公开(公告)号：US06717147B2

公开(公告)日：2004-04-06

申请号：US09939674

申请日：2001-08-28

Applicant: Naoki Oda

Inventor： Naoki Oda

IPC: G01J520

CPC classification number: G01J5/08 ,  G01J5/0853 ,  G01J5/20 ,  G01J2005/068 ,  H04N5/33

Abstract: An infrared ray detector includes an array of pixels each including an infrared ray sensitive section having a first thermo-sensitive resistor and an infrared ray non-sensitive section having a second thermo-sensitive resistor. The second thermo-sensitive resistor is covered by an infrared ray reflector film. A pair of visors extending from the first thermo-sensitive resistor overhang the adjacent second thermo-sensitive resistor. A difference between the output signals from the first and second thermo-sensitive resistors is delivered as an output signal which cancels the fluctuation caused by the ambient temperature or Joule heat of the bias current.

Abstract translation: 一种红外线检测器，包括像素阵列，每个像素阵列包括具有第一热敏电阻器的红外线敏感部分和具有第二热敏电阻器的红外线非敏感部分。 第二个热敏电阻被红外线反射膜覆盖。 从第一热敏电阻延伸的一对遮阳板悬垂在相邻的第二热敏电阻上。 来自第一和第二热敏电阻器的输出信号之间的差异作为输出信号被输送，该输出信号消除由环境温度引起的波动或偏置电流的焦耳热。

公开(公告)号：US06489616B2

公开(公告)日：2002-12-03

申请号：US09811908

申请日：2001-03-19

Applicant: Ryan E. Giedd

Inventor： Ryan E. Giedd

IPC: G01J520

CPC classification number: H01L27/14669 ,  G01J5/04 ,  G01J5/046 ,  G01J5/20 ,  H01L27/14603

Abstract: The present invention is directed to an uncooled, infrared detector which includes a sensor having an amorphous surface layer containing organic carbon and a high dopant concentration which possesses an improved temperature coefficient of resistivity, as well as improved responsivity, and which may be patterned to form a focal plane array by means of common microlithographic techniques. The present invention is additionally directed to an “ion beam mixing” process for preparing the present infrared sensor.

Abstract translation: 本发明涉及一种非制冷的红外检测器，其包括具有包含有机碳的非晶表面层和高掺杂浓度的传感器，该掺杂剂浓度具有改进的电阻率温度系数以及改进的响应度，并且可以被图案化以形成 通过普通微光刻技术的焦平面阵列。 本发明另外涉及用于制备本红外传感器的“离子束混合”方法。

公开(公告)号：US06362483B1

公开(公告)日：2002-03-26

申请号：US09222707

申请日：1998-12-29

Applicant: Iam Keong Sou ,  Zhaohui Ma ,  Choi Lai Man ,  Zhi Yu Yang ,  Kam Sang Wong ,  George Ke-Lun Wong

Inventor： Iam Keong Sou ,  Zhaohui Ma ,  Choi Lai Man ,  Zhi Yu Yang ,  Kam Sang Wong ,  George Ke-Lun Wong

IPC: G01J520

CPC classification number: H01L31/0296 ,  H01L31/109

Abstract: Visible-blind UV detectors are disclosed comprising an active layer of ZnSTe alloy. The Te composition can be varied to provide good lattice matching depending on the nature of the substrate (eg Si, GaP or GaAs) and a novel structure is provided to give high quantum efficiency. The invention also discloses UV detectors with an active layer of pure ZnS and with an active layer of ZnSSe.

Abstract translation: 公开了可见盲UV检测器，其包括ZnSTe合金的有源层。 Te组合物可以改变以根据衬底的性质（例如Si，GaP或GaAs）提供良好的晶格匹配，并且提供新的结构以提供高量子效率。 本发明还公开了具有纯ZnS活性层和ZnSSe活性层的紫外检测器。

公开(公告)号：US06310346B1

公开(公告)日：2001-10-30

申请号：US09340850

申请日：1999-06-28

Applicant: Glenn D. Boreman ,  Iulian Cordreanu ,  Christophe Fumeaux ,  Michael Gritz ,  Christos Christodoulou

Inventor： Glenn D. Boreman ,  Iulian Cordreanu ,  Christophe Fumeaux ,  Michael Gritz ,  Christos Christodoulou

IPC: G01J520

CPC classification number: G01J5/08 ,  G01J5/0837 ,  G01J5/20 ,  G01J5/34

Abstract: A tuned antenna-coupled infrared detector is made possible by application of a bias voltage in the range of a few hundred millivolts. The use of first and second antenna arms connected to the detector makes possible polarization tuning which eliminates the need for bulk-optical polarization filters. An alternative tuned detector is one in which the antenna is frequency tuned by a capacitative device to make the detector particularly responsive to 8 um to 12 um infrared radiation. When integrated into focal plane arrays, these detectors can be used in remote-sensing systems to facilitate enhanced image recognition, feature extraction and image-clutter removal. One preferred version of the polarization tuned antenna has longitudinal metal antenna arms extending outward from an infrared(IR) sensor in a spiral pattern, with polarization tuning devices connected between the antenna arms, and a voltage for controlling the polarization tuning devices, wherein the polarization tuning devices enable real-time control of current distribution in the arms. For the frequency tuned sensors, the embodiment is preferably a microstrip antenna coupled to a bolometer wherein the sensor has a tunable response accomplished by use of a single substrate voltage on a separate capacitative device. The infrared(IR) sensors can be tunnel diodes, schottky diodes, photovoltaics, photoconductors, bolometers and pyroelectrics. Application areas can include earth-resource mapping, pollution monitoring, and general surveillance.

Abstract translation: 通过施加几百毫伏范围内的偏置电压，可以实现调谐天线耦合的红外检测器。 连接到检测器的第一和第二天线臂的使用使得可以进行极化调谐，这消除了对于体光偏振滤波器的需要。 一种替代的调谐检测器是其中天线由电容装置进行频率调谐的检测器，以使得检测器特别响应于8到12um的红外辐射。 当集成到焦平面阵列中时，这些检测器可用于遥感系统，以便于增强图像识别，特征提取和图像杂波去除。 偏振调谐天线的一个优选版本具有从螺旋图案的红外（IR）传感器向外延伸的纵向金属天线臂，其中连接在天线臂之间的偏振调谐装置和用于控制极化调谐装置的电压，其中极化 调谐装置使得能够实时地控制臂中的电流分布。 对于频率调谐的传感器，实施例优选地是耦合到测辐射热计的微带天线，其中传感器具有通过在单独的电容装置上使用单个衬底电压来实现的可调谐响应。 红外（IR）传感器可以是隧道二极管，肖特基二极管，光伏，光电导体，测辐射热计和热释电。 应用领域可以包括地球资源测绘，污染监测和一般监测。

公开(公告)号：US06730909B2

公开(公告)日：2004-05-04

申请号：US09844714

申请日：2001-04-27

Applicant: Neal R. Butler

Inventor： Neal R. Butler

IPC: G01J520

CPC classification number: H04N5/3651 ,  G01J5/10 ,  G01J5/16 ,  G01J5/20 ,  G01J5/22 ,  H04N5/2176 ,  H04N5/33 ,  H04N5/3655

Abstract: Methods and apparatus for compensating a radiation sensor for temperature variations of the sensor. In one example, the radiation sensor is a thermal sensor having at least one property that varies as a function of temperature. The thermal sensor outputs signals based on thermal radiation of interest from a particular radiating body in its view. These signals may contain significant undesirable components due in part to changes in temperature of the sensor itself. Methods and apparatus of the invention compensate the sensor for temperature variations of the sensor that are not due to the radiation of interest, so as to significantly reduce undesirable components in the instantaneous signals output by the sensor. In one example, this is accomplished without thermally stabilizing the sensor itself (i.e., dynamic temperature compensation). In another example, the sensor is thermally stabilized selectively at various predetermined temperatures as a function of the ambient temperature in the proximity of the sensor.

Abstract translation: 用于补偿传感器温度变化的辐射传感器的方法和装置。 在一个示例中，辐射传感器是具有随温度变化的至少一个特性的热传感器。 热传感器在其视图中根据特定辐射体输出感兴趣的热辐射信号。 这些信号可能部分地由于传感器本身的温度变化而含有显着的不合需要的部件。 本发明的方法和装置补偿传感器对传感器的温度变化不是由于感兴趣的辐射引起的，以便显着地减少由传感器输出的瞬时信号中的不期望的部件。 在一个示例中，这是在不使传感器本身热稳定（即，动态温度补偿）的情况下实现的。 在另一个示例中，传感器在传感器附近作为环境温度的函数在各种预定温度下被选择性地热稳定。

公开(公告)号：US06541763B2

公开(公告)日：2003-04-01

申请号：US10123582

申请日：2002-04-15

Applicant: Clinton L. Lingren ,  Stanley J. Friesenhahn ,  Jack F. Butler ,  F. Patrick Dory ,  William L. Ashburn ,  Frank L. Augustine ,  Boris Apotovsky

Inventor： Clinton L. Lingren ,  Stanley J. Friesenhahn ,  Jack F. Butler ,  F. Patrick Dory ,  William L. Ashburn ,  Frank L. Augustine ,  Boris Apotovsky

IPC: G01J520

CPC classification number: G01T1/161 ,  A61B6/037 ,  A61B6/4258 ,  G01T1/1642 ,  G01T1/2018 ,  G01T1/243 ,  G01T1/247 ,  H01L27/146 ,  H01L27/14658 ,  H01L27/14676 ,  H04N5/32

Abstract: A high-energy photon imaging system including an imaging head, a signal processor, a data acquisition system and an image processing computer. The imaging head includes a detector comprising a plurality of closely-packed detection modules. Each detection module comprises a plurality of detection elements mounted to a circuit carrier. The detection elements produce electrical pulses having amplitudes indicative of the magnitude of radiation absorbed by the detection elements. The circuit carrier includes channels for conditioning and processing the signals generated by corresponding detection elements and for preparing the processed signals for further processing by a signal processor. Each conditioning and processing channel stores the amplitudes of the detection element electrical pulses exceeding a predetermined threshold. The detection modules employ a fall-through circuit which automatically finds only those detection elements that have a stored pulse amplitude exceeding the threshold. The fall-through circuit searches for the next detection element and associated channel having a valid event. The signal processor performs diagnostics, gain normalization, and response efficiency normalization functions. The data acquisition system controls the acquisition and processing of data received from the conditioning and processing channels, produces image data based upon the data in a format that is compatible with existing imaging cameras, and transmits the data to the image processing computer. The image processing computer formulates images based upon the processed signals and displays the formulated images on a display device.

公开(公告)号：US06469301B1

公开(公告)日：2002-10-22

申请号：US09570767

申请日：2000-05-12

Applicant: Junji Suzuki ,  Tohru Ishizuya

Inventor： Junji Suzuki ,  Tohru Ishizuya

IPC: G01J520

CPC classification number: G01J5/38

Abstract: Radiation detector arrays are provided that include one or more thermal-type displaceable elements having reduced thickness without compromising mechanical strength or sensitivity of the displaceable elements to incident radiation. An exemplary displaceable element includes first and second membrane layers made of materials having different coefficients of thermal expansion. The layers are supported relative to a substrate by a leg. The displaceable element can also serve as an absorbing member for the incident radiation to be detected. Each element can also include a reflector of signal light. When the displaceable element incident radiation (such as infrared radiation) to be detected, it undergoes heating which bends the element. Displacement of the element is detected as a change in signal light or as a change in capacitance. If the displaceable member includes a signal-light reflector, the reflector includes a planar portion including “dropped” edges serving to strengthen the planar portion and allow the thickness of the planar portion to be reduced.

Abstract translation: 提供辐射检测器阵列，其包括具有减小的厚度的一个或多个热型可位移元件，而不会影响可移位元件对入射辐射的机械强度或灵敏度。 示例性可移位元件包括由具有不同热膨胀系数的材料制成的第一和第二膜层。 这些层通过腿部相对于基底支撑。 可移动元件还可以用作待检测的入射辐射的吸收构件。 每个元件还可以包括信号光的反射器。 当可移动元件入射辐射（例如红外辐射）被检测时，它经历加热使元件弯曲。 元件的位移被检测为信号光的变化或电容的变化。 如果可移动部件包括信号光反射器，则反射器包括平面部分，其包括用于加强平面部分的“下落”边缘，并允许平坦部分的厚度减小。

公开(公告)号：US06465784B1

公开(公告)日：2002-10-15

申请号：US09581808

申请日：2000-06-19

Applicant: Masafumi Kimata

Inventor： Masafumi Kimata

IPC: G01J520

CPC classification number: G01J5/20 ,  G01J5/34

Abstract: Infrared solid-state imaging elements include an infrared absorbing section formed as to correspond to each pixel aligned in a two-dimensional pattern for absorbing incident infrared radiation and converting the same into heat. A temperature detector section is formed as to correspond to each pixel on a semiconductor substrate and are arranged of a plurality of serially connected silicon pn junction diodes that are biased in a forward direction. A hollow section is formed on each region on which the temperature detector section is formed on the semiconductor substrate. Supporting mechanisms are arranged of materials exhibiting large thermal resistance and which support the temperature detector portion above the hollow section on the semiconductor substrate. A joint column thermally couples the infrared absorbing section and the temperature detector section.

Abstract translation: 红外固体成像元件包括形成为对应于以二维图案对准的每个像素的红外吸收部分，用于吸收入射的红外辐射并将其转换成热。 形成温度检测器部分，以对应于半导体衬底上的每个像素，并且被布置成沿正向偏置的多个串联的硅pn结二极管。 在半导体基板上形成有温度检测部的各区域上形成有中空部。 支撑机构布置有表现出大的热阻的材料，并且将温度检测器部分支撑在半导体衬底上的中空部分之上。 接头柱热耦合红外吸收部分和温度检测器部分。

公开(公告)号：US06459084B1

公开(公告)日：2002-10-01

申请号：US09481804

申请日：2000-01-12

Applicant: Glenn Boreman ,  Francisco Javier Gonzalez ,  Michael A. Gritz ,  Julian Codreanu ,  Christophe Fumeaux

Inventor： Glenn Boreman ,  Francisco Javier Gonzalez ,  Michael A. Gritz ,  Julian Codreanu ,  Christophe Fumeaux

IPC: G01J520

CPC classification number: G01J5/08 ,  G01J5/0837 ,  G01J5/20 ,  G01J5/34

Abstract: A small array of antenna-coupled infrared bolometer detectors is connected in parallel. This small array is suitable as an individual area-receiving pixel of an infrared focal plane array. These pixels will have better coupling efficiency to extended sources than are possible with individual antenna-coupled sensors, which have a spatial response on the order of one wavelength in dimension. This pixel can be used to provide the advantages of antenna-coupled IR sensors (e.g., fast response, wavelength tuning, and polarization tuning) while increasing the collection efficiency of the sensors to non-laser sources. When integrated into focal plane arrays, these detectors can be used in remote-sensing systems to facilitate enhanced image recognition, feature extraction and image-clutter removal. A preferred version of the pixel forming the focal plane array antenna has a plurality of two parallel longitudinal metal antenna arms extending outward and opposite from an infrared (IR) bolometer sensor to separate parallel contact pads connected in turn to a means for receiving the output from said antenna. Application areas can include earth-resource mapping, pollution monitoring, and general surveillance.

Abstract translation: 天线耦合红外测辐射热计检测器的一小部分并联连接。 该小阵列适合作为红外焦平面阵列的单个区域接收像素。 与单个天线耦合传感器相比，这些像素对于扩展源具有更好的耦合效率，其具有在一个波长尺寸上的空间响应。 该像素可以用于提供天线耦合的红外传感器的优点（例如，快速响应，波长调谐和极化调谐），同时将传感器的收集效率提高到非激光源。 当集成到焦平面阵列中时，这些检测器可用于遥感系统，以便于增强图像识别，特征提取和图像杂波去除。 形成焦平面阵列天线的像素的优选形式具有从红外（IR）测辐射热计传感器向外和相对延伸的多个两个平行的纵向金属天线臂，以将依次连接的并联接触焊盘分离成用于接收来自 所说天线。 应用领域可以包括地球资源测绘，污染监测和一般监测。

公开(公告)号：US06448557B2

公开(公告)日：2002-09-10

申请号：US09771879

申请日：2001-01-30

Applicant: Naoki Oda

Inventor： Naoki Oda

IPC: G01J520

CPC classification number: G01J5/02 ,  G01J5/0215 ,  G01J5/0225 ,  G01J5/0235 ,  G01J5/024 ,  G01J5/046 ,  G01J5/08 ,  G01J5/0853 ,  G01J5/20 ,  G01J2005/0077

Abstract: An infrared photosensitive area is constituted by an infrared ray absorbing part that is heated by infrared rays, a thermal detector that detects the temperature change of the infrared ray absorbing part, and electrodes that are electrically connected to the thermal detector. The infrared photosensitive area is held up above one surface of a substrate by supports. The electrodes of the infrared photosensitive area are electrically connected to contact pads on the substrate by wiring material that constitutes the support. A shield projects from portions of the infrared ray absorbing part other than portions that correspond to the electrodes. The contact pads of the substrate and the surfaces of the electrodes and the supports that are directed away from the substrate are covered by the shield with an interposed space. This configuration enables an increase in the fill factor of the picture elements of the thermal infrared detector and enables greater absorption of infrared light.

Abstract translation: 红外线感光区域由红外线加热的红外线吸收部分，检测红外线吸收部分的温度变化的热检测器和与热检测器电连接的电极构成。 红外线感光区域通过支撑体保持在基板的一个表面上方。 红外光敏区域的电极通过构成支撑体的布线材料电连接到基板上的接触焊盘。 除了与电极对应的部分之外，护罩从红外线吸收部的一部分突出。 衬底的接触焊盘和指向远离衬底的电极和支撑体的表面被屏蔽物覆盖，具有插入的空间。 该配置使得能够增加热红外检测器的像素的填充因子，并且能够更大程度地吸收红外光。