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    Micromachined device having electrically isolated components and a method for making the same
    142.
    发明授权
    Micromachined device having electrically isolated components and a method for making the same 失效
    具有电隔离部件的微加工装置及其制造方法

    公开(公告)号：US06544811B2

    公开(公告)日：2003-04-08

    申请号：US09766521

    申请日：2001-01-19

    Applicant: Mark G. Allen ,  Charles C. Chung

    Inventor： Mark G. Allen ,  Charles C. Chung

    IPC: H01L2100

    CPC classification number: H01L21/761 ,  B81B3/0086 ,  B81B2201/033 ,  Y10S257/93

    Abstract: A micromachined structure having electrically isolated components is formed by thermomigrating a dopant through a substrate to form a doped region within the substrate. The doped region separates two portions of the substrate. The dopant is selected such that the doped region electrically isolates the two portions of the substrate from each other via junction isolation.

    Abstract translation: 具有电隔离组分的微加工结构通过通过衬底热掺杂掺杂剂形成，以在衬底内形成掺杂区域。 掺杂区域分离衬底的两部分。 选择掺杂剂使得掺杂区域通过结隔离将衬底的两个部分彼此电隔离。

    Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement
    143.
    发明授权
    Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement 有权
    非常紧凑，高稳定性的静电执行器，具有无接触自限位移

    公开(公告)号：US06507138B1

    公开(公告)日：2003-01-14

    申请号：US09615008

    申请日：2000-07-11

    Applicant: M. Steven Rodgers ,  Samuel L. Miller

    Inventor： M. Steven Rodgers ,  Samuel L. Miller

    IPC: H02N100

    CPC classification number: G01P15/125 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2203/051 ,  G01P2015/0814 ,  H02N1/008

    Abstract: A compact electrostatic actuator is disclosed for microelectromechanical (MEM) applications. The actuator utilizes stationary and moveable electrodes, with the stationary electrodes being formed on a substrate and the moveable electrodes being supported above the substrate on a frame. The frame provides a rigid structure which allows the electrostatic actuator to be operated at high voltages (up to 190 Volts) to provide a relatively large actuation force compared to conventional electrostatic comb actuators which are much larger in size. For operation at its maximum displacement, the electrostatic actuator is relatively insensitive to the exact value of the applied voltage and provides a self-limiting displacement.

    Abstract translation: 公开了用于微机电（MEM）应用的小型静电致动器。 致动器利用固定和可移动电极，其中固定电极形成在基板上，并且可移动电极被支撑在框架上的基板上。 框架提供刚性结构，其允许静电致动器在高电压（高达190伏特）下操作，以提供比现有尺寸更大的传统静电梳状致动器相对较大的致动力。 为了在其最大位移操作，静电致动器对施加电压的精确值相对不敏感，并提供自限位移。

    Microelectromechanical system actuator for extended linear motion
    144.
    发明授权
    Microelectromechanical system actuator for extended linear motion 有权
    微机电系统执行器用于延长线性运动

    公开(公告)号：US06465929B1

    公开(公告)日：2002-10-15

    申请号：US09545557

    申请日：2000-04-07

    Applicant: Jeremy A. Levitan ,  Michael J. Sinclair

    Inventor： Jeremy A. Levitan ,  Michael J. Sinclair

    IPC: H02N100

    CPC classification number: B81B3/0037 ,  B81B2201/033 ,  B81B2201/037 ,  B81B2203/051 ,  H02N1/008

    Abstract: A microelectrical mechanical systems actuator that provides a long throw is disclosed. The actuator includes a drive mechanism that oscillates a pallet that is located between leg portions of a drive member. The pallet includes first and second rows of pallet teeth located along two opposite edges of the pallet. The drive member is slideably coupled to a substrate, and includes first and second rows of drive teeth that are located along two opposing drive margins of the drive member leg portions. The pallet teeth and the drive teeth are compatible so as to permit meshing engagement of the pallet teeth with the drive teeth. The pallet is arranged between the rows of drive teeth. When the pallet teeth are meshingly misaligned with respective drive teeth and the pallet is urged against the drive margin, the drive member is forced to move until the teeth meshingly engage. By arranging the pallet and drive teeth so that first and second respective sets of pallet and drive teeth can not simultaneously be in meshing alignment, the drive member may be incrementally moved by oscillating the pallet edges between the first and second drive margins. The shape of the pallet and drive teeth may be selected to control a step size of the movement increment and the force applied. Further, the pallet and drive teeth may be arranged so as to provide movement in one direction or two directions.

    Abstract translation: 公开了提供长时间抛掷的微电机械系统致动器。 致动器包括驱动机构，其驱动位于驱动构件的腿部之间的托盘。 托盘包括沿着托盘的两个相对边缘定位的第一和第二排托盘齿。 驱动构件可滑动地联接到基板，并且包括位于驱动构件腿部的两个相对的驱动边缘处的第一和第二排驱动齿。 托盘齿和驱动齿是相容的，以便允许托盘齿与驱动齿啮合。 托盘布置在驱动齿的行之间。 当托盘齿与相应的驱动齿啮合不对准并且托盘被推靠在驱动边缘上时，驱动构件被迫移动直到齿啮合。 通过布置托盘和驱动齿使得第一和第二组托盘和驱动齿不能同时啮合对准，驱动构件可以通过在第一和第二驱动边缘之间摆动托板边缘来递增地移动。 可以选择托盘和驱动齿的形状来控制运动增量和施加的力的步长。 此外，托盘和驱动齿可以被布置成在一个方向或两个方向上提供运动。

    APPARATUS AND METHOD FOR 2-DIMENSIONAL STEERED-BEAM NXM OPTICAL SWITCH USING SINGLE-AXIS MIRROR ARRAYS
    145.
    发明申请
    APPARATUS AND METHOD FOR 2-DIMENSIONAL STEERED-BEAM NXM OPTICAL SWITCH USING SINGLE-AXIS MIRROR ARRAYS 有权
    使用单向反射镜阵列的二维转向光束光学开关的装置和方法

    公开(公告)号：US20020135855A1

    公开(公告)日：2002-09-26

    申请号：US09917490

    申请日：2001-07-28

    Inventor： Michael J. Daneman ,  Behrang Behin ,  Satinderpall S. Pannu

    IPC: G02B026/00

    CPC classification number: G02B6/3556 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81B2207/07 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3542 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

    Abstract: A beam steering module and switching system. The steering module is composed of a NnullM array of single axis mirrors able to rotate about a particular axis (X-axis), a second NnullM array of single axis mirrors able to rotate about an axis orthogonal to that of the first NnullM array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.

    Abstract translation: 光束转向模块和开关系统。 转向模块由能够围绕特定轴线（X轴）旋转的单轴镜的N×M阵列组成，能够围绕与第一N×M阵列阵列的轴正交的轴线旋转的单轴镜的第二N×M阵列 （Y轴）和设计成将第一反射镜阵列成像到第二反射镜阵列上的中继透镜，使得可以通过调整X中的适当反射镜的角度来控制X和Y轴两者的光束角度，以及 Y镜阵列。 可以组合两个转向模块以形成切换系统。 使用两个这样的转向模块，可以在输出光纤阵列的平面处完全确定从任何输入光纤出射的光束的位置和角度。

    Micro-actuator and manufacturing method thereof
    146.
    发明申请
    Micro-actuator and manufacturing method thereof 失效
    微致动器及其制造方法

    公开(公告)号：US20020021055A1

    公开(公告)日：2002-02-21

    申请号：US09873382

    申请日：2001-06-05

    Inventor： Jin-Ho Lee ,  Young-Chul Ko ,  Do-Hyun Kong

    IPC: H02N001/00

    CPC classification number: B81C3/001 ,  B81B2201/033 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/04 ,  B81B2203/058 ,  B81C1/00142 ,  B81C2201/0132 ,  B81C2203/038 ,  Y10T29/42 ,  Y10T29/435

    Abstract: A micro-actuator having a stage capable of a see-saw motion and a method for its manufacture are disclosed. In the micro-actuator according to the present invention, a plurality of parallel driving comb-type electrodes are formed on the bottom of the stage, and a plurality of parallel fixed comb-type electrodes are formed on a base plate. At both sides of the stage is a torsion bar that enables the see-saw motion. The torsion bar is supported by a frame comprised of a first frame layer and a second frame layer. The torsion bar and the first frame layer form one body. The first and second frame layers are bonded by a metal eutectic bonding layer between metal layers.

    Abstract translation: 公开了一种具有能够进行跷跷板运动的平台的微致动器及其制造方法。 在本发明的微型致动器中，在台架的底部形成多个平行的驱动梳状电极，在基板上形成多个平行的固定梳状电极。 在舞台的两侧是一个扭杆，可以实现跷跷板的动作。 扭杆由包括第一框架层和第二框架层的框架支撑。 扭杆和第一框架层形成一体。 第一和第二框架层通过在金属层之间的金属共晶接合层结合。

    Optical beam steering switching system
    147.
    发明申请
    Optical beam steering switching system 有权
    光束转向开关系统

    公开(公告)号：US20010043386A1

    公开(公告)日：2001-11-22

    申请号：US09917431

    申请日：2001-07-28

    Inventor： Michael J. Daneman ,  Behrang Behin ,  Satinderpall S. Pannu

    IPC: G02B026/00

    CPC classification number: G02B6/3556 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81B2207/07 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3542 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

    Abstract: A beam steering module and switching system. The steering module is composed of a NnullM array of single axis mirrors able to rotate about a particular axis (X-axis), a second NnullM array of single axis mirrors able to rotate about an axis orthogonal to that of the first NnullM array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.

    Abstract translation: 光束转向模块和开关系统。 转向模块由能够围绕特定轴线（X轴）旋转的单轴镜的N×M阵列组成，能够围绕与第一N×M阵列阵列的轴正交的轴线旋转的单轴镜的第二N×M阵列 （Y轴）和设计成将第一反射镜阵列成像到第二反射镜阵列上的中继透镜，使得可以通过调整X中的适当反射镜的角度来控制X和Y轴两者的光束角度，以及 Y镜阵列。 可以组合两个转向模块以形成切换系统。 使用两个这样的转向模块，可以在输出光纤阵列的平面处完全确定从任何输入光纤出射的光束的位置和角度。

    Compact electrostatic comb actuator
    148.
    发明授权
    Compact electrostatic comb actuator 有权
    紧凑型静电梳子执行器

    公开(公告)号：US06133670A

    公开(公告)日：2000-10-17

    申请号：US340994

    申请日：1999-06-24

    Applicant: M. Steven Rodgers ,  Michael S. Burg ,  Brian D. Jensen ,  Samuel L. Miller ,  Stephen M. Barnes

    Inventor： M. Steven Rodgers ,  Michael S. Burg ,  Brian D. Jensen ,  Samuel L. Miller ,  Stephen M. Barnes

    IPC: B81B3/00 ,  G01P15/125 ,  H02N1/00

    CPC classification number: H02N1/008 ,  B81B3/0021 ,  G01P15/125 ,  B81B2201/033 ,  B81B2203/051 ,  G01P2015/0814

    Abstract: A compact electrostatic comb actuator is disclosed for microelectromechanical (MEM) applications. The actuator is based upon a plurality of meshed electrostatic combs, some of which are stationary and others of which are moveable. One or more restoring springs are fabricated within an outline of the electrostatic combs (i.e. superposed with the moveable electrostatic combs) to considerably reduce the space required for the actuator. Additionally, a truss structure is provided to support the moveable electrostatic combs and prevent bending or distortion of these combs due to unbalanced electrostatic forces or external loading. The truss structure formed about the moveable electrostatic combs allows the spacing between the interdigitated fingers of the combs to be reduced to about one micron or less, thereby substantially increasing the number of active fingers which can be provided in a given area. Finally, electrostatic shields can be used in the actuator to substantially reduce unwanted electrostatic fields to further improve performance of the device. As a result, the compact electrostatic comb actuator of the present invention occupies only a fraction of the space required for conventional electrostatic comb actuators, while providing a substantial increase in the available drive force (up to one-hundred times).

    Abstract translation: 公开了用于微机电（MEM）应用的紧凑型静电梳状致动器。 致动器基于多个网状静电梳，其中一些是静止的，其中一些是可移动的。 在静电梳的轮廓内（即与可移动的静电梳重叠）中制造一个或多个复原弹簧，以显着减少致动器所需的空间。 此外，提供桁架结构以支撑可移动的静电梳，并且由于不平衡的静电力或外部负载而防止这些梳子的弯曲或变形。 围绕可移动静电梳形成的桁架结构允许梳子的叉指之间的间隔减小到约一微米或更小，从而基本上增加了可以在给定区域中提供的活动手指的数量。 最后，可以在致动器中使用静电屏蔽以显着减少不需要的静电场，以进一步提高装置的性能。 结果，本发明的紧凑型静电梳状致动器仅占用常规静电梳状致动器所需的空间的一小部分，同时提供可用的驱动力（高达一百倍）的显着增加。

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