System and process for analyzing a sample
    111.
    发明授权
    System and process for analyzing a sample 有权
    用于分析样品的系统和过程

    公开(公告)号:US08310675B2

    公开(公告)日:2012-11-13

    申请号:US12523417

    申请日:2008-01-18

    CPC classification number: G01N21/211 G01J3/2823 G01J4/04 G01N2021/213

    Abstract: A system and process for analyzing a sample includes an excitation section and an analyze section, said excitation section including a light source emitting an incident measurement luminous beam, a polarization state generator (PSG), first optics, and said analyze section includes a polarization state analyzer (PSA), a detection system and second optics. The excitation section includes an illumination source emitting an incident visualization luminous beam, superposition optics that direct the incident visualization luminous beam toward the sample surface along an optical axis which is identical to the optical axis of the incident measurement luminous beam and the analyze section includes separation optics that transmit a part of the reflected or transmitted visualization luminous beam and a part of the reflected or transmitted measurement luminous beam towards a visualization direction.

    Abstract translation: 用于分析样本的系统和过程包括激励部分和分析部分,所述激励部分包括发射入射测量光束的光源,偏振状态发生器(PSG),第一光学器件,并且所述分析部分包括偏振状态 分析仪(PSA),检测系统和第二光学器件。 励磁部分包括发射入射可视化发光束的照明源,将入射的可视化发光束沿着与入射测量光束的光轴相同的光轴朝向样本表面的叠加光学器件,分析部分包括分离 将反射或透射的可视化发光束的一部分和反射或透射的测量发光束的一部分朝向可视化方向透射的光学器件。

    Determining in-band optical signal-to-noise ratios in optical signals with time-varying polarization states using polarization extinction
    112.
    发明授权
    Determining in-band optical signal-to-noise ratios in optical signals with time-varying polarization states using polarization extinction 有权
    使用偏振消光确定具有时变偏振态的光信号中的带内光信噪比

    公开(公告)号:US08294896B2

    公开(公告)日:2012-10-23

    申请号:US12485251

    申请日:2009-06-16

    Inventor: Fred L. Heismann

    CPC classification number: H04B10/07953

    Abstract: A method and apparatus for improving the accuracy of in-band OSNR measurements using a conventional polarization extinction or polarization-nulling method. In particular, the severe degradations of the polarization extinction that result from slow and fast polarization fluctuations in the optical signal components during the in-band OSNR measurement are substantially mitigated by rapidly and/or randomly changing the state of polarization prior to conventional polarization control and filtering.

    Abstract translation: 一种使用常规偏振消光或偏振归零方法提高带内OSNR测量精度的方法和装置。 特别地,在带内OSNR测量期间由于光信号分量中的缓慢且快速的极化波动引起的极化消光的严重劣化通过在常规偏振控制之前快速和/或随机地改变极化状态而得到显着的减轻,并且 过滤

    Method and apparatus for testing magnetic properties of magnetic media
    113.
    发明授权
    Method and apparatus for testing magnetic properties of magnetic media 有权
    用于测试磁性介质磁性能的方法和装置

    公开(公告)号:US08283622B2

    公开(公告)日:2012-10-09

    申请号:US12672998

    申请日:2008-08-13

    CPC classification number: G01R33/0325 G01N21/21 G01N27/72

    Abstract: A method and apparatus for testing a magnetic medium. The method comprises applying a magnetic field of a time-varying strength; directing a polarized optical beam towards a portion of the medium that is in the magnetic field, wherein the optical beam is reflected by a surface of the medium at a point of incidence in the magnetic field; moving the medium relative to the optical beam so as to cause the point of incidence to repeatedly traverse each of a plurality of sectors along a track on the surface; obtaining a series of Kerr signal measurements of the reflected optical beam; grouping measurements into ensembles such that the measurements in an individual ensemble are those obtained while the point of incidence was in a corresponding one of the sectors; and determining at least one magnetic property of at least one of the sectors from the measurements in the corresponding ensemble.

    Abstract translation: 一种用于测试磁介质的方法和装置。 该方法包括施加时变强度的磁场; 将偏振光束引导到处于磁场中的介质的一部分,其中所述光束在所述磁场中的入射点处被所述介质的表面反射; 使所述介质相对于所述光束移动,以使所述入射点沿着所述表面上的轨道重复地穿过多个扇区中的每一个; 获得反射光束的一系列克尔信号测量; 将测量分组成集合,使得单个集合中的测量是当发生点在相应的扇区中时获得的测量; 以及从所述相应组合中的测量确定至少一个扇区的至少一个磁性。

    Birefringence measuring device and birefringence measuring method
    114.
    发明授权
    Birefringence measuring device and birefringence measuring method 有权
    双折射测量装置和双折射测量方法

    公开(公告)号:US08279439B2

    公开(公告)日:2012-10-02

    申请号:US12439441

    申请日:2007-06-14

    Applicant: Kenji Gomi

    Inventor: Kenji Gomi

    CPC classification number: G01N21/23

    Abstract: The present invention is a birefringence measuring device that requires only three types of light intensity information and can measure birefringence characteristics of an object with a relatively inexpensive device configuration. One embodiment comprises a light source for emitting a light flux having a specific polarization state towards the object to be measured, an optical system for extracting each of light fluxes in predetermined three polarization direction; and, from the light flux having passed the object to be measured, a detector for detecting a light amount of each of the light fluxes in the predetermined three polarization directions extracted by the optical system, and a processor for calculating a size and an azimuth of the birefringence of the object to be measured. The processor may calculate the birefringence size and azimuth by assigning each of the light amounts of the light fluxes detected by the detector to a predetermined function expression.

    Abstract translation: 本发明是双折射测量装置,其仅需要三种类型的光强度信息,并且可以以相对便宜的装置配置来测量物体的双折射特性。 一个实施例包括用于向待测量对象发射具有特定偏振态的光束的光源,用于从已经经过被测量物体的光束中提取预定三个偏振方向的每个光束的光学系统, 检测器,用于检测由光学系统提取的预定三个极化方向上的每个光束的光量;以及处理器,用于计算被测量物体的双折射的尺寸和方位角。 处理器可以通过将由检测器检测的光束的每个光量分配给预定的函数表达式来计算双折射大小和方位角。

    Liquid Crystal Optical Device Configured to Reduce Polarization Dependent Loss and Polarization Mode Dispersion
    115.
    发明申请
    Liquid Crystal Optical Device Configured to Reduce Polarization Dependent Loss and Polarization Mode Dispersion 有权
    液晶光学器件配置为减少偏振相关损耗和极化模式色散

    公开(公告)号:US20120212694A1

    公开(公告)日:2012-08-23

    申请号:US13416030

    申请日:2012-03-09

    CPC classification number: G02F1/31 G02F1/13363 G02F2201/17 G02F2203/05

    Abstract: An LC-based optical device compensates for differences in optical path lengths of polarization components of input beam. As a result, PDL and PMD of the optical device are reduced. The compensation mechanism may be a glass plate that is disposed in an optical path of a polarization component so that the optical path length of that polarization component can be made substantially equal to the optical path length of the other polarization component that traverses through a half-wave plate. Another compensation mechanism is a birefringent displacer that has two sections sandwiching a half-wave plate, wherein the two sections are of different widths and the planar front surface of the birefringent displacer can be positioned to be non-orthogonal with respect to the incident input light beam.

    Abstract translation: 基于LC的光学器件补偿输入光束的偏振分量的光程长度的差异。 结果,减少了光学装置的PDL和PMD。 补偿机构可以是设置在偏振分量的光路中的玻璃板,使得可以使该偏振分量的光程长度基本上等于穿过半波长分量的另一偏振分量的光程长度, 波片。 另一种补偿机制是双折射置换器,其具有夹住半波片的两个部分,其中两个部分具有不同的宽度,并且双折射置换器的平面前表面可以相对于入射输入光线定位成非正交的 光束。

    Optical rectification detector with boost optical mode enhancement
    116.
    发明授权
    Optical rectification detector with boost optical mode enhancement 有权
    具有升压光学模式增强的光学整流检测器

    公开(公告)号:US08237102B1

    公开(公告)日:2012-08-07

    申请号:US12630820

    申请日:2009-12-03

    Abstract: Radiation detection systems and methods. In one approach, optical radiation can be detected by using the radiation to be detected as input to a high index contrast waveguide modulator that modulates a wavelength of light that falls within the detection band of a detector. In another approach, the optical radiation that is to be detected is combined with a high power CW boost mode signal in a waveguide, and the sum and/or difference frequencies are detected. In either approach, one can use grating couplers to couple the optical radiation of interest into a waveguide.

    Abstract translation: 辐射检测系统和方法。 在一种方法中,可以通过使用待检测的辐射作为调制落在检测器的检测带内的光的波长的高折射率对比度波导调制器的输入来检测光辐射。 在另一种方法中,要检测的光辐射与波导中的高功率CW升压模式信号组合,并且检测和和/或差频。 在任一方法中,可以使用光栅耦合器将感兴趣的光学辐射耦合到波导中。

    APPARATUS AND METHODS FOR THE OPTICAL EXAMINATION OF BIREFRINGENT SPECIMENS
    117.
    发明申请
    APPARATUS AND METHODS FOR THE OPTICAL EXAMINATION OF BIREFRINGENT SPECIMENS 有权
    光学检测方法的设备及方法

    公开(公告)号:US20120176617A1

    公开(公告)日:2012-07-12

    申请号:US13382208

    申请日:2010-07-01

    Abstract: A method for optically examining a birefringent specimen, the method comprising the steps of: collecting a specimen using a substantially non-birefringent polymer film having an adhesive surface, such that the specimen is attached to the adhesive surface; and examining, between crossed polars, the specimen attached to the said film. Also provided is a substantially non-birefringent laminate film comprising: a first birefringent polymer layer and a second birefringent polymer layer, the first and second layers being mutually oriented such that the birefringent properties of the two layers cancel each other out; and an adhesive surface; wherein the adhesive surface is an outer surface of the film, and/or is an exposable surface between the first and second layers. A method of manufacturing such a film is also provided.

    Abstract translation: 一种用于光学检查双折射样品的方法,所述方法包括以下步骤:使用具有粘合剂表面的基本上非双折射聚合物膜收集样品,使得所述样品附着到所述粘合剂表面; 并在十字棱镜之间检查附着在所述胶片上的标本。 还提供了一种基本上非双折射的层压膜,包括:第一双折射聚合物层和第二双折射聚合物层,第一和第二层相互取向,使得两层的双折射性质彼此抵消; 和粘合剂表面; 其中粘合剂表面是膜的外表面,和/或是第一和第二层之间的可暴露的表面。 还提供了制造这种膜的方法。

    SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOSURE METHOD
    118.
    发明申请
    SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOSURE METHOD 有权
    表面位置检测装置,曝光装置和曝光方法

    公开(公告)号:US20120162623A1

    公开(公告)日:2012-06-28

    申请号:US13405524

    申请日:2012-02-27

    Abstract: A surface position detection apparatus capable of highly precisely detecting the surface position of a surface to be detected without substantially being affected by relative positional displacement due to a polarization component occurring in a light flux having passed through a reflective surface. In the apparatus, a projection system has a projection side prism member (7) having first reflective surfaces (7b, 7c), and a light receiving system has a light receiving prism member (8) having second reflective surfaces (8b, 8c) arranged in correspondence with the projection side prism member. The surface position detection apparatus further has a member for compensating relative positional displacement due to a polarization component of a light flux having passed through the first and second reflective surfaces

    Abstract translation: 一种表面位置检测装置,其能够高度精确地检测待检测表面的表面位置,而不会受到通过反射表面的光束中产生的偏振分量的相对位置偏移的影响。 在该装置中,投影系统具有具有第一反射面(7b,7c)的突出侧棱镜部件(7),并且受光系统具有配置有第二反射面(8b,8c)的受光棱镜部件(8) 与突出侧棱镜构件对应。 表面位置检测装置还具有用于补偿由于通过第一和第二反射面的光束的偏振分量引起的相对位移的构件

    Near field detection for optical metrology
    119.
    发明授权
    Near field detection for optical metrology 有权
    光学测量近场检测

    公开(公告)号:US08209767B1

    公开(公告)日:2012-06-26

    申请号:US12828112

    申请日:2010-06-30

    Applicant: Amnon Manassen

    Inventor: Amnon Manassen

    CPC classification number: G01B11/026 G01Q60/22

    Abstract: An optical metrology tool may include a source of electromagnetic radiation having a characteristic wavelength, an objective having a central obscuration, a near field element located within the central obscuration of the objective, and an electromagnetic radiation detector coupled to the near field element. A mechanism is configured to bring the near field element into proximity to the target. A characteristic dimension of the near field element is sufficient smaller than the wavelength of the electromagnetic radiation that when the electromagnetic radiation passes through the cavity and the cavity is in sufficient proximity to the target that evanescent waves can couple energy from propagating radiation in the near-field element to the target. The detector detects an optical signal due to the evanescent waves coupling to the target.

    Abstract translation: 光学测量工具可以包括具有特征波长的电磁辐射源,具有中心遮蔽的物镜,位于物镜的中心遮蔽范围内的近场元件以及耦合到近场元件的电磁辐射探测器。 一种机构被配置为使近场元素接近目标。 近场元件的特征尺寸足够小于当电磁辐射通过空腔并且空腔足够靠近靶的电磁辐射的波长时,ev逝波可以将能量从近场辐射中的传播辐射耦合, 字段元素到目标。 检测器由于与目标耦合的ev逝波而检测光信号。

    Method of characterizing the anisotropy of a scattering medium and device for implementing such a method
    120.
    发明授权
    Method of characterizing the anisotropy of a scattering medium and device for implementing such a method 失效
    表征散射介质的各向异性的方法和实施这种方法的装置

    公开(公告)号:US08199323B2

    公开(公告)日:2012-06-12

    申请号:US12305604

    申请日:2007-06-13

    CPC classification number: G01N21/21

    Abstract: The invention relates to a method of characterizing a scattering medium. According to the invention, the processing on the electromagnetic radiation scattered by the scattering medium is carried out for an unpolarized signal. In this way, only the anisotrophic incoherent transport of radiation induced by the scattering medium is obtained in the characterization according to the invention. According to the invention, the data representative of the angular variation of the first image representing the unpolarized scattered radiation is representative of the purely isotrophic part of the scattering. Having obtained this purely isotrophic part, it is then possible, according to the invention, to calculate a second image representative of the non-isotrophic part of the scattering. This non-isotrophic part represents the anisotrophic transport of radiation induced by the medium at the moment of scattering.

    Abstract translation: 本发明涉及一种表征散射介质的方法。 根据本发明,对散射介质散射的电磁辐射进行非偏振信号的处理。 以这种方式,在根据本发明的表征中仅获得由散射介质诱导的辐射的各向异性非相干传输。 根据本发明,代表非偏振散射辐射的第一图像的角度变化的数据代表散射的纯粹的等营养部分。 已经获得了这种纯粹的等营养部分,根据本发明,可以计算表示散射的非等营养部分的第二图像。 该非等营养部分表示在散射时由介质诱导的辐射的各向异性传输。

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