Method and Apparatus for Producing and Measuring Dynamically Focused, Steered, and Shaped Oblique Laser Illumination for Spinning Wafer Inspection System
    181.
    发明申请
    Method and Apparatus for Producing and Measuring Dynamically Focused, Steered, and Shaped Oblique Laser Illumination for Spinning Wafer Inspection System 审中-公开
    用于旋转晶圆检测系统的动态聚焦,转向和形状倾斜激光照明的生产和测量方法和设备

    公开(公告)号:US20150330907A1

    公开(公告)日:2015-11-19

    申请号:US14556231

    申请日:2014-11-30

    Abstract: A method and apparatus for producing high frequency dynamically focused oblique laser illumination for a spinning wafer inspection system. The focus is changed by changing the beam direction incidence angle so as to bring focal spot onto the wafer surface.Disclosed herein is a system and method for automatic beam shaping (i.e., spot size) and steering (i.e., position) for a spinning wafer inspection system, combined into a single module. Also disclosed is a method and system for measuring the beam position/size/shape and angle with sufficient resolution to make corrections using feedback from the monitor.

    Abstract translation: 一种用于生产用于旋转晶片检测系统的高频动态聚焦倾斜激光照明的方法和装置。 通过改变光束方向入射角来改变焦点,以便将焦斑引入晶片表面。 本文公开了一种用于旋转晶片检查系统的自动光束成形(即光点尺寸)和转向(即,位置)的系统和方法,其组合成单个模块。 还公开了一种用于以足够的分辨率测量光束位置/尺寸/形状和角度以使用来自监视器的反馈进行校正的方法和系统。

    SYSTEM AND METHOD FOR HAZE MEASUREMENT
    182.
    发明申请
    SYSTEM AND METHOD FOR HAZE MEASUREMENT 有权
    用于雾度测量的系统和方法

    公开(公告)号:US20150260648A1

    公开(公告)日:2015-09-17

    申请号:US14213064

    申请日:2014-03-14

    Inventor: Zhiling Xu

    Abstract: The present invention is directed to an apparatus and method for measuring the haze value of transmissive samples. The apparatus comprises a first light source selectively configurable to emit a first light beam, a second light source selectively configurable to emit a second light beam, an integrating sphere having an outer surface and an inner surface, the inner surface configured to reflect light incident upon the inner surface, the inner surface further enclosing an interior volume. The integrating sphere is further equipped with an exit port configured to emit light from the interior volume of the integrating sphere. The exit port is positioned such that light from the first light source exits the integrating sphere without obstruction, and light from the second light source is diffused on the interior surface of the integrating sphere prior to exiting the exit port. A light detector is also included and is configured to generate a light-intensity signal when light exiting the integrating sphere has passed through a sample and is incident on the light detector. The apparatus further includes a processor configured to receive the light-intensity signal and generate an output signal to a user indicating the haze value. The present invention is also directed to a method of calculating the haze value of a sample using a stored calibration value, a diffuse transmission value (sample-absent diffuse light-intensity value), a direct transmission value (sample-absent direct light-intensity value), a measured diffuse transmission value (sample-present diffuse light-intensity value) and a measured direct transmission value (sample-present direct light-intensity value).

    Abstract translation: 本发明涉及一种用于测量透射样品的雾度值的装置和方法。 该装置包括可选择性地配置为发射第一光束的第一光源,可选择地配置为发射第二光束的第二光源,具有外表面和内表面的积分球,所述内表面被配置为反射入射到其上的光 内表面,内表面还包围内部体积。 积分球还配备有出口端口,其被配置为从积分球的内部空间发射光。 出口端口被定位成使得来自第一光源的光不会阻塞地离开积分球,并且来自第二光源的光在离开出口之前扩散到积分球的内表面上。 还包括光检测器,并且被配置为当离开积分球的光已经通过样品并入射到光检测器上时产生光强度信号。 该装置还包括处理器,其被配置为接收光强度信号并且向用户生成指示雾度值的输出信号。 本发明还涉及一种使用存储的校准值,漫射透射值(无采样扩散光强度值),直接透射值(无采样直接光强度)的样品的雾度值来计算雾度值的方法 值),测量的漫射透射值(样品存在的漫射光强度值)和测量的直接透射值(样品存在的直接光强度值)。

    REFLECTANCE SPECTROSCOPY MEASURING AND SAMPLING SYSTEM AND METHOD FOR GEMSTONE TESTING
    183.
    发明申请
    REFLECTANCE SPECTROSCOPY MEASURING AND SAMPLING SYSTEM AND METHOD FOR GEMSTONE TESTING 有权
    反射光谱测量和采样系统及其测试方法

    公开(公告)号:US20150233839A1

    公开(公告)日:2015-08-20

    申请号:US14413268

    申请日:2013-01-16

    Abstract: A reflectance spectroscopy measuring and sampling system for gemstone testing is disclosed. The system includes a first light source (1), a second light source (2), a light filtering element, an integrating sphere (S), an optical fiber (9), a spectroscopic detection module (10), an analog-digital conversion module (11) and a data processing terminal (12), wherein the integrating sphere (S) is provided with an entrance port, a sampling opening (6) and a reflected light exit port (7). A reflectance spectroscopy measuring and sampling method for gemstone testing is also disclosed. The system and the method have an excellent performance and can be widely used in the gemstone identification.

    Abstract translation: 公开了一种用于宝石测试的反射光谱测量和采样系统。 该系统包括第一光源(1),第二光源(2),滤光元件,积分球(S),光纤(9),光谱检测模块(10),模拟数字 转换模块(11)和数据处理终端(12),其中积分球(S)设置有入口,采样口(6)和反射光出口(7)。 还公开了用于宝石测试的反射光谱测量和采样方法。 该系统和方法具有优异的性能,可广泛应用于宝石鉴定。

    OPTICAL ANALYSIS OF EMISSIONS FROM STIMULATED LIQUIDS
    184.
    发明申请
    OPTICAL ANALYSIS OF EMISSIONS FROM STIMULATED LIQUIDS 有权
    刺激性液体排放的光学分析

    公开(公告)号:US20150000384A1

    公开(公告)日:2015-01-01

    申请号:US14376297

    申请日:2013-02-01

    Abstract: Modular systems can be used for optical analysis, including in-situ analysis, of stimulated liquids. An excitation module can include a radiation sources, e.g., a laser, LED, lamp, etc. A detection module can include one or more detectors configured to receive spectral and/or temporal information from a stimulated liquid. Such systems can be used to identify or measure optical emissions including fluorescence or scattering. The efficient excitation of liquid samples and collection of emissions from the samples provides substantial, up to four-fold increase in the emission signal over prior systems. In an example, emission measurements can be conducted in an isolated sample compartment, such as using interchangeable modules for discrete sampling, flow-through sampling, or sampling via fiber probe. The systems and methods described herein can be used to characterize natural aquatic environments, including assessments of phytoplankton pigments, biomass, structure, physiology, organic matter, and oil pollution.

    Abstract translation: 模块化系统可用于光学分析,包括有源液体的原位分析。 激发模块可以包括辐射源,例如激光,LED,灯等。检测模块可以包括被配置为从受刺激的液体接收光谱和/或时间信息的一个或多个检测器。 这样的系统可用于识别或测量包括荧光或散射在内的光学发射。 液体样品的有效激发和来自样品的排放物的收集提供了相当于现有系统的排放信号的四倍增加。 在一个示例中,发射测量可以在隔离的样品室中进行,例如使用可互换模块进行离散采样,流通采样或通过光纤探头进行采样。 本文所述的系统和方法可用于表征天然水生环境,包括浮游植物色素的评估,生物量,结构,生理,有机物质和油污染。

    Method and system for irradiating and inspecting liquid-carrying containers
    185.
    发明授权
    Method and system for irradiating and inspecting liquid-carrying containers 有权
    用于照射和检查载液容器的方法和系统

    公开(公告)号:US08036444B2

    公开(公告)日:2011-10-11

    申请号:US12090333

    申请日:2005-10-15

    Applicant: Gert Nielsen

    Inventor: Gert Nielsen

    CPC classification number: G01N21/9027 G01N21/9036 G01N2201/0633

    Abstract: A method and system of irradiating a liquid-carrying container for inspection, including rotating the container, its contents or both around a rotation axis and irradiating the container with an electromagnetic radiation beam, wherein the irradiated cross-section of the container, irradiated by the electromagnetic radiation beam, is less than the cross-section of the container; and, a method and system for inspecting a liquid-carrying container for one or more test parameters of the container, the contents of the container, or both, including rotating the container, the contents or both around a rotation axis, irradiating the container with an electromagnetic radiation beam from a first direction along an irradiation center plane substantially parallel to the rotation axis, capturing a representation of a section of the container from a second direction along a detection center plane substantially parallel to the rotation axis, and processing the representation, wherein the irradiated cross-section of the container, irradiated by the electromagnetic radiation beam, is less than the cross-section of the container.

    Abstract translation: 一种照射载液容器进行检查的方法和系统,包括使旋转轴线旋转容器,其内容物或两者,并用电磁辐射束照射容器,其中容器照射的横截面由 电磁辐射束,小于容器的横截面; 以及用于检查液体携带容器的方法和系统,用于对容器的一个或多个测试参数,容器的内容物或两者进行检查,包括围绕旋转轴旋转容器,内容物或两者,照射容器 沿着基本上平行于旋转轴的照射中心平面的第一方向的电磁辐射束,沿着基本上平行于旋转轴的检测中心平面的第二方向捕获容器的一部分的表示,并且处理该表示, 其中由电磁辐射束照射的容器的照射横截面小于容器的横截面。

    COMBINATION READER
    186.
    发明申请
    COMBINATION READER 审中-公开
    组合阅读器

    公开(公告)号:US20100163710A1

    公开(公告)日:2010-07-01

    申请号:US12573023

    申请日:2009-10-02

    Abstract: An imaging system for collecting images of signals associated with a sample tile comprising a stage supporting the sample tile, a ring illuminator system emitting a uniform excitation energy upon an entirety of the sample tile causing at least a first signal to be generated from the sample tile, and an image collecting device collecting a first image of the first signal. The image collecting device further collecting a second image of a second signal emitted from the sample tile, wherein the second signal being different than the first signal.

    Abstract translation: 一种用于收集与样品瓦片相关联的信号的图像的成像系统,包括支撑样品瓦片的台架,环形照明器系统,其在整个样品瓦片上发射均匀的激发能量,从而从样品瓦片产生至少一个第一信号 以及收集第一信号的第一图像的图像采集装置。 所述图像采集装置进一步收集从样本瓦片发射的第二信号的第二图像,其中所述第二信号不同于所述第一信号。

    Measuring device
    187.
    发明授权
    Measuring device 有权
    测量工具

    公开(公告)号:US07477395B2

    公开(公告)日:2009-01-13

    申请号:US11764430

    申请日:2007-06-18

    Abstract: A measuring device for determining the concentrations of gases by radiation absorption. The device includes at least one radiation source for generating radiation, a measuring cell, which is arranged downstream of the radiation source and in which the medium to be measured is located and at least one radiation detector, which is reached by the radiation after it has been sent through the measuring cell. A radiation guide device is provided by which the radiation is guided to the radiation detector. The radiation guide device includes a main optical unit, which has, on the one hand, an optical element (4), so that the punctiform radiation source is imaged in a bar-shaped radiation spot (5) extending along a preferred direction (1), and which has, on the other hand, parallel reflection surfaces (7, 7′), which extend at right angles to the preferred direction and at the inner surfaces of which the radiation is totally reflected between the optical element (4) and the radiation detector (3, 3′).

    Abstract translation: 用于通过辐射吸收确定气体浓度的测量装置。 该装置包括用于产生辐射的至少一个辐射源,测量单元,其布置在辐射源的下游,并且待测量的介质位于其中,并且至少一个辐射检测器在辐射源具有 通过测量池发送。 提供辐射导向装置,通过该辐射导向装置将辐射引导到辐射检测器。 辐射引导装置包括主光学单元,其一方面具有光学元件(4),使得点状辐射源成像在沿优选方向(1)延伸的棒状辐射光点(5)中 ),并且另一方面具有与优选方向成直角延伸的平行反射面(7,7'),并且在其内表面处,辐射在光学元件(4)和 辐射检测器(3,3')。

    Method and System For Irradiating and Inspecting Liquid-Carrying Containers
    188.
    发明申请
    Method and System For Irradiating and Inspecting Liquid-Carrying Containers 有权
    用于照射和检查液体携带容器的方法和系统

    公开(公告)号:US20080230720A1

    公开(公告)日:2008-09-25

    申请号:US12090333

    申请日:2005-10-15

    Applicant: Gert Nielsen

    Inventor: Gert Nielsen

    CPC classification number: G01N21/9027 G01N21/9036 G01N2201/0633

    Abstract: A method and system of irradiating a liquid-carrying container for inspection, including rotating the container, its contents or both around a rotation axis and irradiating the container with an electromagnetic radiation beam, wherein the irradiated cross-section of the container, irradiated by the electromagnetic radiation beam, is less than the cross-section of the container; and, a method and system for inspecting a liquid-carrying container for one or more test parameters of the container, the contents of the container, or both, including rotating the container, the contents or both around a rotation axis, irradiating the container with an electromagnetic radiation beam from a first direction along an irradiation center plane substantially parallel to the rotation axis, capturing a representation of a section of the container from a second direction along a detection center plane substantially parallel to the rotation axis, and processing the representation, wherein the irradiated cross-section of the container, irradiated by the electromagnetic radiation beam, is less than the cross-section of the container.

    Abstract translation: 一种照射载液容器进行检查的方法和系统,包括使旋转轴线旋转容器,其内容物或两者,并用电磁辐射束照射容器,其中容器照射的横截面由 电磁辐射束,小于容器的横截面; 以及用于检查液体携带容器的方法和系统,用于对容器的一个或多个测试参数,容器的内容物或两者进行检查,包括围绕旋转轴旋转容器,内容物或两者,照射容器 沿着基本上平行于旋转轴的照射中心平面的第一方向的电磁辐射束,沿着基本上平行于旋转轴的检测中心平面的第二方向捕获容器的一部分的表示,并且处理该表示, 其中由电磁辐射束照射的容器的照射横截面小于容器的横截面。

    MEASURING DEVICE
    189.
    发明申请
    MEASURING DEVICE 有权
    测量工具

    公开(公告)号:US20080106741A1

    公开(公告)日:2008-05-08

    申请号:US11764430

    申请日:2007-06-18

    Abstract: A measuring device for determining the concentrations of gases by radiation absorption. The device includes at least one radiation source for generating radiation, a measuring cell, which is arranged downstream of the radiation source and in which the medium to be measured is located and at least one radiation detector, which is reached by the radiation after it has been sent through the measuring cell. A radiation guide device is provided by which the radiation is guided to the radiation detector. The radiation guide device includes a main optical unit, which has, on the one hand, an optical element (4), so that the punctiform radiation source is imaged in a bar-shaped radiation spot (5) extending along a preferred direction (1), and which has, on the other hand, parallel reflection surfaces (7, 7′), which extend at right angles to the preferred direction and at the inner surfaces of which the radiation is totally reflected between the optical element (4) and the radiation detector (3, 3′).

    Abstract translation: 用于通过辐射吸收确定气体浓度的测量装置。 该装置包括用于产生辐射的至少一个辐射源,测量单元,其布置在辐射源的下游,并且待测量的介质位于其中,并且至少一个辐射检测器在辐射源具有 通过测量池发送。 提供辐射导向装置,通过该辐射导向装置将辐射引导到辐射检测器。 辐射引导装置包括主光学单元,其一方面具有光学元件(4),使得点状辐射源成像在沿优选方向(1)延伸的棒状辐射光点(5)中 ),并且另一方面具有与优选方向成直角延伸的平行反射面(7,7'),并且在其内表面处,辐射在光学元件(4)和 辐射检测器(3,3')。

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