公开(公告)号：US20220115236A1

公开(公告)日：2022-04-14

申请号：US17408002

申请日：2021-08-20

Applicant: Exogenesis Corporation

Inventor： Allen R. Kirkpatrick

IPC: H01L21/263 ,  H01J37/147 ,  H01J37/305

Abstract: An improved ANAB system or process substantially or fully eliminating contaminant particles from reaching a beam target by adding to the usual primary (first) ionizer of the ANAB system or process an additional (second) ionizer to ionize contaminant particles and means to block or retard the ionized particles to prevent their reaching the beam target.

公开(公告)号：US11101134B2

公开(公告)日：2021-08-24

申请号：US16566649

申请日：2019-09-10

Applicant: Exogenesis Corporation

Inventor： Allen R. Kirkpatrick

IPC: H01L21/263 ,  H01J37/147 ,  H01J37/305

Abstract: An improved ANAB system or process substantially or fully eliminating contaminant particles from reaching a beam target by adding to the usual primary (first) ionizer of the ANAB system or process an additional (second) ionizer to ionize contaminant particles and means to block or retard the ionized particles to prevent their reaching the beam target.

公开(公告)号：US11048162B2

公开(公告)日：2021-06-29

申请号：US16564743

申请日：2019-09-09

Applicant: Exogenesis Corporation

Inventor： Sean R. Kirkpatrick ,  Allen R. Kirkpatrick

IPC: G03F1/80 ,  H05H3/02 ,  H01J37/317 ,  H01L21/02 ,  H01L21/265 ,  H01L21/311 ,  H01J37/05 ,  H01J37/147 ,  G03F1/82 ,  H01L29/36 ,  B24B37/04

Abstract: An apparatus, method and products thereof provide an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials.

公开(公告)号：US10971324B2

公开(公告)日：2021-04-06

申请号：US15909482

申请日：2018-03-01

Applicant: Exogenesis Corporation

Inventor： Joseph Khoury ,  Sean R. Kirkpatrick ,  Michael J. Walsh ,  James G. Bachand ,  Allen R. Kirkpatrick

IPC: H01J37/05 ,  H05H3/02 ,  H01J37/317 ,  H01J37/147 ,  H05H5/04

Abstract: A device such as a medical device and a method for making same provides a surface modified by beam irradiation, such as a gas cluster ion beams or a neutral beam, to inhibit or delay attachment or activation or clotting of platelets.

公开(公告)号：US20200249565A1

公开(公告)日：2020-08-06

申请号：US16564743

申请日：2019-09-09

Applicant: Exogenesis Corporation

Inventor： Sean R. Kirkpatrick ,  Allen R. Kirkpatrick

IPC: G03F1/80 ,  H05H3/02 ,  H01J37/317 ,  H01L21/02 ,  H01L21/265 ,  H01L21/311 ,  H01J37/05 ,  H01J37/147 ,  G03F1/82

Abstract: An apparatus, method and products thereof provide an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials.