公开(公告)号：US20190025226A1

公开(公告)日：2019-01-24

申请号：US16037088

申请日：2018-07-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Akio ISHIKAWA ,  Ken OZAWA ,  Kwang-Soo KIM ,  Sean PARK ,  Mitsunori NUMATA

IPC: G01N21/88 ,  G02B27/42 ,  G06T7/00

CPC classification number: G01N21/8806 ,  G01N21/956 ,  G01N2201/06 ,  G02B27/42 ,  G06T7/0002 ,  G06T2207/10152

Abstract: An imaging apparatus includes an illumination light source to output an illumination light, an illumination optical system to transmit the illumination light toward a sample, an imaging optical system to transmit light reflected from the sample, a stage to move the sample in a predetermined transfer direction, and a photographing unit to receive the reflected light. The imaging apparatus may include one or more diffraction grids located at conjugate focal planes of the sample. The operation of the photographing unit may be synchronized with a movement of the sample by the stage to obtain an image in accordance with a time delay integration method.

公开(公告)号：US09773304B2

公开(公告)日：2017-09-26

申请号：US15382762

申请日：2016-12-19

Applicant: Keyence Corporation

Inventor： Norimasa Mayumi

IPC: G06K9/00 ,  G06T7/00 ,  G06T7/586 ,  H04N13/02 ,  H04N5/225 ,  G06K9/18 ,  G01N21/88

CPC classification number: H04N13/207 ,  G01N21/88 ,  G01N21/8803 ,  G01N21/8806 ,  G01N2201/06 ,  G06K9/18 ,  G06T7/0004 ,  G06T7/586 ,  G06T2207/10016 ,  G06T2207/10152 ,  G06T2207/20016 ,  G06T2207/30164 ,  H04N5/2256

Abstract: A photometric processing part calculates a normal vector of a surface of a workpiece from a plurality of luminance images acquired by a camera in accordance with the photometric stereo method, and performs synthesis processing of synthesizing at least two images out of an inclination image made up of pixel values based on the normal vector calculated from the plurality of luminance images and at least one reduced image of the inclination image, to generate an inspection image showing a surface shape of the inspection target. In particular, a characteristic size setting part sets a characteristic size which is a parameter for giving weight to a component of a reduced image at the time of performing the synthesis processing. The photometric processing part can generate a different inspection image in accordance with the set characteristic size.

公开(公告)号：US09719940B2

公开(公告)日：2017-08-01

申请号：US14875084

申请日：2015-10-05

Applicant: KLA-TENCOR CORPORATION

Inventor： Amnon Manassen ,  Andrew Hill ,  Avi Abramov

IPC: G01J4/00 ,  G01N21/88 ,  G01J3/02 ,  G01N21/956 ,  G03F7/20 ,  G01N21/95 ,  G01N21/47

CPC classification number: G01N21/8806 ,  G01J1/0228 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/2823 ,  G01N21/47 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95623 ,  G01N2021/8848 ,  G01N2201/06 ,  G03F7/70633

Abstract: Methods and systems are provided, which pattern an illumination of a metrology target with respect to spectral ranges and/or polarizations, illuminate a metrology target by the patterned illumination, and measure radiation scattered from the target by directing, at a pupil plane, selected pupil plane pixels from a to respective single detector(s) by applying a collection pattern to the pupil plane pixels. Single detector measurements (compressive sensing) has increased light sensitivity which is utilized to pattern the illumination and further enhance the information content of detected scattered radiation with respect to predefined metrology parameters.

公开(公告)号：US20170115206A1

公开(公告)日：2017-04-27

申请号：US15301749

申请日：2015-03-31

Applicant: Nederlandse Organisatie voor toegepast-natuurweten schappelijk onderzoek TNO

Inventor： Bart Michiel DE BOER, Boer ,  Peter Johan HARMSMA ,  Dario Maria Rosario LO CASCIO

IPC: G01N21/03 ,  G02B6/34 ,  G01N21/05

CPC classification number: G01N21/0303 ,  G01N21/05 ,  G01N21/552 ,  G01N21/7746 ,  G01N21/8483 ,  G01N2021/0321 ,  G01N2021/0367 ,  G01N2201/06 ,  G01N2201/0873 ,  G02B6/34 ,  G02B6/4225

Abstract: The present disclosure concerns an apparatus (10) and method for reading out an optical chip (20). A light source (13) is arranged for emitting single mode source light (S1) from its emitter surface (A1) towards an optical input (21) of the optical chip (20). A light detector (14) is arranged for receiving measurement light (S2) impinging onto its receiver surface (A2) from an optical output (22) of the optical chip (20), and measuring said received measurement light (S2). The emitted source light (S1) is aligned to enter the optical input (21) of the optical chip (20) and the measurement light (S2) is aligned back onto the receiver surface (A2). The receiver surface (A2) is larger than the emitter surface (A1) for facilitating the overall alignment.

公开(公告)号：US20170003222A1

公开(公告)日：2017-01-05

申请号：US15106856

申请日：2014-12-10

Applicant: Koninklijke Philips N.V.

Inventor： Jacobus Hermanus Maria NEIJZEN ,  Johannes Joseph Hubertina Barbara SCHLEIPEN

IPC: G01N21/552

CPC classification number: G01N21/552 ,  G01N15/1436 ,  G01N21/27 ,  G01N2015/1452 ,  G01N2201/06 ,  G02B21/18

Abstract: The invention relates to a detection apparatus (1) for detecting particles on or close to a particles detection surface (5) in a first optical detection mode and in a second optical detection mode, wherein a component of a light detection system (8) and/or a component of an optical system (9) of the detection apparatus is arranged to be used in the first detection mode and in the second detection mode. Since a component of the light detection system and/or a component of the optical system is arranged to be used in the first detection mode and in the second detection mode, this component does not need to be provided twice, i.e. for being used in the first detection mode and for being used in the second detection mode. This can lead to a reduced number of components and can make the detection apparatus technically less complex.

Abstract translation: 本发明涉及一种用于在第一光学检测模式和第二光学检测模式中检测颗粒检测表面（5）上或附近的颗粒的检测装置（1），其中光检测系统（8）和 /或检测装置的光学系统（9）的部件被布置成在第一检测模式和第二检测模式中使用。 由于光检测系统的组件和/或光学系统的组件被布置成在第一检测模式和第二检测模式中使用，所以该组件不需要提供两次，即用于 第一检测模式并用于第二检测模式。 这可能导致部件数量减少，并且可以使检测装置技术上不那么复杂。

公开(公告)号：US20150355101A1

公开(公告)日：2015-12-10

申请号：US14716901

申请日：2015-05-20

Applicant: KEYENCE CORPORATION

Inventor： Zhuoli Sun

IPC: G01N21/88 ,  G06T7/00 ,  H04N13/02

CPC classification number: G01N21/8806 ,  G01N2201/06 ,  G06T7/0004 ,  G06T7/0008 ,  G06T7/586 ,  G06T2207/10152 ,  G06T2207/30164 ,  H04N13/207 ,  H04N13/254

Abstract: An image inspection apparatus includes: an imaging section for capturing an image of a workpiece from a certain direction; an illumination section for illuminating the workpiece from different directions at least three times; an illumination controlling section for sequentially turning on the illumination sections one by one; an imaging generating section for driving the imaging section to generate a plurality of images; a normal vector calculating section for calculating a normal vector with respect to the surface of the workpiece at each of pixels by use of a pixel value of each of pixels having a corresponding relation among the plurality of images; and a contour image generating section for performing differential processing in an X-direction and a Y-direction on the calculated normal vector at each of the pixels, to generate a contour image that shows a contour of inclination of the surface of the workpiece.

Abstract translation: 图像检查装置包括：成像部，用于从特定方向捕获工件的图像; 用于从不同方向照射工件至少三次的照明部分; 照明控制部分，用于逐个依次打开照明部分; 成像产生部分，用于驱动成像部分以产生多个图像; 法线矢量计算部，其通过使用在所述多个图像中具有对应关系的每个像素的像素值来计算相对于每个像素处的所述工件的表面的法线矢量; 以及轮廓图像生成部件，用于在每个像素上对所计算的法线矢量在X方向和Y方向上执行差分处理，以生成表示工件表面的倾斜轮廓的轮廓图像。

公开(公告)号：US20130289919A1

公开(公告)日：2013-10-31

申请号：US13457952

申请日：2012-04-27

Applicant: David J. Wilson, JR. ,  Douglas Morris

Inventor： David J. Wilson, JR. ,  Douglas Morris

IPC: G01N21/35 ,  G06F19/00 ,  G01N21/88

CPC classification number: B01D46/0086 ,  G01N21/59 ,  G01N2201/06

Abstract: A clogged filter detector has a transmitter and a sensor which are held in place by a transmitter bracket and a sensor bracket, respectively. The transmitter emits a beam of electromagnetic radiation, and the sensor is positioned in the path of this beam at a point such that the beam travels through a filter between the transmitter and the sensor. The transmitter and sensor are misaligned with the air flow at the point where the beam contacts the filter. The transmitter alternates between a transmitting mode and a dormant mode, and the transmitter emits a plurality of electromagnetic pulses during each transmitting mode.

Abstract translation: 堵塞的过滤器检测器具有分别由变送器支架和传感器支架保持在适当位置的变送器和传感器。 发射器发射电磁辐射束，并且传感器定位在该光束的路径中，使得光束传播通过发射器和传感器之间的滤光器。 变送器和传感器与光束接触过滤器的点处的气流不对齐。 发射机在发射模式和休眠模式之间交替，并且发射机在每个发射模式期间发射多个电磁脉冲。

公开(公告)号：US20130223056A1

公开(公告)日：2013-08-29

申请号：US13740590

申请日：2013-01-14

Applicant: Bio-Rad Laboratories, Inc.

Inventor： James W. Hillendahl ,  Evelio Perez

IPC: F21V21/005 ,  F21V13/02 ,  F21V9/08

CPC classification number: F21V21/005 ,  F21V9/083 ,  F21V13/02 ,  G01N21/255 ,  G01N21/6452 ,  G01N21/6456 ,  G01N27/447 ,  G01N2021/6463 ,  G01N2021/6471 ,  G01N2201/06 ,  G01N2201/0626 ,  G01N2201/0635

Abstract: A planar sample, particularly of the type used in biological laboratories for detection and sometimes analysis of two-dimensional arrays of proteins, nucleic acids, or other biological species, is illuminated by epi-illumination using optically filtered line lights that are arranged along opposing parallel sides of a rectangle in which the sample array resides, with two coaxial line lights on each side of the rectangle, and the two on any given side being separated by a gap whose optimal width depends on the wavelength band transmitted by the optical filter. Surprisingly, the gap eliminates the peak in intensity at the center of the sample area and the decrease that occurs from the center outward that would otherwise occur with a single continuous filtered line light, producing instead a substantially uniform intensity along the direction parallel to the line lights.

Abstract translation: 平面样品，特别是用于生物实验室中用于检测和有时分析蛋白质，核酸或其他生物物种的二维阵列的类型的样品，通过使用沿着相对的平行排列的光学滤波的线光照射外照射 样品阵列所在的矩形的边，在矩形的每一侧上具有两根同轴线灯，并且任意给定侧上的两根被间隔开，该间隙的最佳宽度取决于由滤光器传输的波长带。 令人惊奇的是，间隙消除了样品区域中心处的强度峰值以及从中心向外发生的减少，否则会出现与单个连续过滤线条光线相反的方向，沿着平行于该线条的方向产生基本均匀的强度 灯光

公开(公告)号：US07431467B2

公开(公告)日：2008-10-07

申请号：US11020122

申请日：2004-12-27

Applicant: Günther Nath ,  Klaus T. Dünkel

Inventor： Günther Nath ,  Klaus T. Dünkel

IPC: F21V19/04 ,  F21V7/04

CPC classification number: G01N21/6447 ,  F21L4/00 ,  F21L4/06 ,  F21V7/22 ,  F21V9/08 ,  F21V21/22 ,  F21V29/67 ,  G01J3/0283 ,  G01J3/0291 ,  G01J3/10 ,  G01N2201/0221 ,  G01N2201/06 ,  G01N2201/06186 ,  G01N2201/08 ,  G02B6/0006

Abstract: Crime scene lighting devices are used in forensic criminology for illumination and investigation at crime scenes using fluorescence excitation. High radiation powers are required both for white light in the so-called general search and for the criminologically relevant UVA-blue-green range. Moreover, it should be possible for the crime scene investigator to use the forensic lighting device portably and independent from the public power supply. The present disclosure relates to a suitable crime scene light device with a mercury ultra high pressure lamp as the light source, a light guide and terminals for operating the lamp selectively with an accumulator or the public power supply system. A suitable carrier bag, a so-called lorgnette with various longpass filters and a cross-section converter for visualizing shoeprints form useful accessories of the forensic lighting device.

Abstract translation: 犯罪现场照明装置用于法医犯罪学，用于使用荧光激发的犯罪现场进行照明和调查。 对于所谓的一般搜索中的白光以及与犯罪学相关的UVA-蓝绿色范围，需要高辐射功率。 此外，犯罪现场调查人员应该可靠地使用法医照明装置，独立于公共电源。 本公开涉及一种具有汞超高压灯作为光源的合适的犯罪现场灯装置，用于选择性地使用蓄电池或公共供电系统来操作灯的导光体和端子。 合适的载体袋，所谓的具有各种长通滤光器的lorgnette和用于可视化shoeprint的横截面转换器形成了法医照明装置的有用附件。

公开(公告)号：US20240344975A1

公开(公告)日：2024-10-17

申请号：US18751514

申请日：2024-06-24

Applicant: Instrument Systems GmbH

Inventor： Elisabeth BOTHSCHAFTER ,  Ferdinand DEGER ,  Markus ESTERMANN ,  Reto HÄRING ,  Christoph KAPPEL ,  Jürgen NEUMEIER ,  Roland SCHANZ ,  Christof THALHAMMER

IPC: G01N21/31 ,  G01N21/25 ,  G06T7/90

CPC classification number: G01N21/31 ,  G01N21/251 ,  G06T7/90 ,  G01N2201/06 ,  G01N2201/0634 ,  G06T2207/10024 ,  G06T2207/20021

Abstract: The disclosure relates to an imaging system which is designed for two-dimensional, spatially resolved measurement of radiometric and/or photometric measured variables, for example the color coordinates of light emitted by a test object. An image sensor is provided for receiving a first part of the light and for generating a two-dimensional digital image of the light emission of the test object. A measuring unit receives a second part of the light and detects radiometric and/or photometric measured variables for different measuring spots or measuring angles. A computing unit transforms the image values of at least a few image points of the generated image, the transformation taking into account the measured variables detected for the measuring spots or measuring angles. The disclosure provides a system which is improved in relation to the prior art. For example, determining the color coordinates when measuring displays with spatially inhomogeneous spectral emission is more precise than in the prior art. The disclosure comprises an imaging spectrometer which is able to determine the measured variables separately for each measuring spot or measuring angle. Alternatively, two or more measuring units can be provided, a measuring unit being associated with each measuring spot or measuring angle. The disclosure also relates to a method for two-dimensional, spatially resolved measurement of radiometric and/or photometric measured variables, for example the color coordinates of light, which uses such an imaging system.