公开(公告)号：US10796922B2

公开(公告)日：2020-10-06

申请号：US16665834

申请日：2019-10-28

Applicant: Applied Materials, Inc.

Inventor： Soonam Park ,  Yufei Zhu ,  Edwin C. Suarez ,  Nitin K. Ingle ,  Dmitry Lubomirsky ,  Jiayin Huang

IPC: H01J37/32 ,  H01L21/3213 ,  G01J3/02 ,  C23C16/50 ,  H01L21/311 ,  H01L21/3065 ,  H01L21/67 ,  H01L21/66 ,  C23C16/44 ,  C23C16/452 ,  C23C16/455 ,  C23C16/52 ,  G01J3/443

Abstract: In an embodiment, a plasma source includes a first electrode, configured for transfer of one or more plasma source gases through first perforations therein; an insulator, disposed in contact with the first electrode about a periphery of the first electrode; and a second electrode, disposed with a periphery of the second electrode against the insulator such that the first and second electrodes and the insulator define a plasma generation cavity. The second electrode is configured for movement of plasma products from the plasma generation cavity therethrough toward a process chamber. A power supply provides electrical power across the first and second electrodes to ignite a plasma with the one or more plasma source gases in the plasma generation cavity to produce the plasma products. One of the first electrode, the second electrode and the insulator includes a port that provides an optical signal from the plasma.

公开(公告)号：US20200300702A1

公开(公告)日：2020-09-24

申请号：US16863140

申请日：2020-04-30

Applicant: SPECLIPSE, Inc.

Inventor： Sung Hyun PYUN ,  Wan Ki MIN

IPC: G01J3/443

Abstract: Disclosed herein are a diagnostic method using laser induced breakdown spectrum analysis and a diagnostic device for performing the same. The diagnostic method may include projecting a pulsed laser to a suspicious specimen, obtaining first spectrum data on the light collected from the suspicious specimen, projecting the pulsed laser to a non-diseased specimen, obtaining second spectrum data on the light collected from the non-diseased specimen, and determining whether a disease is present in the suspicious specimen from a comparison value of the first spectrum data and the second spectrum data using an artificial neural network.

公开(公告)号：US10753800B2

公开(公告)日：2020-08-25

申请号：US16238644

申请日：2019-01-03

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jeong-Il Mun ,  Hyung-Joo Lee ,  Jong-Woo Sun ,  Ja-Myung Gu ,  Jae-Woong Hwang ,  Jong-Hwan An

IPC: G01J3/30 ,  G01J3/443 ,  G01N21/73 ,  G01J3/02

Abstract: A calibrator of an OES may include a cover, a reference light source and a controller. The cover may be detachably combined with a ceiling of a plasma chamber of a plasma processing apparatus. The reference light source may be installed at the cover to irradiate a reference light to the OES through an inner space of the plasma chamber. The controller may compare a spectrum of the reference light inputted into the OES with a spectrum of an actual light inputted into the OES during a plasma process in the plasma chamber to calibrate the OES. Thus, the OES may be calibrated without disassembling of the OES from the plasma chamber to decrease a time for calibrating the OES.

公开(公告)号：US10705023B2

公开(公告)日：2020-07-07

申请号：US16065669

申请日：2016-12-30

Applicant: SHANGHAI INSTITUTE OF CERAMICS, CHINESE ACADEMY OF SCIENCES

Inventor： Zheng Wang ,  Chuchu Huang ,  Qing Li ,  Jiamei Mo

IPC: G01N21/67 ,  H05H1/48 ,  G01J3/10 ,  G01J3/443 ,  H05H1/46

Abstract: A solution cathode glow discharge plasma-atomic emission spectrum apparatus and method capable of performing direct gas sample introduction and used for detecting a heavy metal element. The solution cathode glow discharge plasma-atomic emission spectrum apparatus comprises a high-voltage power source, a ballast resistor, a hollow metal anode and a solution cathode. The hollow metal anode is connected to a positive electrode of the high-voltage power source by means of the ballast resistor, and the solution cathode is connected to a negative electrode of the high-voltage power source by means of a graphite electrode. The plasma apparatus is further configured in such a manner that a discharge region is formed between the hollow metal anode (10) and the solution cathode, and the hollow metal anode further serves as a sample introduction pipeline, so that gas to be detected enters the discharge region and is excited.

公开(公告)号：US20200209063A1

公开(公告)日：2020-07-02

申请号：US16536944

申请日：2019-08-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kyeonghun KIM ,  Jeongil MUN ,  Hyung Joo LEE ,  Jongwoo SUN

IPC: G01J3/443 ,  H01J37/32

Abstract: A substrate processing module includes a process chamber configured to perform a treatment process on a substrate; a transfer chamber provided on a first side of the process chamber, the substrate being transferred between the process chamber and the transfer chamber; an optical emission spectroscopy (OES) system provided on a second side of the process chamber and configured to monitor the process chamber; and a reference light source disposed in the transfer chamber and configured to emit a reference light to calibrate the OES system.

公开(公告)号：US10690546B2

公开(公告)日：2020-06-23

申请号：US16284292

申请日：2019-02-25

Applicant: TDW Delaware, Inc.

Inventor： Kenneth James Greene ,  Chris Caraway ,  Gregory Donikowski ,  Joel Troyer

IPC: G01J3/443 ,  G01N3/42 ,  G01N33/20 ,  G01M3/02 ,  G01M3/04 ,  G01M3/38 ,  G01J3/02

Abstract: A system and method for non-destructive, in situ, positive material identification of a pipe selects a plurality of test areas that are separated axially and circumferentially from one another and then polishes a portion of each test area. Within each polished area, a non-destructive test device is used to collect mechanical property data and another non-destructive test device is used to collect chemical property data. An overall mean for the mechanical property data, and for the chemical property data, is calculated using at least two data collection runs. The means are compared to a known material standard to determine, at a high level of confidence, ultimate yield strength and ultimate tensile strength within +/−10%, a carbon percentage within +/−25%, and a manganese percentage within +/−20% of a known material standard.

公开(公告)号：US10684169B2

公开(公告)日：2020-06-16

申请号：US16348728

申请日：2017-09-08

Applicant: Korea Institute of Ocean Science & Technology

Inventor： Sang Woo Oh ,  Moon Jin Lee

IPC: G01J3/10 ,  G01J3/02 ,  G01J3/443

Abstract: The present invention relates to an optical analysis device using a multi-light source structure, which allows acquisition of an optimized measurement result by adjusting the number of light sources depending on a concentration of an object to be measured, such as ocean spilled oil, etc., and a method therefor. The optical analysis device using a multi-light source structure may comprise: a multi-light source unit including multiple light source units each having a light source which is selectively illuminated, in order to adjust an amount of light depending on a concentration of an object to be measured; a cuvette unit including a cuvette in which an object to be measured is disposed, wherein the cuvette has a prism shape and has as many faces as the number of the light source units plus one, the light source units faces the faces, respectively, and reactive light generated from the object to be measured is emitted through the remaining one face; a light sensor unit for detecting the reactive light emitted through the cuvette; and a control unit for controlling illumination of the light source units configuring the multi-light source unit.

公开(公告)号：US10520372B2

公开(公告)日：2019-12-31

申请号：US16434577

申请日：2019-06-07

Applicant: SIGMA LABS, INC.

Inventor： Vivek R. Dave ,  Mark J. Cola ,  R. Bruce Madigan ,  Martin S. Piltch ,  Alberto Castro

IPC: G01J3/30 ,  G01K13/00 ,  G01N21/71 ,  G01J3/28 ,  G01J3/443 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/00 ,  B23K26/342 ,  B23K26/70 ,  B22F3/105 ,  B23K9/04 ,  B23K9/095 ,  B23K10/02 ,  B23K15/00

Abstract: An optical manufacturing process sensing and status indication system is taught that is able to utilize optical emissions from a manufacturing process to infer the state of the process. In one case, it is able to use these optical emissions to distinguish thermal phenomena on two timescales and to perform feature extraction and classification so that nominal process conditions may be uniquely distinguished from off-nominal process conditions at a given instant in time or over a sequential series of instants in time occurring over the duration of the manufacturing process. In other case, it is able to utilize these optical emissions to derive corresponding spectra and identify features within those spectra so that nominal process conditions may be uniquely distinguished from off-nominal process conditions at a given instant in time or over a sequential series of instants in time occurring over the duration of the manufacturing process.

公开(公告)号：US10481052B2

公开(公告)日：2019-11-19

申请号：US15937917

申请日：2018-03-28

Applicant: Ford Global Technologies, LLC

Inventor： Constantin Chiriac ,  Raj Sohmshetty ,  Elizabeth Bullard ,  James Engle

IPC: G01N21/00 ,  G01N1/28 ,  B21D22/02 ,  B21D22/20 ,  G01N1/36 ,  G01N3/40 ,  G01N3/28 ,  G01J3/443 ,  G01N13/00

Abstract: A method of inspecting and determining characteristics of an aluminized coating of a hot stamped part is provided. The method includes removing a sample from the hot stamped part for Glow Discharge Optical Emission Spectrometry (GDOES), analyzing the sample using GDOES, and plotting constituent element weight percentages versus depth on a graph. The method further includes determining points on the graph where constituent elements intersect and where the points of intersection indicate the characteristics of the aluminized coating. The characteristics of the method include, by way of example, a total thickness of the aluminized coating, a thickness of an inter-diffusion layer (IDL), constituents of the aluminized coating, constituents of the hot stamped part, phase composition of the aluminized coating, surface oxidation, and weldability.

公开(公告)号：US20190301983A1

公开(公告)日：2019-10-03

申请号：US15937917

申请日：2018-03-28

Applicant: Ford Global Technologies, LLC

Inventor： Constantin Chiriac ,  Raj Sohmshetty ,  Elizabeth Bullard ,  James Engle

IPC: G01N1/28 ,  B21D22/02 ,  B21D22/20 ,  G01N1/36 ,  G01N3/40 ,  G01N3/28 ,  G01J3/443

Abstract: A method of inspecting and determining characteristics of an aluminized coating of a hot stamped part is provided. The method includes removing a sample from the hot stamped part for Glow Discharge Optical Emission Spectrometry (GDOES), analyzing the sample using GDOES, and plotting constituent element weight percentages versus depth on a graph. The method further includes determining points on the graph where constituent elements intersect and where the points of intersection indicate the characteristics of the aluminized coating. The characteristics of the method include, by way of example, a total thickness of the aluminized coating, a thickness of an inter-diffusion layer (IDL), constituents of the aluminized coating, constituents of the hot stamped part, phase composition of the aluminized coating, surface oxidation, and weldability.