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    MEMS device oscillator loop with amplitude control
    11.
    发明授权
    MEMS device oscillator loop with amplitude control 有权
    具有幅度控制的MEMS器件振荡器回路

    公开(公告)号：US08884711B2

    公开(公告)日：2014-11-11

    申请号：US13625690

    申请日：2012-09-24

    Applicant: InvenSense, Inc.

    Inventor： Vadim Tsinker

    IPC: H03B5/04 ,  H03B5/30 ,  H03L1/00

    CPC classification number: H03B5/30 ,  H03B5/04 ,  H03B2202/042 ,  H03L1/00

    Abstract: A MEMS device and method for amplitude regulation of a MEMS device are disclosed. In a first aspect, the MEMS device comprises a MEMS resonator, a limiter coupled to the MEMS resonator, and a regulator coupled to the limiter. The MEMS device includes an amplitude control circuit coupled to the MEMS resonator. The amplitude control circuit controls a supply of the limiter via the regulator to regulate oscillation loop amplitude of the MEMS device. In a second aspect, the method includes coupling a regulator to the limiter, coupling an amplitude control circuit to the MEMS resonator, and controlling a supply of the limiter via the regulator to regulate oscillation loop amplitude of the MEMS device.

    Abstract translation: 公开了一种用于MEMS器件的幅度调节的MEMS器件和方法。 在第一方面，MEMS器件包括MEMS谐振器，耦合到MEMS谐振器的限幅器和耦合到限幅器的调节器。 MEMS器件包括耦合到MEMS谐振器的幅度控制电路。 幅度控制电路通过调节器控制限幅器的供应，以调节MEMS装置的振荡环路振幅。 在第二方面，该方法包括将调节器耦合到限幅器，将振幅控制电路耦合到MEMS谐振器，以及通过调节器控制限幅器的供应以调节MEMS装置的振荡环路振幅。

    SENSING AN EXTERNAL STIMULUS USING A GROUP OF CONTINUOUS-TIME NYQUIST RATE ANALOG-TO-DIGITAL CONVERTERS IN A ROUND-ROBIN MANNER
    16.
    发明申请
    SENSING AN EXTERNAL STIMULUS USING A GROUP OF CONTINUOUS-TIME NYQUIST RATE ANALOG-TO-DIGITAL CONVERTERS IN A ROUND-ROBIN MANNER 审中-公开

    公开(公告)号：US20190190535A1

    公开(公告)日：2019-06-20

    申请号：US16219812

    申请日：2018-12-13

    Applicant: INVENSENSE, INC.

    Inventor： Vadim Tsinker

    IPC: H03M3/00 ,  H03M1/12 ,  H03M1/34 ,  H03M1/50

    CPC classification number: H03M3/496 ,  H03M1/124 ,  H03M1/34 ,  H03M1/50 ,  H03M2201/2344

    Abstract: Facilitating a reduction in sensor system latency, circuit size, and current draw utilizing a group of continuous-time Nyquist rate analog-to-digital converters (ADCs) in a round-robin manner is presented herein. A sensor system can comprise a group of sensors that generate respective sensor output signals based on an external excitation of the sensor system; a multiplexer that facilitates a selection, based on a sensor selection input, of a sensor output signal of the respective sensor output signals corresponding to a sensor of the group of sensors; a sense amplifier comprising a charge or voltage sensing circuit that converts the sensor output signal to an analog output signal; and a continuous-time Nyquist rate analog-to-digital converter of the group of continuous-time Nyquist rate ADCs that converts the analog output signal to a digital output signal representing at least a portion of the external excitation of the sensor system.

    REDUCING RESONANCE PEAKS AND DRIVE TONES FROM A MICRO-ELECTRO-MECHANICAL SYSTEM GYROSCOPE RESPONSE
    17.
    发明申请
    REDUCING RESONANCE PEAKS AND DRIVE TONES FROM A MICRO-ELECTRO-MECHANICAL SYSTEM GYROSCOPE RESPONSE 有权
    从微机电系统减少谐振峰值和驱动力陀螺响应

    公开(公告)号：US20170030714A1

    公开(公告)日：2017-02-02

    申请号：US14814016

    申请日：2015-07-30

    Applicant: INVENSENSE, INC.

    Inventor： Vadim Tsinker

    IPC: G01C19/5712

    CPC classification number: G01C19/5776 ,  G01C19/5719

    Abstract: Reducing noise from drive tone and sense resonance peaks of a micro-electro-mechanical system (MEMS) gyroscope output using a notch filter is presented herein. The MEMS gyroscope can include a drive oscillation component configured to vibrate a sensor mass at a drive resonance frequency; a sense circuit configured to detect a deflection of the sensor mass, and generate, based on the deflection and the drive resonance frequency, a demodulated output; and a signal processing component configured to receive a set of frequencies comprising a first value representing the drive resonance frequency and a second value corresponding to a sense resonance frequency associated with the sense circuit, and apply, based on the first value and the second value, a notch filter to the demodulated output to obtain a filtered output.

    Abstract translation: 本文介绍了使用陷波滤波器降低驱动音的噪声和检测微机电系统（MEMS）陀螺仪输出的谐振峰值。 MEMS陀螺仪可以包括配置成以驱动共振频率振动传感器质量的驱动振荡部件; 感测电路，被配置为检测所述传感器质量的偏转，并且基于所述偏转和所述驱动谐振频率生成解调输出; 以及信号处理部件，被配置为接收包括表示所述驱动谐振频率的第一值和对应于与所述感测电路相关联的感测谐振频率的第二值的一组频率，并且基于所述第一值和所述第二值， 到解调输出的陷波滤波器以获得滤波输出。

    Round robin sensor device for processing sensor data
    18.
    发明授权
    Round robin sensor device for processing sensor data 有权

    公开(公告)号：US11913788B2

    公开(公告)日：2024-02-27

    申请号：US17680637

    申请日：2022-02-25

    Applicant: INVENSENSE, INC.

    Inventor： Vadim Tsinker ,  Frederico Mazzarella ,  Ali Shirvani

    IPC: G01C19/5776 ,  H03M1/12 ,  G01P15/08 ,  H03M1/38 ,  G01C19/5712 ,  G01P15/125

    CPC classification number: G01C19/5776 ,  G01P15/08 ,  H03M1/1245 ,  H03M1/38 ,  G01C19/5712 ,  G01P15/125

    Abstract: A round robin sensor device for processing sensor data is provided herein. The sensor device includes a multiplexer stage configured to sequentially select sensor outputs from one or more sensors continuously. Continuously and sequentially selecting sensor outputs results in a stream of selected sensor outputs. The sensor device also includes a charge-to-voltage converter operatively coupled to the multiplexer stage and configured to convert a charge from a first sensor of the one or more sensors to a voltage. Further, the sensor device includes a resettable integrator operatively coupled to the charge-to-voltage converter and configured to demodulate and integrate the voltage, resulting in an integrated voltage. Also included in the sensor device is an analog-to-digital converter operatively coupled to the resettable integrator and configured to digitize the integrated voltage to a digital code.

    High performance accelerometer
    19.
    发明授权
    High performance accelerometer 有权

    公开(公告)号：US11287443B2

    公开(公告)日：2022-03-29

    申请号：US16794952

    申请日：2020-02-19

    Applicant: INVENSENSE, INC.

    Inventor： Sriraman Dakshinamurthy ,  Vadim Tsinker ,  Matthew Julian Thompson

    IPC: G01P15/13 ,  G01P15/08

    Abstract: A MEMS accelerometer includes a suspended spring-mass system that has a frequency response to accelerations experienced over a range of frequencies. The components of the suspended spring-mass system such as the proof masses respond to acceleration in a substantially uniform manner at frequencies that fall within a designed bandwidth for the MEMS accelerometer. Digital compensation circuitry compensates for motion of the proof masses outside of the designed bandwidth, such that the functional bandwidth of the MEMS accelerometer is significantly greater than the designed bandwidth.

    Measuring a noise level of an accelerometer
    20.
    发明授权
    Measuring a noise level of an accelerometer 有权

    公开(公告)号：US11255876B2

    公开(公告)日：2022-02-22

    申请号：US16824161

    申请日：2020-03-19

    Applicant: INVENSENSE, INC.

    Inventor： Sriraman Dakshinamurthy ,  Matthew Julian Thompson ,  Vadim Tsinker

    IPC: G01P21/00 ,  G01P15/125 ,  G01P15/08

    Abstract: A method of measuring noise of an accelerometer can comprise exposing the accelerometer comprising a micro-electro-mechanical system (MEMS) component coupled to an application specific integrated circuit component (ASIC), to an external environmental input, with the MEMS component being configured to provide a first output to the ASIC based on the external environmental input. The method can further comprise estimating a first noise generated by operation of the MEMS component, and replacing the first output provided to the ASIC from the MEMS component, with a second output generated by a MEMS emulator component, with the second output comprising the first noise. Further, the method can include generating an output of the accelerometer based on the second output processed by the ASIC.

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