公开(公告)号：US20110233693A1

公开(公告)日：2011-09-29

申请号：US13128035

申请日：2009-11-25

Applicant: François Perruchot ,  Emmanuel Defay ,  Patrice Rey ,  Lianjun Liu ,  Sergio Pacheco

Inventor： François Perruchot ,  Emmanuel Defay ,  Patrice Rey ,  Lianjun Liu ,  Sergio Pacheco

IPC: H01L29/84 ,  H01L21/02

CPC classification number: B81B3/0072 ,  B81B2201/032 ,  H01L41/0933 ,  H01L41/094

Abstract: A micro or nano electromechanical transducer device formed on a semiconductor substrate comprises a movable structure which is arranged to be movable in response to actuation of an actuating structure. The movable structure comprises a mechanical structure comprising at least one mechanical layer having a first thermal response characteristic and a first mechanical stress response characteristic, at least one layer of the actuating structure, the at least one layer having a second thermal response characteristic different to the first thermal response characteristic and a second mechanical stress response characteristic different to the first mechanical stress response characteristic, a first compensation layer having a third thermal response characteristic and a third mechanical stress characteristic, and a second compensation layer having a fourth thermal response characteristic and a fourth mechanical stress response characteristic. The first and second compensation layers are arranged to compensate a thermal effect produced by the different first and second thermal response characteristics of the mechanical structure and the at least one layer of the actuating structure such that movement of the movable structure is substantially independent of variations in temperature and to adjust a stress effect produced by the different first and second stress response characteristics of the mechanical structure and the at least one layer of the actuating structure such that the movable structure is deflected a predetermined amount relative to the substrate when the electromechanical transducer device is in an inactive state.

Abstract translation: 形成在半导体衬底上的微型或纳米机电换能器装置包括可移动结构，其被布置成响应于致动结构的致动而是可移动的。 可移动结构包括机械结构，其包括具有第一热响应特性和第一机械应力响应特性的至少一个机械层，所述致动结构的至少一层，所述至少一层具有与 第一热响应特性和与第一机械应力响应特性不同的第二机械应力响应特性，具有第三热响应特性和第三机械应力特性的第一补偿层，以及具有第四热响应特性的第二补偿层和 第四机械应力响应特性。 第一和第二补偿层布置成补偿由机械结构和致动结构的至少一个层的不同的第一和第二热响应特性产生的热效应，使得可移动结构的移动基本上与 并且调节由所述机械结构和所述致动结构的所述至少一个层的不同的第一和第二应力响应特性产生的应力效应，使得当所述机电换能器装置 处于非活动状态。

公开(公告)号：US20110221307A1

公开(公告)日：2011-09-15

申请号：US13128032

申请日：2009-11-25

Applicant: Lianjun Liu ,  Sergio Pacheco ,  Francois Perruchot ,  Emmanuel Defay ,  Patrice Rey

Inventor： Lianjun Liu ,  Sergio Pacheco ,  Francois Perruchot ,  Emmanuel Defay ,  Patrice Rey

IPC: H01L41/04

CPC classification number: B81B3/0072 ,  B81B2201/032 ,  H01L41/0933 ,  H01L41/094

Abstract: A micro or nano electromechanical transducer device formed on a semiconductor substrate comprises a movable structure which is arranged to be movable in response to actuation of an actuating structure. The movable structure comprises a mechanical structure having at least one mechanical layer having a first thermal response characteristic, at least one layer of the actuating structure having a second thermal response characteristic different to the first thermal response characteristic, and a thermal compensation structure having at least one thermal compensation layer. The thermal compensation layer is different to the at least one layer and is arranged to compensate a thermal effect produced by the mechanical layer and the at least one layer of the actuating structure such that the movement of the movable structure is substantially independent of variations in temperature.

Abstract translation: 形成在半导体衬底上的微型或纳米机电换能器装置包括可移动结构，其被布置成响应于致动结构的致动而是可移动的。 可移动结构包括具有至少一个具有第一热响应特性的机械层的机械结构，至少一层致动结构具有不同于第一热响应特性的第二热响应特性，以及至少具有至少 一个热补偿层。 热补偿层不同于至少一个层，并且被布置成补偿由机械层和致动结构的至少一个层产生的热效应，使得可移动结构的运动基本上与温度变化无关 。

公开(公告)号：US07989906B2

公开(公告)日：2011-08-02

申请号：US11562331

申请日：2006-11-21

Applicant: Joseph Colby McAlexander, III

Inventor： Joseph Colby McAlexander, III

IPC: H01L49/02

CPC classification number: H01H35/14 ,  B81B2201/0235 ,  B81B2201/032 ,  B81C1/0015 ,  B81C2201/019 ,  G01P15/125 ,  G01P15/135 ,  G01P2015/0828 ,  H01H1/0036

Abstract: An acceleration sensor includes a semiconductor substrate, a first layer formed on the substrate, a first aperture within the first layer, and a beam coupled at a first end to the substrate and suspended above the first layer for a portion of the length thereof. The beam includes a first boss coupled to a lower surface thereof and suspended within the first aperture, and a second boss coupled to an upper surface of the second end of the beam. A second layer is positioned on the first layer over the beam and includes a second aperture within which the second boss is suspended by the beam. Contact surfaces are positioned within the apertures such that acceleration of the substrate exceeding a selected threshold in either direction along a selected axis will cause the beam to flex counter to the direction of acceleration and make contact through one of the bosses with one of the contact surfaces.

Abstract translation: 加速度传感器包括半导体衬底，形成在衬底上的第一层，第一层内的第一孔，以及在第一端处耦合到衬底并在其长度的一部分上悬浮在第一层上方的梁。 梁包括联接到其下表面并悬挂在第一孔内的第一凸起，以及联接到梁的第二端的上表面的第二凸台。 第二层位于梁上的第一层上，并且包括第二孔，第二凸起由梁悬挂在该第二孔内。 接触表面定位在孔内，使得沿着所选择的轴线在任一方向超过选定阈值的基底的加速度将导致梁相对于加速方向弯曲并且通过一个凸起与其中一个接触表面 。

公开(公告)号：US07971971B2

公开(公告)日：2011-07-05

申请号：US12786268

申请日：2010-05-24

Applicant: Gregory John McAvoy ,  Vincent Patrick Lawlor ,  Kia Silverbrook

Inventor： Gregory John McAvoy ,  Vincent Patrick Lawlor ,  Kia Silverbrook

IPC: B41J2/05

CPC classification number: B41J2/14427 ,  B41J2002/14435 ,  B41J2202/03 ,  B41J2202/15 ,  B81B3/0024 ,  B81B2201/032 ,  B81B2201/052

Abstract: An inkjet nozzle assembly includes: a nozzle chamber having a nozzle opening and an ink inlet; and a thermal bend actuator for ejecting ink through the nozzle opening. The actuator includes: an active beam for connection to drive circuitry; a first passive beam fused to the active beam; and a second passive beam fused to the second first passive beam. The first passive beam is sandwiched between the active beam and the second passive beam such that when a current is passed through the active beam, the active beam expands relative to the passive beams, resulting in bending of the actuator and ejection of ink through the nozzle opening.

Abstract translation: 喷墨喷嘴组件包括：具有喷嘴开口和墨入口的喷嘴室; 以及用于通过喷嘴开口喷射墨水的热弯曲致动器。 致动器包括：用于连接到驱动电路的主动梁; 与激活光束融合的第一被动束; 和与第二第一无源光束融合的第二无源光束。 第一无源光束夹在有源光束和第二无源光束之间，使得当电流通过有源光束时，有源光束相对于被动光束扩展，导致致动器弯曲并通过喷嘴喷射墨水 开放

公开(公告)号：US07939994B2

公开(公告)日：2011-05-10

申请号：US12300831

申请日：2007-05-16

Applicant: Mike Kunze ,  Ingo Daumiller

Inventor： Mike Kunze ,  Ingo Daumiller

IPC: H01L41/053 ,  H01L41/047

CPC classification number: F04B43/046 ,  B81B3/0024 ,  B81B2201/014 ,  B81B2201/016 ,  B81B2201/032 ,  H01F21/04 ,  H01F2007/068 ,  H01G5/18 ,  H01L41/047 ,  H01L41/0933 ,  H01L41/094 ,  H01L41/0973

Abstract: A semiconductor actuator includes a substrate base, a bending structure which is connected to the substrate base and can be deflected at least partially relative to the substrate base. The bending structure has semiconductor compounds on the basis of nitrides of main group III elements and at least two electrical supply contacts which impress an electrical current in or for applying an electrical voltage to the bending structure. At least two of the supply contacts are disposed at a spacing from each other respectively on the bending structure and/or integrated in the latter.

Abstract translation: 半导体致动器包括基板，弯曲结构，其连接到基板基底并且可相对于基板基底至少部分地偏转。 该弯曲结构基于主要III族元素的氮化物和至少两个给弯曲结构施加电压或施加电压的电流的电源触点而具有半导体化合物。 至少两个电源触点分别设置在弯曲结构上和/或与后者集成在一起的彼此间隔开。

公开(公告)号：US20110024274A1

公开(公告)日：2011-02-03

申请号：US12935282

申请日：2009-03-30

Applicant: Takaaki Yoshihara ,  Yoshiki Hayasaki ,  Takeo Shirai ,  Tomoaki Matsushima ,  Hiroshi Kawada ,  Yousuke Hagihara

Inventor： Takaaki Yoshihara ,  Yoshiki Hayasaki ,  Takeo Shirai ,  Tomoaki Matsushima ,  Hiroshi Kawada ,  Yousuke Hagihara

IPC: H01H57/00 ,  H01L41/22

CPC classification number: B81B3/0021 ,  B81B2201/032 ,  H01H59/0009 ,  H01H2057/006 ,  Y10T29/42

Abstract: The MEMS switch comprises a substrate with signal-lines having fixed-contacts, a movable-plate with a movable-contact, a flexible support-member supporting the movable-plate, a static-actuator and a piezoelectric-actuator configured to contact the movable-contact with the fixed-contact. The movable-contact is provided at its longitudinal center with the movable-contact, and its both the longitudinal ends with static-movable-electrode-plate. The support-member is four strips disposed on portions outside of the both width ends of the movable plate. The strip extends along the longitudinal direction of the movable plate, provided with a first end fixed to the movable plate, and provided with a second end fixed to the substrate. The piezoelectric-element is disposed on an upper surface of the strip to be located at a portion outside of the width ends of the movable-plate. The piezoelectric-actuator is configured to develop the stress applied to the coupling-portion which is created between each the strip and the movable-plate.

Abstract translation: MEMS开关包括具有固定触点的信号线的基板，具有可移动触点的可移动板，支撑可移动板的柔性支撑构件，静电致动器和压电致动器，其构造成接触可动触点 - 与固定联系人联系。 可动触点在其纵向中心处设置有可动触头，并且其两个纵向端部具有静电可动电极板。 支撑构件是设置在可动板的两个宽度端的外侧的四个条。 该条带沿可移动板的纵向方向延伸，设置有固定到可移动板的第一端，并设置有固定到基板的第二端。 压电元件设置在条的上表面上，以位于可移动板的宽度端的外侧的部分。 压电致动器被配置为产生施加到在每个条和可移动板之间产生的联接部分的应力。

公开(公告)号：US07847885B2

公开(公告)日：2010-12-07

申请号：US10597569

申请日：2005-01-27

Applicant: Dirk Jan Broer ,  Christiane Maria Rosette De Witz ,  Grietje Neeltje Mol ,  Roel Penterman

Inventor： Dirk Jan Broer ,  Christiane Maria Rosette De Witz ,  Grietje Neeltje Mol ,  Roel Penterman

IPC: G02F1/1333

CPC classification number: G02B26/02 ,  B81B3/0024 ,  B81B2201/032 ,  B81B2201/047 ,  Y10T156/11

Abstract: A mechanical structure comprises an element which is moveable by nonmechanical means, such as heat or radiation, between a first state having a first shape and a second state having a second shape different. To this end, the element includes a layer of oriented polymerized liquid crystal which exhibits an anisotropic expansion when subjected to such means. In order to facilitate manufacture the element is positioned on a substrate which has a region of high adhesiveness and a region of low adhesiveness for polymerized liquid crystal. To manufacture such structures a layer of oriented polymerizable liquid crystal is formed on a substrate (201) which is provided with a patterned surface that provides adhesive regions (204) with high adhesiveness to polymerized liquid crystal and nonadhesive regions (203) with low adhesiveness to polymerized liquid crystal. After polymerization, for example a thermal shock is applied which causes the layer of polymerized liquid crystal to delaminate at the non-adhering region while remaining fixed to the adhesive regions. Thus, the method does not require time-consuming under-etching steps.

Abstract translation: 机械结构包括可在诸如热或辐射之间的非机械装置在具有第一形状的第一状态和具有第二形状的第二状态之间移动的元件。 为此，元件包括定向聚合的液晶层，当经受这种方法时，其呈现各向异性膨胀。 为了便于制造，元件位于具有高粘合性区域的基底和聚合液晶的低粘合性区域。 为了制造这样的结构，在基板（201）上形成定向聚合性液晶层，该基板（201）设置有图案化表面，该图案表面向聚合液晶和非粘附区域（203）提供对粘合性高的粘合性区域（204），其粘合性低 聚合液晶。 聚合后，例如进行热冲击，使得聚合液晶层在非粘附区域分层，同时保持固定在粘合剂区域上。 因此，该方法不需要耗时的蚀刻下步骤。

公开(公告)号：US07749793B2

公开(公告)日：2010-07-06

申请号：US12357826

申请日：2009-01-22

Applicant: Robert Faye Elliott ,  Philip John Reiner

Inventor： Robert Faye Elliott ,  Philip John Reiner

IPC: H01L21/302

CPC classification number: H01H37/52 ,  B81B3/0078 ,  B81B2201/032 ,  B81B2203/056 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2300/032

Abstract: A method of making a Lateral-Moving Micromachined Thermal Bimorph which provides the capability of achieving in-plane thermally-induced motion on a microchip, as opposed to the much more common out-of-plane, or vertical, motion seen in many devices. The present invention employs a novel fabrication process to allow the fabrication of a lateral bimorph in a fundamentally planar set of processes. In addition, the invention incorporates special design features that allow the bimorph to maintain material interfaces.

Abstract translation: 一种制造横向移动微机械加热双压电晶片的方法，其提供了在微芯片上实现面内热感应运动的能力，而不是在许多器件中看到的更常见的平面外或垂直运动。 本发明采用新颖的制造工艺，以允许在基本平面的工艺集合中制造横向双压电晶片。 此外，本发明还包含允许双压电晶体保持材料界面的特殊设计特征。

公开(公告)号：US07719169B2

公开(公告)日：2010-05-18

申请号：US11686731

申请日：2007-03-15

Applicant: Takashi Kawakubo ,  Toshihiko Nagano ,  Michihiko Nishigaki

Inventor： Takashi Kawakubo ,  Toshihiko Nagano ,  Michihiko Nishigaki

IPC: H01L41/04 ,  H01L41/047

CPC classification number: B81B3/0072 ,  B81B2201/032 ,  H01G5/16 ,  H01G5/18 ,  H01L41/0946 ,  H01L41/0953

Abstract: A micro-electromechanical device includes a first piezoelectric actuator and a second piezoelectric actuator. The first piezoelectric actuator includes a first beam fixed on a substrate and a second beam extended in parallel to the first beam from a first connecting end to a first working end. A second piezoelectric actuator includes a third beam, spaced from the first beam, fixed on the substrate and a fourth beam extended in parallel to the third beam from a second connecting end to a second working end. The second working end faces the first working end in a perpendicular direction to a surface of the substrate.

Abstract translation: 微机电装置包括第一压电致动器和第二压电致动器。 第一压电致动器包括固定在基板上的第一光束和从第一连接端到第一工作端平行于第一光束延伸的第二光束。 第二压电致动器包括固定在基板上的与第一光束间隔开的第三光束和从第二连接端到第二工作端平行于第三光束延伸的第四光束。 第二工作端在与基板的表面垂直的方向上面向第一工作端。

公开(公告)号：US20090201119A1

公开(公告)日：2009-08-13

申请号：US12318634

申请日：2009-01-05

Applicant: Paul J. Rubel

Inventor： Paul J. Rubel

IPC: H01H71/18 ,  H02N10/00 ,  H01H11/00

CPC classification number: F03G7/06 ,  B81B3/0059 ,  B81B2201/018 ,  B81B2201/032 ,  B81B2201/054 ,  H01H61/02 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H2061/008 ,  H02N10/00 ,  Y10T29/49105

Abstract: A MEMS hysteretic thermal actuator may have a plurality of beams disposed over a heating element formed on the surface of the substrate. The plurality of beams may be coupled to a passive beam which is not disposed over the heating element. One of the plurality of beams may be formed in a first plane parallel to the substrate, whereas another of the plurality of beams may be formed in a second plane closer to the surface of the substrate. When the heating element is activated, it heats the plurality of beams such that they move the passive beam in a trajectory that is neither parallel to nor perpendicular to the surface of the substrate. When the beams are cooled, they may move in a different trajectory, approaching the substrate before moving laterally across it to their initial positions. By providing one electrical contact on the distal end of the passive beam and another stationary electrical contact on the substrate surface, the MEMS hysteretic actuator may form a reliable electrical switch that is relatively simple to manufacture and operate.

Abstract translation: MEMS迟滞热致动器可以具有设置在形成在基板的表面上的加热元件上的多个光束。 多个光束可以耦合到未设置在加热元件上方的无源光束。 多个光束中的一个可以形成在平行于衬底的第一平面中，而多个光束中的另一个可以形成在靠近衬底表面的第二平面中。 当加热元件被激活时，它加热多个光束，使得它们以不平行于或垂直于衬底表面的轨迹移动被动束。 当梁被冷却时，它们可以以不同的轨迹移动，在横向移动到其初始位置之前接近基板。 通过在被动束的远端上提供一个电接触，并在衬底表面上提供另一个固定的电触点，MEMS滞后致动器可形成可靠的电开关，其制造和操作相对简单。