公开(公告)号：US07688454B1

公开(公告)日：2010-03-30

申请号：US12200325

申请日：2008-08-28

Applicant: Gary R. Janik

Inventor： Gary R. Janik

IPC: G01B11/30 ,  G01B11/14 ,  G01J3/44 ,  G01J3/427 ,  G01J3/28

CPC classification number: G01B11/0616 ,  G01N21/65 ,  G01N2021/653

Abstract: A system for characterizing material properties in miniature semiconductor structures performs a scatterometry analysis on inelastically scattered light. The system can include a narrowband probe beam generator and a detector. A single wavelength probe beam from the narrowband probe beam generator produces scattered light from a measurement pattern on a test sample. The scattered light is measured by the detector, and the measurement data (e.g., Raman spectrum) is used in a scatterometry analysis to determine material properties for the measurement pattern. The detector can measure either incoherent inelastically scattered light (e.g., using a spectrometer) or coherent inelastically scattered light (e.g., using an array detector). If the measurement pattern dimensions are substantially similar to actual device dimensions, the material property distributions determined for the measurement pattern can be applied to the actual devices on the test sample.

Abstract translation: 用于表征微型半导体结构中的材料性质的系统对非弹性散射光进行散射分析。 该系统可以包括窄带探测光束发生器和检测器。 来自窄带探测光束发生器的单个波长探测光束从测试样品上的测量图形产生散射光。 通过检测器测量散射光，并且在散射分析中使用测量数据（例如，拉曼光谱）来确定测量图案的材料特性。 检测器可以测量非相干非弹性散射光（例如，使用光谱仪）或相干非弹性散射光（例如，使用阵列检测器）。 如果测量图形尺寸基本上类似于实际的装置尺寸，则可以将测量图案确定的材料特性分布应用于测试样品上的实际装置。

公开(公告)号：US07427757B1

公开(公告)日：2008-09-23

申请号：US11295258

申请日：2005-12-05

Applicant: Gary R. Janik ,  Jeffrey A. Moore

Inventor： Gary R. Janik ,  Jeffrey A. Moore

IPC: G01N23/00 ,  G21K7/00

CPC classification number: G21K1/06 ,  H01J37/244 ,  H01J37/252 ,  H01J2237/24425 ,  H01J2237/2561

Abstract: X-ray monochromators and electron probe micro-analysis (EPMA) systems using such monochromators are disclosed. A turretless x-ray monochromator may have a cassette of reflectors instead of a turret. The cassette stores a plurality of reflectors that can be inserted into a conventional Rowland circle monochromator geometry. A transfer mechanism selectively moves reflectors from the cassette to a reflector positioner. The use of the cassette allows each reflector to be placed closer to a source of x-rays, thereby allowing a larger solid angle for x-ray collection. An alternative x-ray monochromator uses a non-focusing reflector that can be fixed, scanned axially or scanned radially to provide large solid angle detection of x-rays at various energies with a single reflector.

Abstract translation: 公开了使用这种单色仪的X射线单色仪和电子探针微分析（EPMA）系统。 无转塔X射线单色仪可以具有一个反射镜盒而不是一个转盘。 磁带盒存储可以插入常规罗兰圆单色仪几何形状的多个反射器。 传送机构选择性地将反射器从盒子移动到反射器定位器。 使用盒式磁带允许每个反射器被放置得更靠近X射线源，从而允许用于x射线收集的更大的立体角。 另一种x射线单色仪使用非聚焦反射器，其可以被固定，轴向扫描或径向扫描，以提供具有单个反射器的各种能量的X射线的大的立体角检测。

公开(公告)号：US07253901B2

公开(公告)日：2007-08-07

申请号：US10056271

申请日：2002-01-23

Applicant: Gary R. Janik ,  Patrick M. Maxton

Inventor： Gary R. Janik ,  Patrick M. Maxton

IPC: G01J4/00 ,  G01N21/55 ,  G01N23/00 ,  G01N21/86 ,  G01N23/223 ,  G01B11/30 ,  G01B11/24 ,  G01B11/28 ,  G01B15/02 ,  G02F1/01 ,  H01J40/14 ,  G21K7/00 ,  G01V8/00 ,  G01R31/26 ,  G01R27/26 ,  G01R31/305 ,  G01R31/302 ,  H01L21/66 ,  G01T1/36 ,  B08B3/12 ,  B08B6/00 ,  B08B7/00 ,  B08B7/02 ,  C25F1/00 ,  C25F3/30 ,  C25F5/00

CPC classification number: G01N21/211

Abstract: A system for analyzing a thin film uses an energy beam, such as a laser beam, to remove a portion of a contaminant layer formed on the thin film surface. This cleaning operation removes only enough of the contaminant layer to allow analysis of the underlying thin film, thereby enhancing analysis throughput while minimizing the chances of recontamination and/or damage to the thin film. An energy beam source can be readily incorporated into a conventional thin film analysis tool, thereby minimizing total analysis system footprint. Throughput can be maximized by focusing the probe beam (or probe structure) for the analysis operation at the same location as the energy beam so that repositioning is not required after the cleaning operation. Alternatively, the probe beam (structure) and the energy beam can be directed at different locations to reduce the chances of contamination of the analysis optics.

公开(公告)号：US07075073B1

公开(公告)日：2006-07-11

申请号：US10851437

申请日：2004-05-21

Applicant: Gary R. Janik ,  Jeffrey A. Moore ,  Edward M. James

Inventor： Gary R. Janik ,  Jeffrey A. Moore ,  Edward M. James

IPC: G21K1/02

CPC classification number: G01N23/20 ,  G21K1/06

Abstract: An apparatus for detecting properties of a sample. An electron beam generator produces an electron beam and directs the electron beam at a desired point on the sample. The sample thereby emits characteristic x-rays at takeoff angles. A collimator receives and parallelizes the x-rays and converts the takeoff angles of the x-rays to positional differences between the parallelized x-rays. A diffractor receives and deflects the x-rays. A position sensitive detector receives the deflected x-rays and detects the positional differences between the x-rays, and generates signals that are characteristic of the received x-rays. An analyzer receives the signals from the detector and determines the properties of the sample based at least in part on the positional differences between the x-rays.

Abstract translation: 一种用于检测样品特性的装置。 电子束发生器产生电子束并将电子束引导到样品上的所需点。 因此，样品从而以起飞角发射特征性X射线。 准直器接收并平行X射线，并将x射线的射出角度转换为平行X射线之间的位置差异。 衍射器接收和偏转x射线。 位置敏感检测器接收偏转的x射线并检测x射线之间的位置差异，并产生作为接收到的x射线的特征的信号。 分析仪接收来自检测器的信号，并且至少部分地基于X射线之间的位置差异来确定样品的性质。

公开(公告)号：US5676830A

公开(公告)日：1997-10-14

申请号：US632035

申请日：1996-04-12

Applicant: Gary R. Janik ,  Douglas W. Shepard

Inventor： Gary R. Janik ,  Douglas W. Shepard

IPC: G01N30/74 ,  B01D15/08

CPC classification number: G01N30/74

Abstract: A capillary tube used to transfer a liquid sample into a detection cell following separation by a chromatographic system is modified by plugging or otherwise severely restricting its flow. Near its plugged end, said tube is drilled to provide a plurality of holes or ports perpendicular thereto and penetrating into the central flowing core of said tube so as to direct outflow from the tube perpendicularly therefrom. The outer diameter of this so-modified capillary tube is selected to be of a size comparable to, though smaller than, the detection cell diameter into which it transfers the flowing sample. In this manner, fluid transferred into a detection cell by said modified capillary tube will be split into a plurality of smaller streams flowing outwardly therefrom and striking the adjacent detector cell walls almost immediately. Because of the close proximity of the emerging split streams to the walls of the detection cell, the eddies produced thereby will be very small and the contents of the detection cell will be homogenized rapidly.

Abstract translation: 用于在通过色谱系统分离后将液体样品转移到检测单元中的毛细管通过堵塞或以其他方式严格限制其流动来改变。 在其堵塞端附近，所述管被钻孔以提供与其垂直的多个孔或孔，并且穿透到所述管的中心流动的芯中，以便从管垂直地引导从管垂直流出。 该经修改的毛细管的外径被选择为与其传送流动样品的检测池直径相当的尺寸。 以这种方式，通过所述改进的毛细管转移到检测单元中的流体将被分成多个从其向外流动的较小流，并几乎立即撞击相邻的检测器单元壁。 由于新出现的分流与检测单元的壁的紧密接近，因此产生的涡流将非常小，并且检测单元的内容物将迅速均匀化。

公开(公告)号：US5475235A

公开(公告)日：1995-12-12

申请号：US105200

申请日：1993-08-09

Applicant: David T. Phillips ,  Gary R. Janik

Inventor： David T. Phillips ,  Gary R. Janik

IPC: G01N15/02 ,  H01S5/042 ,  G01N15/06

CPC classification number: H01S5/042 ,  G01N15/0205 ,  H01S5/0427

Abstract: The incorporation of certain classes of solid state lasers into light scattering instrumentation is desirable because of their compact structure. However, mode hopping often causes the output power produced by such lasers to be unstable. The frequency of such output power fluctuations is often so broad that output power monitoring means, characteristic of the light scattering instrumentation into which such lasers are incorporated, cannot track accurately the temporal output power fluctuations. A method, and associated apparatus, is described whereby the laser drive current is modulated at low frequency and amplitude sufficient to induce and thereby control mode hopping so as to permit accurate measurement of the ratio of light scattering signals to the laser output power.

Abstract translation: 由于其紧凑的结构，将某些类别的固态激光器并入光散射仪器是合乎需要的。 然而，跳频通常会导致由这种激光器产生的输出功率不稳定。 这种输出功率波动的频率通常如此宽泛，使得其中结合有这种激光器的光散射仪器的特征的输出功率监视装置不能精确地跟踪时间输出功率波动。 描述了一种方法和相关联的装置，其中激光驱动电流被调制在足够低的频率和幅度，以便引起并由此控制模式跳变，以便准确地测量光散射信号与激光输出功率的比率。

公开(公告)号：US07903260B1

公开(公告)日：2011-03-08

申请号：US12699816

申请日：2010-02-03

Applicant: Gary R. Janik

Inventor： Gary R. Janik

IPC: G01B11/30 ,  G01B11/14 ,  G01J3/44 ,  G01J3/427 ,  G01J3/28

CPC classification number: G01B11/0616 ,  G01N21/65 ,  G01N2021/653

Abstract: A system for characterizing material properties in miniature semiconductor structures performs a scatterometry analysis on inelastically scattered light. The system can include a narrowband probe beam generator and a detector. A single wavelength probe beam from the narrowband probe beam generator produces scattered light from a measurement pattern on a test sample. The scattered light is measured by the detector, and the measurement data (e.g., Raman spectrum) is used in a scatterometry analysis to determine material properties for the measurement pattern. The detector can measure either incoherent inelastically scattered light (e.g., using a spectrometer) or coherent inelastically scattered light (e.g., using an array detector). If the measurement pattern dimensions are substantially similar to actual device dimensions, the material property distributions determined for the measurement pattern can be applied to the actual devices on the test sample.

Abstract translation: 用于表征微型半导体结构中的材料性质的系统对非弹性散射光进行散射分析。 该系统可以包括窄带探测光束发生器和检测器。 来自窄带探测光束发生器的单个波长探测光束从测试样品上的测量图形产生散射光。 通过检测器测量散射光，并且在散射分析中使用测量数据（例如，拉曼光谱）来确定测量图案的材料特性。 检测器可以测量非相干非弹性散射光（例如，使用光谱仪）或相干非弹性散射光（例如，使用阵列检测器）。 如果测量图形尺寸基本上类似于实际的装置尺寸，则可以将测量图案确定的材料特性分布应用于测试样品上的实际装置。

公开(公告)号：US07139365B1

公开(公告)日：2006-11-21

申请号：US11025472

申请日：2004-12-28

Applicant: Gary R. Janik

Inventor： Gary R. Janik

IPC: G01N23/20

CPC classification number: G01N23/20

Abstract: Thin film thickness measurement accuracy in x-ray reflectometry systems can be enhanced by minimizing scattering and beam spreading effects. A reflectometry system can include an x-ray tube that can produce an x-ray beam having any cross-sectional shape by scanning an electron beam in an appropriate pattern over a target in an x-ray tube. For example, the electron beam can be scanned over the target in a pattern having a non-unitary aspect ratio, so that the x-ray beam is generated from a source region having a non-unitary aspect ratio. The elongation allows the beam direction dimension to be substantially reduced, without causing overheating of the target. By blocking portions of the x-ray beam focused on the thin film and generating reflectivity curves in increments, the effects of scattering can be minimized.

Abstract translation: 通过最小化散射和光束扩散效应可以增强x射线反射系统中的薄膜厚度测量精度。 反射系统可以包括可以通过在X射线管中的靶上以适当的图案扫描电子束来产生具有任何横截面形状的X射线束的X射线管。 例如，可以以具有非单位宽高比的图案在目标上扫描电子束，从而从具有非单一纵横比的源区产生x射线束。 伸长率允许梁方向尺寸大大减小，而不会导致靶材过热。 通过阻挡聚焦在薄膜上的X射线束的部分并以增量产生反射率曲线，可以使散射的影响最小化。

公开(公告)号：US06816570B2

公开(公告)日：2004-11-09

申请号：US10094537

申请日：2002-03-07

Applicant: Gary R. Janik ,  Jeffrey Moore

Inventor： Gary R. Janik ,  Jeffrey Moore

IPC: G01B1502

CPC classification number: G01B15/02 ,  G01N23/20

Abstract: A thin film analysis system includes multi-technique analysis capability. Grazing incidence x-ray reflectometry (GXR) can be combined with x-ray fluorescence (XRF) using wavelength-dispersive x-ray spectrometry (WDX) detectors to obtain accurate thickness measurements with GXR and high-resolution composition measurements with XRF using WDX detectors. A single x-ray beam can simultaneously provide the reflected x-rays for GXR and excite the thin film to generate characteristic x-rays for XRF. XRF can be combined with electron microprobe analysis (EMP), enabling XRF for thicker films while allowing the use of the faster EMP for thinner films. The same x-ray detector(s) can be used for both XRF and EMP to minimize component count. EMP can be combined with GXR to obtain rapid composition analysis and accurate thickness measurements, with the two techniques performed simultaneously to maximize throughput.

Abstract translation: 薄膜分析系统包括多技术分析能力。 使用波长色散X射线光谱（WDX）检测器可以将掠射入射x射线反射计（GXR）与x射线荧光（XRF）组合，以通过使用WDX检测器的XRF进行GXR和高分辨率成分测量，以获得准确的厚度测量 。 单个X射线束可以同时提供用于GXR的反射X射线，并激发薄膜以产生XRF的特征X射线。 XRF可以与电子微探针分析（EMP）结合使用，使XRF更厚的膜，同时允许使用更快的EMP用于更薄的膜。 相同的X射线探测器可用于XRF和EMP两者，以最小化组件数量。 EMP可与GXR组合，以获得快速成分分析和精确的厚度测量，同时进行两种技术以最大限度地提高产量。

公开(公告)号：US06711232B1

公开(公告)日：2004-03-23

申请号：US10414905

申请日：2003-04-16

Applicant: Gary R. Janik

Inventor： Gary R. Janik

IPC: G01N2320

CPC classification number: G01N23/20

Abstract: An apparatus adapted for sensing characteristics of a layer disposed substantially within a plane, without making physical contact with the layer. An x-ray source produces x-rays, where the x-ray source has an axis disposed substantially perpendicular to the plane of the layer. An x-ray reflector has an axis disposed substantially perpendicular to the plane of the layer. The x-ray reflector receives the x-rays from the x-ray source and directs the x-rays received to a target spot on the layer at angles whereby the x-rays reflect off of the layer as reflected x-rays at a reflection angle. The reflected x-rays have properties that are indicative of the characteristics of the layer. A first x-ray blocking barrier is disposed substantially perpendicular to the plane of the layer, above the target spot. The first x-ray blocking barrier blocks at least a portion of the x-rays director toward and reflected off of the layer. The first x-ray blocking barrier and the layer define a gap, where the size of the gap determines at least in part a throughput and an angular resolution of the x-rays reflected off the layer. A receptor receives the reflected x-rays and produces signals based on the properties of the reflected x-rays. An analyzer receives the signals from the receptor and determines the characteristics of the layer based at least in part on the properties of the reflected x-rays.

Abstract translation: 一种适于感测基本上位于平面内的层的特征而不与层物理接触的装置。 x射线源产生x射线，其中x射线源具有基本上垂直于该层平面设置的轴。 x射线反射器具有基本上垂直于该层平面设置的轴线。 X射线反射器接收来自x射线源的X射线，并以接收角度将X射线引导到层上的目标光斑，由此x射线反射出层，作为反射的X射线 角度。 反射的x射线具有指示层的特征的性质。 第一x射线阻挡屏障基本上垂直于层的平面设置在目标点上方。 第一x射线阻挡屏障阻挡X射线导向器的至少一部分朝向并反射出该层。 第一个X射线阻挡屏障和该层限定了间隙，其中间隙的大小至少部分地决定了从该层反射的x射线的吞吐量和角度分辨率。 受体接收反射的x射线，并根据反射的X射线的性质产生信号。 分析仪接收来自受体的信号，并且至少部分地基于反射的x射线的性质确定层的特性。