公开(公告)号：US20160260642A1

公开(公告)日：2016-09-08

申请号：US14639003

申请日：2015-03-04

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Juergen Frosien ,  Jacob Levin ,  Igor Krivts (Krayvitz) ,  Yoram Uziel ,  Boris Golberg

IPC: H01L21/66 ,  H01J37/18 ,  H01J37/22 ,  H01J37/20 ,  H01J37/29

CPC classification number: H01L22/12 ,  H01J37/226 ,  H01J37/228 ,  H01J37/265 ,  H01J37/28 ,  H01J37/292 ,  H01J2237/2817

Abstract: A system for inspecting and reviewing a sample, the system may include a chamber that is arranged to receive the sample and to maintain vacuum within the chamber during at least a scan period; an inspection unit; a review unit; and a mechanical stage for moving the sample, according to a scan pattern and during the scan period, in relation to the inspection unit and the review unit while a spatial relationship between the inspection unit and the review unit remains unchanged; wherein the inspection unit is arranged to detect, during the scan period, multiple suspected defects of the sample; and wherein the review unit is arranged to (a) receive, during the scan period, information about the multiple suspected defects; and (b) locate, during the scan period and in response to the information about the multiple suspected defects, at least one actual defect.

Abstract translation: 一种用于检查和检查样品的系统，所述系统可以包括被布置成接收样品并且在至少扫描周期期间在腔室内维持真空的室; 检查单位; 一个审查单位; 以及用于在检查单元和检查单元之间相对于检查单元和检查单元根据扫描图案和扫描周期期间移动样品的机械台，而检查单元和检查单元之间的空间关系保持不变; 其中所述检查单元被布置成在所述扫描周期期间检测所述样品的多个可疑缺陷; 并且其中所述审查单元被布置为（a）在扫描周期期间接收关于所述多个可疑缺陷的信息; 并且（b）在扫描期间以及针对关于多个疑似缺陷的信息，至少存在一个实际缺陷。