Hyperspectral sensing system
    161.
    发明授权

    公开(公告)号:US11221322B2

    公开(公告)日:2022-01-11

    申请号:US16988564

    申请日:2020-08-07

    Inventor: Ivan Lalović

    Abstract: A hyperspectral sensing device may include an optical collector configured to collect light and to transfer the collected light to a sensor having spectral resolution sufficient for sensing hyperspectral data. In some examples, the sensor comprises a compact spectrometer. The device further comprises a power supply, an electronics module, and an input/output hub enabling the device to transmit acquired data (e.g., to a remote server). In some examples, a plurality of hyperspectral sensing devices are deployed as a network to acquire data over a relatively large area.

    Spectral analysis system for capturing a spectrum

    公开(公告)号:US11085822B2

    公开(公告)日:2021-08-10

    申请号:US16380543

    申请日:2019-04-10

    Abstract: Spectral analysis system for capturing a spectrum including an inlet opening, a dispersive optical element and reflecting imaging optics having at least one optical functional element defining an optical path from the inlet opening across the dispersive optical element onto an outlet opening and/or detector area of the spectral analysis system and a carrier member defining a flat optical path volume with at least one lateral opening. The dispersive optical element is configured, e.g. in a stationary manner. At least one of the inlet opening, the outlet opening and/or detector area, the at least one optical functional element and the dispersive optical element are integrated in at least one member. The at least one member is mounted on the carrier member at the at least one lateral opening, such that the optical path largely runs transversely to a thickness direction of the optical path volume.

    COMA-ELIMINATION BROADBAND HIGH-RESOLUTION SPECTROGRAPH

    公开(公告)号:US20200348174A1

    公开(公告)日:2020-11-05

    申请号:US16932870

    申请日:2020-07-20

    Abstract: The present invention discloses a coma-elimination broadband high-resolution spectrograph, comprising incident slits, a collimating mirror, an integrated grating, a two-dimensional focus imaging mirror and a two-dimensional area array detector, wherein the incident slits enters along the incident slits, passes through a light through hole in the center of the integrated grating and is incident to the collimating mirror, the incident light enters the integrated grating along a coaxial optical path L1 after collimation of the collimating mirror and is focused by the two-dimensional focus imaging mirror after diffraction of each sub-grating, diffraction light in full spectrum region enters a focal plane of the two-dimensional area array detector for detection along an coaxial optical path L2, and off-axis angles of the L1 and the L2 are zero.

    MULTICHANNEL BROADBAND HIGH-RESOLUTION SPECTROGRAPH

    公开(公告)号:US20200348172A1

    公开(公告)日:2020-11-05

    申请号:US16932869

    申请日:2020-07-20

    Abstract: The present invention discloses a multichannel broadband high-resolution spectrograph, comprising a plurality of light source incident slits, a multichannel integrated grating, a multichannel shared two-dimensional focus imaging mirror and a two-dimensional area array detector which are sequentially disposed along a light source incident or reflection line, wherein the multichannel integrated grating consists of a plurality of sub-gratings, incident light enters the corresponding integrated gratings along the light source incident slits and then is focused by the shared two-dimensional focus imaging mirror after diffraction of the integrated grating, and diffraction light in a full-spectrum region is incident onto a focal plane of the two-dimensional area array detector for detection. No any mechanical displacement part is disposed, multichannel, full-spectrum and high-speed detection and analysis is achieved, and the present disclosure has high spectrum resolution and working reliability.

    Large format three-mirror dispersive spectrometer optics

    公开(公告)号:US10768045B1

    公开(公告)日:2020-09-08

    申请号:US16552597

    申请日:2019-08-27

    Inventor: Lacy G. Cook

    Abstract: All-reflective optics for use in imaging spectrometers. In one example, an imaging spectrometer includes an entrance slit and spectrometer optics consisting of a primary mirror, a secondary mirror having a diffraction grating formed thereon, and a tertiary mirror, each of the primary mirror, the secondary mirror, and the tertiary mirror having free-form non-rotationally symmetric surface figures defined by Zernike polynomials. The spectrometer optics are configured to receive the telecentric image at the entrance slit, to disperse the optical radiation into its spectral components to provide dispersed optical radiation, and to focus the dispersed optical radiation onto an image plane positioned in a common plane with the entrance slit. The spectrometer optics have a physical length that is twice the length of the entrance slit, a ratio of a distance of the secondary mirror from the entrance slit to a distance of the primary mirror from the entrance slit being approximately 0.32.

    Radiation receiving system
    167.
    发明授权

    公开(公告)号:US10678145B2

    公开(公告)日:2020-06-09

    申请号:US15941324

    申请日:2018-03-30

    Abstract: A radiation receiving system for an inspection apparatus, used to perform measurements on target structures on lithographic substrates as part of a lithographic process, comprises a spectrometer with a number of inputs. The radiation receiving system comprises: a plurality of inputs, each input being arranged to provide radiation from a target structure; a first optical element operable to receive radiation from each of the plurality of inputs; a second optical element operable to receive radiation from the first optical element and to scatter the radiation; and a third optical element operable to direct the scattered radiation onto a detector. The second optical element may for example be a reflective diffraction grating that diffracts incoming radiation into an output radiation spectrum.

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