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    Fabrication of robust electrothermal MEMS with fast thermal response
    131.
    发明授权
    Fabrication of robust electrothermal MEMS with fast thermal response 有权
    制造具有快速热响应的坚固的电热MEMS

    公开(公告)号：US08735200B2

    公开(公告)日：2014-05-27

    申请号：US13311693

    申请日：2011-12-06

    Applicant: Sagnik Pal ,  Huikai Xie

    Inventor： Sagnik Pal ,  Huikai Xie

    IPC: H01L21/00

    CPC classification number: F03G7/08 ,  B81B3/0024 ,  B81B2201/032 ,  B81B2201/042 ,  H02N10/00

    Abstract: Embodiments of the invention provide robust electrothermal MEMS with fast thermal response. In one embodiment, an electrothermal bimorph actuator is fabricated using aluminum as one bimorph layer and tungsten as the second bimorph layer. The heating element can be the aluminum or the tungsten, or a combination of aluminum and tungsten, thereby providing a resistive heater and reducing deposition steps. Polyimide can be used for thermal isolation of the bimorph actuator and the substrate. For MEMS micromirror designs, the polyimide can also be used for thermal isolation between the bimorph actuator and the micromirror.

    Abstract translation: 本发明的实施例提供了具有快速热响应的稳健的电热MEMS。 在一个实施例中，使用铝作为一个双晶片层和钨作为第二双晶片层制造电热双压电晶片致动器。 加热元件可以是铝或钨，或铝和钨的组合，从而提供电阻加热器并减少沉积步骤。 聚酰亚胺可用于双压电晶片致动器和基板的热隔离。 对于MEMS微镜设计，聚酰亚胺也可用于双压电晶片致动器和微镜之间的热隔离。

    MEMS switch and method of manufacturing the MEMS switch
    132.
    发明授权
    MEMS switch and method of manufacturing the MEMS switch 失效
    MEMS开关和制造MEMS开关的方法

    公开(公告)号：US08390173B2

    公开(公告)日：2013-03-05

    申请号：US12935282

    申请日：2009-03-30

    Applicant: Takaaki Yoshihara ,  Yoshiki Hayasaki ,  Takeo Shirai ,  Tomoaki Matsushima ,  Hiroshi Kawada ,  Yousuke Hagihara

    Inventor： Takaaki Yoshihara ,  Yoshiki Hayasaki ,  Takeo Shirai ,  Tomoaki Matsushima ,  Hiroshi Kawada ,  Yousuke Hagihara

    IPC: H01L41/00 ,  H02N1/00 ,  H02N11/00

    CPC classification number: B81B3/0021 ,  B81B2201/032 ,  H01H59/0009 ,  H01H2057/006 ,  Y10T29/42

    Abstract: The MEMS switch comprises a substrate with signal-lines having fixed-contacts, a movable-plate with a movable-contact, a flexible support-member supporting the movable-plate, a static-actuator and a piezoelectric-actuator configured to contact the movable-contact with the fixed-contact. The movable-contact is provided at its longitudinal center with the movable-contact, and its both the longitudinal ends with static-movable-electrode-plate. The support-member is four strips disposed on portions outside of the both width ends of the movable plate. The strip extends along the longitudinal direction of the movable plate, provided with a first end fixed to the movable plate, and provided with a second end fixed to the substrate. The piezoelectric-element is disposed on an upper surface of the strip to be located at a portion outside of the width ends of the movable-plate. The piezoelectric-actuator is configured to develop the stress applied to the coupling-portion which is created between each the strip and the movable-plate.

    Abstract translation: MEMS开关包括具有固定触点的信号线的基板，具有可移动触点的可移动板，支撑可移动板的柔性支撑构件，静电致动器和压电致动器，其构造成接触可动触点 - 与固定联系人联系。 可动触点在其纵向中心处设置有可动触头，并且其两个纵向端部具有静电可动电极板。 支撑构件是设置在可动板的两个宽度端的外侧的四个条。 该条带沿可移动板的纵向方向延伸，设置有固定到可移动板的第一端，并设置有固定到基板的第二端。 压电元件设置在条的上表面上，以位于可移动板的宽度端的外侧的部分。 压电致动器被配置为产生施加到在每个条和可移动板之间产生的联接部分的应力。

    Micromechanical element and sensor for monitoring a micromechanical element
    133.
    发明授权
    Micromechanical element and sensor for monitoring a micromechanical element 有权
    用于监测微机械元件的微机械元件和传感器

    公开(公告)号：US08379283B2

    公开(公告)日：2013-02-19

    申请号：US12567498

    申请日：2009-09-25

    Applicant: Thomas Klose ,  Thomas Grasshoff ,  Holger Conrad

    Inventor： Thomas Klose ,  Thomas Grasshoff ,  Holger Conrad

    IPC: G02B26/10

    CPC classification number: B81B3/0062 ,  B81B2201/032 ,  Y10T74/20341

    Abstract: A micromechanical element includes a movable functional element, a first retaining element, a second retaining element, a third retaining element, and a fourth retaining element. The first retaining element and the functional element are connected at a first junction, the second retaining element and the functional element are connected at a second junction, the third retaining element and the functional element are connected at a third junction, and the fourth retaining element and the functional element are connected at a fourth junction. In addition, the first retaining element and the second retaining element each include a piezoelectric driving element, the driving element of the first retaining element and the driving element of the second retaining element being configured to move the functional element in accordance with electric excitation.

    Abstract translation: 微机械元件包括可移动功能元件，第一保持元件，第二保持元件，第三保持元件和第四保持元件。 第一保持元件和功能元件在第一接合处连接，第二保持元件和功能元件在第二接合处连接，第三保持元件和功能元件在第三接合处连接，并且第四保持元件 并且功能元件在第四连接处连接。 此外，第一保持元件和第二保持元件各自包括压电驱动元件，第一保持元件的驱动元件和第二保持元件的驱动元件构造成根据电激励来移动功能元件。

    FORMING A MEMBRANE HAVING CURVED FEATURES
    134.
    发明申请
    FORMING A MEMBRANE HAVING CURVED FEATURES 有权
    形成具有弯曲特征的膜

    公开(公告)号：US20120248063A1

    公开(公告)日：2012-10-04

    申请号：US13077154

    申请日：2011-03-31

    Applicant: Gregory De Brabander ,  Mark Nepomnishy

    Inventor： Gregory De Brabander ,  Mark Nepomnishy

    IPC: B32B37/02 ,  C23F1/00 ,  B32B38/10 ,  B32B37/06 ,  B32B37/14

    CPC classification number: B81B3/0021 ,  B81B2201/032 ,  B81B2203/0127 ,  B81B2203/053 ,  B81C2201/0195 ,  B81C2203/036

    Abstract: Processes for making a membrane having a curved feature are disclosed. A profile-transferring substrate surface having a curved feature is created by vacuum bonding a membrane to a top surface of a substrate, where the top surface has a cavity formed therein. The surface of the membrane is exposed to a fluid pressure such that the membrane deforms and the undersurface of the membrane touches the bottom of the cavity. The curved feature formed in the deformed membrane can be made permanent by annealing the bonding areas between membrane and substrate. A uniform layer of material deposited over the exposed surface of the membrane will include a curved feature at the location where the membrane has bent into the cavity. After at least one layer of material has been uniformed deposited on the membrane, the cavity can be etched open from the bottom to remove the membrane from the underside.

    Abstract translation: 公开了制造具有弯曲特征的膜的方法。 具有弯曲特征的轮廓转印衬底表面是通过将膜真空粘合到衬底的顶表面而形成的，其中顶表面形成有空腔。 膜的表面暴露于流体压力，使得膜变形并且膜的下表面接触腔的底部。 形成在变形的膜中的弯曲特征可以通过退火膜和基底之间的结合区域而被永久化。 沉积在膜的暴露表面上的均匀的材料层将在膜已经弯曲到腔中的位置处包括弯曲特征。 在将至少一层材料均匀地沉积在膜上之后，可以从底部刻蚀空腔以从下侧去除膜。

    Hysteretic MEMS thermal device and method of manufacture
    137.
    发明授权
    Hysteretic MEMS thermal device and method of manufacture 有权
    迟滞MEMS热装置及其制造方法

    公开(公告)号：US07944113B2

    公开(公告)日：2011-05-17

    申请号：US12318634

    申请日：2009-01-05

    Applicant: Paul J. Rubel

    Inventor： Paul J. Rubel

    IPC: H01L41/08

    CPC classification number: F03G7/06 ,  B81B3/0059 ,  B81B2201/018 ,  B81B2201/032 ,  B81B2201/054 ,  H01H61/02 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H2061/008 ,  H02N10/00 ,  Y10T29/49105

    Abstract: A MEMS hysteretic thermal actuator may have a plurality of beams disposed over a heating element formed on the surface of the substrate. The plurality of beams may be coupled to a passive beam which is not disposed over the heating element. One of the plurality of beams may be formed in a first plane parallel to the substrate, whereas another of the plurality of beams may be formed in a second plane closer to the surface of the substrate. When the heating element is activated, it heats the plurality of beams such that they move the passive beam in a trajectory that is neither parallel to nor perpendicular to the surface of the substrate. When the beams are cooled, they may move in a different trajectory, approaching the substrate before moving laterally across it to their initial positions. By providing one electrical contact on the distal end of the passive beam and another stationary electrical contact on the substrate surface, the MEMS hysteretic actuator may form a reliable electrical switch that is relatively simple to manufacture and operate.

    Abstract translation: MEMS迟滞热致动器可以具有设置在形成在基板的表面上的加热元件上的多个光束。 多个光束可以耦合到未设置在加热元件上方的无源光束。 多个光束中的一个可以形成在平行于衬底的第一平面中，而多个光束中的另一个可以形成在靠近衬底表面的第二平面中。 当加热元件被激活时，它加热多个光束，使得它们以不平行于或垂直于衬底表面的轨迹移动被动束。 当梁被冷却时，它们可以以不同的轨迹移动，在横向移动到其初始位置之前接近基板。 通过在被动束的远端上提供一个电接触，并在衬底表面上提供另一个固定的电触点，MEMS滞后致动器可形成可靠的电开关，其制造和操作相对简单。

    ELECTROTHERMAL MICROACTUATOR FOR LARGE VERTICAL DISPLACEMENT WITHOUT TILT OR LATERAL SHIFT
    138.
    发明申请
    ELECTROTHERMAL MICROACTUATOR FOR LARGE VERTICAL DISPLACEMENT WITHOUT TILT OR LATERAL SHIFT 有权
    无倾斜或横向移位的大直角位移电热微处理器

    公开(公告)号：US20100307150A1

    公开(公告)日：2010-12-09

    申请号：US12743499

    申请日：2008-12-15

    Applicant: Lei Wu ,  Huikai Xie

    Inventor： Lei Wu ,  Huikai Xie

    IPC: F03G7/06

    CPC classification number: B81B3/0024 ,  B81B2201/032 ,  B81B2201/047 ,  B81B2203/053

    Abstract: A microactuator for displacing a platform vertically with respect to a substrate includes a first rigid frame, a first flexible bimorph beam connecting the first frame to the substrate, a second rigid frame, a second flexible bimorph beam connecting the second frame to the first frame, and a third flexible bimorph beam connecting a platform to the second frame. Activation of the first, second, and third flexible bimorph beams allows vertical displacement of the platform with respect to the substrate, with negligible lateral shift. A microactuator assembly includes a substrate, a plurality of first rigid frames, a plurality of first flexible bimorph beams, a plurality of second rigid frames, a plurality of second flexible bimorph beams, a platform, and a plurality of third flexible bimorph beams. Activation of the first, second, and third bimorph beams allows vertical displacement of the platform with respect to the substrate, with negligible lateral shift. A further embodiment with four identical such microactuators oriented at four sides of the platform, can achieve 1D or 2D angular scanning of the mirror plate by the activation of 1 or 2 adjacent microactuators.

    Abstract translation: 用于使平台相对于衬底垂直移位的微致动器包括第一刚性框架，将第一框架连接到衬底的第一柔性双压电晶片梁，第二刚性框架，将第二框架连接到第一框架的第二柔性双压电晶片梁， 以及将平台连接到第二框架的第三柔性双压电晶片。 第一，第二和第三柔性双晶片束的激活允许平台相对于衬底的垂直位移，具有可忽略的横向偏移。 微致动器组件包括基板，多个第一刚性框架，多个第一柔性双压电晶片梁，多个第二刚性框架，多个第二柔性双压电晶片梁，平台和多个第三柔性双压电晶片。 第一，第二和第三双晶片束的激活允许平台相对于衬底的垂直位移，具有可忽略的横向偏移。 具有四个相同的这样的微致动器的另一实施例在平台的四个侧面定向，可以通过激活1或2个相邻微致动器来实现镜板的1D或2D角扫描。

    Actuator and electronic hardware using the same
    139.
    发明授权
    Actuator and electronic hardware using the same 失效
    执行器和电子硬件使用相同

    公开(公告)号：US07830068B2

    公开(公告)日：2010-11-09

    申请号：US12354182

    申请日：2009-01-15

    Applicant: Michihiko Nishigaki ,  Toshihiko Nagano ,  Kazuhiko Itaya ,  Takashi Kawakubo

    Inventor： Michihiko Nishigaki ,  Toshihiko Nagano ,  Kazuhiko Itaya ,  Takashi Kawakubo

    IPC: H01L41/08

    CPC classification number: H01H57/00 ,  B81B3/0021 ,  B81B2201/032 ,  H01G5/18 ,  H01H2057/006 ,  H01L41/094 ,  H01L41/0973

    Abstract: An actuator includes a first beam, a first fixed part, a second beam, a first connective part, and a first fixed electrode. The first beam extends from a first fixed end to a first connective end, and the first fixed part connects the first fixed end and the substrate and supports the first beam above a main surface of the substrate with a gap. The second beam extends from a second connective end to a first action end and is provided in parallel to the first beam, and has a first division part divided by a first slit extending from the first action end toward the second connective end. The first connective part connects the first connective end and the second connective end and holds the second beam above the main surface of the substrate with a gap. The first fixed electrode is provided on the main surface of the substrate being configured to be opposed to a part of the first division part on a side of the first action end.

    Abstract translation: 致动器包括第一光束，第一固定部分，第二光束，第一连接部分和第一固定电极。 第一光束从第一固定端延伸到第一连接端，并且第一固定部分连接第一固定端和衬底，并且将第一光束以间隙支撑在衬底的主表面上方。 第二光束从第二连接端部延伸到第一动作端部并且平行于第一光束提供，并且具有由从第一动作端向第二连接端部延伸的第一狭缝分割的第一分割部分。 第一连接部分连接第一连接端和第二连接端，并且将第二光束以间隙保持在基板的主表面上方。 第一固定电极设置在基板的主表面上，该主表面被配置为与第一动作端侧的第一分割部分的一部分相对。

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