Differential-type MEMS acoustic transducer

    公开(公告)号:US09961451B2

    公开(公告)日:2018-05-01

    申请号:US14858997

    申请日:2015-09-18

    Abstract: A MEMS acoustic transducer has: a detection structure, which generates an electrical detection quantity as a function of a detected acoustic signal; and an electronic interface circuit, which is operatively coupled to the detection structure and generates an electrical output quantity as a function of the electrical detection quantity. The detection structure has a first micromechanical structure of a capacitive type and a second micromechanical structure of a capacitive type, each including a membrane that faces and is capacitively coupled to a rigid electrode and defines a respective first detection capacitor and second detection capacitor; the electronic interface circuit defines an electrical connection in series of the first detection capacitor and second detection capacitor between a biasing line and a reference line, and further has a first single-output amplifier and a second single-output amplifier, which are coupled to a respective one of the first detection capacitor and the second detection capacitor and have a respective first output terminal and second output terminal, between which the electrical output quantity is present.

    Microphone system with driven electrodes

    公开(公告)号:US09955269B2

    公开(公告)日:2018-04-24

    申请号:US15620387

    申请日:2017-06-12

    CPC classification number: H04R19/005 H04R2201/003

    Abstract: Systems for controlling parameters of a MEMS microphone. In one embodiment, the microphone system includes a MEMS microphone and a controller. The MEMS microphone includes a movable electrode, a stationary electrode, and a driven electrode. The movable electrode is configured such that acoustic pressure acting on the movable electrode causes movement of the movable electrode. The stationary electrode and the driven electrode are positioned on a first side of the movable electrode. The driven electrode is configured to alter a parameter of the MEMS microphone based on a control signal. The controller is coupled to the stationary electrode and the driven electrode. The controller is configured to determine a voltage difference between the movable electrode and the stationary electrode. The controller is also configured to generate the control signal based on the voltage difference.

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