公开(公告)号：US20130207328A1

公开(公告)日：2013-08-15

申请号：US13586444

申请日：2012-08-15

Applicant: Shorya Awtar ,  Siddharth Sood ,  Mohammad Olfatnia

Inventor： Shorya Awtar ,  Siddharth Sood ,  Mohammad Olfatnia

IPC: F16F1/00

CPC classification number: F16F1/00 ,  B81B3/0051 ,  B81B2201/033

Abstract: Flexure bearing systems and configurations guide translational motion along a single-axis in micro and macro applications such as micro-electro-mechanical system (MEMS) devices including sensors and actuators like electrostatic comb-drive actuators. The flexure bearing systems and configurations described herein provide an improved constraint against movement (i.e., stiffness) of the primary mover in non-motion axes such as a bearing axis.

Abstract translation: 挠性轴承系统和结构在微型和宏观应用中沿单轴引导平移运动，如微机电系统（MEMS）设备，包括传感器和执行器，如静电梳驱动执行器。 本文所述的挠曲轴承系统和构造提供了在诸如轴承轴线的非运动轴线中抵抗原动机的运动（即，刚度）的改进的限制。

公开(公告)号：US08384975B2

公开(公告)日：2013-02-26

申请号：US12893778

申请日：2010-09-29

Applicant: Tjalf Pirk ,  Stefan Pinter ,  Joachim Fritz ,  Christoph Friese

Inventor： Tjalf Pirk ,  Stefan Pinter ,  Joachim Fritz ,  Christoph Friese

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  B81B3/0059 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/053 ,  H02N1/008

Abstract: A micromechanical assembly having a mounting, at least one stator electrode comb, which is fixedly placed on the mounting, having at least two stator electrode fingers, whose central longitudinal axes are on a central plane of the stator electrode comb, at least one actuator electrode comb having at least two actuator electrode fingers, and a displaceable component, which is coupled to the at least one actuator electrode comb so that the displaceable component is displaceable in relation to the mounting at least in one first displacement direction using a nonzero operating voltage, which is applied between the at least two stator electrode fingers and the at least two actuator electrode fingers, the first displacement direction having one first nonzero directional component perpendicular to the central plane.

Abstract translation: 具有固定地放置在所述安装件上的至少一个定子电极梳的安装的至少一个定子电极梳的微机械组件具有至少两个定子电极指，其中心纵向轴线位于所述定子电极梳的中心平面上，至少一个致动器电极 梳具具有至少两个致动器电极指，以及可移位部件，其连接到所述至少一个致动器电极梳，使得所述可移位部件可使用非零工作电压至少在一个第一位移方向上相对于所述安装而移位， 其施加在所述至少两个定子电极指和所述至少两个致动器电极指之间，所述第一位移方向具有垂直于所述中心平面的一个第一非零方向分量。

公开(公告)号：US08169678B2

公开(公告)日：2012-05-01

申请号：US12517241

申请日：2007-12-11

Applicant: Ulrich Hofmann ,  Marten Oldsen

Inventor： Ulrich Hofmann ,  Marten Oldsen

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  B81B2201/033 ,  B81B2201/042 ,  B81C1/00166

Abstract: The present invention relates to a method for producing a micro-mirror actuator and the corresponding actuator. In the method, the actuator is generated from a layered construction made of at least three main layers (101, 103, 107), which are at least sectionally electrically insulated from one another via intermediate layers (102, 104, 106). The layers are structured to form the micro-mirror element and the electrodes, the structuring being performed in such a way that a closed frame (310) is formed from at least the uppermost layer (107) around the inner area of the actuator, which allows a hermetic encapsulation of the inner area by application of a cover plate onto the frame. Furthermore, a conductor level (105), which is electrically insulated from these layers via the intermediate layers, is generated between at least two of the layers and structured to form conductor paths, via which one or more electrodes may be electrically contacted from outside the frame (310) after the formation of contact openings in one or more of the intermediate layers (102, 104, 106).A hermetically sealed encapsulation of the inner area of actuator may already be achieved easily at the wafer level using the method.

Abstract translation: 本发明涉及一种用于制造微反射镜致动器和相应致动器的方法。 在该方法中，致动器由至少三个主层（101,103,107）制成的分层结构产生，所述至少三个主层通过中间层（102,104,106）至少部分地电绝缘。 这些层被构造成形成微镜元件和电极，结构以这样的方式执行，使得围绕致动器的内部区域的至少最上层（107）形成闭合框架（310），其中 允许通过在框架上施加盖板来对内部区域进行气密封装。 此外，在至少两个层之间产生经由中间层与这些层电绝缘的导体电平（105），并且构造成形成导体路径，一个或多个电极可以通过该导体路径从外部电接触 在一个或多个中间层（102,104,106）中形成接触开口之后的框架（310）。 使用该方法，可以在晶片级上容易地实现致动器的内部区域的气密密封。

公开(公告)号：US08142670B2

公开(公告)日：2012-03-27

申请号：US12292540

申请日：2008-11-20

Applicant: Norinao Kouma ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Satoshi Ueda

Inventor： Norinao Kouma ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Satoshi Ueda

IPC: B44C1/22 ,  C25F3/00

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/058

Abstract: A micro-oscillating element includes a frame, a movable functional portion, and a torsional joint for joining the frame and the functional portion. The micro-oscillating element also includes first and second comb-tooth electrodes for generation of the driving force for the oscillating motion of the movable functional portion about the torsional joint. The first comb-tooth electrode includes a plurality of first electrode teeth each having a first conductor, an insulator and a second conductor laminated in the direction of the oscillating motion, where the first conductor and the second conductor are electrically connected with each other. The second comb-tooth electrode includes a plurality of second electrode teeth caused not to face the second conductor but to face the first conductor of the first electrode teeth during non-operation. The second electrode teeth are longer than the first conductor in the direction of the oscillating motion.

Abstract translation: 微振动元件包括框架，可移动功能部分和用于连接框架和功能部分的扭转接头。 微振动元件还包括用于产生用于可动功能部分围绕扭转接头的摆动运动的驱动力的第一和第二梳齿电极。 第一梳齿电极包括多个第一电极齿，每个第一电极齿具有沿振荡运动方向层叠的第一导体，绝缘体和第二导体，其中第一导体和第二导体彼此电连接。 第二梳齿电极包括在不操作期间不面向第二导体而是面对第一电极齿的第一导体的多个第二电极齿。 第二电极齿在摆动运动方向上比第一导体长。

公开(公告)号：US20110221455A1

公开(公告)日：2011-09-15

申请号：US13119695

申请日：2009-08-03

Applicant: Ando Feyh

Inventor： Ando Feyh

IPC: G01R27/26 ,  H05K3/36

CPC classification number: B81B7/007 ,  B81B2201/033 ,  B81B2207/095 ,  B81C2203/0118 ,  B81C2203/036 ,  Y10T29/49126

Abstract: A method for producing a micromechanical component, includes providing a first substrate, developing a micropattern on the first substrate, the micropattern having a movable functional element, providing a second substrate, and developing an electrode in the second substrate for the capacitive recording of a deflection of the functional element. The method further includes connecting the first and the second substrate, a closed cavity being formed which encloses the functional element, and the electrode bordering on the cavity in an area of the functional element.

Abstract translation: 一种制造微机械部件的方法，包括提供第一基板，在所述第一基板上显影微图案，所述微图案具有可移动的功能元件，提供第二基板，以及在所述第二基板中显影用于电容记录偏转的电极 的功能元素。 该方法还包括连接第一和第二基板，形成封闭的功能元件的封闭空腔以及与功能元件的区域中的空腔接壤的电极。

公开(公告)号：US07982361B2

公开(公告)日：2011-07-19

申请号：US12295027

申请日：2007-03-30

Applicant: Takanori Maeda ,  Hirokazu Takahashi ,  Masahiro Ishimori

Inventor： Takanori Maeda ,  Hirokazu Takahashi ,  Masahiro Ishimori

IPC: H02N1/00

CPC classification number: H02N1/008 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/11 ,  B81B2203/051 ,  B82Y10/00 ,  G11B9/1454

Abstract: An actuator comprises a connection section having one end rotatably connected to a connection point (C1) of a fixed section and the other end rotatably connected to a connection point (C2) of a moving section, a connection section having one end rotatably connected to a connection point (C3) of the fixed section and the other end rotatably connected to a connection point (C4) of the moving sections a comb-teeth electrode having the root section connected to a comb-teeth base point (B1) and the fore-end section extending along the turning path, and a comb-teeth electrode having the root section connected to the fixed section and the other section extending along the curve of the comb-teeth electrode and opposed to the comb-teeth electrode with a predetermined gap.

Abstract translation: 致动器包括连接部分，其一端可旋转地连接到固定部分的连接点（C1），另一端可旋转地连接到移动部分的连接点（C2），连接部分的一端可旋转地连接到 所述固定部分的连接点（C3）和另一端可旋转地连接到所述移动部分的连接点（C4），所述梳齿电极具有连接到梳齿基点（B1）的根部部分， 所述梳齿电极具有连接到所述固定部分的所述根部部分，而所述另一部分沿着所述梳齿电极的曲线延伸并且与所述梳齿电极以预定间隙相对。

公开(公告)号：US07959843B2

公开(公告)日：2011-06-14

申请号：US12486749

申请日：2009-06-18

Applicant: Yoshitaka Zaitsu ,  Chienliu Chang ,  Masao Majima ,  Hironobu Maeda

Inventor： Yoshitaka Zaitsu ,  Chienliu Chang ,  Masao Majima ,  Hironobu Maeda

IPC: B29C59/02

CPC classification number: B81C1/00634 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/019 ,  G02B26/0833 ,  Y10T29/49833 ,  Y10T29/49861 ,  Y10T29/49908

Abstract: In a method of fabricating a structure by plastically deforming a processing portion provided at a movable segment, a restraint segment configured to restrain movement of the movable segment is provided before an external force is applied to the processing portion. After processing of the processing portion is completed, the restraint segment is removed.

Abstract translation: 在通过使设置在可移动部分处的处理部分发生塑性变形来制造结构的方法中，在对加工部分施加外力之前，设置限制可动部分的移动的约束部分。 在处理部分的处理完成之后，约束段被去除。

公开(公告)号：US07880951B2

公开(公告)日：2011-02-01

申请号：US12059859

申请日：2008-03-31

Applicant: Osamu Tsuboi ,  Norinao Kouma ,  Hiromitsu Soneda ,  Hisao Okuda ,  Yoshihiro Mizuno ,  Tsuyoshi Matsumoto

Inventor： Osamu Tsuboi ,  Norinao Kouma ,  Hiromitsu Soneda ,  Hisao Okuda ,  Yoshihiro Mizuno ,  Tsuyoshi Matsumoto

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  B81B3/0086 ,  B81B2201/033 ,  B81B2201/047

Abstract: A micro oscillating device includes a frame, an oscillating part including a first drive electrode for application of a reference electric potential, and a connecting part for connecting the frame and the oscillating part to each other, where the connecting part defines an axis of an oscillating motion of the oscillating part. A second drive electrode is fixed to the frame to cooperate with the first drive electrode for generation of a driving force for the oscillating movement. The first drive electrode includes a first end extension and a second end extension separated from each other and extending in a direction crossing the axis. The second drive electrode is within a separation distance between the first and the second end extensions.

Abstract translation: 微振荡装置包括框架，包括用于施加参考电位的第一驱动电极的振荡部分和用于将框架和振荡部分彼此连接的连接部分，其中连接部分限定摆动轴线 摆动部分的运动。 第二驱动电极固定到框架以与第一驱动电极协作以产生用于振荡运动的驱动力。 第一驱动电极包括彼此分离并沿与轴线交叉的方向延伸的第一端部延伸部和第二端部延伸部。 第二驱动电极在第一和第二端部延伸部之间的间隔距离内。

公开(公告)号：US20100296151A1

公开(公告)日：2010-11-25

申请号：US12669333

申请日：2008-07-10

Applicant: Ulrich Hofmann ,  Hans-Joachim Quenzer ,  Marten Oldsen

Inventor： Ulrich Hofmann ,  Hans-Joachim Quenzer ,  Marten Oldsen

IPC: G02B26/08 ,  B23P11/00

CPC classification number: G02B26/0841 ,  B81B3/0054 ,  B81B2201/033 ,  B81B2201/042 ,  G02B26/105

Abstract: The invention relates to a microsystem having at least one micromirror (1) and at least one micromirror actuator (2) for pivoting the at least one micromirror (1) about at least one axis from a relaxed resting position, comprising a frame chip and a transparent cover (3) disposed on the frame chip, wherein the frame chip has a chip frame (10), on which the at least one micromirror (1) is articulated in an elastically pivoting manner, wherein the at least one micromirror (1) is further disposed within the chip frame (10) and in a cavity (11) that is formed between the transparent cover (3) and a carrier layer. To this end, the at least one micromirror (1) is articulated on a frame (14) pivotally about the at least one axis, the frame (14) in turn being pivotally articulated on the chip frame (10), wherein the frame (14) is permanently pivoted out of a chip plane defined by the carrier layer such that the micromirror (1) in the resting position thereof is tilted about a non-pivoting angle relative to the chip plane. The invention further relates to a method for the production of such a microsystem.

Abstract translation: 本发明涉及一种具有至少一个微反射镜（1）和至少一个微反射镜致动器（2）的微系统，用于将至少一个微反射镜（1）从松弛的静止位置绕至少一个轴线枢转，包括框架芯片和 透明盖（3），其中所述框架芯片具有芯片框架（10），所述至少一个微镜（1）以弹性枢转的方式铰接在所述芯片框架（10）上，其中所述至少一个微镜（1） 进一步设置在所述芯片框架（10）内并且形成在所述透明盖（3）和载体层之间的空腔（11）中。 为此，所述至少一个微镜（1）铰接在围绕所述至少一个轴线枢转的框架（14）上，所述框架（14）依次被枢转地铰接在所述芯片框架（10）上，其中所述框架 14）从由载体层限定的切屑平面永久地枢转，使得其静止位置中的微镜（1）相对于切屑平面倾斜不转动的角度。 本发明还涉及一种用于生产这种微系统的方法。

公开(公告)号：US20100194235A1

公开(公告)日：2010-08-05

申请号：US12761123

申请日：2010-04-15

Applicant: Osamu TSUBOI ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto

Inventor： Osamu TSUBOI ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto

IPC: H02N11/00

CPC classification number: B81B3/0086 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/058 ,  G02B26/0841

Abstract: A micro movable device suitable for suppressing deterioration of driving characteristics, and a micro movable device array including such a micro movable device are provided. The micro movable device (X1) of the present invention includes a movable portion including a first driving electrode, a second driving electrode for generating electrostatic attraction between the first driving electrode and the second driving electrode, a first conductor portion (22c) electrically connected to the first driving electrode, a second conductor portion (22b) electrically connected to the second driving electrode, and a third conductor portion (21a) which is not electrically connected to the first and the second driving electrodes and which is bonded to the first conductor portion (22c) via an insulating film (23) and bonded to the second conductor portion (22b) via the insulating film (23).

Abstract translation: 提供一种适用于抑制驱动特性的劣化的微型可移动装置，以及包括这种微型可移动装置的微型可移动装置阵列。 本发明的微型可移动装置（X1）包括可动部，包括第一驱动电极，用于在第一驱动电极和第二驱动电极之间产生静电吸引力的第二驱动电极，第一导体部分（22c），电连接到 第一驱动电极，与第二驱动电极电连接的第二导体部分（22b）和不与第一和第二驱动电极电连接并且连接到第一导体部分的第三导体部分（21a） （22c）经由绝缘膜（23）经由绝缘膜（23）与第二导体部（22b）接合。