中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

338 records (took 0.024 seconds)

    SYSTEMS, METHODS, AND MEDIA FOR MULTIPLE BEAM OPTICAL COHERENCE TOMOGRAPHY
    121.
    发明公开
    SYSTEMS, METHODS, AND MEDIA FOR MULTIPLE BEAM OPTICAL COHERENCE TOMOGRAPHY 审中-公开

    公开(公告)号：US20230341222A1

    公开(公告)日：2023-10-26

    申请号：US17757723

    申请日：2020-12-21

    Applicant: The General Hospital Corporation

    Inventor： Benjamin Vakoc ,  Yongjoo Kim

    IPC: G01B9/02091 ,  G01B9/02002 ,  G01B9/02015 ,  G01B9/02001

    CPC classification number: G01B9/02091 ,  G01B9/02005 ,  G01B9/02028 ,  G01B9/0201 ,  G01B9/02011

    Abstract: Systems, methods, and media for multiple beam optical coherence tomography are provided which, in some embodiments, include: a light source; a splitter that outputs a fraction of light to various waveguides; optical components that receive light from the waveguides and direct the light as beams that simultaneously impinge a sample at different lateral positions, and collect backscattered light from the lateral positons; another splitter that outputs a fraction of light to waveguides of a reference arm as reference light samples; a mixer that receives the backscattered light samples and the reference light samples, and combines each backscattered sample with a corresponding reference sample such that the mixer outputs fringes; and a detector that receives the fringes, and outputs OCT signals, each indicative of a structure of the sample at a respective lateral position.

    Overlay metrology using spectroscopic phase
    122.
    发明授权
    Overlay metrology using spectroscopic phase 有权

    公开(公告)号：US11713959B2

    公开(公告)日：2023-08-01

    申请号：US17204595

    申请日：2021-03-17

    Applicant: KLA Corporation

    Inventor： Andrei V. Shchegrov ,  Ido Dolev ,  Yoram Uziel ,  Amnon Manassen

    IPC: G01B9/02001 ,  G01B11/27

    CPC classification number: G01B9/0201 ,  G01B11/272

    Abstract: An interferometric overlay tool may include an interferometer and a controller. The interferometer may include one or more beamsplitters to split illumination including one or more wavelengths into a probe beam along a probe path and a reference beam along a reference path, one or more illumination optics to illuminate a grating-over-grating structure with the probe beam, one or more collection optics to collect a measurement beam from the grating-over-grating structure, one or more beam combiners to combine the measurement beam and the reference beam as an interference beam, and a variable phase delay configured to vary an optical path difference (OPD) in the interferometer. The controller may receive one or more interference signals representative of interferometric phase data associated with a plurality of OPD values and the one or more wavelengths from a detector and determine an overlay error of the grating-over-grating structure based on the interferometric phase data.

    INTERFEROMETER WITH A LOOPED OR STRAIGHT OPTICAL FIBRE
    123.
    发明公开
    INTERFEROMETER WITH A LOOPED OR STRAIGHT OPTICAL FIBRE 审中-公开

    公开(公告)号：US20230160697A1

    公开(公告)日：2023-05-25

    申请号：US17603797

    申请日：2020-04-14

    Applicant: IXBLUE

    Inventor： Eric DUCLOUX ,  Cédric MOLUCON ,  Hervè LEFEVRE

    IPC: G01B9/02001

    CPC classification number: G01B9/0201

    Abstract: A fiber-optic interferometer is designed to receive and propagate a first single-mode wave along a first optical path and, respectively, a second single-mode wave along a second optical path, the second optical path being the reverse of the first optical path, and to form a first output wave and, respectively, a second output wave, having a modulated phase difference Δϕm(t). According to the invention, the modulated phase difference Δϕm(t) is equal to sum of a first periodic phase difference Δϕπ(t) having a level equal to ±π, a second periodic phase difference Δϕalpha(t) having a level equal to ±alpha and a third periodic phase difference Δϕbeta(t) having a variable level between −beta and +beta, said modulated phase difference Δϕm(t) comprising per modulation period T at least eight modulation levels among twelve modulation levels and said modulated phase difference between such that: Δϕm(t+T/2)=−Δϕm(t).

    System for fourier domain optical coherence tomography
    129.
    发明授权
    System for fourier domain optical coherence tomography 有权
    傅立叶光学相干断层扫描系统

    公开(公告)号：US09448056B2

    公开(公告)日：2016-09-20

    申请号：US12759029

    申请日：2010-04-13

    Applicant: Joseph A. Izatt

    Inventor： Joseph A. Izatt

    IPC: G01B9/02

    CPC classification number: G01B9/02007 ,  G01B9/02004 ,  G01B9/0201 ,  G01B9/02027 ,  G01B9/02044 ,  G01B9/02079 ,  G01B9/02081 ,  G01B9/02091 ,  G01B2290/40 ,  G01B2290/45 ,  G01B2290/70

    Abstract: Optical coherence tomography (OCT) is an imaging method which can image with micrometer-scale resolution up to a few millimeters deep into, for example, living biological tissues and preserved tissue samples. An improved apparatus and image reconstruction algorithm for parallel Fourier Domain OCT which greatly eases requirements for interferometer stability and also allows for more efficient parallel image acquisition is provided. The apparatuses and algorithms reconstruct images from interfered, low-coherence, multiwave length signals having a .pi. radian phase difference relative to one another. Other numbers of signals and other phase differences may be alternatively used, with some combinations resulting in higher resolution and image stability. The apparatus also eliminates a need for bulk optics to modulate a phase delay in a reference arm of the optical path. Images may be reconstructed using two spectrometers, where each is coupled to a detector array such as a photodiode array.

    Abstract translation: 光学相干断层扫描（OCT）是一种成像方法，可以将尺寸分辨率高达几毫米的微米尺度分辨率成像到例如活的生物组织和保留的组织样本中。 提供了一种用于并行傅立叶域OCT的改进的装置和图像重建算法，其大大减轻了干涉仪稳定性的要求，并且还提供了更有效的并行图像采集。 装置和算法从具有.pi的干扰，低相干，多波长信号重构图像。 弧度相位差相对于彼此。 可以替代地使用其他数量的信号和其它相位差，其中一些组合导致更高的分辨率和图像稳定性。 该装置还消除了对光学路径的参考臂中的相位延迟调制体光学器件的需要。 可以使用两个光谱仪重建图像，其中每个光谱仪耦合到诸如光电二极管阵列的检测器阵列。

    Systems and methods for interferometric phase measurement
    130.
    发明授权
    Systems and methods for interferometric phase measurement 有权
    用于干涉测量的系统和方法

    公开(公告)号：US09384540B2

    公开(公告)日：2016-07-05

    申请号：US14095624

    申请日：2013-12-03

    Applicant: SunEdison Semiconductor Limited (UEN201334164H)

    Inventor： Benno Orschel

    IPC: H04N7/18 ,  G06K9/00 ,  G06T7/00 ,  G01B9/02 ,  G01N21/88

    CPC classification number: G06T7/0004 ,  G01B9/0201 ,  G01B9/02084 ,  G01N21/88 ,  G01N21/8851

    Abstract: A method for measuring phase shift to detect irregularities of a surface is described. Additionally, a system for measuring phase shift to detect irregularities of a surface is provided. Further, a non-transitory computer-readable storage medium having computer-executable instructions embodied thereon is described. The computer-executable instructions are for measuring phase shift to detect irregularities of a surface.

    Abstract translation: 描述了用于测量相移以检测表面的不规则性的方法。 另外，提供了用于测量相移以检测表面不规则性的系统。 此外，描述了具有实施在其上的计算机可执行指令的非暂时计算机可读存储介质。 计算机可执行指令用于测量相移以检测表面的不规则性。

Patent Agency Ranking