MICRO-OPTICAL BENCH DEVICE WITH HIGHLY/SELECTIVELY-CONTROLLED OPTICAL SURFACES
    11.
    发明申请
    MICRO-OPTICAL BENCH DEVICE WITH HIGHLY/SELECTIVELY-CONTROLLED OPTICAL SURFACES 审中-公开
    具有高/可选光控表面的微光学设备

    公开(公告)号:US20160246002A1

    公开(公告)日:2016-08-25

    申请号:US15047205

    申请日:2016-02-18

    Abstract: A micro-optical bench device is fabricated by a process that provides control over one or more properties of the micro-optical bench device and/or one or more properties of optical surfaces in the micro-optical bench device. The process includes etching a substrate to form a permanent structure including optical elements and a temporary structure. The shape of the temporary structure and gaps between the temporary structure and permanent structure facilitate control of a property of the micro-optical bench and/or optical surfaces therein. The process further includes removing the temporary structure from an optical path of the micro-optical bench device.

    Abstract translation: 通过提供对微型光学台装置的一个或多个特性的控制和/或微型光学台装置中的光学表面的一个或多个特性的方法制造微型光学台装置。 该方法包括蚀刻衬底以形成包括光学元件和临时结构的永久结构。 临时结构的形状和临时结构和永久结构之间的间隙便于控制微光学台和/或其中的光学表面的性质。 该方法还包括从微型光学平台装置的光路中移除临时结构。

    INCREASED SPECTROMETER FIELD OF VIEW

    公开(公告)号:US20210018365A1

    公开(公告)日:2021-01-21

    申请号:US16931237

    申请日:2020-07-16

    Abstract: Aspects relate to mechanisms for increasing the field of view of a spectrometer. An optical device may be configured to simultaneously couple light from different locations (spots) on a sample to the spectrometer to effectively increase the spectrometer field of view. The optical device can include a beam combiner and at least one reflector to reflect light beams from respective spots on the sample towards the beam combiner. The beam combiner can combine the received light beams from the different spots to produce a combined light beam that may be input to the spectrometer.

    SELF CALIBRATION FOR MIRROR POSITIONING IN OPTICAL MEMS INTERFEROMETERS
    18.
    发明申请
    SELF CALIBRATION FOR MIRROR POSITIONING IN OPTICAL MEMS INTERFEROMETERS 有权
    自动校准用于光学MEMS干涉仪中的镜像定位

    公开(公告)号:US20160231172A1

    公开(公告)日:2016-08-11

    申请号:US15130876

    申请日:2016-04-15

    Abstract: A Micro-Electro-Mechanical System (MEMS) apparatus provides for self-calibration of mirror positioning of a moveable mirror of an interferometer. At least one mirror in the MEMS apparatus includes a non-planar surface. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS apparatus includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at multiple reference positions of the moveable mirror corresponding to a center burst and one or more secondary bursts of an interferogram produced by the interferometer based on the non-planar surface. A calibration module uses the actuator capacitances at the reference positions to compensate for any drift in the capacitive sensing circuit.

    Abstract translation: 微机电系统(MEMS)装置提供干涉仪可移动反射镜的镜像定位的自校准。 MEMS装置中的至少一个反射镜包括非平面表面。 可移动镜连接到具有可变电容的MEMS致动器。 MEMS装置包括电容感测电路,用于确定MEMS致动器在可移动镜的对应于中心脉冲串的多个参考位置处的电容,以及由干涉仪基于非平面表面产生的干涉图的一个或多个二次脉冲串。 校准模块使用参考位置处的致动器电容来补偿电容感测电路中的任何漂移。

    LARGE SPOT SIZE SPECTROMETER
    19.
    发明申请

    公开(公告)号:US20220390277A1

    公开(公告)日:2022-12-08

    申请号:US17828747

    申请日:2022-05-31

    Abstract: Aspects relate to an optical device providing a large spot size spectrometer. The optical device includes an optical head, an optical window, and a spectrometer. The optical head includes a plastic molded part having an aperture and a plurality of reflectors around the aperture formed therein. Each reflector may include a respective lamp assembled therein. The optical window is configured to receive a sample, to pass input light from the lamps to the sample and to pass scattered light from the sample towards the aperture. The aperture is configured to filter a first portion of scattered light containing unusable sample information and to pass a second portion of the scattered light to the spectrometer.

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