公开(公告)号：US10815582B2

公开(公告)日：2020-10-27

申请号：US16243832

申请日：2019-01-09

Applicant: Northeastern University

Inventor： Ahmed Busnaina ,  Hanchul Cho ,  Sivasubramanian Somu ,  Jun Huang

IPC: C25D13/02 ,  C25D13/00 ,  C25D15/00 ,  G03F7/00 ,  B82Y10/00 ,  B82Y40/00 ,  B82B3/00

Abstract: Damascene templates have two-dimensionally patterned raised metal features disposed on an underlying conductive layer extending across a substrate. The templates are topographically flat overall, and the patterned conductive features establish micron-scale and nanometer-scale patterns for the assembly of nanoelements into nanoscale circuits and sensors. The templates are made using microfabrication techniques together with chemical mechanical polishing. These templates are compatible with various directed assembly techniques, including electrophoresis, and offer essentially 100% efficient assembly and transfer of nanoelements in a continuous operation cycle. The templates can be repeatedly used for transfer of patterned nanoelements thousands of times with minimal or no damage, and the transfer process involves no intermediate processes between cycles. The assembly and transfer processes employed are carried out at room temperature and pressure and are thus amenable to low cost, high-rate device production.

公开(公告)号：US10031102B2

公开(公告)日：2018-07-24

申请号：US14910294

申请日：2014-08-05

Applicant: Northeastern University

Inventor： Jin Young Lee ,  Ahmed Busnaina ,  Hanchul Cho ,  Sivasubramanian Somu

IPC: G01N27/00 ,  G01N33/00 ,  G01N27/414 ,  C12Q1/58 ,  C12Q1/00 ,  B82Y15/00 ,  C12Q1/26 ,  C12Q1/54 ,  H01L29/40 ,  G01N27/12

Abstract: A single-walled carbon nanotube-based micron scale multiplex biosensor is provided that enables the detection of glucose, lactate, and urea. The sensor is based on modification of semiconducting single-walled carbon nanotubes using a linker that non-covalently associates with the nanotubes and covalently couples to an enzyme. Reaction of a physiological substrate with the enzyme results in increased resistance of the nanotubes within the sensor. The sensor is suitable for use in patient monitoring, particularly in a clinical setting. Incorporation of read out electronics and an RF signal generator into the sensor device enables it to communicate to a relay station or remote receiver. Methods are also provided for fabricating the biosensor device and using the device for detection.

公开(公告)号：US09117601B2

公开(公告)日：2015-08-25

申请号：US14141133

申请日：2013-12-26

Applicant: Northeastern University

Inventor： Sivasubramanian Somu ,  Ahmed Busnaina ,  Nicol McGruer ,  Peter Ryan ,  George G. Adams ,  Xugang Xiong ,  Taehoon Kim

IPC: H01L21/00 ,  H01H11/04 ,  B82Y10/00 ,  G11C11/50 ,  G11C13/02 ,  H01L51/05 ,  H01L51/00 ,  B82Y40/00

CPC classification number: H01H11/04 ,  B82Y10/00 ,  B82Y40/00 ,  G11C11/50 ,  G11C13/025 ,  G11C2213/16 ,  H01L51/0048 ,  H01L51/0575 ,  H01L51/0591 ,  Y10S977/89 ,  Y10S977/943

Abstract: A non-volatile bistable nano-electromechanical switch is provided for use in memory devices and microprocessors. The switch employs carbon nanotubes as the actuation element. A method has been developed for fabricating nanoswitches having one single-walled carbon nanotube as the actuator. The actuation of two different states can be achieved using the same low voltage for each state.

Abstract translation: 提供了用于存储器件和微处理器的非易失性双稳态纳米机电开关。 开关采用碳纳米管作为驱动元件。 已经开发了用于制造具有一个单壁碳纳米管作为致动器的纳米开关的方法。 对于每个状态，可以使用相同的低电压来实现两种不同状态的致动。

公开(公告)号：US20140318967A1

公开(公告)日：2014-10-30

申请号：US14356328

申请日：2012-11-08

Applicant: Northeastern University

Inventor： Ahmed Busnaina ,  Hanchul Cho ,  Sivasubramanian Somu ,  Jun Huang

IPC: C25D13/00

CPC classification number: C25D13/02 ,  B82B3/0042 ,  B82Y10/00 ,  B82Y40/00 ,  C25D13/00 ,  C25D15/00 ,  G03F7/0002 ,  Y10S977/882

Abstract: Damascene templates have two-dimensionally patterned raised metal features disposed on an underlying conductive layer extending across a substrate. The templates are topographically flat overall, and the patterned conductive features establish micron-scale and nanometer-scale patterns for the assembly of nanoelements into nanoscale circuits and sensors. The templates are made using microfabrication techniques together with chemical mechanical polishing. These templates are compatible with various directed assembly techniques, including electrophoresis, and offer essentially 100% efficient assembly and transfer of nanoelements in a continuous operation cycle. The templates can be repeatedly used for transfer of patterned nanoelements thousands of times with minimal or no damage, and the transfer process involves no intermediate processes between cycles. The assembly and transfer processes employed are carried out at room temperature and pressure and are thus amenable to low cost, high-rate device production.

Abstract translation: 镶嵌模板具有二维图案化的凸起金属特征，其设置在跨越衬底延伸的下面的导电层上。 模板在整体上在地形上平坦，并且图案化的导电特征建立了用于将纳米元件组装成纳米尺度电路和传感器的微米级和纳米级图案。 模板使用微加工技术和化学机械抛光制成。 这些模板与各种定向组装技术（包括电泳）兼容，并且在连续的操作循环中提供基本上100％的有效组装和转移纳米元件。 可以重复使用模板，以最小或无损伤的方式传输图案化纳米元件数千次，并且转印过程不涉及循环之间的中间过程。 所采用的组装和转移方法在室温和压力下进行，因此可以实现低成本，高速率的装置生产。

公开(公告)号：US12174534B2

公开(公告)日：2024-12-24

申请号：US17765927

申请日：2020-10-16

Applicant: Northeastern University

Inventor： Salman A. Abbasi ,  Zhimin Chai ,  Ahmed Busnaina

IPC: G03F7/00 ,  B33Y10/00 ,  B33Y80/00 ,  B82Y40/00

Abstract: A scalable printing process capable of printing microscale and nanoscale features for additively manufacturing electronics is provided. This fast, directed assembly-based approach selectively prints microscale and nanoscale features on both rigid and flexible substrates. The printing speed is much faster than state-of-the-art inkjet and flexographic printing, and the resolution is two orders of magnitude higher, with minimum feature size of 100 nm. Feature patterns can be printed over large areas and require no special limitations on the assembled materials. Hydrophilic/hydrophobic patterns are used to direct deposition of nanomaterials to specific regions or to selectively assemble polymer blends to desired sites in a one-step process with high specificity and selectively. The selective deposition can be based on electrostatic forces, hydrogen bonding, or hydrophobic interactions. The methods and nanoscale patterned substrates can be used with polyelectrolytes, conductive polymers, colloids, and nanoparticles for application in electronics, sensors, energy, medical devices, and structural materials.

公开(公告)号：US09497855B2

公开(公告)日：2016-11-15

申请号：US14838930

申请日：2015-08-28

Applicant: Northeastern University

Inventor： Asli Sirman ,  Ahmed Busnaina ,  Cihan Yilmaz ,  Jun Huang ,  Sivasubramanian Somu

IPC: H05K1/03 ,  H05K1/09 ,  B82Y40/00 ,  C25D13/04 ,  C25D13/12 ,  H05K1/02 ,  H01L21/02 ,  H01L29/06 ,  B82Y30/00

CPC classification number: C25D13/22 ,  B82Y30/00 ,  B82Y40/00 ,  C09D5/4407 ,  C09D5/4488 ,  C09D125/06 ,  C25D13/04 ,  C25D13/12 ,  C25D13/20 ,  H01L21/0243 ,  H01L21/0259 ,  H01L21/02628 ,  H01L29/0665 ,  H05K1/0213 ,  H05K1/0306 ,  H05K1/092 ,  H05K3/1258 ,  Y10S977/882 ,  Y10S977/892

Abstract: A method for high rate assembly of nanoelements into two-dimensional void patterns on a non-conductive substrate surface utilizes an applied electric field to stabilize against forces resulting from pulling the substrate through the surface of a nanoelement suspension. The electric field contours emanating from a conductive layer in the substrate, covered by an insulating layer, are modified by a patterned photoresist layer, resulting in an increased driving force for nanoelements to migrate from a liquid suspension to voids on a patterned substrate having a non-conductive surface. The method can be used for the production of microscale and nanoscale circuits, sensors, and other electronic devices.

公开(公告)号：US20150322589A1

公开(公告)日：2015-11-12

申请号：US14410961

申请日：2013-07-01

Applicant: Northeastern University

Inventor： Ahmed Busnaina ,  Cihan Yilmaz ,  TaeHoon Kim ,  Sivasubramanian Somu

IPC: C25D13/18 ,  B23K31/00 ,  C25D13/22 ,  C25D13/02 ,  C25D13/12

CPC classification number: C25D13/18 ,  B23K31/00 ,  B81B2203/0361 ,  B81B2207/056 ,  B81C1/00111 ,  B81C2201/0187 ,  C25D3/48 ,  C25D5/02 ,  C25D13/02 ,  C25D13/12 ,  C25D13/22 ,  H01L21/2885 ,  H01L21/76879 ,  H01L21/76885 ,  H01L2221/1094

Abstract: A variety of homogeneous or layered hybrid nanostructures are fabricated by electric field-directed assembly of nanoelements. The nanoelements and the fabricated nanostructures can be conducting, semi-conducting, or insulating, or any combination thereof. Factors for enhancing the assembly process are identified, including optimization of the electric field and combined dielectrophoretic and electrophoretic forces to drive assembly. The fabrication methods are rapid and scalable. The resulting nano structures have electrical and optical properties that render them highly useful in nanoscale electronics, optics, and biosensors.

Abstract translation: 通过纳米元件的电场定向组装制造各种均匀或分层的混合纳米结构。 纳米元件和制造的纳米结构可以是导电，半导电或绝缘或其任何组合。 确定了增强组装过程的因素，包括优化电场和组合介电泳和驱动装配的电泳力。 制造方法是快速和可扩展的。 所得纳米结构具有电和光学性质，使得它们在纳米级电子学，光学和生物传感器中非常有用。

公开(公告)号：US20140202860A1

公开(公告)日：2014-07-24

申请号：US14141133

申请日：2013-12-26

Applicant: Northeastern University

Inventor： Sivasubramanian Somu ,  Ahmed Busnaina ,  Nicol McGruer ,  Peter Ryan ,  George G. Adams ,  Xugang Xiong ,  Taehoon Kim

IPC: H01H11/04

CPC classification number: H01H11/04 ,  B82Y10/00 ,  B82Y40/00 ,  G11C11/50 ,  G11C13/025 ,  G11C2213/16 ,  H01L51/0048 ,  H01L51/0575 ,  H01L51/0591 ,  Y10S977/89 ,  Y10S977/943

Abstract: A non-volatile bistable nano-electromechanical switch is provided for use in memory devices and microprocessors. The switch employs carbon nanotubes as the actuation element. A method has been developed for fabricating nanoswitches having one single-walled carbon nanotube as the actuator. The actuation of two different states can be achieved using the same low voltage for each state.

Abstract translation: 提供了用于存储器件和微处理器的非易失性双稳态纳米机电开关。 开关采用碳纳米管作为驱动元件。 已经开发了用于制造具有一个单壁碳纳米管作为致动器的纳米开关的方法。 对于每个状态，可以使用相同的低电压来实现两种不同状态的致动。

公开(公告)号：US11156914B2

公开(公告)日：2021-10-26

申请号：US16485073

申请日：2018-02-12

Applicant: Northeastern University

Inventor： Hobin Jeong ,  Ahmed Busnaina

IPC: G03F7/00 ,  C25D13/22 ,  B82Y30/00 ,  B82Y40/00

Abstract: Methods of fabricating a damascene template for electrophoretic assembly and transfer of patterned nanoelements are provided which do not require chemical mechanical polishing to achieve a uniform surface area. The methods include conductive layer fabrication using a combination of precision lithography techniques using etching or building up the conductive layer to form raised conductive features separated by an insulating layer of equal height.

公开(公告)号：US20190384168A1

公开(公告)日：2019-12-19

申请号：US16485073

申请日：2018-02-12

Applicant: Northeastern University

Inventor： Hobin Jeong ,  Ahmed Busnaina

IPC: G03F7/00 ,  C25D13/22

Abstract: Methods of fabricating a damascene template for electrophoretic assembly and transfer of patterned nanoelements are provided which do not require chemical mechanical polishing to achieve a uniform surface area. The methods include conductive layer fabrication using a combination of precision lithography techniques using etching or building up the conductive layer to form raised conductive features separated by an insulating layer of equal height.