公开(公告)号：US07538471B2

公开(公告)日：2009-05-26

申请号：US11114725

申请日：2005-04-26

Applicant: Akira Kurozuka ,  Yoshihiro Mushika ,  Osamu Kajino

Inventor： Akira Kurozuka ,  Yoshihiro Mushika ,  Osamu Kajino

IPC: H02N1/00 ,  G02B26/08

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/053 ,  B81B2203/058 ,  H02N1/008

Abstract: There has been a trade-off between the rigidity and the mass of a movable section of a microactuator, and also between the rigidity of the movable section and the electrostatic force. A microactuator 100 includes: a base 1; a first comb electrode 2 supported by the base 1; a movable section 6 having a second comb electrode 8 opposing the first comb electrode 2, and at least one reinforcement rib 9 protruding toward the base 1; and an elastic supporting member 3 for supporting the movable section 6 so as to allow the movable section 6 to be displaced with respect to the base 1. The height of the second comb electrode 8 is different from the height of the at least one reinforcement rib 9.

Abstract translation: 在微型致动器的可动部的刚性和质量之间以及可动部的刚性与静电力之间存在权衡。 微致动器100包括：基座1; 由基座1支撑的第一梳状电极2; 具有与第一梳状电极2相对的第二梳状电极8的可动部6和朝向基部1突出的至少一个加强肋9; 以及用于支撑可动部分6以使可动部分6相对于基座1移位的弹性支撑部件3.第二梳状电极8的高度与至少一个加强肋的高度不同 9。

公开(公告)号：US20080316577A1

公开(公告)日：2008-12-25

申请号：US12043202

申请日：2008-03-06

Applicant: Abdul Jaleel K. Moidu

Inventor： Abdul Jaleel K. Moidu

IPC: G02B26/00 ,  H01L21/00

CPC classification number: B81B3/004 ,  B81B2201/033

Abstract: A vertical comb electro-static actuator for rotating a micro-electro-mechanical micro-mirror device about a tilt axis or rotation. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which includes a prestressed layer for bending the rotor comb fingers at an angle to the substrate and mirrored platform, enabling the platform, the hinges, the rotor comb fingers and the stator comb fingers to be formed in the same layer, i.e. the same etching step.

Abstract translation: 一种垂直梳状静电致动器，用于围绕倾斜轴线或旋转旋转微机电微反射镜装置。 梳子驱动器的转子梳齿从微反射镜的子框架延伸，微镜的子框架包括用于将转子梳齿与基板和镜像平台成一定角度弯曲的预应力层，使平台，铰链，转子 梳指和定子梳指形成在相同的层中，即相同的蚀刻步骤。

公开(公告)号：US20080247029A1

公开(公告)日：2008-10-09

申请号：US11873771

申请日：2007-10-17

Applicant: Tiansheng ZHOU

Inventor： Tiansheng ZHOU

IPC: G02B26/08 ,  G03F7/00

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/058

Abstract: A micro-electro-mechanical system (MEMS) micro mirror and a method of making the same. The micro mirror includes a body having a mirror support, opposed anchor s and flexible hinges which connect the mirror support to the anchor s. The mirror support has opposed comb edges with comb fingers. Electrodes, which have comb fingers to interact with the comb fingers of the mirror support, are spaced from the comb edges. The comb fingers along each of the comb edges of the mirror support surface are positioned on different horizontal planes from and the comb fingers on the electrodes so as to maximize electrostatic actuation.

Abstract translation: 微机电系统（MEMS）微镜及其制造方法。 微反射镜包括具有反射镜支撑体，相对的锚杆和将镜子支撑件连接到锚杆的柔性铰链的主体。 镜子支架具有与梳齿相反的梳齿。 具有梳齿与电镜支架的梳指相互作用的电极与梳齿间隔开。 沿着镜支撑表面的每个梳齿边缘的梳齿位于与电极上的梳齿不同的水平平面上，以使静电致动最大化。

公开(公告)号：US20080239456A1

公开(公告)日：2008-10-02

申请号：US12059859

申请日：2008-03-31

Applicant: Osamu TSUBOI ,  Norinao KOUMA ,  Hiromitsu SONEDA ,  Hisao OKUDA ,  Yoshihiro MIZUNO ,  Tsuyoshi MATSUMOTO

Inventor： Osamu TSUBOI ,  Norinao KOUMA ,  Hiromitsu SONEDA ,  Hisao OKUDA ,  Yoshihiro MIZUNO ,  Tsuyoshi MATSUMOTO

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  B81B3/0086 ,  B81B2201/033 ,  B81B2201/047

Abstract: A micro oscillating device includes a frame, an oscillating part including a first drive electrode for application of a reference electric potential, and a connecting part for connecting the frame and the oscillating part to each other, where the connecting part defines an axis of an oscillating motion of the oscillating part. A second drive electrode is fixed to the frame to cooperate with the first drive electrode for generation of a driving force for the oscillating movement. The first drive electrode includes a first end extension and a second end extension separated from each other and extending in a direction crossing the axis. The second drive electrode is within a separation distance between the first and the second end extensions.

Abstract translation: 微振荡装置包括框架，包括用于施加参考电位的第一驱动电极的振荡部分和用于将框架和振荡部分彼此连接的连接部分，其中连接部分限定摆动轴线 摆动部分的运动。 第二驱动电极固定到框架以与第一驱动电极协作以产生用于振荡运动的驱动力。 第一驱动电极包括彼此分离并沿与轴线交叉的方向延伸的第一端延伸部和第二端部延伸部。 第二驱动电极在第一和第二端部延伸部之间的间隔距离内。

公开(公告)号：US07422928B2

公开(公告)日：2008-09-09

申请号：US10572554

申请日：2004-09-12

Applicant: Naomasa Oka ,  Hiroshi Harada ,  Jun Ogihara ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Yuji Suzuki ,  Kiyohiko Kawano ,  Takaaki Yoshihara ,  Masahiko Suzumura

Inventor： Naomasa Oka ,  Hiroshi Harada ,  Jun Ogihara ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Yuji Suzuki ,  Kiyohiko Kawano ,  Takaaki Yoshihara ,  Masahiko Suzumura

IPC: H01L21/00 ,  H02N1/00

CPC classification number: G02B26/0816 ,  B81B3/0086 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C2201/0109 ,  B81C2201/019 ,  G02B6/3516 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/355 ,  G02B6/357 ,  G02B6/3584 ,  H02N1/008

Abstract: A process for fabricating a micro-electro-mechanical system (MEMS) composed of fixed components fixedly supported on a lower substrate and movable components movably supported on the lower substrate. The process utilizes an upper substrate separate from the lower substrate. The upper substrate is selectively etched in its top layer to form therein a plurality of posts which project commonly from a bottom layer of the upper substrate. The posts include the fixed components to be fixed to the lower substrate and the movable components which are resiliently supported only to one or more of the fixed components to be movable relative to the fixed components. The lower substrate is formed in its top surface with at least one recess. The upper substrate is then bonded to the top of the lower substrate upside down in such a manner as to place the fixed components directly on the lower substrate and to place the movable components upwardly of the recess. Finally, the bottom layer of the upper substrate is removed to release the movable components from the bottom layer for floating the movable components above the recess and allowing them to move relative to the lower substrate, while keeping the fixed components fixed to the top of the lower substrate.

Abstract translation: 一种用于制造由固定地支撑在下基板上的固定部件和可移动地支撑在下基板上的可移动部件的微机电系统（MEMS）的制造方法。 该方法利用与下基板分开的上基板。 在其顶层中选择性地蚀刻上基板，以在其中形成多个从上基板的底层共同突出的柱。 支柱包括要固定到下基板的固定部件和仅弹性地支撑到一个或多个固定部件以相对于固定部件可移动的可动部件。 下基板在其顶表面上形成有至少一个凹部。 然后将上基板以这样的方式上下连接到下基板的顶部，以将固定部件直接放置在下基板上并将可移动部件放置在凹部的上方。 最后，去除上基板的底层以从底层释放可移动部件，用于使可移动部件浮动在凹部上方并允许​​它们相对于下基板移动，同时保持固定部件固定在 下基板。

公开(公告)号：US07399652B2

公开(公告)日：2008-07-15

申请号：US10821263

申请日：2004-04-08

Applicant: Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

Inventor： Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

IPC: H01L21/58

CPC classification number: H01L21/76898 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C1/00896 ,  B81C2201/019 ,  G02B6/357 ,  G02B6/3584

Abstract: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.

Abstract translation: 一种具有支撑部件和操作部件的微电子机械装置的制造方法，包括提供具有第一半导体材料层的第一半导体晶片和配置在第一层顶部的第二半导体材料层，形成 在第二层中的装置的第一支撑部分和第一操作部分，在第一层中形成临时锚固件，以及将第一晶片结合到第二晶片，第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后，所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。

公开(公告)号：US20070193380A1

公开(公告)日：2007-08-23

申请号：US11360870

申请日：2006-02-23

Applicant: Jonathan Klein ,  Galen Magendanz ,  Peter LaFond ,  Mark Williams ,  Michael Foster

Inventor： Jonathan Klein ,  Galen Magendanz ,  Peter LaFond ,  Mark Williams ,  Michael Foster

IPC: B81B3/00 ,  G01D5/12 ,  G01D5/00 ,  G01P15/13

CPC classification number: B81B7/0077 ,  B81B2201/033 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  Y10T74/22

Abstract: A microelectromechanical system (MEMS) device with a mechanism layer having a first part and a second part, and at least one cover for sealing the mechanism layer. The inner surface of at least one of the covers is structured such that a protruding structure is present on the inner surface of the cover and wherein the protruding structure mechanically causes the first part to be deflected out of a plane associated with the second part.

Abstract translation: 一种具有机械层的微机电系统（MEMS）装置，其具有第一部分和第二部分，以及至少一个用于密封机构层的盖。 至少一个盖的内表面构造成使得突出结构存在于盖的内表面上，并且其中突出结构机械地使第一部分偏离与第二部分相关联的平面。

公开(公告)号：US20070128824A1

公开(公告)日：2007-06-07

申请号：US11528619

申请日：2006-09-28

Applicant: Young-chul Ko ,  Hyun-ku Jeong

Inventor： Young-chul Ko ,  Hyun-ku Jeong

IPC: H01L21/76 ,  H01L21/302

CPC classification number: B81C1/00547 ,  B81B2201/033

Abstract: A double-sided etching method using an embedded alignment mark includes: preparing a substrate having first and second alignment marks embedded in an intermediate portion thereof; etching an upper portion of the substrate so as to expose the first alignment mark from a first surface of the substrate; etching the upper portion of the substrate using the exposed first alignment mark; etching a lower portion of the substrate so as to expose the second alignment mark from a second surface of the substrate; and etching the lower portion of the substrate using the exposed second alignment mark.

Abstract translation: 使用嵌入对准标记的双面蚀刻方法包括：准备具有嵌入其中间部分中的第一和第二对准标记的基板; 蚀刻所述基板的上部以便从所述基板的第一表面露出所述第一对准标记; 使用暴露的第一对准标记蚀刻衬底的上部; 蚀刻所述基板的下部以便从所述基板的第二表面露出所述第二对准标记; 并使用暴露的第二对准标记蚀刻衬底的下部。

公开(公告)号：US20070018065A1

公开(公告)日：2007-01-25

申请号：US11187054

申请日：2005-07-21

Applicant: Jeffrey Denatale ,  Xiaobin Li

Inventor： Jeffrey Denatale ,  Xiaobin Li

IPC: A47F5/00

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/053 ,  B81B2203/058

Abstract: A support structure extends upwards from a substrate and supports a tiltable platform, the upper surface of which can be a mirror, by means of spaced flexible couplings that enable the platform to tilt relative to the support structure. Respective electrodes associated with the substrate and platform control the platform tilt in response to applied signals. The platform electrodes are preferably spaced below and tilt with the platform, with the platform extending laterally from the support structure further than the platform electrodes. The platform is preferably bulk micromachined, and the support structure surface micromachined.

Abstract translation: 支撑结构从衬底向上延伸，并且通过间隔开的柔性联接器支撑可倾斜的平台，其上表面可以是反射镜，其使得平台相对于支撑结构倾斜。 与基板和平台相关联的各电极响应于所施加的信号控制平台倾斜。 平台电极优选地与平台隔开并倾斜，平台从支撑结构横向延伸超过平台电极。 该平台优选是体积微加工的，并且支撑结构表面微加工。

公开(公告)号：US20060180883A1

公开(公告)日：2006-08-17

申请号：US11352200

申请日：2006-02-13

Applicant: Norinao Kouma ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Satoshi Ueda

Inventor： Norinao Kouma ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Satoshi Ueda

IPC: H01L29/84 ,  H01L21/00

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/058

Abstract: A micro-oscillating element includes a frame, a movable functional portion, and a torsional joint for joining the frame and the functional portion. The micro-oscillating element also includes first and second comb-tooth electrodes for generation of the driving force for the oscillating motion of the movable functional portion about the torsional joint. The first comb-tooth electrode includes a plurality of first electrode teeth each having a first conductor, an insulator and a second conductor laminated in the direction of the oscillating motion, where the first conductor and the second conductor are electrically connected with each other. The second comb-tooth electrode includes a plurality of second electrode teeth caused not to face the second conductor but to face the first conductor of the first electrode teeth during non-operation. The second electrode teeth are longer than the first conductor in the direction of the oscillating motion.