Polychromatic polarization state generator and its application for real-time birefringence imaging

    公开(公告)号:US09625369B2

    公开(公告)日:2017-04-18

    申请号:US14807020

    申请日:2015-07-23

    Inventor: Michael Shribak

    CPC classification number: G01N21/23 G01N2201/0683 G02B21/0092 G02B27/286

    Abstract: Apparatus for generating polychromatic polarized light with the polarization ellipse orientation determined by the wavelength. The proposed polychromatic polarization state generator can be used in various configurations of polarized light microscope (called “polychromatic polscope”) for imaging birefringent samples. The polychromatic polscope produces a spectral-modulated visual scene, in which birefringent structures are evident because their appearance is different from the background. New polarized light microscope can subtract the background and produce video-enhanced color image of birefringent structures. The obtained picture can be also mathematically processed in order to obtain a map of quantitative distribution of specimen retardation and orientation of the principal axes.

    INSPECTION APPARATUS AND INSPECTION METHOD
    167.
    发明申请
    INSPECTION APPARATUS AND INSPECTION METHOD 审中-公开
    检查装置和检查方法

    公开(公告)号:US20160363541A1

    公开(公告)日:2016-12-15

    申请号:US15003914

    申请日:2016-01-22

    Inventor: Kiminori YOSHINO

    Abstract: In accordance with an embodiment, an inspection apparatus includes an irradiating section, a detecting section and a control section. The irradiating section is configured to irradiate a sample with light. The detecting section is configured to detect the light reflected by the sample. The control section is configured to classify defects of the sample on the basis of a difference between a first signal outputted from the detecting section by irradiating the sample with the light under a first optical condition and a second signal outputted from the detecting section by irradiating the sample with the light under a second optical condition different from the first optical condition.

    Abstract translation: 根据实施例,检查装置包括照射部,检测部和控制部。 照射部被配置为用光照射样品。 检测部被配置为检测由样本反射的光。 控制部分被配置为基于通过在第一光学条件下照射样品和从检测部分输出的第二信号从检测部分输出的第一信号之间的差异来分类样本的缺陷, 在与第一光学条件不同的第二光学条件下用光进行采样。

    Method and Apparatus for Determining Concentration Using Polarized Light

    公开(公告)号:US20160356701A1

    公开(公告)日:2016-12-08

    申请号:US15243233

    申请日:2016-08-22

    CPC classification number: G01N21/21 G01N2201/0683

    Abstract: An apparatus and method for determining the concentration of chiral molecules in a fluid includes a first polarizer configure to polarize light in substantially a first plane to provide initially polarized light. A second polarizer is capable of polarizing the initially polarized light in a plurality of planes, at least one of the plurality of planes being different from the first plane, to provide subsequently polarized light. One or more receivers are included for measuring an intensity of the subsequently polarized light in one or more of the plurality of planes.

    Intra-Die Defect Detection
    169.
    发明申请
    Intra-Die Defect Detection 审中-公开
    模内缺陷检测

    公开(公告)号:US20160321800A1

    公开(公告)日:2016-11-03

    申请号:US15140438

    申请日:2016-04-27

    Abstract: Methods and systems for detecting defects on a specimen are provided. One system includes one or more computer subsystems configured for acquiring images generated by an imaging subsystem at multiple instances of a pattern of interest (POI) within a die formed on the specimen. The multiple instances include two or more instances that are located at aperiodic locations within the die. The computer subsystem(s) are also configured for generating a POI reference image from two or more of the images generated at the multiple instances of the POI within the die. The computer subsystem(s) are further configured for comparing the images generated at the multiple instances of the POI within the die to the POI reference image and detecting defects in the multiple instances of the POI based on results of the comparing.

    Abstract translation: 提供了检测试样缺陷的方法和系统。 一个系统包括一个或多个计算机子系统,其配置用于在形成在样本上的模具内的多个感兴趣模式(POI)实例处获取由成像子系统生成的图像。 多个实例包括位于管芯内非周期位置的两个或多个实例。 计算机子系统还被配置为从在芯片内的POI的多个实例处生成的两个或多个图像中生成POI参考图像。 计算机子系统还被配置为将在模具内的POI的多个实例处产生的图像与POI参考图像进行比较,并且基于比较的结果检测POI的多个实例中的缺陷。

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