公开(公告)号：US20160011056A1

公开(公告)日：2016-01-14

申请号：US14330488

申请日：2014-07-14

Applicant: ASML Netherlands B.V.

Inventor： Rong Liu ,  Robert J. Rafac ,  David Wayne Myers ,  Robert A. Bergstedt ,  Paul Alexander McKenzie

IPC: G01J11/00 ,  H05G2/00

CPC classification number: G01J11/00 ,  G01J1/0228 ,  G01J1/0295 ,  G01J1/429 ,  G01J2001/4238 ,  G01J2001/4247 ,  H01S3/0014 ,  H01S3/2232 ,  H01S5/042 ,  H05G2/008

Abstract: In a laser-produced plasma (LPP) extreme ultraviolet (EUV) system, laser pulses are used to produce EUV light. To determine the energy of individual laser pulses, a photoelectromagnetic (PEM) detector is calibrated to a power meter using a calibration coefficient. When measuring a unitary laser beam comprising pulses of a single wavelength, the calibration coefficient is calculated based on a burst of the pulses. A combined laser beam has main pulses of a first wavelength alternating with pre-pulses pulses of a second wavelength. To calculate the energy of the main pulses in the combined laser beam, the calibration coefficient calculated for a unitary laser beam of the main pulses is used. To calculate the energy of the pre-pulses in the combined laser beam, a new calibration coefficient is calculated. When the calculated energy values drift beyond a pre-defined threshold, the calibration coefficients are recalculated.

公开(公告)号：US09182776B2

公开(公告)日：2015-11-10

申请号：US13124305

申请日：2009-10-14

Applicant: Mark Foster ,  Alexander Gaeta ,  David Geraghty ,  Michal Lipson ,  Reza Salem ,  Amy Foster

Inventor： Mark Foster ,  Alexander Gaeta ,  David Geraghty ,  Michal Lipson ,  Reza Salem ,  Amy Foster

IPC: G01J9/00 ,  G06E3/00 ,  G01J11/00 ,  G01J9/02 ,  G02B27/46

Abstract: There is set forth in one embodiment an apparatus and method for imparting a phase shift to an input waveform for output of a converted waveform. In one embodiment, a phase shift can be provided by four wave mixing of an input waveform and a pump pulse. In one embodiment, there is set forth an apparatus and method for generating a high resolution time domain representation of an input waveform comprising: dispersing the input waveform to generate a dispersed input waveform; subjecting the dispersed input waveform to four wave mixing by combining the dispersed input waveform with a dispersed pump pulse to generate a converted waveform; and presenting the converted waveform to a detector unit. In one embodiment a detector unit can include a spectrometer (spectrum analyzer) for recording of the converted waveform and output of a record representing the input waveform.

公开(公告)号：US20150276473A1

公开(公告)日：2015-10-01

申请号：US14666501

申请日：2015-03-24

Applicant: FANUC CORPORATION

Inventor： Takashi Izumi

IPC: G01J1/42 ,  G01J11/00

CPC classification number: G01J1/4257 ,  G01J11/00 ,  H01S3/08045 ,  H01S3/097 ,  H01S3/101 ,  H01S3/13 ,  H01S3/139

Abstract: A beam profiler which can determine whether or not a laser beam can be suitably output at a lower cost. The beam profiler is provided with a partial reflecting mirror, light receiving parts, and laser intensity sensors which are individually attached to the light receiving parts. The light receiving parts include a first light receiving part which receives a first region which includes an optical axis of the laser beam in a laser irradiation region of the laser beam and a second light receiving part which is insulated heat-wise from the first light receiving part and which receives a second region of a laser irradiation region which is different from the first region.

Abstract translation: 能够确定能够以较低的成本适当地输出激光束的光束轮廓仪。 光束轮廓仪设置有分别附接到光接收部分的部分反射镜，光接收部分和激光强度传感器。 光接收部分包括：第一光接收部分，其接收在激光束的激光照射区域中包括激光束的光轴的第一区域;以及第二光接收部分，其与第一光接收 并且其接收与第一区域不同的激光照射区域的第二区域。

公开(公告)号：US20150109620A1

公开(公告)日：2015-04-23

申请号：US14396978

申请日：2013-04-23

Applicant: INTER-UNIVERSITY RESEARCH INSTITUTE CORPORATION NATIONAL INSTITUTES OF NATURAL SCIENCES

Inventor： Takao Fuji ,  Yutaka Nomura

IPC: G01J11/00 ,  G01J9/02

CPC classification number: G01J11/00 ,  G01J3/2823 ,  G01J3/45 ,  G01J9/00 ,  G01J9/02 ,  G01J9/0246

Abstract: Provided are a method and an apparatus for measuring the spectral intensity and phase of a light pulse having an arbitrary time duration. The apparatus includes: a nonlinear mixing means for generating a signal light pulse expressed by the following Formula (★ denotes an operator representing general nonlinear mixing, and α denotes a coefficient which is proportional to a nonlinear susceptibility in the nonlinear mixing) by nonlinearly mixing a reference light pulse having an electric field Er(t−τ) delayed by an optical delay means and a measurement target light pulse having an electric field E0(t); and Er(t−τ)+αEr(t−τ)★E0(t) an imaging spectrum device for spectrally splitting the signal light pulse and outputting a Fourier transform signal expressed by the following Formula (F denotes a symbol indicating Fourier transform, * denotes a complex conjugate, and R denotes a symbol indicating a real part), |F[Er(t−τ)]|2+|αF[Er(t−τ)★E0(t)]|2+2R{αF[Er(t−τ)]*·F[Er(t−τ)★E0(t)]}.

Abstract translation: 提供了一种用于测量具有任意持续时间的光脉冲的光谱强度和相位的方法和装置。 该装置包括：非线性混合装置，用于产生由以下公式表示的信号光脉冲（★表示通用非线性混合的运算符，并且α表示与非线性混合中的非线性磁化率成比例的系数），通过非线性混合 具有由光延迟装置延迟的电场Er（t-τ）的参考光脉冲和具有电场E0（t）的测量目标光脉冲; 以及Er（t-τ）+αEr（t-τ）★E0（t）用于频谱分割信号光脉冲并输出由下式表示的傅里叶变换信号的成像光谱装置（F表示表示傅立叶变换的符号， | F [Er（t-τ）] | 2+ |αF[Er（t-τ）★E0（t）] | 2 + 2R { αF[Er（t-τ）] *·F [Er（t-τ）★E0（t）]}。

公开(公告)号：US20150106047A1

公开(公告)日：2015-04-16

申请号：US14318967

申请日：2014-06-30

Applicant: U.S.A. as represented by the Administrator of the National Aeronautics and Space Administration

Inventor： CONSTANTINE LUKASHIN ,  BRUCE A. WIELICKI

IPC: G01J1/10 ,  G01J1/42 ,  G01J11/00

CPC classification number: G01J1/10 ,  B64G1/1021 ,  B64G2001/1028 ,  G01J1/0429 ,  G01J1/08 ,  G01J1/4257 ,  G01J3/0224 ,  G01J3/28 ,  G01J11/00 ,  G01J2001/4238 ,  G01J2003/2866

Abstract: The present invention comprises an approach for calibrating the sensitivity to polarization, optics degradation, spectral and stray light response functions of instruments on orbit. The concept is based on using an accurate ground-based laser system, Ground-to-Space Laser Calibration (GSLC), transmitting laser light to instrument on orbit during nighttime substantially clear-sky conditions. To minimize atmospheric contribution to the calibration uncertainty the calibration cycles should be performed in short time intervals, and all required measurements are designed to be relative. The calibration cycles involve ground operations with laser beam polarization and wavelength changes.

Abstract translation: 本发明包括用于校准轨道上的仪器的偏振灵敏度，光学降级，光谱和杂散光响应函数的方法。 这个概念是基于使用精确的地面激光系统，地面到空间激光校准（GSLC），在夜间基本上天空条件下，将激光传输到轨道上的仪器。 为了尽量减少对校准不确定度的大气贡献，校准周期应在短时间间隔内执行，所有需要的测量都设计为相对的。 校准周期涉及具有激光束偏振和波长变化的地面操作。

公开(公告)号：US08830471B2

公开(公告)日：2014-09-09

申请号：US13971293

申请日：2013-08-20

Applicant: Baker Hughes Incorporated

Inventor： Brown Lyle Wilson ,  Earl Bruce Brookbank ,  Ketankumar K. Sheth ,  Suresha R. O'Bryan ,  Steven K. Tetzlaff ,  Risa Rutter

IPC: G01N21/55 ,  G01B11/16 ,  G01J11/00

CPC classification number: G01J3/0218 ,  G01D5/35316 ,  G01J3/42 ,  G01J3/4406

Abstract: A seal section for use in a wellbore electrical submersible pump and includes an optic fiber detection arrangement wherein one or more optic fiber sensors is used to detect an operational parameter associated with the seal section. The operational parameters can include temperature, vibration and pressure.

Abstract translation: 一种用于井筒电潜泵的密封部分，并且包括光纤检测装置，其中使用一个或多个光纤传感器来检测与密封部分相关联的操作参数。 操作参数可包括温度，振动和压力。

公开(公告)号：US20140168638A1

公开(公告)日：2014-06-19

申请号：US13971293

申请日：2013-08-20

Applicant: Baker Hughes Incorporated

Inventor： Brown Lyle Wilson ,  Earl Bruce Brookbank ,  Ketankumar K. Sheth ,  Suresha R. O'Bryan ,  Steven K. Tetzlaff ,  Risa Rutter

IPC: G01J11/00

CPC classification number: G01J3/0218 ,  G01D5/35316 ,  G01J3/42 ,  G01J3/4406

Abstract: A seal section for use in a wellbore electrical submersible pump and includes an optic fiber detection arrangement wherein one or more optic fiber sensors is used to detect an operational parameter associated with the seal section. The operational parameters can include temperature, vibration and pressure.

Abstract translation: 一种用于井筒电潜泵的密封部分，并且包括光纤检测装置，其中使用一个或多个光纤传感器来检测与密封部分相关联的操作参数。 操作参数可包括温度，振动和压力。

公开(公告)号：US20120120382A1

公开(公告)日：2012-05-17

申请号：US12966466

申请日：2010-12-13

Applicant: John F. SILNY ,  Gary D. COLEMAN

Inventor： John F. SILNY ,  Gary D. COLEMAN

IPC: G01C3/08 ,  G01J11/00 ,  G01B11/00

CPC classification number: G01S7/4818 ,  G01S17/42

Abstract: A multi-directional sensor system includes a light source configured to generate a beam of electromagnetic radiation; and a transmitter configured to transmit the beam of electromagnetic radiation to a target. The transmitter may include (i) a plurality of optical fibers, wherein one or more of the optical fibers are configured to receive the beam of electromagnetic radiation, and (ii) a surface on which one end of each of the plurality of optical fibers terminate in a different direction and/or orientation thereof to emit electromagnetic radiation. A detector is configured to detect electromagnetic radiation responsive to electromagnetic radiation transmitted to the target. A method of sensing is also disclosed.

Abstract translation: 多向传感器系统包括被配置为产生电磁辐射束的光源; 以及发射机，被配置为将电磁辐射束发射到目标。 发射机可以包括（i）多个光纤，其中一个或多个光纤被配置为接收电磁辐射束，以及（ii）多个光纤中的每一个的一端终止于其上的表面 在不同的方向和/或取向上发射电磁辐射。 检测器被配置为响应于传输到目标的电磁辐射来检测电磁辐射。 还公开了一种感测方法。

公开(公告)号：US07855370B2

公开(公告)日：2010-12-21

申请号：US12184624

申请日：2008-08-01

Applicant: Richard B. Mott

Inventor： Richard B. Mott

IPC: G01T1/24 ,  G01T1/20 ,  G01R13/00 ,  G01J11/00

CPC classification number: G01T1/171

Abstract: A method of detecting edges of a preamplifier signal including identifying a first portion of the signal wherein each part thereof has an instantaneous slope having a first polarity, identifying a second portion immediately following the first portion wherein each part thereof has an instantaneous slope having a second opposite polarity, and identifying a third portion immediately following the second portion wherein each part thereof has an instantaneous slope having the first polarity. The method further includes determining a first difference between the magnitudes associated with an end point and a beginning point of the second segment, determining a second difference between the magnitude associated with an end point of the third segment and the magnitude associated with a beginning point of the first segment, and detecting an edge if: (i) the first difference exceeds a threshold, and (ii) the second difference exceeds a fraction of the threshold.

Abstract translation: 一种检测前置放大器信号的边缘的方法，包括识别信号的第一部分，其中其每个部分具有具有第一极性的瞬时斜率，识别紧接在第一部分之后的第二部分，其中其每个部分具有瞬时斜率，其具有第二 并且识别紧接在第二部分之后的第三部分，其中其每个部分具有具有第一极性的瞬时斜率。 该方法还包括确定与终点相关联的幅度与第二段的起始点之间的第一差值，确定与第三段的终点相关联的幅度与与起始点相关的幅度之间的第二差值 第一段，并且如果：（i）第一差异超过阈值，并且（ii）第二差异超过阈值的分数，则检测边缘。

公开(公告)号：US07795582B2

公开(公告)日：2010-09-14

申请号：US11875415

申请日：2007-10-19

Applicant: David R. Jez ,  Frank M. Haran

Inventor： David R. Jez ,  Frank M. Haran

IPC: G01J11/00 ,  G01J1/00

CPC classification number: G01N21/3581 ,  G01S7/4818

Abstract: A system and method of monitoring with temperature stabilization. The system can include a housing operably connected to a fiber optic cable that provides a light wave thereto, a relay optic for receiving the light wave and being positioned in the housing, a radiation device for processing or producing radiation in the frequency range of 10 GHz to 100 THz from the light wave and being positioned in the housing, a temperature sensor in thermal communication with the housing, and a thermal management device in thermal communication with the housing where the thermal management device adjusts a temperature within the housing based on temperature conditions measured by the temperature sensor. Other embodiments are disclosed.

Abstract translation: 一种采用温度稳定监测的系统和方法。 该系统可以包括可操作地连接到向其提供光波的光纤电缆的壳体，用于接收光波并被定位在壳体中的中继光学器件，用于在10GHz的频率范围内处理或产生辐射的辐射装置 从光波到100THz并且被定位在壳体中，与壳体热连通的温度传感器和与壳体热连通的热管理装置，其中热管理装置基于温度条件调节壳体内的温度 由温度传感器测量。 公开了其他实施例。