公开(公告)号：US20170016762A1

公开(公告)日：2017-01-19

申请号：US15211123

申请日：2016-07-15

Applicant: Melexis Technologies NV

Inventor： Carl VAN BUGGENHOUT ,  Ben MAES ,  Karel VANROYE ,  Stijn REEKMANS

IPC: G01J1/02 ,  G01J1/42

CPC classification number: G01J1/0252 ,  G01J1/4228 ,  G01J5/06 ,  G01J5/12 ,  G01J2005/066 ,  G01J2005/068

Abstract: An infrared sensor assembly for sensing infrared radiation from an object is disclosed. The infrared sensor assembly comprises a sensor array comprising a plurality of sensing elements, provided on or embedded in a substrate extending in a substrate plane. The sensor array comprises at least two infrared sensing elements, each infrared sensing element having a radiation responsive element providing a proportionate electrical signal in response to infrared radiation incident thereto and at least two blind sensing elements, at least one blind sensing element being interspersed among the at least two sensing elements, each blind sensing element being shielded from incident infrared radiation from the object and providing a proportionate electrical signal in response to parasitic thermal fluxes. The output of the sensor array is a function of the infrared sensing elements and of the blind sensing elements such that parasitic thermal fluxes are at least partly compensated for.

Abstract translation: 公开了一种用于感测来自物体的红外辐射的红外传感器组件。 红外传感器组件包括传感器阵列，该传感器阵列包括多个感测元件，其设置在衬底平面上延伸的衬底上或嵌入衬底中。 传感器阵列包括至少两个红外感测元件，每个红外感测元件具有响应于入射到其上的红外辐射而提供比例电信号的辐射响应元件和至少两个盲感测元件，至少一个盲感测元件散布在 至少两个感测元件，每个盲感测元件被屏蔽以避免来自物体的入射红外辐射，并响应于寄生热通量提供成比例的电信号。 传感器阵列的输出是红外感测元件和盲目感测元件的函数，使得寄生热通量至少部分被补偿。

公开(公告)号：US20150179861A1

公开(公告)日：2015-06-25

申请号：US14578701

申请日：2014-12-22

Applicant: MELEXIS TECHNOLOGIES NV

Inventor： Ben MAES ,  Carl VAN BUGGENHOUT ,  Appolonius Jacobus VAN DER WIEL

IPC: H01L31/09 ,  G01J5/12 ,  H01L31/18 ,  G01J5/02

CPC classification number: H01L31/09 ,  G01J5/02 ,  G01J5/024 ,  G01J5/12 ,  G01J5/20 ,  H01L27/14669 ,  H01L27/14683 ,  H01L31/18

Abstract: The invention relates to an infrared thermal sensor comprising a substrate having a cavity, a cavity bottom wall formed by a continuous substrate surface. The sensor comprises a membrane adapted for receiving heat from incident infrared radiation, a beam suspending the membrane, and a thermocouple. This membrane comprises openings extending through the membrane for facilitating the passage of an anisotropic etchant for etching the cavity during manufacture. Each opening has a cross-section with a length to width ratio of at least 4. The width direction of respectively a first and a second set of openings is oriented according to respectively a first crystallographic orientation and a second crystallographic orientation, these orientations corresponding to different directions lying in loosely packed crystal lattice faces of the semiconductor substrate.

Abstract translation: 本发明涉及一种红外热传感器，其包括具有空腔的基板，由连续基板表面形成的空腔底壁。 传感器包括适于从入射的红外辐射接收热量的膜，悬挂膜的光束和热电偶。 该膜包括延伸穿过膜的开口，以便在制造期间便于各向异性蚀刻剂通过蚀刻腔。 每个开口具有长宽比至少为4的横截面。分别第一组和第二组开口的宽度方向分别根据第一结晶取向和第二结晶取向取向，这些取向对应于 不同的方向位于半导体衬底的松散堆积的晶格面上。