公开(公告)号：US5969249A

公开(公告)日：1999-10-19

申请号：US073747

申请日：1998-05-06

Applicant: Trey Roessig ,  Roger T. Howe ,  Albert P. Pisano

Inventor： Trey Roessig ,  Roger T. Howe ,  Albert P. Pisano

IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/09

CPC classification number: G01P15/097 ,  G01P15/0802 ,  G01P2015/0814

Abstract: An accelerometer comprises a proof mass, a first resonant tuning fork connected to the proof mass, a second resonant tuning fork connected to the proof mass, and a flexural lever leverage system supporting the proof mass above a substrate. The flexural lever leverage system enhances an acceleration force applied to the proof mass to cause a tensile force in the first resonant tuning fork which raises its resonant frequency, and a compressive force in the second resonant tuning fork which lowers its resonant frequency. The device may be fabricated using semiconductor-based surface-micromachining technology.

Abstract translation: 加速度计包括检测质量块，连接到检验质量块的第一谐振音叉，连接到校验块的第二谐振音叉，以及支撑在衬底上方的校准块的弯曲杆杠杆系统。 弯曲杆杠杆系统增强了施加到检验质量块上的加速力，从而在第一共振音叉中引起拉力，从而提高其共振频率，并使第二共振音叉中的压缩力降低其谐振频率。 该器件可以使用基于半导体的表面微加工技术来制造。

公开(公告)号：US5955932A

公开(公告)日：1999-09-21

申请号：US473342

申请日：1995-06-06

Applicant: Clark Tu-Cuong Nguyen ,  Roger T. Howe

Inventor： Clark Tu-Cuong Nguyen ,  Roger T. Howe

IPC: H01G5/14 ,  H03H9/02 ,  H03H9/46 ,  H03H9/205

CPC classification number: H03H9/02377 ,  G01R33/0286 ,  H01G5/14 ,  H03H9/02393 ,  H03H9/02425 ,  H03H9/467 ,  H03H2009/02496 ,  H03H9/0023

Abstract: A Q-controlled microresonator and devices including such resonators.

Abstract translation: Q控制的微谐振器和包括这种谐振器的器件。

公开(公告)号：US5919364A

公开(公告)日：1999-07-06

申请号：US669149

申请日：1996-06-24

Applicant: Kyle S. Lebouitz ,  Roger T. Howe ,  Albert P. Pisano

Inventor： Kyle S. Lebouitz ,  Roger T. Howe ,  Albert P. Pisano

IPC: B01D71/02 ,  B01L3/00 ,  B81B1/00 ,  B81B7/00 ,  B81C1/00 ,  G01N33/49 ,  G03F7/00 ,  B01D63/00

CPC classification number: B81C1/00333 ,  B01D67/0072 ,  B01D67/0093 ,  B01D71/02 ,  B01L3/502707 ,  B01L3/502753 ,  B81C1/00158 ,  G01N33/491 ,  G03F7/00 ,  B01D2323/225 ,  B01D2325/04 ,  B01L2200/12 ,  B01L2300/0681

Abstract: Microfabricated filters constructed with permeable polysilicon membranes and methods for fabricating such filters. The filters include a frame structure having a plurality of openings therethrough and a permeable polysilicon membrane disposed over the openings in the frame structure. The frame structure provides support for the permeable polysilicon membrane. The pores of the filter may be smaller than the resolution limit of photolithography. The width of the pores may be as small as about 0.01 .mu.m, while the length of the pores may be as small as about 0.05 .mu.m. The filters feature a relatively high throughput due to the extremely short pore length. The filters may be fabricated utilizing standard microfabrication processes. Also, microfabricated shells constructed with permeable membranes for encapsulating microfabricated devices such as microelectromechanical structures (MEMS) and methods for fabricating such shells. The shells include a frame structure having a plurality of openings therethrough, a permeable membrane disposed on the openings through the frame structure, an optional sealing structure disposed on the permeable membrane, and a cavity bounded by the frame structure. The frame structure provides support for the permeable membrane. The permeable membrane may be a thin film layer of polysilicon having a thickness of less than about 0.3 .mu.m. The shells and methods for fabricating the shells minimize the damage incurred by the encapsulated microfabricated device during the fabrication of the shell without restricting the width of the shell. The shells may be fabricated utilizing standard microfabrication processes.

Abstract translation: 用可渗透多晶硅膜构造的微型过滤器和制造这种过滤器的方法。 过滤器包括具有穿过其中的多个开口的框架结构和设置在框架结构中的开口上方的可渗透多晶硅膜。 框架结构为可渗透多晶硅膜提供支撑。 滤光器的孔可以小于光刻的分辨率极限。 孔的宽度可以小至约0.01μm，而孔的长度可以小至约0.05μm。 由于孔长度非常短，过滤器的生产量相对较高。 可以使用标准微加工工艺来制造过滤器。 而且，用可封装微结构器件（例如微机电结构（MEMS））和用于制造这种壳的方法的可渗透膜构成的微制造壳体。 壳体包括具有穿过其中的多个开口的框架结构，通过框架结构设置在开口上的可渗透膜，设置在可渗透膜上的可选密封结构以及由框架结构限定的空腔。 框架结构为渗透膜提供了支撑。 渗透膜可以是厚度小于约0.3μm的多晶硅薄膜层。 用于制造壳体的壳体和方法最小化在壳体制造期间由包封的微制造装置引起的损坏而不限制壳体的宽度。 壳可以使用标准的微细加工工艺制造。

公开(公告)号：US5839062A

公开(公告)日：1998-11-17

申请号：US210199

申请日：1994-03-18

Applicant: Clark Tu-Cuong Nguyen ,  Vadim Gutnik ,  Roger T. Howe

Inventor： Clark Tu-Cuong Nguyen ,  Vadim Gutnik ,  Roger T. Howe

IPC: H03H9/02 ,  H03H9/24 ,  H03H9/46 ,  H04B1/26

CPC classification number: H03H9/2426 ,  H03H9/02377 ,  H03H9/465 ,  H04B1/26 ,  H03H2009/02496

Abstract: Mixing, modulation and demodulation using the nonlinear properties of microelectromechanical resonators and filters are described. Mixing followed by filtering is implemented using microelectromechanical filters with nonlinear input transducers. AM modulation is implemented by passing a carrier signal through the output transducer of a microelectromechanical filter. FM and FSK demodulation is accomplished using parallel banks of microelectromechanical filters. The invention can be implemented using integrated circuit technology.

Abstract translation: 描述使用微机电谐振器和滤波器的非线性特性的混频，调制和解调。 使用具有非线性输入传感器的微机电滤波器实现混频，随后进行滤波。 通过使载波信号通过微机电滤波器的输出换能器来实现AM调制。 FM和FSK解调是使用微机电滤波器的并行库实现的。 本发明可以使用集成电路技术实现。

公开(公告)号：US5403665A

公开(公告)日：1995-04-04

申请号：US79611

申请日：1993-06-18

Applicant: Rodney L. Alley ,  Roger T. Howe ,  Kyriakos Komyopoulos

Inventor： Rodney L. Alley ,  Roger T. Howe ,  Kyriakos Komyopoulos

IPC: B05D1/18 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  C09D4/00 ,  H02N1/00 ,  B31B9/04

CPC classification number: H02N1/002 ,  B05D1/185 ,  B81C1/00674 ,  B82Y30/00 ,  B82Y40/00 ,  C09D4/00 ,  Y10T428/31663

Abstract: A micromachine is lubricated in a fluid-based process. The known fluid-based process of releasing a sacrificial layer from a micromachine is followed by a fluid-based hydrophilic processing of the micromachine surfaces. A lubricating monolayer surface is then formed on the resultant hydrophilic micromachine surfaces. Afterwards, the surfaces are dried through conventional means.

Abstract translation: 微机械在基于流体的工艺中润滑。 从微机械释放牺牲层的已知的基于流体的方法之后是微机械表面的基于流体的亲水处理。 然后在所得的亲水微机械表面上形成润滑单层表面。 之后，通过常规方法干燥表面。

公开(公告)号：US4851080A

公开(公告)日：1989-07-25

申请号：US285347

申请日：1988-12-14

Applicant: Roger T. Howe ,  Shih-Chia Chang

Inventor： Roger T. Howe ,  Shih-Chia Chang

IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/125 ,  G01P15/13 ,  G01P15/18

CPC classification number: G01P15/18 ,  G01P15/0802 ,  G01P15/097 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/084 ,  Y10S438/977

Abstract: An accelerometer is provided by a sample mass suspended in a central area of a support by pairs of resonating arms. One pair of arms lies on one axis through the sample mass. Another pair of arms lies on a second axis through the sample mass perpendicular to the one axis. Acceleration of the mass and support is detected by a measured change in resonant frequency of the arms of a pair. The measured change in resonant frequency is the magnitude of the acceleration and the axis along which the pair of arms lies provides the direction of the acceleration. Orthogonal components of acceleration are simultaneously measured by the pairs of arms lying on perpendicular axes. Electrostatic force-rebalance techniques and other known techniques for measuring acceleration in a direction perpendicular to the axes of the pairs of arms are readily incorporated to provide a third direction measurement of acceleration. The accelerometer is fabricated in a monolithic process which employs micromachining techniques.

公开(公告)号：US08329559B2

公开(公告)日：2012-12-11

申请号：US11737545

申请日：2007-04-19

Applicant: Hideki Takeuchi ,  Emmanuel P. Quevy ,  Tsu-Jae King ,  Roger T. Howe

Inventor： Hideki Takeuchi ,  Emmanuel P. Quevy ,  Tsu-Jae King ,  Roger T. Howe

IPC: H01L21/46 ,  H01L21/78 ,  H01L21/301

CPC classification number: B81C1/00142 ,  B81B2201/0271 ,  B81C2201/0109 ,  Y10S438/933

Abstract: In fabricating a microelectromechanical structure (MEMS), a method of forming a narrow gap in the MEMS includes a) depositing a layer of sacrificial material on the surface of a supporting substrate, b) photoresist masking and at least partially etching the sacrificial material to form at least one blade of sacrificial material, c) depositing a structural layer over the sacrificial layer, and d) removing the sacrificial layer including the blade of the sacrificial material with a narrow gap remaining in the structural layer where the blade of sacrificial material was removed.

Abstract translation: 在制造微机电结构（MEMS）中，在MEMS中形成窄间隙的方法包括：a）在支撑衬底的表面上沉积牺牲材料层，b）光致抗蚀剂掩模并且至少部分蚀刻牺牲材料以形成 至少一个牺牲材料刀片，c）在所述牺牲层上沉积结构层，以及d）去除包括所述牺牲材料刀片的所述牺牲层，其中所述牺牲材料刀片被去除的所述结构层中残留有窄间隙 。

公开(公告)号：US20100327874A1

公开(公告)日：2010-12-30

申请号：US12822971

申请日：2010-06-24

Applicant: Yang Liu ,  Robert W. Dutton ,  Roger T. Howe

Inventor： Yang Liu ,  Robert W. Dutton ,  Roger T. Howe

IPC: G01N27/62

CPC classification number: G01N33/48721 ,  C12Q1/68 ,  G01N27/04 ,  G01N27/4145 ,  G01N27/44791 ,  G01N33/68

Abstract: According to one aspect, the disclosure is directed to an example embodiment in which a circuit-based arrangement includes a circuit-based substrate securing a channel, with an effective width that is not limited by the Debye screening length, along a surface of the substrate. A pair of reservoirs are included in or on the substrate and configured for containing and presenting a sample having bio-molecules for delivery in the channel. A pair of electrodes electrically couple a charge in the sample to enhance ionic current flow therein (e.g., to overcome the electrolyte screening), and a sense electrode is located along the channel for sensing a characteristic of the biological sample by using the electrostatic interaction between the enhanced ionic current flow of the sample and the sense electrode. Actual detection occurs by using a charge-signal processing circuit to process the sensed charge signal and, therefrom, provide an output indicative of a signature for the bio-molecules delivered in the channel.

Abstract translation: 根据一个方面，本发明涉及一个示例性实施例，其中基于电路的布置包括基于电路的基板，其沿着基板的表面固定具有不受德拜屏蔽长度限制的有效宽度的通道 。 一对储存器包含在基底中或基底上，并且被配置为容纳和呈现具有用于在通道中递送的生物分子的样品。 一对电极将样品中的电荷电耦合以增强其中的离子电流（例如，以克服电解质屏蔽），并且感测电极沿着通道定位，以通过使用 样品和感应电极的增强的离子电流流动。 通过使用电荷信号处理电路来处理所感测的电荷信号，从而提供指示在通道中递送的生物分子的签名的输出，发生实际检测。

公开(公告)号：US6114044A

公开(公告)日：2000-09-05

申请号：US866833

申请日：1997-05-30

Applicant: Michael R. Houston ,  Roger T. Howe ,  Roya Maboudian ,  Uthara Srinivasan

Inventor： Michael R. Houston ,  Roger T. Howe ,  Roya Maboudian ,  Uthara Srinivasan

IPC: B81B3/00 ,  B32B9/04

CPC classification number: B81B3/0005 ,  B81C1/00928 ,  B81C2201/112 ,  B82Y30/00

Abstract: A method of fabricating a micromachine includes the step of constructing a low surface energy film on the micromachine. The micromachine is then rinsed with a rinse liquid that has a high surface energy, relative to the low surface energy film, to produce a contact angle of greater than 90.degree. between the low surface energy film and the rinse liquid. This relatively large contact angle causes any rinse liquid on the micromachine to be displaced from the micromachine when the micromachine is removed from the rinse liquid. In other words, the micromachine is dried by dewetting from a liquid-based process. Thus, a separate evaporative drying step is not required, as the micromachine is removed from the liquid-based process in a dry state. The relatively large contact angle also operates to prevent attractive capillary forces between micromachine components, thereby preventing contact and adhesion between adjacent microstructure surfaces. The low surface energy film may be constructed with a fluorinated self-assembled monolayer film. The processing of the invention avoids the use of environmentally harmful, health-hazardous chemicals.

Abstract translation: 制造微机械的方法包括在微机械上构造低表面能膜的步骤。 然后用相对于低表面能膜的表面能高的漂洗液冲洗微机械，在低表面能膜和冲洗液之间产生大于90°的接触角。 当微冲洗液从冲洗液中移出时，这种相对大的接触角使微机械上的任何漂洗液体从微机械移位。 换句话说，微机器通过从基于液体的方法去除而被干燥。 因此，不需要单独的蒸发干燥步骤，因为微机器在干燥状态下从基于液体的方法中去除。 相对较大的接触角也用于防止微机械部件之间的有吸引力的毛细作用力，从而防止相邻微结构表面之间的接触和粘附。 低表面能膜可以由氟化的自组装单层膜构成。 本发明的加工避免使用对环境有害的健康危害的化学品。

公开(公告)号：USRE36498E

公开(公告)日：2000-01-18

申请号：US172541

申请日：1998-10-14

Applicant: Roger T. Howe ,  Stephen Bart

Inventor： Roger T. Howe ,  Stephen Bart

IPC: G01L1/14 ,  G01P15/125 ,  G01P15/13 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01L1/148 ,  G01P15/131 ,  H01G5/14 ,  G01P2015/0814

Abstract: A micromachined force sensor containing separate sensing and actuator structures. A member is suspended above the substrate so that it is movable along an axis in response to a force. The member includes a set of parallel sense fingers and a separate set of parallel force fingers. The sense fingers are positioned between fingers of two sense plates, to form a first differential capacitor, whose capacitance changes when the member moves in response to a force along the axis. The change in capacitance induces a sense signal on the member, which permits the measurement of the magnitude and duration of the force. The force fingers are positioned between fingers of two actuator plates, to form a second differential capacitor. The sense signal can be used to provide feedback to the second differential capacitor to generate different electrostatic forces between the force fingers and the two actuator plates, to offset the force applied along the preferred axis. Limit stops limit the movement of the member to less than the distance between the electrodes of the differential capacitors, to prevent contact between the electrodes. Additional fingers be positioned around the differential capacitors to minimize parasitic capacitances.

Abstract translation: 包含单独的传感和致动器结构的微加工力传感器。 构件悬挂在基板上方，使得其可以响应于力而沿轴线移动。 该构件包括一组平行的手指和一组单独的平行的手指。 感测指状物定位在两个感测板的指状物之间，以形成第一差分电容器，当构件响应于沿着轴的力移动时，其电容发生变化。 电容的变化会引起元件上的感应信号，这样可以测量力的大小和持续时间。 力指定位于两个致动器板的指状物之间，以形成第二差分电容器。 感测信号可以用于向第二差分电容器提供反馈以在力指和两个致动器板之间产生不同的静电力，以抵消沿着优选轴施加的力。 限制停止将构件的移动限制为小于差分电容器的电极之间的距离，以防止电极之间的接触。 附加指状物位于差分电容器周围，以最小化寄生电容。