公开(公告)号：US20170369303A1

公开(公告)日：2017-12-28

申请号：US15542779

申请日：2015-11-27

Applicant: SONY CORPORATION

Inventor： SHINYA MORITA ,  KOICHI IKEDA

IPC: B81B3/00 ,  H02N1/00 ,  H01H59/00

CPC classification number: B81B3/0021 ,  B81B3/0013 ,  B81B3/0016 ,  B81B2201/018 ,  B81B2201/033 ,  B81B2203/04 ,  B81B2203/051 ,  H01H59/0009 ,  H02N1/00 ,  H02N1/008

Abstract: An electrostatic actuator includes a base, a movable electrode including a semiconductor and supported to the base to be displaceable in a first direction, and a fixed electrode including the semiconductor and fixed to the base, in which the fixed electrode faces the movable electrode in a state of being separated therefrom in the first direction. The electrostatic actuator includes a high-resistance region formed in at least a portion of each of respective facing surfaces of the movable electrode and the fixed electrode, and lower in impurity concentration than a surrounding region thereof.

公开(公告)号：US20170363424A1

公开(公告)日：2017-12-21

申请号：US15625314

申请日：2017-06-16

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Inventor： Federico MASPERO ,  Loic JOET

IPC: G01C19/5762 ,  B81C99/00 ,  H01G5/14 ,  B81B3/00 ,  G01P15/125 ,  G01P15/08

CPC classification number: G01C19/5762 ,  B81B3/0045 ,  B81B3/0051 ,  B81B3/0062 ,  B81B2201/0228 ,  B81B2201/0242 ,  B81B2201/033 ,  B81B2203/053 ,  B81C99/003 ,  G01P15/125 ,  G01P2015/0822 ,  H01G5/14

Abstract: Microelectromechanical sensor comprising a fixed part and a mobile part suspended from the fixed part such that the mobile part can move at least in an out-of-plane displacement direction, the fixed part comprising at least first electrodes extending parallel to the displacement direction of the mobile part, the mobile part comprising a seismic mass and at least second electrodes extending parallel to the out-of-plane displacement direction, the first electrodes and the second electrodes being located relative to each other so as to be interdigitated, in which the second electrodes are directly connected to the inertial mass and only part of the face of each mobile electrode is facing an electrode fixed at rest.

公开(公告)号：US09807305B2

公开(公告)日：2017-10-31

申请号：US14630437

申请日：2015-02-24

Applicant: MEMS Start, LLC

Inventor： Roman Gutierrez

IPC: H04N5/238 ,  H02N1/08 ,  G03B3/10 ,  B81B5/00 ,  H04N5/232 ,  H02N1/00 ,  H04N5/225 ,  B81B3/00

CPC classification number: H04N5/23287 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2203/0136 ,  G03B3/10 ,  G03B2205/0053 ,  G03B2205/0084 ,  H02N1/008 ,  H04N5/2252 ,  H04N5/2253 ,  H04N5/2254

Abstract: An actuator for moving a platform having electrical connections is provided. The actuator includes an outer frame connected to an inner frame by one or more spring elements that are electrically conductive. The actuator further includes one or more comb drive actuators that apply a controlled force between the outer frame and the inner frame. Each of the comb drive actuators includes one or more comb drives. Moreover, a method for moving a platform having electrical connections is also provided. The method includes connecting an outer frame to an inner frame using one or more spring elements that are electrically conductive. The method further includes generating a controlled force using one or more comb drive actuators. Each of the comb drive actuators includes one or more comb drives. In addition, the method includes applying the controlled force between the outer frame and the inner frame.

公开(公告)号：US09670056B2

公开(公告)日：2017-06-06

申请号：US14607714

申请日：2015-01-28

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto Carminati ,  Sebastiano Conti

IPC: B81B3/00 ,  B81B7/00 ,  G02B26/08 ,  G03B21/14 ,  G03B21/20 ,  G03B21/28

CPC classification number: B81B3/0062 ,  B81B3/0043 ,  B81B7/008 ,  B81B2201/018 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  G02B26/0841 ,  G03B21/142 ,  G03B21/2033 ,  G03B21/28

Abstract: The MEMS device has a suspended mass supported via a pair of articulation arms by a supporting region. An electrostatic driving system, coupled to the articulation arms, has mobile electrodes and fixed electrodes that are coupled to each other. The electrostatic driving system is formed by two pairs of actuation assemblies, arranged on opposite sides of a respective articulation arm and connected to the articulation arm through connection elements. Each actuation assembly extends laterally to the suspended mass and has an auxiliary arm carrying a respective plurality of mobile electrodes. Each auxiliary arm is parallel to the articulation arms. The connection elements may be rigid or formed by linkages.

公开(公告)号：US09631952B2

公开(公告)日：2017-04-25

申请号：US14720282

申请日：2015-05-22

Applicant: Commissariat a L'Energie Atomique et aux Energies Alternatives

Inventor： Philippe Robert ,  Loic Joet

IPC: H01G5/14 ,  G01D5/241 ,  B81C1/00 ,  H01G5/16 ,  B81B3/00 ,  G01P15/125 ,  G01P15/08

CPC classification number: G01D5/2417 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2203/051 ,  B81C1/00134 ,  G01P15/125 ,  G01P2015/0814 ,  H01G5/14 ,  H01G5/16

Abstract: A device with a mobile element extending along a given plane comprising at least one first, one second and one third layers extending in planes parallel to the given plane, with the first layer forming a support, the second layer comprising all or a portion of the mobile element and means for suspending the mobile element with respect to the support and the third layer comprising all or a portion of the capacitive means of which the capacitance varies according to the relative position of the mobile element with respect to the support, said capacitive means comprising at least one mobile electrode integral with one of the faces of the mobile element parallel to the given plane, and at least one fixed electrode with respect to the support, with the fixed and mobile electrodes being arranged at least partially in the same plane parallel to the given plane and at least partially above and/or below the mobile element.

公开(公告)号：US20170003500A1

公开(公告)日：2017-01-05

申请号：US15265323

申请日：2016-09-14

Applicant: SUMITOMO PRECISION PRODUCTS CO., LTD.

Inventor： Ryohei UCHINO

IPC: G02B26/08 ,  H01L41/053

CPC classification number: G02B26/0858 ,  B81B3/0048 ,  B81B2201/032 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/058 ,  G02B26/0841 ,  H01L41/053 ,  H01L41/094

Abstract: A mirror device 300 disclosed herein includes: a base 302; a mirror 305; an actuator 306; an extension 304 provided on the other side of the mirror 305 with respect to an X-axis opposite from the actuator 306; a fixed comb electrode 308; and a movable comb electrode 307 provided on the other side of the mirror 305 with respect to the X-axis opposite from the actuator 306. The movable comb electrode 307 includes: a beam portion 371 coupled to the mirror 305 via a hinge 373; and electrode fingers 372 provided for the beam portion 371. The extension 304 is coupled to the base 302 via a hinge 341, and the mirror 305 tilts around a principal axis passing through the hinge 341.

Abstract translation: 本文公开的镜装置300包括：基座302; 镜子305; 致动器306; 相对于与致动器306相对的X轴设置在反射镜305的另一侧上的延伸部304; 固定梳电极308; 以及相对于与致动器306相对的X轴设置在反射镜305的另一侧上的可动梳状电极307.可动梳状电极307包括：经由铰链373联接到反射镜305的梁部分371; 以及为梁部分371提供的电极指372.延伸部分304经由铰链341连接到基座302，并且反射镜305围绕穿过铰链341的主轴线倾斜。

公开(公告)号：US20160268927A1

公开(公告)日：2016-09-15

申请号：US14656618

申请日：2015-03-12

Applicant: MEMS DRIVE, INC.

Inventor： XIAOLEI LIU ,  GUIQIN WANG ,  ROMAN GUTIERREZ

IPC: H02N1/00 ,  B81C1/00 ,  B81B3/00

CPC classification number: H02N1/008 ,  B81B3/0086 ,  B81B2201/033 ,  B81B2203/0136 ,  B81B2203/019

Abstract: A comb drive includes an inactive comb finger array and an opposing active comb finger array positioned to oppose the inactive comb finger array and configured to move in a non-linear path relative to the inactive comb finger array, wherein each comb finger array includes a comb spine and a plurality of comb fingers extending from its comb spine, and each comb finger on the active comb finger array is shaped to match a non-parallel profile. The non-parallel profile may be tapered, curved, or selected to linearize the capacitance in a gap between adjacent comb fingers from the inactive comb finger array when a comb finger from the active comb finger array moves through the gap.

Abstract translation: 梳状驱动器包括不活动的梳状指状阵列和相对的有源梳状指阵列，定位成与非活性梳状指状阵列相对并配置为相对于非活性梳状指状阵列在非线性路径中移动，其中每个梳齿阵列包括梳子 脊和从其梳脊延伸的多个梳齿，并且活动梳指阵列上的每个梳指被成形为匹配非平行轮廓。 非平行轮廓可以是渐缩的，弯曲的或选择的，以便当来自主动梳齿阵列的梳齿移动穿过间隙时，使来自无源梳指阵列的相邻梳齿之间的间隙中的电容线性化。

公开(公告)号：US20160131893A1

公开(公告)日：2016-05-12

申请号：US14403308

申请日：2013-10-11

Applicant: KOREA OPTRON CORP.

Inventor： Kyungsu KIM ,  Junil KIM ,  Jonghyun LEE ,  Seunghwan MOON

IPC: G02B26/08 ,  G02B26/10

CPC classification number: G02B26/0841 ,  B81B3/0048 ,  B81B2201/033 ,  G02B26/105 ,  G03B21/008 ,  H02N1/008 ,  H04N3/08

Abstract: The present invention relates to a micro electro mechanical systems (MEMS) scanner, and more particularly, to an MEMS scanner for implementing stable driving while increasing a driving angle between a fixed electrode and a driving electrode using an MEMS process. The MEMs scanner comprises a lower frame, a pair of upper frames, a pair of levers, a pair of fixed electrode portions, and a driving electrode portion.

Abstract translation: 微机电系统（MEMS）扫描器技术领域本发明涉及一种微机电系统（MEMS）扫描器，更具体地说，涉及一种MEMS扫描器，用于在使用MEMS工艺增加固定电极和驱动电极之间的驱动角的同时实现稳定的驱动。 MEM扫描器包括下框架，一对上框架，一对杠杆，一对固定电极部分和驱动电极部分。

公开(公告)号：US08941192B2

公开(公告)日：2015-01-27

申请号：US13247888

申请日：2011-09-28

Applicant: Robert J. Calvet ,  Xiaolei Liu ,  Ankur Jain ,  Lakshminarayan Hariharan ,  Roman C. Gutierrez

Inventor： Robert J. Calvet ,  Xiaolei Liu ,  Ankur Jain ,  Lakshminarayan Hariharan ,  Roman C. Gutierrez

IPC: H02N1/00 ,  G03B17/00 ,  G03B5/00 ,  B81B3/00 ,  G03B3/10

CPC classification number: G03B5/00 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2203/053 ,  G03B3/10 ,  G03B2205/0007 ,  G03B2205/0084 ,  Y10T29/49826 ,  Y10T74/18992

Abstract: A method for making an actuator device includes forming a substantially planar structure having a stage resiliently supported for movement within a plane of the structure, an actuator coupled to an outer periphery of the stage and operable to apply a force acting in the plane and tangentially to the stage when actuated, the actuator comprising a fixed frame and a moving frame resiliently supported for reciprocal movement relative to the fixed frame by a motion control flexure, and an outer frame surrounding and supporting the stage and the actuator. The moving frame is moved to a deployed position that is coplanar with, parallel to and spaced apart from the fixed frame at a selected distance, and the moving frame is then fixed at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.

Abstract translation: 一种用于制造致动器装置的方法包括形成基本平坦的结构，其具有弹性支撑以在所述结构的平面内移动的台阶;致动器，其联接到所述平台的外周边并且可操作以施加作用在所述平面中的切向和切向地 致动器包括固定框架和弹性支撑的运动框架，用于通过运动控制挠曲件相对于固定框架往复运动，以及围绕并支撑平台和致动器的外框架。 移动框架被移动到展开位置，该展开位置与固定框架平行并间隔开一定距离，然后移动框架固定在展开位置，以相对于固定框架基本上直线，垂直移动 。

公开(公告)号：US08873174B2

公开(公告)日：2014-10-28

申请号：US14101280

申请日：2013-12-09

Applicant: DigitalOptics Corporation MEMS

Inventor： Roman C. Gutierrez ,  Ankur Jain

IPC: G02B7/00 ,  H02N2/00 ,  B81B7/00

CPC classification number: H02N2/005 ,  B81B7/0006 ,  B81B2201/033 ,  B81B2203/0154 ,  B81B2207/07

Abstract: A device may comprise a flexure formed of a first semiconductor material. A first trench may be formed in the flexure. The first trench may separate the first semiconductor material into a first portion and a second portion thereof. An oxide layer may be formed in the first trench. The oxide layer may extend over a top portion of the first semiconductor material. A second semiconductor material may be formed on the oxide layer. The first trench and the oxide layer may cooperate to electrically isolate the first portion and the second portion from one another.

Abstract translation: 装置可以包括由第一半导体材料形成的挠曲。 可以在弯曲部中形成第一沟槽。 第一沟槽可以将第一半导体材料分离成第一部分和第二部分。 可以在第一沟槽中形成氧化物层。 氧化物层可以在第一半导体材料的顶部上延伸。 可以在氧化物层上形成第二半导体材料。 第一沟槽和氧化物层可以协作以将第一部分和第二部分彼此电隔离。