公开(公告)号：US20080050079A1

公开(公告)日：2008-02-28

申请号：US11630051

申请日：2004-07-07

Applicant: Chan-Joo Lee ,  Ki-Wan Jang ,  Young-Beom Seo

Inventor： Chan-Joo Lee ,  Ki-Wan Jang ,  Young-Beom Seo

IPC: G02B6/036 ,  C03B37/018

CPC classification number: C03B37/01807 ,  C03B37/01853 ,  C03B2201/075 ,  C03B2201/31 ,  G02B6/03622 ,  G02B6/03694

Abstract: Disclosed is a low-attenuation single-mode optical fiber having a photoconductive core and a clad, which shows very low OH concentration in MFD (Mode Field Diameter) region. The optical fiber includes a core positioned at its center for photoconduction, and a dehydrated clad and a base clad which are coated on the clad in order. The dehydrated clad has a substantially identical refractive index to the base clad. A refractive index of the core is greater than those of the dehydrated clad and the base clad. The dehydrated clad has a relatively lower OH concentration than the base clad. The region composed of the core and the dehydrated clad has an MFD region at which OH concentration is less than 0.8 ppb.

Abstract translation: 公开了一种具有光导芯和包层的低衰减单模光纤，其在MFD（模场直径）区域中显示出非常低的OH浓度。 光纤包括位于其中心的用于感光的芯，以及依次涂覆在包层上的脱水包层和基底包层。 脱水包层具有与基底包层基本相同的折射率。 芯的折射率大于脱水包层和基底包层的折射率。 脱水包层的OH浓度比底层包层低。 由核心和脱水包层组成的区域具有OH浓度小于0.8ppb的MFD区域。

公开(公告)号：US07312170B2

公开(公告)日：2007-12-25

申请号：US10548237

申请日：2004-03-03

Applicant: Hiroyuki Nishimura ,  Akira Fujinoki

Inventor： Hiroyuki Nishimura ,  Akira Fujinoki

IPC: C03C3/06 ,  C03B37/07 ,  C03B37/075 ,  C03B37/018

CPC classification number: C03B32/00 ,  C03B19/1453 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2201/23 ,  C03C3/06 ,  C03C4/0071 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/42 ,  Y02P40/57

Abstract: The present invention provides an optical synthetic quartz glass material which substantially does not cause changes in transmitted wave surface (TWS) by solarization, compaction (TWS delayed), rarefaction (TWS progressed) and photorefractive effect when ArF excimer laser irradiation is applied at a low energy density, e.g. at energy density per pulse of 0.3 mJ/cm2 or less. The present invention further provides a method for manufacturing the same. In order to solve the above-mentioned problems, the optical synthetic quartz glass material of the present invention is characterized in that, in a synthetic quartz glass prepared by a flame hydrolysis method using a silicon compound as a material, the followings are satisfied that the amount of SiOH is within a range of more than 10 ppm by weight to 400 ppm by weight, content of fluorine is 30 to 1000 ppm by weight, content of hydrogen is 0.1×1017 to 10×1017 molecules/cm3 and, when the amounts of SiOH and fluorine are A and B, respectively, total amount of A and B is 100 ppm by weight or more and B/A is 0.25 to 25.

Abstract translation: 本发明提供了一种光学合成石英玻璃材料，其在低温下施加ArF准分子激光照射时，通过太阳化，压实（TWS延迟），稀释（TWS进行）和光折射效应基本上不会引起透射波面（TWS）的变化 能量密度，例如 每个脉冲的能量密度为0.3mJ / cm 2以下。 本发明还提供一种制造该方法的方法。 为了解决上述问题，本发明的光学合成石英玻璃材料的特征在于，在使用硅化合物作为材料的火焰水解法制备的合成石英玻璃中，满足以下条件： SiOH的量在大于10重量ppm至400重量ppm的范围内，氟含量为30至1000重量ppm，氢含量为0.1×10 17至10 10 17分子/ cm 3，当SiOH和氟的量分别为A和B时，A和B的总量为100重量ppm以上，B / A为 0.25至25。

公开(公告)号：US07159418B2

公开(公告)日：2007-01-09

申请号：US09930693

申请日：2001-08-17

Applicant: Koji Matsuo ,  Hisatoshi Otsuka ,  Kazuo Shirota ,  Shigeru Maida

Inventor： Koji Matsuo ,  Hisatoshi Otsuka ,  Kazuo Shirota ,  Shigeru Maida

IPC: C03B19/14 ,  C03C3/06

CPC classification number: C03B19/1453 ,  C03B19/1423 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2207/30 ,  C03B2207/64 ,  C03C3/06 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/42 ,  C03C2203/54 ,  Y02P40/57

Abstract: Fluorine-containing synthetic quartz glass is produced by feeding silica-forming material, hydrogen, and oxygen gases from a burner to a reaction zone, flame hydrolyzing the silica-forming material in the reaction zone to form particles of silica, depositing the silica particles on a rotatable substrate in the reaction zone to form a porous silica matrix, and heating and vitrifying the porous silica matrix in a fluorine compound gas-containing atmosphere. During formation of the porous silica matrix, the angle between the center axes of the silica matrix and the silica-forming reactant flame from the burner is adjusted to 90–120° so that the porous silica matrix has a density of 0.1–1.0 g/cm3 with a narrow distribution within 0.1 g/cm3. The resulting quartz glass has a high transmittance to light in the vacuum ultraviolet region below 200 nm.

Abstract translation: 含氟合成石英玻璃是通过将二氧化硅形成材料，氢气和氧气从燃烧器送入反应区而产生的，火焰水解反应区中二氧化硅形成材料，形成二氧化硅颗粒，将二氧化硅颗粒沉积在 反应区中的可旋转基底，形成多孔二氧化硅基质，并在含氟化合物气体的气氛中加热和玻璃化多孔二氧化硅基质。 在形成多孔二氧化硅基体期间，将二氧化硅基体的中心轴线与来自燃烧器的形成二氧化硅的反应物火焰之间的角度调节至90-120°，使得多孔二氧化硅基质的密度为0.1-1.0g / cm 3，窄分布在0.1g / cm 3以内。 所得的石英玻璃对于低于200nm的真空紫外线区域的光具有高透射率。

公开(公告)号：US20060281623A1

公开(公告)日：2006-12-14

申请号：US11266638

申请日：2005-11-03

Applicant: Michael Winnen ,  Todd Springer

Inventor： Michael Winnen ,  Todd Springer

IPC: C03C3/06 ,  C03B11/00 ,  C03B13/00 ,  C03B23/00 ,  C03B18/02

CPC classification number: C03B20/00 ,  C03B19/02 ,  C03B2201/04 ,  C03B2201/075 ,  C03C3/06 ,  C03C10/0009 ,  C03C2201/23 ,  Y02P40/57

Abstract: A method to form quartz glass ingots of ultra low contamination and defect levels by firing a high-purity quartz form as the feedstock, wherein the quartz glass ingot is free-formed on a platen rotating concentrically with the feedstock quartz article.

Abstract translation: 通过烧制高纯度石英形式作为原料来形成超低污染和缺陷水平的石英玻璃锭的方法，其中石英玻璃锭自由形成在与原料石英制品同心旋转的压板上。

公开(公告)号：US07130513B2

公开(公告)日：2006-10-31

申请号：US11141203

申请日：2005-06-01

Applicant: Tetsuya Haruna ,  Shinji Ishikawa ,  Toshiki Taru ,  Tetsutarou Katayama ,  Nobuyuki Taira

Inventor： Tetsuya Haruna ,  Shinji Ishikawa ,  Toshiki Taru ,  Tetsutarou Katayama ,  Nobuyuki Taira

IPC: G02B6/02

CPC classification number: C03B37/01807 ,  C03B37/01876 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2201/10 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/34 ,  C03B2201/36 ,  C03B2203/22 ,  C03B2207/90

Abstract: A method produces a glass body that contains a reduced amount of OH groups in the metallic-oxide-containing glass layer and that has a reduced amount of transmission loss due to OH groups when the glass body is transformed into an optical fiber. The production method produces an optical glass body. An optical fiber contains the optical glass body in at least one part of its region for guiding a lightwave. The production method includes the following steps: (a) introducing into a glass pipe a gas containing an organometallic compound and a glass-forming material; (b) decomposing the organometallic compound into an organic constituent and a metallic constituent; (c) heating and oxidizing the metallic constituent so that produced glass particles containing a metallic oxide are deposited on the inner surface of the glass pipe to form a glass-particle-deposited layer; and (d) consolidating the deposited layer to form a metallic-oxide-containing glass layer.

Abstract translation: 一种方法产生玻璃体，其在含金属氧化物的玻璃层中含有少量的OH基团，并且当玻璃体转变成光纤时，其具有由OH基导致的传输损失量减少的玻璃体。 该制造方法产生光学玻璃体。 光纤在其区域的至少一部分中包含用于引导光波的光学玻璃体。 制造方法包括以下步骤：（a）向玻璃管内导入含有有机金属化合物和玻璃形成材料的气体; （b）将有机金属化合物分解成有机成分和金属成分; （c）加热和氧化金属成分，使得在玻璃管的内表面上沉积含有金属氧化物的玻璃颗粒，形成玻璃颗粒沉积层; 和（d）固化沉积层以形成含金属氧化物的玻璃层。

公开(公告)号：US20060234848A1

公开(公告)日：2006-10-19

申请号：US11403267

申请日：2006-04-13

Applicant: Bodo Kuehn ,  Stefan Ochs ,  Steffen Kaiser ,  Denis Kassube

Inventor： Bodo Kuehn ,  Stefan Ochs ,  Steffen Kaiser ,  Denis Kassube

IPC: C03C3/06 ,  C03B19/06 ,  C03B19/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B19/1469 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03C4/0085 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  Y02P40/57

Abstract: To provide an optical component of quartz glass for use in a projection lens system for immersion lithography with an operating wavelength below 250 nm, which is optimized for use with linearly polarized UV laser radiation and particularly with respect to compaction and birefringence induced by anisotropic density change, it is suggested according to the invention that the quartz glass should show the combination of several properties: particularly a glass structure essentially without oxygen defects, a mean content of hydroxyl groups of less than 60 wt ppm, a mean content of fluorine of less than 10 wt ppm, a mean content of chlorine of less than 1 wt ppm. A method for producing such an optical component comprises the following method steps: producing and drying an SiO2 soot body under reducing conditions and treating the dried soot body before or during vitrification with a reagent reacting with oxygen defects of the quartz glass structure.

Abstract translation: 提供用于投影透镜系统的石英玻璃的光学部件，用于工作波长低于250nm的浸没式光刻，其被优化用于线偏振UV激光辐射，特别是关于由各向异性密度变化引起的压实和双折射 根据本发明，建议石英玻璃应显示几种性能的组合：特别是基本上没有氧缺陷的玻璃结构，羟基的平均含量小于60重量ppm，氟的平均含量小于 10重量ppm，氯的平均含量小于1重量ppm。 制造这种光学部件的方法包括以下步骤：在还原条件下制备和干燥SiO 2烟炱体，并在玻璃化之前或期间用与氧缺陷反应的试剂处理干燥的烟炱体 石英玻璃结构。

公开(公告)号：US20060081008A1

公开(公告)日：2006-04-20

申请号：US11248185

申请日：2005-10-13

Applicant: Hiroyasu Hirata ,  Yuji Fukasawa ,  Masanobu Ezaki

Inventor： Hiroyasu Hirata ,  Yuji Fukasawa ,  Masanobu Ezaki

IPC: C03B32/00 ,  C03C17/00 ,  C03C23/00 ,  C03C15/00 ,  C03C19/00 ,  C03C21/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B25/025 ,  C03B32/00 ,  C03B2201/075 ,  C03B2201/21 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/54

Abstract: The invention provides a method for efficiently manufacturing a synthetic silica glass substrate for photomasks excellent in light stability and capable of being applied to ArF-Wet photolithography with maximum birefringence of 1.4 nm/cm or less, homogeneity of diffractive index of 2×10−5 or less and an average content of hydrogen atoms of 1018 to 1019, comprising the steps of: forming a mask-plain substrate by slicing a block of a synthetic silica glass; heating each sheet of the mask-plain substrate at a temperature of 1100° C. or more; slowly cooling the substrate at a cooling rate of 0.01 to 0.8° C./min; and placing the substrate in a hydrogen gas atmosphere at least at the latter half of the slow cooling step or after the slow cooling step.

Abstract translation: 本发明提供了一种有效地制造光稳定性优异的光掩模用合成石英玻璃基板的方法，能够适用于1.4nm / cm以下的双折射最大双折射的ArF-Wet光刻法，2×10 -6的衍射指数的均匀性， 5或更低，氢原子的平均含量为10 18至10 19，包括以下步骤：通过切割块来形成掩模 - 平版底物 的合成石英玻璃; 在1100℃以上的温度下对每片掩模基片进行加热; 以0.01〜0.8℃/ min的冷却速度缓慢冷却基板; 以及至少在缓慢冷却步骤的后半段或缓慢冷却步骤之后将衬底放置在氢气气氛中。

公开(公告)号：US06988379B2

公开(公告)日：2006-01-24

申请号：US10117228

申请日：2002-04-08

Applicant: Gérard Orcel ,  Marc Nicolardot ,  Jean-Florent Campion

Inventor： Gérard Orcel ,  Marc Nicolardot ,  Jean-Florent Campion

IPC: C03B37/018 ,  C03C13/04

CPC classification number: C03B37/01291 ,  C03B37/01205 ,  C03B37/01892 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20

Abstract: The invention provides a low cost method of manufacturing high capacity preforms by chemical vapor deposition. More particularly, there is described a method of manufacturing an optical fiber preform, which method comprises the steps of providing a substrate tube of silica doped with sufficient chlorine to obtain an OH concentration of less than 100 ppb and doped with sufficient fluorine proportional to the chlorine doping to obtain a refractive index that is lower than that of a natural silica, depositing inner cladding and an optical core inside the substrate tube, collapsing the substrate tube to form a primary preform, and depositing outer cladding of said natural silica on the resulting primary preform. The invention is applicable to manufacturing optical fibers.

公开(公告)号：US20060008218A1

公开(公告)日：2006-01-12

申请号：US10502251

申请日：2003-01-23

Applicant: Jonathan Knight ,  Philip Russell ,  Timothy Birks

Inventor： Jonathan Knight ,  Philip Russell ,  Timothy Birks

IPC: G02B6/02

CPC classification number: G02B6/02314 ,  B82Y20/00 ,  C03B37/01205 ,  C03B37/0122 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2203/42 ,  G02B6/02347 ,  G02B6/0238

Abstract: A method of manufacturing an optical fibre, comprises: (i) forming a preform (10) for drawing into the fibre, the preform (10) comprising a bundle of elongate elements, (20,50) arranged to form a first region that becomes a cladding region of the fibre and a second region that becomes a core region of the fibre; (ii) drawing the preform (10) into the fibre. The bundle of elongate elements (20,50) comprises a plurality of elongate elements (20) of a lower purity dielectric material and at least one elongate element (50) of a higher purity dielectric material. The first region comprises a plurality of the lower purity elements (20) and the second region comprises the higher purity element (50).

Abstract translation: 一种制造光纤的方法包括：（i）形成用于拉入纤维的预成型件（10），所述预成型件（10）包括一束细长元件（20,50），所述细长元件布置成形成第一区域，所述第一区域成为 纤维的包层区域和成为纤维的核心区域的第二区域; （ii）将预成型件（10）拉伸到纤维中。 细长元件束（20,50）包括多个较低纯度介电材料的细长元件（20）和至少一个较高纯度介电材料的细长元件（50）。 第一区域包括多个较低纯度元件（20），第二区域包括较高纯度元件（50）。

公开(公告)号：US20050262877A1

公开(公告)日：2005-12-01

申请号：US10857081

申请日：2004-05-27

Applicant: Jitendra Balakrishnan ,  Steven Dunwoody ,  Pushkar Tandon

Inventor： Jitendra Balakrishnan ,  Steven Dunwoody ,  Pushkar Tandon

IPC: C03B37/014 ,  C03B37/018

CPC classification number: C03B37/0142 ,  C03B37/01413 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2207/36 ,  C03B2207/70 ,  C03B2207/81 ,  C03B2207/87

Abstract: A method for deposition glass soot for making an optical fiber preform. A fuel and a glass precursor are flowed to a burner flame forming glass soot which is deposited onto a glass target. By first depositing an insulating layer of glass soot with a low velocity burner flame, the amount of water which may be adsorbed into the surface of the glass target can be reduced. Thereafter, the flame velocity may be increased to increase the deposition rate of the glass soot without significantly increasing the concentration of water incorporated into the glass target.

Abstract translation: 一种用于制造光纤预制棒的沉积玻璃烟炱的方法。 燃料和玻璃前体流到燃烧器火焰形成的玻璃烟灰，其沉积在玻璃靶上。 通过首先用低速燃烧器火焰沉积玻璃烟炱的绝缘层，可以减少可能吸附到玻璃靶的表面中的水的量。 此后，可以增加火焰速度以增加玻璃烟炱的沉积速率，而不会显着增加掺入玻璃靶中的水的浓度。