公开(公告)号：US3244936A

公开(公告)日：1966-04-05

申请号：US19303162

申请日：1962-04-03

Applicant: UNILECTRON INC

Inventor： HULL JOSEPH A

IPC: H01J61/00 ,  H05B43/00

CPC classification number: H05B43/00 ,  H01J61/00 ,  H01J2893/0063

公开(公告)号：US3218514A

公开(公告)日：1965-11-16

申请号：US20750562

申请日：1962-07-05

Applicant: MAX PLANCK GESELLSCHAFT

Inventor： GUNTHER BOLDT

IPC: G01N21/67 ,  H01J17/00 ,  H01J61/00 ,  H01T2/02

CPC classification number: H01T2/02 ,  G01N21/67 ,  H01J17/00 ,  H01J61/00 ,  H01J2893/0059 ,  H01J2893/0063

公开(公告)号：US2974256A

公开(公告)日：1961-03-07

申请号：US73167458

申请日：1958-04-29

Applicant: CENTRE NAT RECH SCIENT

Inventor： LOUIS ROMAND JACQUES ,  BORIS VODAR

IPC: G01N21/67 ,  H01J17/00 ,  H01J61/00

CPC classification number: H01J17/00 ,  G01N21/67 ,  H01J61/00 ,  H01J2893/0059 ,  H01J2893/0063

公开(公告)号：US20240105440A1

公开(公告)日：2024-03-28

申请号：US18372590

申请日：2023-09-25

Applicant: KLA Corporation

Inventor： Ilya Bezel ,  Oleg Khodykin ,  John Szilagyi

IPC: H01J61/02 ,  H01J61/16 ,  H01J61/52 ,  H01S3/094

CPC classification number: H01J61/025 ,  H01J61/16 ,  H01J61/52 ,  H01S3/094026 ,  H01S3/094076 ,  H01J2893/0063

Abstract: A pulse-assisted LSP broadband light source in flowing high-pressure liquid or supercritical fluid is disclosed. The light source includes a fluid containment structure for containing a high-pressure liquid or supercritical fluid. The light source includes a primary laser pump source and a high-repetition pulse-assisting laser light source. wherein the primary laser pump source is configured to direct a primary pump beam into a plasma-forming region of the fluid. The primary beam and the pulsed-assisting beam are configured to sustain a plasma within the plasma-forming region of the fluid within the fluid containment structure. A light collector element is configured to collect broadband light emitted from the plasma for use in downstream applications.

公开(公告)号：US11776804B2

公开(公告)日：2023-10-03

申请号：US17696653

申请日：2022-03-16

Applicant: KLA Corporation

Inventor： Ilya Bezel ,  Leonid Borisovich Zvedenuk ,  Andrey Evgenievich Stepanov ,  Vitaly K. Rerikh ,  Boris Vasilyevich Potapkin

IPC: H01J61/52 ,  H01J65/04 ,  H05H1/46

CPC classification number: H01J61/52 ,  H01J65/04 ,  H05H1/46 ,  H01J2893/0063

Abstract: A laser-sustained plasma (LSP) light source with reverse vortex flow is disclosed. The LSP source includes gas cell including a gas containment structure including a body, neck, and shaft. The gas cell includes one or more gas delivery lines for delivery gas to one or more nozzles positioned in or below the neck of the gas containment structure. The gas cell includes one or more gas inlets and one or more gas outlets arranged to generate a reverse vortex flow within the gas containment structure of the gas cell. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.

公开(公告)号：US20040119394A1

公开(公告)日：2004-06-24

申请号：US10325997

申请日：2002-12-19

Inventor： Leonard E. Klebanoff ,  William T. Silfvast ,  Daniel J. Rader

IPC: H01J001/16 ,  H01J017/04

CPC classification number: H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70916 ,  H01J2893/0063

Abstract: Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.

Abstract translation: 用于通过热电泳和静电沉积减轻由放电源产生和分散的碎片的运输的方法和装置。 一个构件位于与放电源的前电极相邻并用于建立其与前电极之间的温度差。 通过在构件和前电极之间流动气体，建立温度梯度，该温度梯度可用于根据热梯度的方向将颗粒碎片热沉沉在构件或前电极上。 在构件和前电极之间建立电场可以通过静电沉积来帮助颗粒沉积。

公开(公告)号：US3475646A

公开(公告)日：1969-10-28

申请号：US3475646D

申请日：1967-04-10

Applicant: EVERETT CHAPMAN

Inventor： CHAPMAN EVERETT

IPC: H01J61/00 ,  H01T1/00 ,  H01T7/00

CPC classification number: H01T1/00 ,  H01J61/00 ,  H01J2893/0063

公开(公告)号：US3252046A

公开(公告)日：1966-05-17

申请号：US16261261

申请日：1961-12-27

Applicant: KERNS QUENTIN A ,  COX GERALD C ,  INNES THOMAS G ,  FLOOD WILLIAM S

Inventor： KERNS QUENTIN A ,  COX GERALD C ,  INNES THOMAS G ,  FLOOD WILLIAM S

IPC: H01J61/00

CPC classification number: H01J61/00 ,  H01J2893/0063

公开(公告)号：US3039018A

公开(公告)日：1962-06-12

申请号：US72477458

申请日：1958-03-28

Applicant: HEINZ FISCHER

Inventor： HEINZ FISCHER

IPC: H01J61/00

CPC classification number: H01J61/00 ,  H01J2893/0063

公开(公告)号：US2819427A

公开(公告)日：1958-01-07

申请号：US50139155

申请日：1955-04-14

Applicant: RAULAND CORP

Inventor： NOSKOWICZ THEODORE S

IPC: G03B21/20 ,  H01J61/00 ,  H01J61/28 ,  H01J61/98

CPC classification number: H01J61/98 ,  G03B21/2026 ,  H01J61/00 ,  H01J61/28 ,  H01J2893/0063