SONIC SENSORS AND PACKAGES
    122.
    发明申请

    公开(公告)号:US20170108583A1

    公开(公告)日:2017-04-20

    申请号:US15390060

    申请日:2016-12-23

    Abstract: Embodiments relate to integrated sonic sensors having a transmitter, a receiver and driver electronics integrated in a single, functional package. In one embodiment, a piezoelectric signal transmitter, a silicon microphone receiver and a controller/amplifier chip are concomitantly integrated in a semiconductor housing. The semiconductor housing, in embodiments, is functional in that at least a portion of the housing can comprise the piezoelectric element of the transmitter, with an inlet aperture opposite the silicon microphone receiver.

    Method of forming a protective coating for a packaged semiconductor device
    125.
    发明授权
    Method of forming a protective coating for a packaged semiconductor device 有权
    形成用于封装半导体器件的保护涂层的方法

    公开(公告)号:US09561953B1

    公开(公告)日:2017-02-07

    申请号:US14833871

    申请日:2015-08-24

    Abstract: A first semiconductor substrate having at least one integrated semiconductor device is provided. A lift-off layer is formed on a main surface of the first semiconductor substrate. The lift-off layer is patterned so as to form openings in the lift-off layer that are arranged on either side of a first portion of the lift-off layer. The first substrate is connected together with a second substrate by an interconnect structure to form an assembly with the main surface of the first semiconductor substrate being exposed. Exposed surfaces of the assembly are coated with a parylene coating, with a first portion of the parylene coating being supported by the first portion of the lift-off layer. The first portion of the parylene coating is selectively removed using a lift-off technique that removes the first portion of the lift-off layer. The lift-off technique is performed after connecting the first substrate and second substrates together.

    Abstract translation: 提供具有至少一个集成半导体器件的第一半导体衬底。 在第一半导体衬底的主表面上形成剥离层。 剥离层被图案化以在剥离层中形成布置在剥离层的第一部分的任一侧上的开口。 第一衬底通过互连结构与第二衬底连接在一起,以形成暴露第一半导体衬底的主表面的组件。 组件的暴露表面涂覆有聚对二甲苯涂层,聚对二甲苯涂层的第一部分由剥离层的第一部分支撑。 使用去除剥离层的第一部分的剥离技术选择性地除去聚对二甲苯涂层的第一部分。 在将第一基板和第二基板连接在一起之后进行剥离技术。

    Sonic sensors and packages
    126.
    发明授权
    Sonic sensors and packages 有权
    声波传感器和包装

    公开(公告)号:US09557417B2

    公开(公告)日:2017-01-31

    申请号:US14969848

    申请日:2015-12-15

    Abstract: Embodiments relate to integrated sonic sensors having a transmitter, a receiver and driver electronics integrated in a single, functional package. In one embodiment, a piezoelectric signal transmitter, a silicon microphone receiver and a controller/amplifier chip are concomitantly integrated in a semiconductor housing. The semiconductor housing, in embodiments, is functional in that at least a portion of the housing can comprise the piezoelectric element of the transmitter, with an inlet aperture opposite the silicon microphone receiver.

    Abstract translation: 实施例涉及具有集成在单个功能封装中的发射器,接收器和驱动器电子器件的集成声波传感器。 在一个实施例中,压电信号发射器,硅麦克风接收器和控制器/放大器芯片同时集成在半导体外壳中。 在实施例中,半导体外壳的功能在于,壳体的至少一部分可以包括发射器的压电元件,具有与硅麦克风接收器相对的入口孔。

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