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公开(公告)号：US10948830B1
公开(公告)日：2021-03-16
申请号：US16724925
申请日：2019-12-23
Applicant: Waymo LLC
Inventor： Hongqin Shi , Yeh-Jiun Tung , James Dunphy , Cesar Gensoli
Abstract: The present application relates to contact immersion lithography exposure units and methods of their use. An example contact exposure unit includes a container configured to contain a fluid material and a substrate disposed within the container. The substrate has a first surface and a second surface, and the substrate includes a photoresist material on at least the first surface. The contact exposure unit includes a photomask disposed within the container. The photomask is optically coupled to the photoresist material by way of a gap comprising the fluid material. The contact exposure unit also includes an inflatable balloon configured to be controllably inflated so as to apply a desired force to the second surface of the substrate to controllably adjust the gap between the photomask and the photoresist material.
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公开(公告)号：US20250035844A1
公开(公告)日：2025-01-30
申请号：US18917449
申请日：2024-10-16
Applicant: Waymo LLC
Inventor： James Dunphy , David Hutchison , Pierre-Yves Droz , Yeh-Jiun Tung
Abstract: One example LIDAR device comprises a substrate and a waveguide disposed on the substrate. A first section of the waveguide extends lengthwise on the substrate in a first direction. A second section of the waveguide extends lengthwise on the substrate in a second direction different than the first direction. A third section of the waveguide extends lengthwise on the substrate in a third direction different than the second direction. The second section extends lengthwise between the first section and the second section. The LIDAR device also comprises a light emitter configured to emit light. The waveguide is configured to guide the light inside the first section toward the second section, inside the second section toward the third section, and inside the third section away from the second section.
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公开(公告)号：US12174547B2
公开(公告)日：2024-12-24
申请号：US18526249
申请日：2023-12-01
Applicant: Waymo LLC
Inventor： James Dunphy , David Hutchison
Abstract: The present disclosure relates to systems and methods relating to the fabrication of light guide elements. An example system includes an optical component configured to direct light emitted by a light source to illuminate a photoresist material at one or more desired angles so as to expose an angled structure in the photoresist material. The photoresist material overlays at least a portion of a first surface of a substrate. The optical component includes a container containing a light-coupling material that is selected based in part on the one or more desired angles. The system also includes a reflective surface arranged to reflect at least a first portion of the emitted light to illuminate the photoresist material at the one or more desired angles.
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公开(公告)号：US12147076B2
公开(公告)日：2024-11-19
申请号：US18337119
申请日：2023-06-19
Applicant: Waymo LLC
Inventor： James Dunphy , David Hutchison , Pierre-Yves Droz , Yeh-Jiun Tung
Abstract: One example LIDAR device comprises a substrate and a waveguide disposed on the substrate. A first section of the waveguide extends lengthwise on the substrate in a first direction. A second section of the waveguide extends lengthwise on the substrate in a second direction different than the first direction. A third section of the waveguide extends lengthwise on the substrate in a third direction different than the second direction. The second section extends lengthwise between the first section and the second section. The LIDAR device also comprises a light emitter configured to emit light. The waveguide is configured to guide the light inside the first section toward the second section, inside the second section toward the third section, and inside the third section away from the second section.
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公开(公告)号：US12078754B1
公开(公告)日：2024-09-03
申请号：US17138172
申请日：2020-12-30
Applicant: Waymo LLC
Inventor： David Hutchison , James Dunphy , Pierre-Yves Droz
CPC classification number: G01S7/4813 , G01S7/484 , G01S7/486 , G01S7/4972 , G01S17/931 , G05D1/024
Abstract: The present disclosure relates to optical transmitter modules, lidar systems, and methods of their manufacture. An example optical transmitter module includes a transparent substrate and a plurality of wires disposed along the transparent substrate. The optical transmitter module includes driver circuitry electrically-coupled to at least a portion of the plurality of wires and one or more light-emitter devices electrically-coupled to at least a portion of the plurality of wires. The light-emitter device(s) are configured to emit light pulses. The optical transmitter module also includes a fast axis collimation lens disposed along the transparent substrate. The fast axis collimation lens is configured to collimate the light pulses so as to provide collimated light. The optical transmitter module also includes one or more waveguide structures disposed along the transparent substrate within an optical region. The optical transmitter module also includes a lid configured to provide a sealed interior volume.
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Patent Agency Ranking
16.发明授权公开(公告)号：US11994802B2
公开(公告)日：2024-05-28
申请号：US17464185
申请日：2021-09-01
Applicant: Waymo LLC
Inventor： James Dunphy , David Hutchison
CPC classification number: G03F7/201 , G03F7/0005 , G03F7/2008 , G03F7/2014 , G03F7/26 , G03F7/7015 , G02B5/0891
Abstract: Systems and methods described herein relate to the manufacture of optical elements and optical systems. An example system may include an optical component configured to direct light from a light source to illuminate a photoresist material at a desired angle and to expose at least a portion of an angled structure in the photoresist material, where the photoresist material overlays at least a portion of a top surface of a substrate. The optical component includes a container containing an light-coupling material that is selected based in part on the desired angle. The optical component also includes a mirror arranged to reflect at least a portion of the light to illuminate the photoresist material at the desired angle.
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公开(公告)号：US11714233B2
公开(公告)日：2023-08-01
申请号：US17835464
申请日：2022-06-08
Applicant: Waymo LLC
Inventor： James Dunphy , David Hutchison , Pierre-Yves Droz , Yeh-Jiun Tung
CPC classification number: G02B6/125 , G01S7/4815 , G02B6/1228 , G02B6/4202 , G01S7/4812 , G01S17/10 , G01S17/42
Abstract: One example LIDAR device comprises a substrate and a waveguide disposed on the substrate. A first section of the waveguide extends lengthwise on the substrate in a first direction. A second section of the waveguide extends lengthwise on the substrate in a second direction different than the first direction. A third section of the waveguide extends lengthwise on the substrate in a third direction different than the second direction. The second section extends lengthwise between the first section and the second section. The LIDAR device also comprises a light emitter configured to emit light. The waveguide is configured to guide the light inside the first section toward the second section, inside the second section toward the third section, and inside the third section away from the second section.
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公开(公告)号：US20230055071A1
公开(公告)日：2023-02-23
申请号：US17982078
申请日：2022-11-07
Applicant: Waymo LLC
Inventor： Pierre-Yves Droz , David Neil Hutchison , James Dunphy , Nathaniel Golshan , Ralph Hamilton Shepard
Abstract: One example system comprises a light source configured to emit light. The system also comprises a waveguide configured to guide the emitted light from a first end of the waveguide toward a second end of the waveguide. The waveguide has an output surface between the first end and the second end. The system also comprises a plurality of mirrors including a first mirror and a second mirror. The first mirror reflects a first portion of the light toward the output surface. The second mirror reflects a second portion of the light toward the output surface. The first portion propagates out of the output surface toward a scene as a first transmitted light beam. The second portion propagates out of the output surface toward the scene as a second transmitted light beam.
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公开(公告)号：US20220018942A1
公开(公告)日：2022-01-20
申请号：US17490428
申请日：2021-09-30
Applicant: Waymo LLC
Inventor： James Dunphy , David Hutchison
Abstract: One example system comprises a plurality of substrates disposed in an overlapping arrangement. The plurality of substrates includes at least a first substrate and a second substrate. The system also comprises a first waveguide disposed on the first substrate to define a first optical path on the first substrate. The first waveguide is configured to guide light along the first optical path and to transmit, at an output section of the first waveguide, the light out of the first waveguide toward the second substrate. The system also comprises a second waveguide disposed on the second substrate to define a second optical path on the second substrate. An input section of the second waveguide is aligned with the output section of the first waveguide to receive the light transmitted by the first waveguide. The second waveguide is configured to guide the light along the second optical path.
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公开(公告)号：US20210124269A1
公开(公告)日：2021-04-29
申请号：US16666952
申请日：2019-10-29
Applicant: Waymo LLC
Inventor： James Dunphy , David Hutchison
Abstract: The present disclosure relates to systems and methods relating to the fabrication of light guide elements. An example system includes an optical component configured to direct light emitted by a light source to illuminate a photoresist material at one or more desired angles so as to expose an angled structure in the photoresist material. The photoresist material overlays at least a portion of a first surface of a substrate. The optical component includes a container containing a light-coupling material that is selected based in part on the one or more desired angles. The system also includes a reflective surface arranged to reflect at least a first portion of the emitted light to illuminate the photoresist material at the one or more desired angles.
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