公开(公告)号：US20050174573A1

公开(公告)日：2005-08-11

申请号：US10511502

申请日：2003-04-15

Applicant: Andrew Harvey ,  David Fletcher-Holmes

Inventor： Andrew Harvey ,  David Fletcher-Holmes

IPC: G01J3/28 ,  G01J3/447 ,  G01J3/51 ,  G01J4/04

CPC classification number: G01J4/04 ,  G01J3/2823 ,  G01J3/447 ,  G01J3/51

Abstract: An imaging spectrometer is disclosed that comprises imaging means for dividing a received image into two or more spatially separated images and means for detecting each spectral image, and is characterised in that the imaging means comprises at least one polarizing beam splitter. The polarizing beam splitter may be a Wollaston prism. In one embodiment of the invention, the imaging means comprises image replication means to produce two or more spatially separated images, and one or more filter elements such as dichroic filters which act to alter the spectral characteristics of one or more of the spatially separated images. In a further embodiment of the invention the imaging means comprises one or more spectral replication means arranged in optical series, each spectral replication means comprising an optical retardation element and a polarising beam splitter.

Abstract translation: 公开了一种成像光谱仪，其包括用于将接收的图像分割为两个或更多个空间分离的图像的成像装置和用于检测每个光谱图像的装置，其特征在于，所述成像装置包括至少一个偏振分束器。 偏振分束器可以是Wollaston棱镜。 在本发明的一个实施例中，成像装置包括产生两个或更多个空间分离图像的图像复制装置，以及用于改变一个或多个空间分离图像的光谱特性的一个或多个过滤元件，例如二向色滤光器。 在本发明的另一个实施例中，成像装置包括以光学系列布置的一个或多个光谱复制装置，每个光谱复制装置包括光学延迟元件和偏振分束器。

公开(公告)号：US06816261B2

公开(公告)日：2004-11-09

申请号：US10146228

申请日：2002-05-14

Applicant: Jayantilal S. Patel ,  Zhizhong Zhuang ,  John A. Yeazell

Inventor： Jayantilal S. Patel ,  Zhizhong Zhuang ,  John A. Yeazell

IPC: G01J400

CPC classification number: G01J4/04 ,  G01J3/447 ,  G01J4/00 ,  G01M11/331

Abstract: Measurements at multiple distinct polarization measurement states are taken to define the polarization state of an input, for example to calculate a Stokes vector. High accuracy and/or capability of frequent recalibration are needed, due to the sensitivity of measurement to retardation of the input signal. A multiple measurement technique takes a set of spatially and/or temporally distinct intensity measurements through distinct waveplates and polarizers. These can be optimized as to orientation and retardation using initial choices and also using tunable elements, especially controllable birefringence elements. A device matrix defines the response of the device at each of the measurement states. The matrix can be corrected using an iterative technique to revise the device matrix, potentially by automated recalibration. Two input signals (or preferably the same signal before and after a polarization transform) that are known to have a common polarization attribute or other attribute relationship are measured and the common attribute and/or attribute relationship is derived for each and compared. The device matrix is revised, for example by iterative correction or by random search of candidates to improve the accuracy of the device matrix. Optional tunable spectral and temporal discrimination provide additional functions.

Abstract translation: 采用多个不同极化测量状态的测量来定义输入的偏振状态，例如计算斯托克斯矢量。 由于测量对输入信号的延迟的敏感性，需要高精度和/或频繁重新校准的能力。 多重测量技术通过不同的波片和偏振器采取一组空间和/或时间上不同的强度测量。 可以使用初始选择以及使用可调谐元件，特别是可控双折射元件来定向和延迟这些。 器件矩阵定义了器件在每个测量状态下的响应。 可以使用迭代技术校正矩阵，以便通过自动重新校准来修改器件矩阵。 测量已知具有共同极化属性或其他属性关系的两个输入信号（或优选地，在偏振变换之前和之后的相同信号），并且为每个并且进行比较导出公共属性和/或属性关系。 修改设备矩阵，例如通过迭代校正或通过随机搜索候选来改进设备矩阵的准确性。 可选的可调谐光谱和时间辨别提供附加功能。

公开(公告)号：US06804004B1

公开(公告)日：2004-10-12

申请号：US09583229

申请日：2000-05-30

Applicant: Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt

Inventor： Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt

IPC: G01B1106

CPC classification number: G01N21/211 ,  G01J3/14 ,  G01J3/447

Abstract: Disclosed are multi-element lenses which demonstrate reduced achromatic focal length and reduced electromagentic beam spot size dispersal effects in ellipsometer and polarimeter systems. Also disclosed is methodology for evaluating parameters in parameterized equations which enables calculating retardance entered to, or between, orthogonal components in a beam of electromagnetic radiation which is caused to pass through input and/or output optical elements and interact with a material system, by each of the input and output optical elements, substantially uncorrelated with retardation entered by the material system. Present invention input and/or output focusing lens(es) find application in spectroscopic ellipsometer mediated investigation of small spots on material systems, wherein a beam of electromagnetic radiation is caused to converge via an input lens, interact with a very small, chromatically undispersed spot area on a material system, then optionally re-collimate via an output lens, prior to entering a detector system. Present invention methodology provides benefit where it is necessary to separate out birefringent effects of input and/or output optical element focusing lens(es), optionally in combination with beam directing and/or window elements present in an ellipsometer system which are positioned with respect to input and/or output len(es) so as to be ellipsometrically indistinguishable therefrom, to arrive at material system characterizing ellipsometric PSI and DELTA results.

Abstract translation: 公开了多元素透镜，其在椭偏仪和偏光计系统中表现出减少的消色差焦距和降低的电磁光束光斑尺寸分散效应。 还公开了用于评估参数化方程式中的参数的方法，该方法能够计算在电磁辐射束中输入到或之间的正交分量的延迟，所述正交分量被引导通过输入和/或输出光学元件并与材料系统相互作用 的输入和输出光学元件，与材料系统进入的延迟基本上不相关。 本发明的输入和/或输出聚焦透镜在光谱椭偏仪介导的对材料系统上的小斑点的调查中的应用发现，其中使电磁辐射束通过输入透镜会聚，与非常小的，色散的未分散的点相互作用 区域，然后在进入检测器系统之前可选地通过输出透镜重新校准。 本发明的方法在需要分离输入和/或输出光学元件聚焦透镜的双折射效应（可选地与存在于椭圆偏振仪系统中的光束引导和/或窗口元件）相关联的位置方面提供了益处，所述光学元件聚焦透镜相对于 输入和/或输出len（es）以便椭圆不能与其区分开来，以得到表征椭圆偏振PSI和DELTA结果的材料系统。

公开(公告)号：US06753961B1

公开(公告)日：2004-06-22

申请号：US09956356

申请日：2001-09-18

Applicant: Adam E. Norton ,  Kenneth C. Johnson ,  Fred E. Stanke ,  Abdurrahman Sezginer

Inventor： Adam E. Norton ,  Kenneth C. Johnson ,  Fred E. Stanke ,  Abdurrahman Sezginer

IPC: G01J400

CPC classification number: G01J3/447 ,  G01J4/00 ,  G01N21/211 ,  G01N21/274 ,  G01N2021/213

Abstract: A spectroscopic ellipsometer having a multiwavelength light source, spectrometer (or wavelength-scanning monochromator and photodetector), a polarizer and polarization analyzer, and one or more objectives in the illumination and collection light paths, further comprises a stationary polarization modulator that modulates the light polarization versus wavelength. Modulator can be an optically active crystal rotating the linear polarization plane by a different angle for each wavelength or a non-achromatic waveplate retarder that varies the relative phase delay of the polarization components periodically over wavelength. The measured spectrum can be used to characterize selected features or parameters of a sample, e.g. by comparison with one or more theoretical spectra.

Abstract translation: 具有多波长光源，光谱仪（或波长扫描单色仪和光电检测器），偏振器和偏振分析器以及照明和采集光路中的一个或多个目标的光谱椭偏仪还包括调制光偏振的固定偏振调制器 对波长。 调制器可以是旋转线性偏振平面对于每个波长旋转不同角度的光学活性晶体，或者是在波长周期性地改变偏振分量的相对相位延迟的非消色差波片延迟器。 测量的光谱可用于表征所选择的特征或样品的参数，例如。 通过与一个或多个理论光谱进行比较。

公开(公告)号：US06734968B1

公开(公告)日：2004-05-11

申请号：US09298007

申请日：1999-04-22

Applicant: Haiming Wang ,  Patrick M. Maxton ,  Kenneth C. Johnson ,  Mehrdad Nikoonahad

Inventor： Haiming Wang ,  Patrick M. Maxton ,  Kenneth C. Johnson ,  Mehrdad Nikoonahad

IPC: G01N2121

CPC classification number: G01J4/02 ,  G01J3/447 ,  G01N21/21

Abstract: Two phase modulators or polarizing elements are employed to modulate the polarization of an interrogating radiation beam before and after the beam has been modified by a sample to be measured. Radiation so modulated and modified by the sample is detected and up to 25 harmonics may be derived from the detected signal. The up to 25 harmonics may be used to derive ellipsometric and system parameters, such as parameters related to the angles of fixed polarizing elements, circular deattenuation, depolarization of the polarizing elements and retardances of phase modulators. A portion of the radiation may be diverted for detecting sample tilt or a change in sample height. A cylindrical objective may be used for focusing the beam onto the sample to illuminate a circular spot on the sample. The above-described self-calibrating ellipsometer may be combined with another optical measurement instrument such as a polarimeter, a spectroreflectometer or another ellipsometer to improve the accuracy of measurement and/or to provide calibration standards for the optical measurement instrument. The self-calibrating ellipsometer as well as the combined system may be used for measuring sample characteristics such as film thickness and depolarization of radiation caused by the sample.

公开(公告)号：US20020044282A1

公开(公告)日：2002-04-18

申请号：US09782098

申请日：2001-02-13

Applicant: Lucent Technologies Inc.

Inventor： Lothar B. Moeller ,  Paul Stephen Westbrook

IPC: G01J004/00

CPC classification number: H04B10/2569 ,  G01J3/447 ,  G01J4/04

Abstract: A method and apparatus for polarization measurements. A polarization state of an optical signal can be determined using a polarization analyzer comprising a polarization controller, a polarizer, a wavelength dispersive element and a photo-detector. The method and apparatus can be applied to polarization and polarization mode dispersion measurements in wavelength division multiplexed communication systems.

Abstract translation: 一种用于偏振测量的方法和装置。 可以使用包括偏振控制器，偏振器，波长色散元件和光检测器的偏振分析器来确定光信号的偏振状态。 该方法和装置可应用于波分复用通信系统中的偏振和偏振模色散测量。

公开(公告)号：US20010052979A1

公开(公告)日：2001-12-20

申请号：US09800953

申请日：2001-03-07

Inventor： Patrick J. Treado ,  Arjun Bangalore ,  Matthew P. Nelson ,  Christopher T. Zugates

IPC: G01J003/42 ,  G01B009/02

CPC classification number: G02B21/365 ,  G01B11/2545 ,  G01J3/2823 ,  G01J3/44 ,  G01J3/447

Abstract: An apparatus incorporated within a spectroscopic imaging system, typically a microscope, but also applicable to other image gathering platforms, namely fiberscopes, macrolens imaging systems and telescopes employing a polarizing beam splitting element is disclosed. The apparatus allows simultaneous spectroscopic (i.e. chemical) imaging and rapid acquisition spectroscopy to be performed without the need for moving mechanical parts or time sequenced sampling and without introducing significant optical signal loss or degradation to the spectroscopic imaging capability. In addition, the apparatus affords a more compact design, an improved angular field of view and an improved overall ruggedness of optical design at a lower manufacturing and maintenance cost compared to previous devices.

Abstract translation: 公开了一种结合在分光成像系统（通常为显微镜）内的装置，但也适用于采用偏振分束元件的其它图像采集平台，即纤维内窥镜，宏观成像系统和望远镜。 该装置允许执行同时分光（即化学）成像和快速采集光谱，而不需要移动机械部件或时间顺序采样，并且不会对光谱成像能力引入显着的光信号损失或劣化。 此外，与先前的设备相比，该设备以更低的制造和维护成本提供更紧凑的设计，改进的角视场和改进的光学设计的整体耐用性。

公开(公告)号：US5949480A

公开(公告)日：1999-09-07

申请号：US806129

申请日：1997-03-03

Applicant: Grant R. Gerhart ,  Roy M. Matchko

Inventor： Grant R. Gerhart ,  Roy M. Matchko

IPC: G01J3/28 ,  G01J3/447 ,  H04N5/76

CPC classification number: G01J3/2823 ,  G01J3/447

Abstract: A method for obtaining spectral radiation data for points in a field of view utilizes a broad band variable filter to produce different intensity distributions on a photocell array. The array is in the focal plane of a camera and photocell locations correspond to points in the field of view. The variable filter has a sequence of optical train elements comprised of a first linear polarizer, a body of optically active material, a retarder and a second linear polarizer. A series of radiance measurements are taken at each photocell of the array and at least one of the optical train components is repositioned between measurements. For each photocell, a collection of photocell values is stored in a computer memory and is converted to a system of linear equations. Intensities for spectral components of light incident thereon are derived for each photocell. The method can be used to create a two-dimensional intensity map for the pixel array for each wavelength measured. Also, the method can be used to create a broad band spectroradiometer for points in the field of view.

Abstract translation: 用于获得视野中的点的光谱辐射数据的方法利用宽带可变滤波器在光电池阵列上产生不同的强度分布。 该阵列位于相机的焦平面中，光电池位置对应于视场中的点。 可变滤波器具有由第一线性偏振器，光学活性材料体，延迟器和第二线性偏振器组成的光学序列元件的序列。 在阵列的每个光电池处进行一系列辐射测量，并且至少一个光学组件在测量之间重新定位。 对于每个光电池，光电池值的集合存储在计算机存储器中并被转换为线性方程组。 对于每个光电池导出入射到其上的光的光谱分量的强度。 该方法可用于为每个测量波长的像素阵列创建二维强度图。 此外，该方法可用于为视场中的点创建宽带光谱辐射计。

公开(公告)号：US5781293A

公开(公告)日：1998-07-14

申请号：US586671

申请日：1996-04-17

Applicant: John Miles Padgett ,  Alan James Duncan ,  Wilson Sibbett ,  Andrew Robert Harvey

Inventor： John Miles Padgett ,  Alan James Duncan ,  Wilson Sibbett ,  Andrew Robert Harvey

IPC: G01J3/447 ,  G01J3/453 ,  G01B9/02

CPC classification number: G01J3/447 ,  G01J3/4531

Abstract: A Fourier-transform spectrometer contains a birefringent optical component, removing the need for a Michelson interferometer used in conventional instruments. A suitable birefringent element such as a Wollaston prism, is used to introduce a path difference between two light polarisations. Use of an extended light source so that all areas of the birefringent component are illuminated simultaneously ensures that different positions on the birefringent component correspond to different path differences between the two polarisations. A Fourier-transform of the resulting interferogram at the detector results in the spectral distribution of the input light being obtained. The use of an extended light source permits a Fourier-transform spectrometer with no moving parts to be achieved.

Abstract translation: PCT No.PCT / GB94 / 01499 Sec。 371日期：1996年4月17日 102（e）日期1996年4月17日PCT 1994年7月11日PCT公布。 公开号WO95 / 02171 日期1995年1月19日傅立叶变换光谱仪包含双折射光学部件，不需要用于传统仪器中的迈克尔逊干涉仪。 使用诸如Wollaston棱镜的合适的双折射元件来引入两个光极化之间的路径差异。 使用扩展光源使得双折射元件的所有区域同时被照亮，确保双折射元件上的不同位置对应于两个极化之间的不同路径差异。 在检测器处的​​所得干涉图的傅立叶变换导致所获得的输入光的光谱分布。 使用扩展光源允许不具有移动部件的傅里叶变换光谱仪。

公开(公告)号：US5657121A

公开(公告)日：1997-08-12

申请号：US543277

申请日：1995-10-16

Applicant: Shigeki Nishina

Inventor： Shigeki Nishina

IPC: G01J3/18 ,  G01J3/447 ,  G02B5/30 ,  G02B27/28 ,  G01J3/32

CPC classification number: G02B5/3083 ,  G01J3/18 ,  G01J3/447 ,  G01J3/0224

Abstract: A spectrum measuring device for measuring optical spectrum of input light includes first and second double-image elements which separate input light to be measured into two polarized wave components having respective planes of polarization perpendicularly intersecting each other and having different optical axes, a third double-image element which separates the two polarized wave components from the first and second double-image elements into four polarized wave components each two of which having respective planes of polarization perpendicularly intersecting each other and having different optical axes, a dispersing element which is irradiated by the four polarized wave components from the third double-image element in which the dispersing element separates optical components of each wavelength contained in the four polarized wave components at the same angle of separation, and a photodetector for measuring an overall intensity of the four polarized wave components of the same wavelength separated by the dispersing element.

Abstract translation: 用于测量输入光的光谱的光谱测量装置包括将要测量的输入光分离为具有彼此垂直相交且具有不同光轴的偏振平面的两个偏振波分量的第一和第二双像元件， 图像元件，其将两个偏振波分量与第一和第二双像元件分离成四个偏振波分量，每个偏振波分量各自具有彼此垂直相交且具有不同光轴的偏振平面;由 其中分散元件以相同的分离角度分离四个偏振波分量中包含的每个波长的光学分量的第三双像元素的四个偏振波分量，以及用于测量四个偏振波分量的总体强度的光电检测器 相同的波浪 由分散元件分隔开。