Plasma polymerization coating with uniformity control

    公开(公告)号:US11332829B2

    公开(公告)日:2022-05-17

    申请号:US16427199

    申请日:2019-05-30

    Inventor: Jian Zong

    Abstract: Introduced here is a plasma polymerization apparatus and process. Example embodiments include a vacuum chamber in a substantially symmetrical shape relative to a central axis. A primary rotation shaft may be operable to rotate about the central axis of the vacuum chamber and a secondary rotation shaft may be operable to rotate about a secondary axis distal to the central axis. The primary and secondary rotation shafts may be mechanically connected, and one or more devices may be secured on a platform that rotates along both shafts. Additionally, reactive species discharge mechanisms positioned around a perimeter of the vacuum chamber may be configured to disperse reactive species into the vacuum chamber. The reactive species may form a uniform polymeric multi-layer coating on the surface of the one or more devices.

    Substrate processing apparatus
    113.
    发明授权

    公开(公告)号:US11282699B2

    公开(公告)日:2022-03-22

    申请号:US16814694

    申请日:2020-03-10

    Abstract: There is provided a substrate processing apparatus including: a processing container having a vacuum atmosphere formed therein; a stage provided within the processing container and configured to place a substrate on the stage; a film-forming gas supply part configured to supply a film-forming gas for forming an organic film on the substrate placed on the stage; and a heating part configured to heat the substrate placed on the stage in a non-contact manner so as to remove a surface portion of the organic film.

    SUBSTRATE, SELECTIVE FILM DEPOSITION METHOD, DEPOSITION FILM OF
ORGANIC MATTER, AND ORGANIC MATTER

    公开(公告)号:US20220081575A1

    公开(公告)日:2022-03-17

    申请号:US17421507

    申请日:2020-01-07

    Abstract: The selective film deposition method according to an embodiment of the present disclosure includes depositing a film of an organic matter represented by the following formula (1) on a substrate having a structure where a first surface region containing at least one of a metal or a metal oxide and a second surface region containing a nonmetallic inorganic material are both exposed, selectively in the first surface region than in the second surface region, wherein N represents a nitrogen atom; and R1 represents a C1-C30 hydrocarbon group optionally containing a hetero atom or a halogen atom, R2, R3, R4, and R5 each independently represent a hydrogen atom or a C1-C10 hydrocarbon group optionally containing a hetero atom or a halogen atom, where the hydrocarbon group covers a branched or cyclic hydrocarbon group when containing 3 or more carbon atoms.

    Nanostructured Bactericidal Polymer Foil

    公开(公告)号:US20220062507A1

    公开(公告)日:2022-03-03

    申请号:US17460561

    申请日:2021-08-30

    Inventor: Qing Cao Yi Zhang

    Abstract: Nanostructured thin films and methods of their manufacture are disclosed. An example method of manufacturing includes forming a colloidal crystal mask on a template substrate so as to partially mask the template substrate. The method additionally includes etching the exposed potions of the template substrate to form a plurality of holes within the template substrate corresponding to the plurality of holes in the first thin film. The method yet further includes depositing a second thin film on the etched template substrate to form a nanostructured thin film. The nanostructured thin film includes a nanopillar array disposed along a first surface of a flexible substrate. The flexible substrate and the nanopillar array comprise a polymer material.

    METHOD OF FORMING A CRYSTALLINE OR POLYCRYSTALLINE LAYER OF AN ORGANIC-INORGANIC METAL HALIDE PEROVSKITE

    公开(公告)号:US20210395279A1

    公开(公告)日:2021-12-23

    申请号:US17279146

    申请日:2019-09-23

    Abstract: The present invention provides a method of forming a crystalline or polycrystalline layer of an organic-inorganic metal halide perovskite material comprising a three-dimensional crystal structure represented by the formula AMX 3, in which A represents an organic cation or a mixture of two or more different cations, at least one of which is an organic cation, M represents a divalent metal cation or a mixture of two or more different divalent metal cations, and X represents halide anions which are the same or different, the method comprising the steps of: (i) forming a first layer on the surface of a substrate, the first layer comprising an organic-inorganic metal halide perovskite material having a planar, layered two-dimensional crystal structure (ii) reacting the first layer with one or more organic halides to form the crystalline or polycrystalline layer comprising an organic-inorganic metal halide perovskite material having the formula AMX 3. Also provided is an optoelectronic or photovoltaic device including an active layer comprising an organic-inorganic metal halide perovskite material comprising a three-dimensional crystal structure represented by the formula AMX 3, wherein the material is obtainable using the above defined method.

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