WAFER INSPECTION APPARATUS AND WAFER INSPECTION METHOD

    公开(公告)号:US20170131219A1

    公开(公告)日:2017-05-11

    申请号:US15405605

    申请日:2017-01-13

    Inventor: Hajime FUJIKURA

    Abstract: A wafer inspection apparatus including a light emitter configured to emit light onto a to-be-inspected surface of a wafer, an imaging unit configured to obtain an image formed by the light emitted from the light emitter and reflected by the to-be-inspected surface, a moving unit configured to move a to-be-inspected position on the to-be-inspected surface by controlling a position of one of the wafer and the light emitter, and an inspecting unit configured to inspect the to-be-inspected surface by detecting a scatter image formed by the light that is emitted from the light emitter and scattered by a defect of the to-be-inspected surface, where the scatter image is formed outside an outline of the image formed by the light emitted from the light emitter.

    Apparatus for taking an accurate photometric measurement of a liquid

    公开(公告)号:US09513209B2

    公开(公告)日:2016-12-06

    申请号:US14590213

    申请日:2015-01-06

    Applicant: Laxco Inc.

    Inventor: Congliang Chen

    Abstract: An apparatus for taking an accurate photometric measurement of a liquid by way of forming a specimen volume of a controlled optical path length for use with photometric measurement equipment is disclosed herein. In some embodiments, the apparatus comprises a transparent body configured for displacing a volume of a fluid and at least one support element wherein the support element is configured to maintain the transparent body at a location such that specimen fluid may enter a void volume to form a specimen volume of a controlled optical path length. In some embodiments, the apparatus comprises a plurality of transparent bodies interconnected by a web such that the transparent bodies are maintained at a spacing arrangement which allows for them to be inserted into the wells of a microplate in order to create a plurality of specimen volumes of a controlled optical path length.

    MICROELECTROMECHANICAL (MEMS) MANIPULATORS FOR CONTROL OF NANOPARTICLE COUPLING INTERACTIONS
    139.
    发明申请
    MICROELECTROMECHANICAL (MEMS) MANIPULATORS FOR CONTROL OF NANOPARTICLE COUPLING INTERACTIONS 有权
    用于控制纳米耦合相互作用的微电子机械(MEMS)操纵器

    公开(公告)号:US20160233791A1

    公开(公告)日:2016-08-11

    申请号:US14565737

    申请日:2014-12-10

    Abstract: A nanopositioning system for producing a coupling interaction between a first nanoparticle and a second nanoparticle. A first MEMS positioning assembly includes an electrostatic comb drive actuator configured to selectively displace a first nanoparticle in a first dimension and an electrode configured to selectively displace the first nanoparticle in a second dimensions. Accordingly, the first nanoparticle may be selectively positioned in two dimensions to modulate the distance between the first nanoparticle and a second nanoparticle that may be coupled to a second MEMS positioning assembly. Modulating the distance between the first and second nanoparticles obtains a coupling interaction between the nanoparticles that alters at least one material property of the nanoparticles applicable to a variety of sensing and control applications.

    Abstract translation: 一种用于产生第一纳米颗粒和第二纳米颗粒之间的偶联相互作用的纳米定位系统。 第一MEMS定位组件包括静电梳驱动致动器,其被配置为选择性地置换第一维度中的第一纳米颗粒,以及配置成在第二维度中选择性地置换第一纳米颗粒的电极。 因此,第一纳米颗粒可以被选择性地定位在二维上以调节第一纳米颗粒和第二纳米颗粒之间的距离,第二纳米颗粒可以耦合到第二MEMS定位组件。 调节第一和第二纳米颗粒之间的距离获得纳米颗粒之间的耦合相互作用,其改变适用于各种感测和控制应用的纳米颗粒的至少一种材料性质。

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