公开(公告)号：US07460703B2

公开(公告)日：2008-12-02

申请号：US11931339

申请日：2007-10-31

Applicant: Tzyy-Shuh Chang ,  Daniel Gutchess ,  Hsun-Hau Huang

Inventor： Tzyy-Shuh Chang ,  Daniel Gutchess ,  Hsun-Hau Huang

IPC: G06K9/00

CPC classification number: G01N21/952 ,  G01N2201/0826 ,  G01N2201/084 ,  H04N7/18

Abstract: The present invention is directed to solving the problems associated with the detection of surface defects on metal bars as well as the problems associated with applying metal flat inspection systems to metal bars for non-destructive surface defects detection. A specially designed imaging system, which is comprised of a computing unit, line lights and high data rate line scan cameras, is developed for the aforementioned purpose. The target application is the metal bars (1) that have a circumference/cross-section-area ratio equal to or smaller than 4.25 when the cross section area is unity for the given shape, (2) whose cross-sections are round, oval, or in the shape of a polygon, and (3) are manufactured by mechanically cross-section reduction processes. The said metal can be steel, stainless steel, aluminum, copper, bronze, titanium, nickel, and so forth, and/or their alloys. The said metal bars can be at the temperature when they are being manufactured. A removable cassette includes various mirrors. A protection tube isolates the moving metal bar from the line light assembly and image acquisition camera. A contaminant reduction mechanism applies a vacuum to remove airborne contaminants.

Abstract translation: 本发明旨在解决与检测金属棒表面缺陷相关的问题以及将金属平面检查系统应用于金属棒以用于非破坏性表面缺陷检测相关的问题。 为了上述目的开发了一种专门设计的成像系统，由计算单元，线路灯和高数据速率线扫描摄像机组成。 目标应用是当给定形状的横截面积为1时，具有等于或小于4.25的圆周/横截面积比的金属棒（1），（2）横截面为圆形，椭圆形 ，或多边形的形状，（3）通过机械截面缩小工艺制造。 所述金属可以是钢，不锈钢，铝，铜，青铜，钛，镍等，和/或它们的合金。 所述金属棒可以处于制造时的温度。 可拆卸的盒子包括各种镜子。 保护管将移动的金属棒与线路灯组件和图像采集相机隔离。 污染物减少机制应用真空去除空气污染物。

公开(公告)号：US07324681B2

公开(公告)日：2008-01-29

申请号：US11194985

申请日：2005-08-02

Applicant: Tzyy-Shuh Chang ,  Daniel Gutchess ,  Hsun-Hau Huang

Inventor： Tzyy-Shuh Chang ,  Daniel Gutchess ,  Hsun-Hau Huang

IPC: G06K9/00

CPC classification number: G01N21/952 ,  G01N2201/0826 ,  G01N2201/084 ,  H04N7/18

Abstract: The present invention is directed to solving the problems associated with the detection of surface defects on metal bars as well as the problems associated with applying metal flat inspection systems to metal bars for non-destructive surface defects detection. A specially designed imaging system, which is comprised of a computing unit, line lights and high data rate line scan cameras, is developed for the aforementioned purpose. The target application is the metal bars (1) that have a circumference/cross-section-area ratio equal to or smaller than 4.25 when the cross section area is unity for the given shape, (2) whose cross-sections are round, oval, or in the shape of a polygon, and (3) are manufactured by mechanically cross-section reduction processes. The said metal can be steel, stainless steel, aluminum, copper, bronze, titanium, nickel, and so forth, and/or their alloys. The said metal bars can be at the temperature when they are being manufactured.

Abstract translation: 本发明旨在解决与检测金属棒表面缺陷相关的问题以及将金属平面检查系统应用于金属棒以用于非破坏性表面缺陷检测相关的问题。 为了上述目的开发了一种专门设计的成像系统，由计算单元，线路灯和高数据速率线扫描摄像机组成。 目标应用是当给定形状的横截面积为1时，具有等于或小于4.25的圆周/横截面积比的金属棒（1），（2）横截面为圆形，椭圆形 ，或多边形的形状，（3）通过机械截面缩小工艺制造。 所述金属可以是钢，不锈钢，铝，铜，青铜，钛，镍等，和/或它们的合金。 所述金属棒可以处于制造时的温度。

公开(公告)号：US20070013903A1

公开(公告)日：2007-01-18

申请号：US11524684

申请日：2006-09-21

Applicant: Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

Inventor： Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2201/0697 ,  G01N2201/0826

Abstract: Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane assembly, optically forming a continuous surface of photo-detectors at the focal plane of the optical imaging system. The continuously moving wafer is illuminated by a laser pulse of duration significantly shorter than the pixel dwell time, such that there is effectively no image smear during the wafer motion. The laser pulse has sufficient energy and brightness to impart the necessary illumination to each sequentially inspected field of view required for creating an image of the inspected wafer die. A novel fiber optical illumination delivery system, which is effective in reducing the effects of source coherence is described. Other novel aspects of the system include a system for compensating for variations in the pulse energy of a Q-switched laser output, methods for autofocussing of the wafer imaging system, and novel methods for removal of repetitive features of the image by means of Fourier plane filtering, to enable easier detection of wafer defects.

Abstract translation: 通过用来自重复脉冲激光器的短光脉冲照射晶片缺陷的快速在线电光检测，晶片的一部分在成像系统的视场内移动，并将移动的晶片成像到 焦平面组件，在光学成像系统的焦平面处光学地形成光电检测器的连续表面。 持续移动的晶片被持续时间明显短于像素停留时间的激光脉冲照亮，使得在晶片运动期间实际上没有图像污迹。 激光脉冲具有足够的能量和亮度，以对于产生被检查的晶片管芯的图像所需的每个顺序检查的视场赋予必要的照明。 描述了一种有效减少源相干效应的新型光纤照明传输系统。 该系统的其他新颖的方面包括用于补偿Q开关激光输出的脉冲能量变化的系统，用于晶片成像系统的自动聚焦的方法，以及通过傅立叶平面去除图像的重复特征的新颖方法 过滤，以便更容易地检测晶片缺陷。

公开(公告)号：US20060244957A1

公开(公告)日：2006-11-02

申请号：US11476356

申请日：2006-06-28

Applicant: Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

Inventor： Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2201/0697 ,  G01N2201/0826

Abstract: Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane assembly, optically forming a continuous surface of photo-detectors at the focal plane of the optical imaging system. The continuously moving wafer is illuminated by a laser pulse of duration significantly shorter than the pixel dwell time, such that there is effectively no image smear during the wafer motion. The laser pulse has sufficient energy and brightness to impart the necessary illumination to each sequentially inspected field of view required for creating an image of the inspected wafer die. A novel fiber optical illumination delivery system, which is effective in reducing the effects of source coherence is described. Other novel aspects of the system include a system for compensating for variations in the pulse energy of a Q-switched laser output, methods for autofocussing of the wafer imaging system, and novel methods for removal of repetitive features of the image by means of Fourier plane filtering, to enable easier detection of wafer defects.

公开(公告)号：US20060203244A1

公开(公告)日：2006-09-14

申请号：US11434606

申请日：2006-05-15

Applicant: David Nilson ,  Brad Rice ,  Tamara Troy

Inventor： David Nilson ,  Brad Rice ,  Tamara Troy

IPC: G01N21/25

CPC classification number: G01N21/6456 ,  G01N2021/1787 ,  G01N2021/6471 ,  G01N2021/6484 ,  G01N2201/0227 ,  G01N2201/0826

Abstract: A dual illumination system is disclosed for use with an imaging apparatus. The imaging apparatus defines a light-tight imaging compartment with an interior wall having a view port extending into the imaging compartment. This view port enables data acquisition of a biological specimen contained in the imaging compartment. The dual illumination system includes a first illumination assembly configured to direct structured light onto a first side of the specimen to enable structured light and surface topography measurements thereof. A second illumination assembly then directs light at the specimen wherein diffused fluorescent light emanates from a surface thereof for receipt through the view port to acquire fluorescence data of the specimen. The combination of structured light imaging and fluorescence imaging enables 3D diffuse tomographic reconstructions of fluorescent probe location and concentration.

公开(公告)号：US20050219535A1

公开(公告)日：2005-10-06

申请号：US11155078

申请日：2005-06-17

Applicant: David Nilson ,  Brad Rice ,  Tamara Troy

Inventor： David Nilson ,  Brad Rice ,  Tamara Troy

IPC: A01K1/03 ,  A22B3/00 ,  A61M16/00 ,  A61M16/10 ,  A61M16/18 ,  A61M16/20 ,  G01N21/64

CPC classification number: G01N21/6456 ,  A01K1/031 ,  A61M16/104 ,  A61M16/18 ,  A61M16/202 ,  A61M2016/0039 ,  G01N2021/1787 ,  G01N2021/6463 ,  G01N2021/6471 ,  G01N2021/6484 ,  G01N2201/0227 ,  G01N2201/0826

Abstract: A macroscopic fluorescence illumination assembly is provided for use with an imaging apparatus with a light-tight imaging compartment. The imaging apparatus includes an interior wall defining a view port extending into the imaging compartment to enable viewing of a specimen contained therein. The illumination assembly includes a specimen support surface sized and dimensioned for receipt in the imaging compartment, and oriented to face toward the view port of the imaging apparatus. The support surface is substantially opaque and defines a window portion that enables the passage of light there through. The window portion is selectively sized and dimensioned such that the specimen, when supported atop the support surface, can be positioned and seated over the window portion in a manner forming a light-tight seal substantially there between. The illumination assembly further includes an excitation light source, and a bundle of fiber optic strands having proximal ends thereof in optical communication with the light source. The distal ends of the strands terminate proximate the window portion of the support surface. The distal ends each emit a respective beam of light originating from the light source which are then collectively directed toward the window portion and into a bottom side of the specimen wherein the diffused light passes there through and exits a topside thereof for receipt through the view port to view the fluorescence of the specimen.

Abstract translation: 提供了一种宏观荧光照明组件，用于与具有不透光成像室的成像装置一起使用。 该成像设备包括限定了一个视图端口的内壁，该视图端口延伸到成像室中以使得能够观察其中容纳的样本。 照明组件包括尺寸和尺寸适于接收在成像室中的样本支撑表面，并且被定向成面向成像设备的视口。 支撑表面基本上是不透明的，并且限定了能够使光通过的窗口部分。 窗口部分被选择性地定尺寸和尺寸使得当被支撑在支撑表面上方时，样本可以以基本上在其之间形成不透光密封的方式被定位和安置在窗口部分上。 照明组件还包括激发光源，以及一束光纤束，其光纤束的近端与光源光学连通。 股线的末端终止于支撑表面的窗口部分。 远端各自发出源自光源的相应光束，然后将它们共同指向窗口部分并进入样本的底侧，其中漫射光通过其并穿过其顶侧并通过观察端口接收 以观察样品的荧光。

公开(公告)号：US20050110987A1

公开(公告)日：2005-05-26

申请号：US11021393

申请日：2004-12-23

Applicant: Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

Inventor： Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

IPC: G01N20060101 ,  G01N1/00 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  H01L21/20 ,  H01L21/66 ,  H04B10/08

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2201/0697 ,  G01N2201/0826

Abstract: Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane assembly, optically forming a continuous surface of photo-detectors at the focal plane of the optical imaging system. The continuously moving wafer is illuminated by a laser pulse of duration significantly shorter than the pixel dwell time, such that there is effectively no image smear during the wafer motion. The laser pulse has sufficient energy and brightness to impart the necessary illumination to each sequentially inspected field of view required for creating an image of the inspected wafer die. A novel fiber optical illumination delivery system, which is effective in reducing the effects of source coherence is described. Other novel aspects of the system include a system for compensating for variations in the pulse energy of a Q-switched laser output, methods for autofocussing of the wafer imaging system, and novel methods for removal of repetitive features of the image by means of Fourier plane filtering, to enable easier detection of wafer defects.

Abstract translation: 通过用来自重复脉冲激光器的短光脉冲照射晶片缺陷的快速在线电光检测，晶片的一部分在成像系统的视场内移动，并将移动的晶片成像到 焦平面组件，在光学成像系统的焦平面处光学地形成光电检测器的连续表面。 持续移动的晶片被持续时间明显短于像素停留时间的激光脉冲照亮，使得在晶片运动期间实际上没有图像污迹。 激光脉冲具有足够的能量和亮度，以对于产生被检查的晶片管芯的图像所需的每个顺序检查的视场赋予必要的照明。 描述了一种有效减少源相干效应的新型光纤照明传输系统。 该系统的其他新颖的方面包括用于补偿Q开关激光输出的脉冲能量变化的系统，用于晶片成像系统的自动聚焦的方法，以及通过傅里叶平面去除图像的重复特征的新颖方法 过滤，以便更容易地检测晶片缺陷。

公开(公告)号：US20040150828A1

公开(公告)日：2004-08-05

申请号：US10700086

申请日：2003-11-03

Inventor： James Lee Hendrix ,  David Y. Wang ,  David M. Aikens ,  Lawrence Rotter ,  Joel Ng

IPC: G01J004/00 ,  G01N021/55

CPC classification number: G01J3/02 ,  G01J3/0218 ,  G01J3/10 ,  G01N21/55 ,  G01N21/9501 ,  G01N2201/06146 ,  G01N2201/0826

Abstract: A flat spectrum illumination source for use in optical metrology systems includes a first light source generating a visible light beam and a second light source generating an ultraviolet light beam. The illumination source also includes an auxiliary light source generating a light beam at wavelengths between the visible light beam and the ultraviolet light beam. The three light beams are combined to provide a broadband probe beam that has substantially even illumination levels across a broad range of wavelengths. Alternately, the illumination source may be fabricated as an array of light emitting diodes selected to cover a range of separate wavelengths. The outputs of the LED array are combined to produce the broadband probe beam.

Abstract translation: 用于光学测量系统的平面光谱照明源包括产生可见光束的第一光源和产生紫外光束的第二光源。 照明源还包括在可见光束和紫外光束之间的波长处产生光束的辅助光源。 三个光束被组合以提供在宽范围的波长上具有基本均匀的照明水平的宽带探测光束。 或者，照明源可以被制造为被选择以覆盖一定范围的分开的波长的发光二极管的阵列。 组合LED阵列的输出以产生宽带探测光束。

公开(公告)号：US20040130720A1

公开(公告)日：2004-07-08

申请号：US10475472

申请日：2003-10-21

Inventor： Hiromu Maeda ,  Toshihiro Mizuno

IPC: G01J003/28 ,  G01N021/25

CPC classification number: G01N21/3563 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0221 ,  G01J3/0256 ,  G01J3/0272 ,  G01J3/0291 ,  G01J3/26 ,  G01J3/2803 ,  G01N33/025 ,  G01N2021/317 ,  G01N2021/8466 ,  G01N2201/0221 ,  G01N2201/08 ,  G01N2201/0826 ,  G01N2201/084

Abstract: A compact handy type inspection instrument is provided for conducting readily nondestructive inspection of an inspection object in any working site. The inspection instrument comprises a spectroscope assembly containing an optical fiber-arranging member for arranging and holding a light-outputting end of an optical fiber bundle to be flat in a uniform layer thickness, a packaged compact spectroscope which is enclosed in a package having a slit-shaped light inlet window on a side confronting the rectilinear light-outputting end of the optical fiber-arranging member and is constituted of linear type continuous variable interference filter, a microlens array, and a linear type silicon array sensor assembled in the named order from the side of the light inlet window toward the opposite side, and a positioning device for positioning the rectilinear light-outputting end of the optical fiber bundle to fit to the light input window; and a detection head; incorporated together into a main body casing.

Abstract translation: 提供了一种紧凑便携式检测仪器，用于在任何工作现场进行检查对象的非破坏性检查。 该检查仪器包括一个分光计组件，该分光镜组件包含用于将光纤束的光输出端布置并保持为均匀层厚度的平坦的光纤排列构件，封装在具有狭缝的封装中的封装的小型分光镜 形状的光入口窗在与光纤排列构件的直线光输出端相对的一侧上，由线性型连续可变干涉滤光器，微透镜阵列和线性硅阵列传感器构成，该传感器以命名顺序从 光入口窗侧朝向相反侧;以及定位装置，用于将光纤束的直线光输出端定位成适合于光输入窗; 和检测头; 并入到主体外壳中。

公开(公告)号：US06392241B1

公开(公告)日：2002-05-21

申请号：US09214915

申请日：1999-07-26

Applicant: John Gordon Rushbrooke ,  Claire Elizabeth Hooper ,  William Wray Neale

Inventor： John Gordon Rushbrooke ,  Claire Elizabeth Hooper ,  William Wray Neale

IPC: G01N2164

CPC classification number: G01N21/6452 ,  G01N2021/6484 ,  G01N2201/0826 ,  G01N2201/0833

Abstract: A fibre optic coupling plate (24) has a sample viewing face for receiving light from a sample (12), an output window (18) for conveying sample originating (emitted) light to an imaging detector and an additional window through which excitation radiation can be projected. A primary light is provided through the plate made up of optical fibres which will convey light entering the viewing face, directly and with minimal loss, to the output window, and a secondary light path separate from the primary light path, by which excitation radiation entering the additional window is conveyed to the viewing face for irradiating the sample.

Abstract translation: 光纤耦合板（24）具有用于接收来自样品（12）的光的样品观察面，用于将样品始发（发射）光传送到成像检测器的输出窗口（18）和激发辐射可通过该附加窗口 被预计。 通过由光纤构成的板提供初级光，其将直接且以最小损失将光进入观察面的光传送到输出窗，以及与初级光路分离的次级光路，激发辐射进入 将附加窗口传送到观察面以照射样品。