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公开(公告)号：US20220134749A1
公开(公告)日：2022-05-05
申请号：US17116617
申请日：2020-12-09
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Ying-Lun Chang , Hsien-Chung Tai , Chi-Feng Huang , Yung-Lung Han , Wei-Ming Lee
IPC: B41J2/14
Abstract: A wafer structure is disclosed and includes a chip substrate and at least one inkjet chip. The chip substrate is a silicon substrate fabricated by a semiconductor process on a wafer of at least 12 inches. The inkjet chip is directly formed on the chip substrate by the semiconductor process, whereby the wafer is diced, and the inkjet chip is produced, to be implemented for inkjet printing. The inkjet chip includes plural ink-drop generators produced by the semiconductor process and formed on the chip substrate. The ink-drop generators are arranged in a longitudinal direction to form plural longitudinal axis array groups having a pitch maintained between two adjacent ink-drop generators in the longitudinal direction, and arranged in a horizontal direction to form plural horizontal axis array groups having a central stepped pitch equal to or less than 1/600 inches maintained between two adjacent ink-drop generators in the horizontal direction.
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公开(公告)号：US20220134747A1
公开(公告)日：2022-05-05
申请号：US17116292
申请日：2020-12-09
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Ying-Lun Chang , Hsien-Chung Tai , Chi-Feng Huang , Yung-Lung Han
Abstract: A wafer structure is disclosed and includes a chip substrate and a plurality of inkjet chips. The chip substrate is a silicon substrate which is fabricated by a semiconductor process on a wafer of at least 12 inches. The plurality of inkjet chips include at least one first inkjet chip and at least one second inkjet chip. The plurality of inkjet chips are directly formed on the chip substrate by the semiconductor process, respectively, and diced into the at least one first inkjet chip and the at least one second inkjet chip, to be implemented for inkjet printing. Each of the first inkjet chip and the second inkjet chip includes a plurality of ink-drop generators produced by the semiconductor process and formed on the chip substrate.
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公开(公告)号：US10697449B2
公开(公告)日：2020-06-30
申请号：US15640735
申请日：2017-07-03
Applicant: Microjet Technology Co., Ltd.
Inventor： Shih-Chang Chen , Ying-Lun Chang , Hsiang-Dyi Wu , Yung-Lung Han , Chi-Feng Huang
Abstract: A fluid control device includes a piezoelectric actuator and a deformable substrate. The piezoelectric actuator includes a piezoelectric element and a vibration plate. The piezoelectric element is attached on a first surface of the vibration plate and is subjected to deformation in response to an applied voltage. The vibration plate is subjected to a curvy vibration in response to the deformation of the piezoelectric element. A bulge is formed on a second surface of the vibration plate. The deformable substrate includes a flexible plate and a communication plate stacked on each other. A synchronously-deformed structure is defined by the flexible plate and the communication plate. The deformable substrate is bent in the direction away from the vibration plate. There is a specified depth maintained between the flexible plate and the bulge of the vibration plate. The flexible plate includes a movable part corresponding to the bulge of vibration plate.
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公开(公告)号：US10408210B2
公开(公告)日：2019-09-10
申请号：US15414788
申请日：2017-01-25
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Ying-Lun Chang , Shih-Chang Chen , Jia-Yu Liao
IPC: F04B49/20 , F04B45/047 , F04B49/06 , F04B51/00
Abstract: A control method of a driving circuit is provided for controlling a piezoelectric actuator of a piezoelectric pump to move a fluid of a fluid reservoir. Firstly, a driving voltage is outputted from the driving circuit. Then, a first inhalation adjusting process is implemented while the piezoelectric pump performs an inhaling operation. In the first inhalation adjusting process, a fluid pressure of the fluid within the fluid reservoir is detected and the fluid pressure is adjusted to the first predetermined inhalation pressure value according to the detecting result. Then, a first exhalation adjusting process is performed while the piezoelectric pump performs an exhaling operation. In the first exhalation adjusting process, the fluid pressure is detected and the fluid pressure is adjusted to the first predetermined exhalation pressure value according to the detecting result.
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公开(公告)号：US10385838B2
公开(公告)日：2019-08-20
申请号：US15409847
申请日：2017-01-19
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Shih-Chang Chen , Chi-Feng Huang , Yung-Lung Han , Jia-Yu Liao , Shou-Hung Chen , Che-Wei Huang , Hung-Hsin Liao , Chao-Chih Chen , Jheng-Wei Chen , Ying-Lun Chang , Chia-Hao Chang , Wei-Ming Lee
IPC: F04B43/04 , F04B45/047 , F04B53/10 , H01L41/053 , H01L41/09
Abstract: A miniature fluid control device includes a gas inlet plate, a resonance plate and a piezoelectric actuator. The gas inlet plate includes at least one inlet, at least one convergence channel and a central cavity. A convergence chamber is defined by the central cavity. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric ceramic plate. A gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber. When the piezoelectric actuator is driven and after the gas is fed into the miniature fluid control device through the inlet of the gas inlet plate, the gas is sequentially converged to the central cavity through the convergence channel, transferred through the central aperture of the resonance plate, introduced into the first chamber, transferred downwardly through the piezoelectric actuator, and exited from the miniature fluid control device.
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Patent Agency Ranking
公开(公告)号：US20180065370A1
公开(公告)日：2018-03-08
申请号：US15641054
申请日：2017-07-03
Applicant: Microjet Technology Co., Ltd.
Inventor： Shih-Chang Chen , Ying-Lun Chang , Hsiang-Dyi Wu , Chi-Feng Huang , Yung-Lung Han , Jia-Yu Liao , Jheng-Wei Chen
CPC classification number: B41J2/1623 , B29C53/04 , B29C65/48 , B29C69/00 , B29L2031/7496 , B29L2031/767 , B41J2/161 , F04B17/003 , F04B43/046 , H01L41/23 , H01L41/25
Abstract: A manufacturing method of a fluid control device is provided. Firstly, a housing, a piezoelectric actuator and a deformable substrate are provided. The piezoelectric actuator includes a piezoelectric element and a vibration plate having a bulge. The deformable substrate includes a flexible plate and a communication plate. The flexible plate includes a movable part. Then, the flexible plate and the communication plate are stacked on and coupled with each other to form the deformable substrate. Then, the housing, the piezoelectric actuator and the deformable substrate are sequentially stacked on each other and coupled with each other. A synchronous deformation process is implemented by applying at least one external force to the deformable substrate, so that the flexible plate and the communication plate of the deformable substrate are subjected to a synchronous deformation, and a specified depth between the movable part and the bulge of the vibration plate is defined.
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公开(公告)号：US09611843B2
公开(公告)日：2017-04-04
申请号：US14272272
申请日：2014-05-07
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Ta-Wei Hsueh , Ying-Lun Chang , Hsiang-Dyi Wu , Rong-Ho Yu , Shih-Chang Chen , Tsung-Pat Chou , Yau-Ji Lee , Jia-Yu Liao
CPC classification number: F04B43/046 , F04B49/22
Abstract: A micro-gas pressure driving apparatus includes a miniature gas transportation module and a miniature valve module. The miniature gas transportation module includes a gas inlet plate, a fluid channel plate, a resonance membrane and a piezoelectric actuator. A first chamber is defined between the resonance membrane and the piezoelectric actuator. After the piezoelectric actuator is activated to feed a gas through the gas inlet plate, the gas is transferred to the first chamber through the fluid channel plate and the resonance membrane and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve module includes a gas collecting plate, a valve membrane and a gas outlet plate. After the gas is transferred from the miniature gas transportation module to the gas-collecting chamber, the gas is transferred in one direction, so that a pressure-collecting operation or a pressure-releasing operation is selectively performed.
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公开(公告)号：US11639054B2
公开(公告)日：2023-05-02
申请号：US17116292
申请日：2020-12-09
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Ying-Lun Chang , Hsien-Chung Tai , Chi-Feng Huang , Yung-Lung Han
Abstract: A wafer structure is disclosed and includes a chip substrate and a plurality of inkjet chips. The chip substrate is a silicon substrate which is fabricated by a semiconductor process on a wafer of at least 12 inches. The plurality of inkjet chips include at least one first inkjet chip and at least one second inkjet chip. The plurality of inkjet chips are directly formed on the chip substrate by the semiconductor process, respectively, and diced into the at least one first inkjet chip and the at least one second inkjet chip, to be implemented for inkjet printing. Each of the first inkjet chip and the second inkjet chip includes a plurality of ink-drop generators produced by the semiconductor process and formed on the chip substrate.
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公开(公告)号：US20220219456A1
公开(公告)日：2022-07-14
申请号：US17530066
申请日：2021-11-18
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Ying-Lun Chang , Hsien-Chung Tai , Yung-Lung Han , Chi-Feng Huang , Chin-Wen Hsieh
Abstract: A wafer structure is disclosed and includes a chip substrate and a plurality of inkjet chips. The chip substrate is a silicon substrate fabricated by a semiconductor process. At least one inkjet chip is directly formed on the chip substrate by the semiconductor process and diced into the at least one inkjet chip for inkjet printing. Each of the inkjet chip includes a plurality of ink-drop generators produced by a semiconductor process and formed on the chip substrate. Each of the ink-drop generators includes a thermal-barrier layer, a resistance heating layer, a conductive layer, a protective layer, a barrier layer, an ink-supply chamber and a nozzle.
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公开(公告)号：US20220161558A1
公开(公告)日：2022-05-26
申请号：US17410779
申请日：2021-08-24
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Ying-Lun Chang , Hsien-Chung Tai , Yung-Lung Han , Chi-Feng Huang , Chang-Yen Tsai
Abstract: A wafer structure including a chip substrate and plural inkjet chips is disclosed. The chip substrate is a silicon substrate fabricated by a semiconductor process on a wafer of at least 12 inches. The inkjet chips are formed on the chip substrate by the semiconductor process and diced into the first inkjet chip and the second inkjet chip. Each of the first inkjet chip and the second inkjet chip includes plural ink-drop generators. Each of the ink-drop generators includes a nozzle. A diameter of the nozzle is in a range between 0.5 micrometers and 10 micrometers. A volume of an inkjet drop discharged from the nozzle is in a range between 1 femtoliter and 3 picoliters. The ink-drop generators form plural longitudinal axis array groups having a pitch and form plural horizontal axis array groups having a central stepped pitch equal to 1/600 inches or less.
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