公开(公告)号：US09376593B2

公开(公告)日：2016-06-28

申请号：US14856601

申请日：2015-09-17

Applicant: Enki Technology, Inc.

Inventor： Sina Maghsoodi ,  Brenor L. Brophy ,  Ze'ev R. Abrams ,  Peter R. Gonsalves

IPC: B32B17/06 ,  C03C17/30 ,  C09D183/04 ,  C03C17/34 ,  C09D5/00 ,  C09D7/12 ,  C03C17/00 ,  C09D5/16 ,  C09D183/08 ,  C08G77/24 ,  C08K3/36

CPC classification number: C09D183/04 ,  C03C17/007 ,  C03C17/3405 ,  C03C17/42 ,  C03C2203/27 ,  C03C2217/425 ,  C03C2217/73 ,  C03C2217/732 ,  C03C2217/76 ,  C03C2217/78 ,  C03C2218/113 ,  C03C2218/34 ,  C08G77/24 ,  C08K3/36 ,  C09D5/006 ,  C09D5/1662 ,  C09D7/61 ,  C09D7/63 ,  C09D183/08 ,  Y10T428/265 ,  Y10T428/31612

Abstract: Disclosed herein are coating materials and methods for applying a top-layer coating that is durable, abrasion resistant, highly transparent, hydrophobic, low-friction, moisture-sealing, anti-soiling, and self-cleaning to an existing conventional high temperature anti-reflective coating. The top coat imparts superior durability performance and new properties to the under-laying conventional high temperature anti-reflective coating without reducing the anti-reflectiveness of the coating. Methods and data for optimizing the relative thickness of the under-layer high temperature anti-reflective coating and the top-layer thickness for optimizing optical performance are also disclosed.

Abstract translation: 本文公开了用于将耐用，耐磨，高度透明，疏水，低摩擦，湿气密封，防污染和自清洁的顶层涂层施加到现有常规高温抗蚀剂的涂料和方法， 反光涂层。 顶层涂层赋予了低成本的常规高温抗反射涂层优异的耐久性能和新特性，而不会降低涂层的抗反射性。 还公开了用于优化底层高温抗反射涂层的相对厚度和优化光学性能的顶层厚度的方法和数据。

公开(公告)号：US09376589B2

公开(公告)日：2016-06-28

申请号：US14799479

申请日：2015-07-14

Applicant: Enki Technology, Inc.

Inventor： Sina Maghsoodi ,  Brenor L. Brophy ,  Thomas E. Colson ,  Peter R. Gonsalves ,  Ze'ev R. Abrams

IPC: C09D173/00 ,  C09D5/00 ,  G02B1/11

CPC classification number: C09D5/006 ,  C03C17/007 ,  C03C17/30 ,  C03C2217/20 ,  C03C2217/425 ,  C03C2217/45 ,  C03C2217/465 ,  C03C2217/47 ,  C03C2217/732 ,  C08K3/36 ,  C09D7/61 ,  C09D173/00 ,  C09D183/04 ,  C09D183/08 ,  G02B1/11 ,  G02B1/111 ,  G02B1/12 ,  G02B1/14 ,  G02B5/021 ,  G02B5/0215 ,  G02B5/0221 ,  H01L31/02168 ,  H01L31/18 ,  H01L33/005 ,  H01L33/44 ,  Y02E10/50 ,  Y02P20/582

Abstract: Disclosed herein are single layer transparent coatings with an anti-reflective property, a hydrophobic property, and that are highly abrasion resistant. The single layer transparent coatings contain a plurality of oblate voids. At least 1% of the oblate voids are open to a surface of the single layer transparent coatings.

Abstract translation: 本文公开了具有抗反射性，疏水性，并且具有高耐磨性的单层透明涂层。 单层透明涂层含有多个扁圆形的空隙。 至少1％的扁圆形空隙对单层透明涂层的表面开放。

公开(公告)号：US20160032147A1

公开(公告)日：2016-02-04

申请号：US14799507

申请日：2015-07-14

Applicant: Enki Technology, Inc.

Inventor： Sina Maghsoodi ,  Brenor L. Brophy ,  Thomas E. Colson ,  Peter R. Gonsalves ,  Ze'ev R. Abrams

IPC: C09D183/08 ,  G02B1/12 ,  C03C17/30 ,  H01L33/00 ,  H01L31/0216 ,  H01L31/18 ,  G02B1/111 ,  H01L33/44

CPC classification number: C09D5/006 ,  C03C17/007 ,  C03C17/30 ,  C03C2217/20 ,  C03C2217/425 ,  C03C2217/45 ,  C03C2217/465 ,  C03C2217/47 ,  C03C2217/732 ,  C08K3/36 ,  C09D7/61 ,  C09D173/00 ,  C09D183/04 ,  C09D183/08 ,  G02B1/11 ,  G02B1/111 ,  G02B1/12 ,  G02B1/14 ,  G02B5/021 ,  G02B5/0215 ,  G02B5/0221 ,  H01L31/02168 ,  H01L31/18 ,  H01L33/005 ,  H01L33/44 ,  Y02E10/50 ,  Y02P20/582

Abstract: Disclosed herein are polysilsesquioxane-based anti-reflective coating (ARC) compositions, methods of preparation, and methods of deposition on a substrate. In one embodiment, the polysilsesquioxane of this disclosure is prepared in a two-step process of acid catalyzed hydrolysis of organoalkoxysilane followed by addition of tetralkoxysilane that generates silicone polymers with >40 mol % silanol based on Si-NMR. These high silanol siloxane polymers are stable and have a long shelf-life in polar organic solvents at room temperature. Also disclosed are low refractive index ARC made from these compositions with and without additives such as porogens, templates, thermal radical initiator, photo radical initiators, crosslinkers, Si—OH condensation catalyst and nano-fillers. Also disclosed are methods and apparatus for applying coatings to flat substrates including substrate pre-treatment processes, coating processes and coating curing processes including skin-curing using hot-air knives. Also disclosed are coating compositions and formulations for highly tunable, durable, highly abrasion-resistant functionalized anti-reflective coatings.

公开(公告)号：US20160032141A1

公开(公告)日：2016-02-04

申请号：US14799479

申请日：2015-07-14

Applicant: Enki Technology, Inc.

Inventor： Sina Maghsoodi ,  Brenor L. Brophy ,  Thomas E. Colson ,  Peter R. Gonsalves ,  Ze'ev R. Abrams

IPC: C09D173/00 ,  G02B1/11 ,  C09D5/00

CPC classification number: C09D5/006 ,  C03C17/007 ,  C03C17/30 ,  C03C2217/20 ,  C03C2217/425 ,  C03C2217/45 ,  C03C2217/465 ,  C03C2217/47 ,  C03C2217/732 ,  C08K3/36 ,  C09D7/61 ,  C09D173/00 ,  C09D183/04 ,  C09D183/08 ,  G02B1/11 ,  G02B1/111 ,  G02B1/12 ,  G02B1/14 ,  G02B5/021 ,  G02B5/0215 ,  G02B5/0221 ,  H01L31/02168 ,  H01L31/18 ,  H01L33/005 ,  H01L33/44 ,  Y02E10/50 ,  Y02P20/582

Abstract: Disclosed herein are single layer transparent coatings with an anti-reflective property, a hydrophobic property, and that are highly abrasion resistant. The single layer transparent coatings contain a plurality of oblate voids. At least 1% of the oblate voids are open to a surface of the single layer transparent coatings.

Abstract translation: 本文公开了具有抗反射性，疏水性，并且具有高耐磨性的单层透明涂层。 单层透明涂层含有多个扁圆形的空隙。 至少1％的扁圆形空隙对单层透明涂层的表面开放。

公开(公告)号：US20160002498A1

公开(公告)日：2016-01-07

申请号：US14856601

申请日：2015-09-17

Applicant: Enki Technology, Inc.

Inventor： Sina Maghsoodi ,  Brenor L. Brophy ,  Ze'ev R. Abrams ,  Peter R. Gonsalves

IPC: C09D183/04 ,  C09D5/00 ,  C09D7/12 ,  C03C17/34

CPC classification number: C09D183/04 ,  C03C17/007 ,  C03C17/3405 ,  C03C17/42 ,  C03C2203/27 ,  C03C2217/425 ,  C03C2217/73 ,  C03C2217/732 ,  C03C2217/76 ,  C03C2217/78 ,  C03C2218/113 ,  C03C2218/34 ,  C08G77/24 ,  C08K3/36 ,  C09D5/006 ,  C09D5/1662 ,  C09D7/61 ,  C09D7/63 ,  C09D183/08 ,  Y10T428/265 ,  Y10T428/31612

Abstract: Disclosed herein are coating materials and methods for applying a top-layer coating that is durable, abrasion resistant, highly transparent, hydrophobic, low-friction, moisture-sealing, anti-soiling, and self-cleaning to an existing conventional high temperature anti-reflective coating. The top coat imparts superior durability performance and new properties to the under-laying conventional high temperature anti-reflective coating without reducing the anti-reflectiveness of the coating. Methods and data for optimizing the relative thickness of the under-layer high temperature anti-reflective coating and the top-layer thickness for optimizing optical performance are also disclosed.

Abstract translation: 本文公开了用于将耐用，耐磨，高度透明，疏水，低摩擦，湿气密封，防污染和自清洁的顶层涂层施加到现有常规高温抗蚀剂的涂料和方法， 反光涂层。 顶层涂层赋予了低成本的常规高温抗反射涂层优异的耐久性能和新特性，而不会降低涂层的抗反射性。 还公开了用于优化底层高温抗反射涂层的相对厚度和优化光学性能的顶层厚度的方法和数据。