Abstract:
A system for measuring a sample comprising: an integrating sphere light collector (12) for collecting light and containing the sample; a light source (24) for introducing light in the integrating sphere light collector (12), wherein the light source (24) is operable to output light with a known modulation, preferably by using a signal generator (26); a detector (22) for detecting scattered light in the integrating sphere light collector (12) and generating a signal indicative of the scattered light, and a lock-in amplifier (28) operable use the known light modulation and the signal generated by the detector (22) to provide an output for analysis.
Abstract:
A system and method of non-contact measurement of the dopant content of semiconductor material by reflecting infrared (IR) radiation off of the material into an integrating sphere to scatter the received radiation and passing portions of the radiation through band pass filters of differing wavelength ranges, comparing the level of energy passed through each filter and calculating the dopant content by referencing a correlation curve made up of known wafer dopant content for that system.
Abstract:
A gonio-spectroradiometer and a measuring method thereof. The gonio-spectroradiometer includes a light source rotating on a light source axis, a first integrating sphere revolving around the light source with respect to a revolving axis perpendicular to the light source axis with a fixed radius and including an entrance formed in a direction to see the light source, a light intensity modulator adapted to modulate light intensity of light received through the first integrating sphere according to the rotation amount of the revolving axis, and a detector adapted to measure output light of the light intensity modulator at each wavelength.
Abstract:
There is provided an optical characteristic measurement system that can be set up in a relatively short time and can increase a detection sensitivity. The optical characteristic measurement system includes a first measurement apparatus. The first measurement apparatus includes: a first detection element arranged in a housing; a first cooling unit at least partially joined to the first detection element that cools the detection element; and a suppression mechanism that suppresses temperature variations occurring around the detection element in the housing.
Abstract:
The light measurement apparatus according to the present invention includes: an integrating sphere; a reference calibration light source body holding unit that is arranged on the integrating sphere and to which a reference calibration light source body is attached; a test light source body holding unit that is arranged on the integrating sphere and to which a test light source body to be measured is attached; a light detection unit that is arranged on the integrating sphere and detects light from the reference calibration light source body and the test light source body; and a control unit that controls lighting of the reference calibration light source body and the test light source body, the light measurement apparatus being configured so that only either one of the reference calibration light source body and the test light source body is able to selectively emit light in the integrating sphere.
Abstract:
A light measuring system including an integrating sphere having an aperture configured by opposing reflectors selectively aligned with complementary reflectors of at least one light source mounting block having a light source mounting region for mounting a light source thereon.
Abstract:
The present invention discloses a method for measuring absolute value of non-linear error and an apparatus thereof. The method comprises: placing N reflecting plates jointed together at the sample port of the optical measuring instrument at the same time, wherein each of reflecting plate has a same covering area at the sample port; placing an aperture along light paths of the optical measuring instrument; adjusting the number of reflecting plates as used according to a position in the measuring range of the optical measuring instrument where the non-linear error is required to be measured; following every adjustment, acquiring the output results when the adjusted reflecting plates are placed at the sample port; performing a computation processing for non-linear error to the output results; and acquiring the non-linear error of the output results of the optical measuring instrument.
Abstract:
The present invention discloses a method for measuring absolute value of non-linear error and an apparatus thereof. The method comprises: placing N reflecting plates jointed together at the sample port of the optical measuring instrument at the same time, wherein each of reflecting plate has a same covering area at the sample port; placing an aperture along light paths of the optical measuring instrument; adjusting the number of reflecting plates as used according to a position in the measuring range of the optical measuring instrument where the non-linear error is required to be measured; following every adjustment, acquiring the output results when the adjusted reflecting plates are placed at the sample port; performing a computation processing for non-linear error to the output results; and acquiring the non-linear error of the output results of the optical measuring instrument.
Abstract:
The invention features devices and methods for collecting and measuring light from external light sources. In general, the devices of the invention feature a light diffusing element, e.g., as a component of a light collector, connected by a light conducting conduit, e.g., a fiber optic cable, to a light measuring device, e.g., a spectrometer. This light diffusing element allows, e.g., for substantially uniform light diffusion across its surface and thus accurate measurements, while permitting the total footprint of the device to remain relatively small and portable. This light diffusing element also allows flexibility in scaling of the device to permit use in a wide range of applications.
Abstract:
An optical measurement apparatus includes a hemispherical portion having a diffuse reflection layer on an inner wall, and a plane portion disposed to involve a substantial center of curvature of the hemispherical portion and close an opening of the hemispherical portion, and having a reflection layer on an inner surface side of the hemispherical portion. The plane portion includes: at least one of a window for introducing light to be homogenized in an integrating space formed between the hemispherical portion and the plane portion, and a window for extracting light homogenized in the integrating space; an outer portion formed of a first material chiefly causing specular reflection, and occupying at least a region of a predetermined width from an outermost circumference; and an inner portion formed of a second material chiefly causing diffuse reflection and having a higher reflectance for at least an ultraviolet region than the first material.