公开(公告)号：US20150137000A1

公开(公告)日：2015-05-21

申请号：US14520754

申请日：2014-10-22

Applicant: JEOL Ltd.

Inventor： Tatsuo Naruse

IPC: H01J37/20 ,  H01J37/18 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J37/18 ,  H01J37/261 ,  H01J2237/002 ,  H01J2237/2002 ,  H01J2237/26 ,  H01J2237/2602

Abstract: A charged particle beam instrument is offered which can introduce cooled samples easily into a sample chamber. The charged particle beam instrument (100) of the present invention has: a sample container (10) that accommodates samples (S) and a refrigerant (6) for cooling the samples (S); an evacuated sample chamber (20); a sample exchange chamber (30) connected with the sample chamber (20); a partition valve (40) disposed between the sample exchange chamber (30) and the sample container (10); and vacuum pumping equipment (50) for evacuating the sample container (10). The sample container (10) can be connected with the sample exchange chamber (30) via the partition valve (40). The sample container (10) is evacuated by the vacuum pumping equipment (50) while the partition valve (40) is closed.

Abstract translation: 提供带电粒子束仪器，可以将冷却的样品容易地引入样品室。 本发明的带电粒子束仪器（100）具有容纳样品（S）的样品容器（10）和用于冷却样品（S）的制冷剂（6）。 抽真空的样品室（20）; 与样品室（20）连接的样品更换室（30）; 设置在样品更换室（30）和样品容器（10）之间的分隔阀（40）; 以及用于抽空样品容器（10）的真空抽吸设备（50）。 样品容器（10）可以通过分隔阀（40）与样品更换室（30）连接。 当分隔阀（40）关闭时，样品容器（10）被真空泵送设备（50）抽真空。