公开(公告)号：US20080257867A1

公开(公告)日：2008-10-23

申请号：US11661474

申请日：2005-08-26

Applicant: Ajay P Malshe ,  Kumar R. Virwani ,  Kalmakar P. Rajurkar

Inventor： Ajay P Malshe ,  Kumar R. Virwani ,  Kalmakar P. Rajurkar

IPC: H01L21/00

CPC classification number: B81C1/00492 ,  B81C2201/0145 ,  G01Q80/00

Abstract: An apparatus for nano-scale electric discharge machining of a conductive workpiece. In one embodiment, the apparatus includes a dielectric medium deposited on a surface of the workpiece to form a dielectric layer having a thickness, a positioning device capable of moving in three dimensions, an electrode having a nano-scaled tip and mounted to the positioning device, a power source electrically coupled with the electrode and the workpiece, and a controller in communication with the positioning device for generating a signal to cause the nano-scaled tip of the electrode to move to a desired position over the surface of the workpiece. In operation a biasing voltage over a threshold voltage is applied from the power source between the nano-scaled tip of the electrode and the surface of the workpiece such that an avalanche current is formed across the nano-scaled tip of the electrode and the surface of the workpiece to perform machining of the workpiece.

Abstract translation: 一种用于导电工件的纳米级放电加工的装置。 在一个实施例中，该装置包括沉积在工件的表面上以形成具有厚度的电介质层的电介质介质层，能够三维移动的定位装置，具有纳米级尖端的电极并安装到定位装置 与电极和工件电耦合的电源，以及与定位装置连通的控制器，用于产生信号以使电极的纳米级尖端移动到工件表面上的期望位置。 在操作中，从电源在电极的纳米级尖端和工件表面之间施加超过阈值电压的偏置电压，使得在电极的纳米级尖端和跨越电极的表面形成雪崩电流 工件对工件进行加工。

公开(公告)号：US20160035513A1

公开(公告)日：2016-02-04

申请号：US14883843

申请日：2015-10-15

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Stephen E. LUCE ,  Anthony K. STAMPER

IPC: H01H11/00 ,  H01H59/00 ,  B81C1/00

CPC classification number: B81C1/00698 ,  B81C1/0015 ,  B81C1/00166 ,  B81C1/00523 ,  B81C2201/0132 ,  B81C2201/0133 ,  B81C2201/0145 ,  B81C2201/0154 ,  B81C2203/0145 ,  H01H1/0036 ,  H01H1/58 ,  H01H11/00 ,  H01H49/00 ,  H01H59/00 ,  H01H59/0009 ,  H01H2059/0018 ,  Y10T29/49105

Abstract: MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.

公开(公告)号：US20160035510A1

公开(公告)日：2016-02-04

申请号：US14883745

申请日：2015-10-15

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Stephen E. LUCE ,  Anthony K. STAMPER

IPC: H01H11/00 ,  H01H59/00 ,  B81C1/00

CPC classification number: B81C1/00698 ,  B81C1/0015 ,  B81C1/00166 ,  B81C1/00523 ,  B81C2201/0132 ,  B81C2201/0133 ,  B81C2201/0145 ,  B81C2201/0154 ,  B81C2203/0145 ,  H01H1/0036 ,  H01H1/58 ,  H01H11/00 ,  H01H49/00 ,  H01H59/00 ,  H01H59/0009 ,  H01H2059/0018 ,  Y10T29/49105

Abstract: MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.

公开(公告)号：US20130192964A1

公开(公告)日：2013-08-01

申请号：US13826070

申请日：2013-03-14

Applicant: International Business Machines Corporation

Inventor： Stephen E. LUCE ,  Anthony K. STAMPER

IPC: H01H59/00 ,  H01H11/00

CPC classification number: B81C1/00698 ,  B81C1/0015 ,  B81C1/00166 ,  B81C1/00523 ,  B81C2201/0132 ,  B81C2201/0133 ,  B81C2201/0145 ,  B81C2201/0154 ,  B81C2203/0145 ,  H01H1/0036 ,  H01H1/58 ,  H01H11/00 ,  H01H49/00 ,  H01H59/00 ,  H01H59/0009 ,  H01H2059/0018 ,  Y10T29/49105

Abstract: MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.

公开(公告)号：US20090260961A1

公开(公告)日：2009-10-22

申请号：US12107118

申请日：2008-04-22

Applicant: Stephen E. Luce ,  Anthony K. Stamper

Inventor： Stephen E. Luce ,  Anthony K. Stamper

IPC: H01H57/00 ,  H01H11/00

CPC classification number: B81C1/00698 ,  B81C1/0015 ,  B81C1/00166 ,  B81C1/00523 ,  B81C2201/0132 ,  B81C2201/0133 ,  B81C2201/0145 ,  B81C2201/0154 ,  B81C2203/0145 ,  H01H1/0036 ,  H01H1/58 ,  H01H11/00 ,  H01H49/00 ,  H01H59/00 ,  H01H59/0009 ,  H01H2059/0018 ,  Y10T29/49105

Abstract: MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.

Abstract translation: 提供MEMS开关和制造MEMS开关的方法。 所述MEMS开关具有至少两个悬臂电极，所述至少两个悬臂电极具有重叠的端部，并且在被至少一个固定电极施加电压时被构造和可操作以彼此接触。

公开(公告)号：US11830743B2

公开(公告)日：2023-11-28

申请号：US17305295

申请日：2021-07-02

Applicant: Board of Regents, The University of Texas System

Inventor： Ali E. Aliev ,  Ray H. Baughman

IPC: H01L21/3213 ,  B81C99/00 ,  H10K71/20 ,  H01J19/24

CPC classification number: H01L21/32136 ,  B81C99/001 ,  H01J19/24 ,  H10K71/233 ,  B81C2201/0145

Abstract: A dry-state non-contact method for patterning of nanostructured conducting materials is disclosed. Short self-generated electron-emission pulses in air at atmospheric pressure can enable an electron-emission-based (field enhancement) interaction between a sharp tungsten tip and elements of the nanostructured materials to cause largely non-oxidative sequential decomposition of the nanostructured elements. Embodiments can employ a substrate/tip gap of 10 to 20 nm, discharge voltages of 25-30 V, and patterning speeds as fast as 10 cm/s to provide precisely patterned nanostructures (

公开(公告)号：US10017383B2

公开(公告)日：2018-07-10

申请号：US14883825

申请日：2015-10-15

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Stephen E. Luce ,  Anthony K. Stamper

IPC: B81C1/00 ,  H01H59/00 ,  H01H11/00 ,  H01H49/00 ,  H01H1/58

CPC classification number: B81C1/00698 ,  B81C1/0015 ,  B81C1/00166 ,  B81C1/00523 ,  B81C2201/0132 ,  B81C2201/0133 ,  B81C2201/0145 ,  B81C2201/0154 ,  B81C2203/0145 ,  H01H1/0036 ,  H01H1/58 ,  H01H11/00 ,  H01H49/00 ,  H01H59/00 ,  H01H59/0009 ,  H01H2059/0018 ,  Y10T29/49105

Abstract: An approach includes a method of fabricating a switch. The approach includes forming a fixed electrode, forming a first cantilevered electrode, forming a second cantilevered electrode aligned vertically over the first fixed electrode, and which has an end that overlaps and is operable to directly contact an end of the first cantilevered electrode upon an application of a voltage to the fixed electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.

公开(公告)号：US09944518B2

公开(公告)日：2018-04-17

申请号：US14883843

申请日：2015-10-15

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Stephen E. Luce ,  Anthony K. Stamper

IPC: H01H11/00 ,  H01H49/00 ,  B81C1/00 ,  H01H59/00 ,  H01H1/58

CPC classification number: B81C1/00698 ,  B81C1/0015 ,  B81C1/00166 ,  B81C1/00523 ,  B81C2201/0132 ,  B81C2201/0133 ,  B81C2201/0145 ,  B81C2201/0154 ,  B81C2203/0145 ,  H01H1/0036 ,  H01H1/58 ,  H01H11/00 ,  H01H49/00 ,  H01H59/00 ,  H01H59/0009 ,  H01H2059/0018 ,  Y10T29/49105

Abstract: An approach includes a method of fabricating a switch. The approach includes forming a first fixed electrode and a second fixed electrode, forming a first cantilevered electrode aligned vertically over the first fixed electrode, forming a second cantilevered electrode aligned vertically over the first fixed electrode and which has an end that overlaps the first cantilevered electrode, forming a third cantilevered electrode aligned vertically over the second fixed electrode and operable to directly contact the first cantilevered electrode upon an application of a voltage to the second fixed electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.

公开(公告)号：US20180016138A1

公开(公告)日：2018-01-18

申请号：US15717234

申请日：2017-09-27

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Stephen E. LUCE ,  Anthony K. STAMPER

IPC: B81C1/00 ,  H01H49/00 ,  H01H59/00 ,  H01H11/00 ,  H01H1/58

CPC classification number: B81C1/00698 ,  B81C1/0015 ,  B81C1/00166 ,  B81C1/00523 ,  B81C2201/0132 ,  B81C2201/0133 ,  B81C2201/0145 ,  B81C2201/0154 ,  B81C2203/0145 ,  H01H1/0036 ,  H01H1/58 ,  H01H11/00 ,  H01H49/00 ,  H01H59/00 ,  H01H59/0009 ,  H01H2059/0018 ,  Y10T29/49105

Abstract: An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode operable to directly contact a second fixed electrode upon an application of a voltage to a first fixed electrode, forming a second cantilevered electrode with an end that overlaps the first cantilevered electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.

公开(公告)号：US09718681B2

公开(公告)日：2017-08-01

申请号：US15012314

申请日：2016-02-01

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Stephen E. Luce ,  Anthony K. Stamper

IPC: H01H11/00 ,  H01H65/00 ,  B81C1/00 ,  H01H59/00 ,  H01H49/00 ,  H01H1/58

CPC classification number: B81C1/00698 ,  B81C1/0015 ,  B81C1/00166 ,  B81C1/00523 ,  B81C2201/0132 ,  B81C2201/0133 ,  B81C2201/0145 ,  B81C2201/0154 ,  B81C2203/0145 ,  H01H1/0036 ,  H01H1/58 ,  H01H11/00 ,  H01H49/00 ,  H01H59/00 ,  H01H59/0009 ,  H01H2059/0018 ,  Y10T29/49105

Abstract: MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.