强度和分布的散射光,散射体具有用于散射光的发射表面,并分配有至少一个光传感器,用于检测 离开发射表面的散射光。 具有至少一个屏幕开口的屏蔽体被分配给散射体的发射表面,散射光沿着至少一个光传感器的方向射出。

    Multilayered Tissue Phantoms, Fabrication Methods, and Use
    115.
    发明申请
    Multilayered Tissue Phantoms, Fabrication Methods, and Use 有权
    多层组织幽灵,制作方法和使用

    公开(公告)号:US20150055130A1

    公开(公告)日:2015-02-26

    申请号:US14536157

    申请日:2014-11-07

    Abstract: A method for producing a multilayer tissue phantom involves successively forming at least two layers, each layer formed by depositing a viscous flowable material over a supporting element or over a previously formed layer of the phantom supported by the supporting element, selectively redistributing the material while material is solidifying to control a thickness distribution of the layer, and allowing the material to solidify sufficiently to apply a next layer. The supporting element supports the material in 2 or 3 directions and effectively molds a lumen of the tissue. The neighbouring layers are of different composition and of chosen thickness to provide desired optical properties and mechanical properties of the phantom. The phantom may have selected attenuation and backscattering properties to mimic tissues for optical coherence tomography imaging.

    Abstract translation: 用于制造多层组织体模的方法包括连续地形成至少两层,每层通过在支撑元件上沉积粘性可流动材料形成,或者由预先形成的由支撑元件支撑的体模层形成,选择性地重新分配材料,同时材料 正在凝固以控制该层的厚度分布,并允许该材料足够固化以施加下一层。 支撑元件以2或3个方向支撑材料,并有效地模制组织的内腔。 相邻的层具有不同的组成和选定的厚度以提供所需的光学性质和体模的机械性能。 幻影可以选择衰减和后向散射特性来模拟组织用于光学相干断层成像。

    ON-AXIS FOCUS SENSOR AND METHOD
    116.
    发明申请
    ON-AXIS FOCUS SENSOR AND METHOD 有权
    轴对焦传感器和方法

    公开(公告)号:US20140368635A1

    公开(公告)日:2014-12-18

    申请号:US14367564

    申请日:2012-12-20

    Abstract: A focus height sensor in an optical system for inspection of semiconductor devices includes a sensor beam source that emits a beam of electromagnetic radiation. A reflector receives the beam of electromagnetic radiation from the sensor beam source and directs the beam toward a surface of a semiconductor device positioned within a field of view of the optical system. The reflector is positioned to receive at least a portion of the beam back from the surface of the semiconductor device to direct the returned beam to a sensor. The sensor receives the returned beam and outputs a signal correlating to a position of the surface within the field of view along an optical axis of the optical system.

    Abstract translation: 用于检查半导体器件的光学系统中的焦点高度传感器包括发射电磁辐射束的传感器光束源。 反射器接收来自传感器光束源的电磁辐射束,并将光束引向位于光学系统的视野内的半导体器件的表面。 反射器定位成从半导体器件的表面接收光束的至少一部分,以将返回的光束引导到传感器。 传感器接收返回的光束,并沿着光学系统的光轴输出与视场内的表面的位置相关的信号。

    DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE
    118.
    发明申请
    DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE 有权
    缺陷检查方法和缺陷检查装置

    公开(公告)号:US20140268122A1

    公开(公告)日:2014-09-18

    申请号:US14232929

    申请日:2012-06-28

    Abstract: A defect inspection method and device for irradiating a linear region on a surface-patterned sample mounted on a planarly movable table, with illumination light from an inclined direction relative to a direction of a line normal to the sample, next detecting in each of a plurality of directions an image of the light scattered from the sample irradiated with the illumination light, then processing signals obtained by the detection of the images of the scattered light, and thereby detecting a defect present on the sample; wherein the step of detecting the scattered light image in the plural directions is performed through elliptical lenses in which elevation angles of the optical axes thereof are different from each other, within one plane perpendicular to a plane formed by the normal to the surface of the table on which to mount the sample and the longitudinal direction of the linear region irradiated with the irradiation light, the elliptical lenses being formed of circular lenses having left and right portions thereof cut.

    Abstract translation: 一种用于照射安装在平面可移动台上的表面图案样品上的线性区域的缺陷检查方法和装置,其具有相对于垂直于样品的线的方向的倾斜方向的照明光,接下来在多个 指示从照射光照射的样品散射的光的图像,然后处理通过检测散射光的图像而获得的信号,从而检测样品上存在的缺陷; 其特征在于,所述检测多个方向的散射光图像的步骤是通过椭圆形透镜进行的,所述椭圆透镜在光学轴的仰角彼此不同的垂直于与所述表的表面法线形成的平面的一个平面内 在其上安装样品和用照射光照射的线性区域的纵向方向,椭圆形透镜由其左侧和右侧部分切割的圆形透镜形成。

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