公开(公告)号：US06649947B2

公开(公告)日：2003-11-18

申请号：US10098214

申请日：2002-03-18

Applicant: M. Steven Rodgers ,  Jeffry J. Sniegowski ,  Thomas W. Krygowski

Inventor： M. Steven Rodgers ,  Jeffry J. Sniegowski ,  Thomas W. Krygowski

IPC: H01L2714

CPC classification number: B81B5/00 ,  B81B2201/034 ,  Y10T74/19651

Abstract: A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 &mgr;m or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.

公开(公告)号：US5366587A

公开(公告)日：1994-11-22

申请号：US887749

申请日：1992-05-26

Applicant: Minoru Ueda ,  Michitomo Iiyama

Inventor： Minoru Ueda ,  Michitomo Iiyama

IPC: C04B41/53 ,  C04B41/91 ,  C23C16/40 ,  G03F7/00 ,  H01L21/306

CPC classification number: B81C1/00198 ,  C04B41/009 ,  C04B41/53 ,  C04B41/91 ,  C23C16/408 ,  G03F7/00 ,  B81B2201/034 ,  B81B2201/035 ,  B81B2201/037 ,  B81B2203/056 ,  Y10S505/785

Abstract: A process for manufacturing a micromachine comprising a machine element supported on a substrate, comprising the steps of successively depositing on the substrate machine part layers and removable sacrificial layers made of an oxide ceramic material containing a rare earth, Ba, and Cu, and selectively removing the machine parts layer and the sacrificial layers so as to leave the machine element.

Abstract translation: 一种微机械的制造方法，其特征在于，具有：支撑在基板上的机械元件，其特征在于，包括以下步骤：在所述基板上依次沉积由含有稀土元素Ba，Cu的氧化物陶瓷材料构成的部分层和可除去的牺牲层， 机器部件层和牺牲层，以便离开机器元件。

公开(公告)号：US11697584B2

公开(公告)日：2023-07-11

申请号：US16799293

申请日：2020-02-24

Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.

Inventor： Matthieu Gaudet ,  Bert Kaiser

IPC: B81B3/00

CPC classification number: B81B3/0062 ,  B81B2201/034 ,  B81B2203/01 ,  B81B2203/0145 ,  B81B2203/056 ,  B81B2203/058

Abstract: A platform includes first and second actuation layers. The first actuation layer includes first and second frames and a plurality of actuators connected between the first frame and the second frame, wherein the plurality of actuators are adapted to move the first and second frames with respect to each other in a first direction. The second actuation layer includes third and fourth frames and a plurality of actuators connected between the third frame and the fourth frame, wherein the plurality of actuators are adapted to move the third frame and the fourth frame with respect to each other in a second direction, different from the first direction. Thereby, the fourth frame of the second actuation layer and the second frame of the first actuation layer are mechanically connected to each other, such that the second actuation layer experiences the movement in the first direction induced by the first actuation layer.

公开(公告)号：US20180213154A1

公开(公告)日：2018-07-26

申请号：US15413210

申请日：2017-01-23

Applicant: Faez BA-TIS ,  Ridha BEN-MRAD

Inventor： Faez BA-TIS ,  Ridha BEN-MRAD

IPC: H04N5/232 ,  H04N5/225 ,  B81B3/00

CPC classification number: H04N5/23287 ,  B81B3/0029 ,  B81B2201/034 ,  B81B2201/047 ,  B81B2203/0136 ,  H04N5/2253 ,  H04N5/2254 ,  H04N5/23212

Abstract: Miniature camera modules that achieve autofocus (AF) and optical image stabilization (OIS) using piston-tube electrostatic actuators are disclosed. Various embodiments of the camera modules that work on two main mechanisms are disclosed. The two mechanisms are the whole barrel motion leading to AF and OIS and the single lens motion leading to AF. The MEMS actuator is integrated within a housing which is, in turn, coupled with an image sensor module. Autofocus is achieved by a translational motion of the piston-tube electrostatic actuator to translate the whole barrel back and forth. OIS is achieved by tilting the whole barrel using the tilting action of the piston-tube actuator.

公开(公告)号：US09664897B1

公开(公告)日：2017-05-30

申请号：US14883474

申请日：2015-10-14

Applicant: Intel Corporation

Inventor： Arnon Hirshberg

IPC: G02B26/08 ,  G02B26/10 ,  H02N1/00

CPC classification number: G02B26/085 ,  B81B5/00 ,  B81B2201/034 ,  G02B26/105 ,  H02K33/18 ,  H02N1/006

Abstract: Embodiments of the present disclosure are directed toward an apparatus with a rotatable MEMS device. The apparatus may include a magnetic circuit with two magnets disposed opposite each other to produce a magnetic field between the magnets. The MEMS device may be placed in a frame disposed between the magnets. The MEMS device may include a driving coil disposed around the device, and may be rotatable around a first axis of the frame, in response to application of electromagnetic force produced by interaction of electric current to pass through the driving coil, with the magnetic field. The frame may include another driving coil, and may be rotatable around a second axis orthogonal to first axis, in response to application of electromagnetic force produced by interaction of electric current to pass through the second driving coil, with the magnetic field. Other embodiments may be described and/or claimed.

公开(公告)号：US09546508B2

公开(公告)日：2017-01-17

申请号：US14825213

申请日：2015-08-13

Applicant: Raviv Erlich ,  Yuval Gerson

Inventor： Raviv Erlich ,  Yuval Gerson

IPC: E05D7/00 ,  E05D11/00 ,  B81B3/00 ,  B81C1/00 ,  E05D1/02 ,  G02B26/08

CPC classification number: F16C11/12 ,  B81B3/0043 ,  B81B2201/0235 ,  B81B2201/034 ,  B81B2201/042 ,  B81B2203/0118 ,  B81B2203/0163 ,  B81C1/0015 ,  B81C1/00198 ,  B81C1/00523 ,  B81C2201/013 ,  E05D1/02 ,  E05D7/00 ,  E05D11/0081 ,  F16F1/48 ,  F16F2224/025 ,  F16F2226/00 ,  F16F2226/042 ,  G01C19/02 ,  G01P15/09 ,  G01P15/093 ,  G01P15/125 ,  G02B26/0833 ,  G02B26/105 ,  Y10T16/522 ,  Y10T16/525 ,  Y10T29/24 ,  Y10T29/25

Abstract: A mechanical device includes a long, narrow element made of a rigid, elastic material. A rigid frame is configured to anchor at least one end of the element, which is attached to the frame, and to define a gap running longitudinally along the element between the beam and the frame, so that the element is free to move within the gap. A solid filler material, different from the rigid, elastic material, fills at least a part of the gap between the element and the frame so as to permit a first mode of movement of the element within the gap while inhibiting a different, second mode of movement.

Abstract translation: 机械装置包括由刚性弹性材料制成的长而窄的元件。 刚性框架构造成锚固附接到框架的元件的至少一个端部并且限定沿着梁和框架之间的元件纵向延伸的间隙，使得元件在间隙内自由移动 。 与刚性弹性材料不同的固体填充材料填充元件和框架之间的间隙的至少一部分，以便允许元件在间隙内的第一移动模式，同时抑制不同的第二模式 运动。

公开(公告)号：US09470090B2

公开(公告)日：2016-10-18

申请号：US14696266

申请日：2015-04-24

Applicant: Lee Ervin

Inventor： Lee Ervin

IPC: F01D1/18 ,  F01D25/14 ,  F01D25/00 ,  B81B5/00 ,  F03B17/00

CPC classification number: F01D1/18 ,  B81B5/00 ,  B81B2201/03 ,  B81B2201/034 ,  B81B2203/06 ,  F01D25/005 ,  F01D25/14 ,  F03B17/00 ,  Y02E10/20 ,  Y02E10/28

Abstract: A device for converting the kinetic energy of molecules into useful work includes an actuator configured to move within a fluid or gas due to collisions with the molecules of the fluid or gas. The actuator has dimensions that subject it to the Brownian motion of the surrounding molecules. The actuator utilizes objects having multiple surfaces where the different surfaces result in differing coefficients of restitution. The Brownian motion of surrounding molecules produce molecular impacts with the surfaces. Each surface then experiences relative differences in transferred energy from the kinetic collisions. The sum effect of the collisions produces net velocity in a desired direction. The controlled motion can be utilized in a variety of manners to perform work, such as generating electricity or transporting materials.

公开(公告)号：US09441931B1

公开(公告)日：2016-09-13

申请号：US14756652

申请日：2015-09-29

Applicant: Department of the Navy

Inventor： Troy Caruso ,  Thinh Hoang ,  Daniel Jean ,  Kevin Cochran ,  Andrew Jen ,  Scott Rauscher ,  Kristopher Nodianos

IPC: F42C15/188 ,  F42C15/40 ,  F42C19/12 ,  B81B3/00 ,  B81C1/00

CPC classification number: F42C15/188 ,  B81B3/0024 ,  B81B2201/031 ,  B81B2201/034 ,  B81B2203/056 ,  F42C15/40

Abstract: An apparatus used in a fuze device, which includes a MEMS micro-rotor. The micro-rotor of the apparatus may move an explosive material, for example, a fuze material, from an out-of-line position to an in-line position. The micro-rotor includes an integral cavity in which the material may be safely loaded and held in the out-of-line position. At an appropriate time, the fuze device of a fully assembled ordnance may be armed. When the apparatus is activated, the micro-rotor carefully moves the explosive material to the in-line position, where the ordnance is armed.

Abstract translation: 一种在引信装置中使用的装置，其包括MEMS微转子。 装置的微型转子可以将爆炸物质例如引信材料从脱线位置移动到直列位置。 微转子包括整体空腔，其中材料可以被安全地装载并保持在离线位置。 在适当的时候，完全组装的军械的引信装置可以装备。 当设备启动时，微型转子会将爆炸物小心地移动到装备武器的在线位置。

公开(公告)号：US09150405B2

公开(公告)日：2015-10-06

申请号：US14310247

申请日：2014-06-20

Applicant: THE CHARLES STARK DRAPER LABORATORY, INC.

Inventor： David Carter ,  Marc S. Weinberg ,  Eugene H. Cook ,  Peter Miraglia

IPC: B81C1/00 ,  F16C33/04 ,  F04B19/00 ,  G01C19/06 ,  F04D25/00

CPC classification number: B81C1/00198 ,  B81B2201/0242 ,  B81B2201/034 ,  F04B19/006 ,  F04D13/00 ,  F04D25/00 ,  F16C33/04 ,  G01C19/06 ,  Y10T74/12

Abstract: In one embodiment, a rotary device includes a multiwall nanotube that extends substantially perpendicularly from a substrate. A rotor may be coupled to an outer wall of the multiwall nanotube, be spaced apart from the substrate, and be free to rotate around an elongate axis of the multiwall nanotube.

Abstract translation: 在一个实施例中，旋转装置包括从衬底基本上垂直延伸的多壁纳米管。 转子可以耦合到多壁纳米管的外壁，与基底间隔开，并且可以围绕多壁纳米管的细长轴自由旋转。

公开(公告)号：US09140042B2

公开(公告)日：2015-09-22

申请号：US14207796

申请日：2014-03-13

Applicant: Raviv Erlich ,  Yuval Gerson

Inventor： Raviv Erlich ,  Yuval Gerson

IPC: E05D1/02 ,  B81C1/00 ,  G02B26/08

CPC classification number: F16C11/12 ,  B81B3/0043 ,  B81B2201/0235 ,  B81B2201/034 ,  B81B2201/042 ,  B81B2203/0118 ,  B81B2203/0163 ,  B81C1/0015 ,  B81C1/00198 ,  B81C1/00523 ,  B81C2201/013 ,  E05D1/02 ,  E05D7/00 ,  E05D11/0081 ,  F16F1/48 ,  F16F2224/025 ,  F16F2226/00 ,  F16F2226/042 ,  G01C19/02 ,  G01P15/09 ,  G01P15/093 ,  G01P15/125 ,  G02B26/0833 ,  G02B26/105 ,  Y10T16/522 ,  Y10T16/525 ,  Y10T29/24 ,  Y10T29/25

Abstract: A mechanical device includes a long, narrow element made of a rigid, elastic material. A rigid frame is configured to anchor at least one end of the element, which is attached to the frame, and to define a gap running longitudinally along the element between the beam and the frame, so that the element is free to move within the gap. A solid filler material, different from the rigid, elastic material, fills at least a part of the gap between the element and the frame so as to permit a first mode of movement of the element within the gap while inhibiting a different, second mode of movement.

Abstract translation: 机械装置包括由刚性弹性材料制成的长而窄的元件。 刚性框架构造成锚固附接到框架的元件的至少一个端部并且限定沿着梁和框架之间的元件纵向延伸的间隙，使得元件在间隙内自由移动 。 与刚性弹性材料不同的固体填充材料填充元件和框架之间的间隙的至少一部分，以便允许元件在间隙内的第一移动模式，同时抑制不同的第二模式 运动。