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    Optical Metrology With Reduced Focus Error Sensitivity
    201.
    发明申请
    Optical Metrology With Reduced Focus Error Sensitivity 有权
    光学测量与聚焦误差灵敏度降低

    公开(公告)号：US20160245741A1

    公开(公告)日：2016-08-25

    申请号：US14833370

    申请日：2015-08-24

    Applicant: KLA-Tencor Corporation

    Inventor： Shankar Krishnan ,  Guorong V. Zhuang ,  David Y. Wang ,  Xuefeng Liu

    IPC: G01N21/25 ,  G01N21/95 ,  G01J3/02

    CPC classification number: G01N21/255 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/18 ,  G01J3/2803 ,  G01J3/42 ,  G01J2003/425 ,  G01N21/211 ,  G01N21/55 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2201/06113 ,  G01N2201/068

    Abstract: Methods and systems for performing broadband spectroscopic metrology with reduced sensitivity to focus errors are presented herein. Significant reductions in sensitivity to focus position error are achieved by imaging the measurement spot onto the detector such that the direction aligned with the plane of incidence on the wafer surface is oriented perpendicular to the direction of wavelength dispersion on the detector surface. This reduction in focus error sensitivity enables reduced focus accuracy and repeatability requirements, faster focus times, and reduced sensitivity to wavelength errors without compromising measurement accuracy. In a further aspect, the dimension of illumination field projected on the wafer plane in the direction perpendicular to the plane of incidence is adjusted to optimize the resulting measurement accuracy and speed based on the nature of target under measurement.

    Abstract translation: 本文介绍了对聚焦误差灵敏度降低的宽带光谱测量方法和系统。 通过将测量点成像到检测器上来实现对聚焦位置误差的敏感性的显着降低，使得与晶片表面上的入射平面对准的方向定向为垂直于检测器表面上的波长色散的方向。 聚焦误差灵敏度的降低可以降低聚焦精度和重复性要求，更快的聚焦时间，降低对波长误差的灵敏度，而不会影响测量精度。 在另一方面，调整在垂直于入射平面的方向上投射在晶片平面上的照明场的尺寸，以根据测量目标的性质优化所得到的测量精度和速度。

    Absorbance spectrum scanning flow cytometry
    202.
    发明授权
    Absorbance spectrum scanning flow cytometry 有权
    吸光度谱扫描流式细胞术

    公开(公告)号：US09423348B2

    公开(公告)日：2016-08-23

    申请号：US14123630

    申请日：2012-05-31

    Applicant: Pierce O. Norton ,  Yong Qin Chen

    Inventor： Pierce O. Norton ,  Yong Qin Chen

    IPC: G01N21/64 ,  G01N15/14 ,  G01N15/10

    CPC classification number: G01N21/6428 ,  G01N15/1434 ,  G01N15/1436 ,  G01N15/1459 ,  G01N21/64 ,  G01N2015/0065 ,  G01N2015/1006 ,  G01N2015/1438 ,  G01N2015/144 ,  G01N2015/1477 ,  G01N2021/6417 ,  G01N2021/6439 ,  G01N2201/06113 ,  G01N2201/0633 ,  G01N2201/068

    Abstract: The present invention provides systems and methods for analyzing the excitation spectra of fluorescent particles in a flowing stream. The system uses a white light laser and color separation optics to provide a spatially-distributed, continuous color-spectrum excitation light system that is used to illuminate a region of a flowing stream. A particle that passes through the detection region traverses the full dispersed spectrum of excitation light, and the fluorescence emissions from the particle are continuously measured as it passes through the detection region. The measured fluorescence emissions at each wavelength of excitation light, which changes through full spectrum of the excitation light as the particle passes through the detection region, provides the excitation spectrum of the particle.

    Abstract translation: 本发明提供了用于分析流动流中的荧光颗粒的激发光谱的系统和方法。 该系统使用白光激光器和分色光学器件来提供用于照亮流动区域的空间分布的连续色谱激发光系统。 通过检测区域的粒子穿过激发光的全部分散光谱，并且当粒子通过检测区域时，粒子的荧光发射被连续地测量。 在颗粒通过检测区域时，通过激发光的全谱变化的激发光的每个波长处的测量的荧光发射提供了颗粒的激发光谱。

    GAS SENSOR
    203.
    发明申请
    GAS SENSOR 审中-公开
    气体传感器

    公开(公告)号：US20160231244A1

    公开(公告)日：2016-08-11

    申请号：US15022976

    申请日：2014-09-26

    Applicant: ASAHI KASEI MICRODEVICES CORPORATION

    Inventor： Edson Gomes CAMARGO ,  Satoshi TAKEHARA

    IPC: G01N21/61 ,  H01L31/167 ,  H01L31/0304 ,  G01N21/3504

    CPC classification number: G01N21/61 ,  G01N21/0303 ,  G01N21/031 ,  G01N21/3504 ,  G01N2201/062 ,  G01N2201/068 ,  G01N2201/12 ,  H01L31/0304 ,  H01L31/167

    Abstract: A small-size reliable gas sensor that can reduce a measurement error can be provided. The gas sensor includes: a first light source (20); a first sensor unit (31) and a second sensor unit (32) disposed to receive light output from the first light source (20); a first substrate (41) having a first principal surface (411) on which the first light source (20) and the first sensor unit (31) are provided; and a second substrate (42) having a first principal surface (422) on which the second sensor unit (32) is provided. The first sensor unit (31) is disposed at a location where light output from the first light source (20) and reflected on the second principal surface (412) strikes the first principal surface (422) of the first substrate (41).

    Abstract translation: 可以提供可以减少测量误差的小尺寸可靠的气体传感器。 气体传感器包括：第一光源（20）; 设置为接收从第一光源（20）输出的光的第一传感器单元（31）和第二传感器单元（32）。 具有设置有第一光源（20）和第一传感器单元（31）的第一主面（411）的第一基板（41） 以及具有第一主表面（422）的第二基板（42），所述第二传感器单元（32）设置在所述第一主表面上。 第一传感器单元（31）设置在从第一光源（20）输出并在第二主表面（412）上反射的光照射到第一基板（41）的第一主表面（422）的位置处。

    CUVETTE SYSTEM
    204.
    发明申请
    CUVETTE SYSTEM 审中-公开
    CUVETTE系统

    公开(公告)号：US20160231227A1

    公开(公告)日：2016-08-11

    申请号：US15016837

    申请日：2016-02-05

    Applicant: JOHN L. STERNICK

    Inventor： JOHN L. STERNICK

    IPC: G01N21/03

    CPC classification number: G01N21/0303 ,  G01N2021/0307 ,  G01N2021/0321 ,  G01N2201/068

    Abstract: A cuvette system may comprise a disposable cuvette element for holding a sample for analysis, with the cuvette element comprising an elongated strip having opposite faces and a well for receiving the sample to be analyzed. The well may be formed on the strip to hold a sample on the strip, and a hole may form at least a portion of the well and may extend through the strip. The well may be configured to hold a defined volume of the sample to be held therein. The system may comprise a reusable holder for removably receiving the cuvette element, with the holder having a substantially hollow interior for receiving at least a portion of the cuvette element. The holder may have a perimeter wall including a front wall and a rear wall of the holder, and a window may be formed in each of the front and rear walls and may be generally positioned in alignment with each other. The windows may be alignable with the well in the cuvette element when the cuvette element is inserted into the holder such that a straight line passes through the windows and the well simultaneously.

    Abstract translation: 试管系统可以包括用于保持用于分析的样品的一次性比色皿元件，其中所述比色皿元件包括具有相对面的细长条和用于接收待分析样品的孔。 井可以形成在条带上以将样品保持在条带上，并且孔可以形成孔的至少一部分并且可以延伸穿过条带。 井可以被配置成保持要保持在其中的限定体积的样品。 该系统可以包括用于可拆卸地接收比色皿元件的可重复使用的保持器，其中保持器具有基本中空的内部，用于容纳至少一部分比色皿元件。 保持器可以具有包括保持器的前壁和后壁的周边壁，并且可以在每个前壁和后壁中形成窗口，并且通常可以彼此对准地定位。 当比色皿元件插入保持器中时，窗口可以与比色皿元件中的孔对齐，使得直线同时穿过窗户和井。

    Design Based Sampling and Binning for Yield Critical Defects
    205.
    发明申请
    Design Based Sampling and Binning for Yield Critical Defects 有权
    基于设计的采样和分拣产量关键缺陷

    公开(公告)号：US20160225138A1

    公开(公告)日：2016-08-04

    申请号：US15092510

    申请日：2016-04-06

    Applicant: KLA-Tencor Corporation

    Inventor： Satya Kurada ,  Raghav Babulnath ,  Kwok Ng ,  Lisheng Gao

    IPC: G06T7/00 ,  G01N21/956 ,  G01N21/95

    CPC classification number: G06T7/0006 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/95676 ,  G01N2201/06113 ,  G01N2201/068 ,  G01N2201/10 ,  G01N2201/12 ,  G06K9/00 ,  G06K9/66 ,  G06T7/0008 ,  G06T7/001 ,  G06T2207/20081 ,  G06T2207/30148

    Abstract: Methods and systems for design based sampling and binning for yield critical defects are provided. One method includes aligning each image patch in each inspection image frame generated for a wafer by an optical subsystem of an inspection system to design information for the wafer. The method also includes deriving multiple layer design attributes at locations of defects detected in the image patches. In addition, the method includes building a decision tree with the multiple layer design attributes. The decision tree is used to separate the defects into bins with different yield impacts on a device being formed on the wafer. The method also includes binning the defects with the decision tree.

    Abstract translation: 提供了用于产量关键缺陷的基于设计的抽样和装箱的方法和系统。 一种方法包括通过检查系统的光学子系统对于为晶片生成的每个检查图像帧中的每个图像补片进行对准以设计晶片的信息。 该方法还包括在图像斑块中检测到的缺陷位置导出多层设计属性。 另外，该方法包括使用多层设计属性构建决策树。 决策树用于将缺陷分离成对晶片上形成的器件产生不同产量的影响。 该方法还包括使用决策树将缺陷合并。

    SENSOR DEVICE FOR MONITORING THE STATE OF A LUBRICANT AND METHOD FOR PRODUCING SAID SENSOR DEVICE
    206.
    发明申请
    SENSOR DEVICE FOR MONITORING THE STATE OF A LUBRICANT AND METHOD FOR PRODUCING SAID SENSOR DEVICE 有权
    用于监测润滑剂状态的传感器装置和用于生产传感器装置的方法

    公开(公告)号：US20160223459A1

    公开(公告)日：2016-08-04

    申请号：US15022071

    申请日：2014-07-25

    Applicant: Schaeffler Technologies AG & CO. KG ,  AEMTEC GMBH

    Inventor： Ingolf Schlosser ,  Martin Kram

    IPC: G01N21/47 ,  G01N21/55 ,  G01N33/28

    CPC classification number: G01N21/4738 ,  F16N2250/34 ,  G01N21/314 ,  G01N21/3577 ,  G01N21/474 ,  G01N21/55 ,  G01N21/552 ,  G01N21/8507 ,  G01N33/2888 ,  G01N2021/4769 ,  G01N2201/062 ,  G01N2201/0638 ,  G01N2201/068 ,  H01L25/167 ,  H01L33/54 ,  H01L2224/48091 ,  H01L2224/8592 ,  H01L2924/00014

    Abstract: Rolling bearings include a plurality of rolling bodies which during operation roll on raceways. In order to reduce friction during rolling, it is customary to supply the rolling bearings with a lubricant. However, the quality of the lubricant can deteriorate during operation due to long-term stress, aging, or thermal influences, or get lost in gaps etc. The objective addressed by the invention is that of providing a sensor device, which can be operated in a functionally reliable manner. This objective is achieved by a sensor device for monitoring the state of a lubricant in a lubricant chamber, including a transmitter platform, wherein on the transmitter platform, a plurality of diode devices are arranged, having a measurement window device, wherein the measurement window device is arranged between a measuring chamber and the lubricant chamber, having a receiving device, wherein at least one of the diode devices comprises a die and a plastic dome. The plastic dome and the die are connected by way of a contact surface, wherein the contact surface is arranged on an upper side of the die.

    Abstract translation: 滚动轴承包括在滚道运行期间滚动的多个滚动体。 为了减少轧制过程中的摩擦，通常为滚动轴承提供润滑剂。 然而，润滑剂的质量由于长时间的应力，老化或热影响而在操作期间劣化，或者在间隙等中损失。本发明所提出的目的是提供一种传感器装置，其可以在 功能可靠的方式。 该目的通过一种传感器装置实现，该传感器装置用于监测润滑剂室中的润滑剂的状态，包括发射台，其中在发射台上配置有多个二极管装置，具有测量窗口装置，其中测量窗口装置 布置在测量室和具有接收装置的润滑剂室之间，其中至少一个二极管装置包括模具和塑料圆顶。 塑料圆顶和模具通过接触表面连接，其中接触表面设置在模具的上侧。

    Method and device for carbonyl detection and quantitation
    208.
    发明授权
    Method and device for carbonyl detection and quantitation 有权
    用于羰基检测和定量的方法和装置

    公开(公告)号：US09404836B2

    公开(公告)日：2016-08-02

    申请号：US14754567

    申请日：2015-06-29

    Applicant: Pulse Health LLC

    Inventor： Gerald Thomas ,  Brian Young ,  Juven Lara ,  Charles Noll ,  James Ingle

    IPC: G01N33/497 ,  G01N33/48 ,  G01N33/58 ,  G01N1/22 ,  G01D11/24 ,  G01N33/52 ,  G01N21/64

    CPC classification number: G01N1/22 ,  A61B5/0071 ,  A61B5/082 ,  A61B5/087 ,  G01D11/24 ,  G01N21/6428 ,  G01N21/645 ,  G01N33/497 ,  G01N33/4972 ,  G01N33/52 ,  G01N33/64 ,  G01N2001/2244 ,  G01N2021/6482 ,  G01N2033/4975 ,  G01N2201/022 ,  G01N2201/062 ,  G01N2201/068 ,  Y10T436/200833 ,  Y10T436/202499

    Abstract: Fluorescence chromophores such as phenylene diamine derivatives can undergo oxidative coupling and polymerization to form optical, colorimetric and fluorogenic, multimers and polymers. The presence of carbonyl containing moieties such as aldehydes and ketones under favorable environmental conditions can initiate, catalyze, accelerate and modulate this reaction which in turn provides a mechanism for the detection and quantitation of such moieties. Selected phenylene diamine derivatives can be used for the detection and quantitation of aldehyde and ketones via measurement of the reaction and the associated spectroscopic transformation. In particular, the use of meta-phenylene diamine (mPDA) and related compounds for aldehyde detection and quantitation is described. The method provides a convenient means for monitoring aldehyde and ketone levels without use of separation steps. The method is applicable to kinetic and quasi-endpoint detection assay formats.

    Abstract translation: 荧光发色团如苯二胺衍生物可进行氧化偶联和聚合以形成光学，比色和荧光，多聚体和聚合物。 在有利的环境条件下，含有羰基的部分如醛和酮的存在可引发，催化，加速和调节该反应，而反应又提供了检测和定量这些部分的机理。 选择的苯二胺衍生物可用于通过测量反应和相关的光谱转化来检测和定量醛和酮。 特别地，描述了使用间苯二胺（mPDA）和相关化合物进行醛检测和定量。 该方法提供了在不使用分离步骤的情况下监测醛和酮水平的方便手段。 该方法适用于动力学和准终点检测测定方法。

    DEVICE FOR PRINT IMAGE OBSERVATION
    209.
    发明申请
    DEVICE FOR PRINT IMAGE OBSERVATION 审中-公开
    打印图像观察设备

    公开(公告)号：US20160202191A1

    公开(公告)日：2016-07-14

    申请号：US14912935

    申请日：2014-07-31

    Applicant: Windmoeller & Hoelscher KG

    Inventor： Alois Thoele

    IPC: G01N21/892 ,  G01J5/02 ,  B41F33/00

    CPC classification number: G01N21/892 ,  B41F33/00 ,  B41F33/0036 ,  G01J5/02 ,  G01J2005/0077 ,  G01N21/898 ,  G01N2201/068

    Abstract: The invention relates to a device for observing a moving material web, in particular to observe a printed material web during the printing process, with a light source positioned on the front side of the material web to illuminate an observed section of the material web, with a camera positioned on the front side of the material web to record still images of the material web within the observed section, and with a light-diffusing surface positioned on the back side of the material web and within the observed section of the material web. In order to create a device for print image observation that can without exception detect color defects for any print job on an otherwise transparent material web, it is provided that the light-diffusing surface has elements to control the color of the light-diffusing surface.

    Abstract translation: 本发明涉及一种用于观察移动材料幅材的装置，特别是在印刷过程中观察印刷材料幅材，光源位于材料幅材的正面以照亮材料幅材的观察部分， 定位在材料纤维网的前侧上的照相机，用于在观察部分内记录材料纤维网的静止图像，以及位于材料纤维网背面和材料纤维网的观察部分内的光漫射表面。 为了创建用于打印图像观察的设备，其可以无异常地在不透明的材料网上检测任何打印作业的颜色缺陷，但是光扩散表面具有用于控制光漫射表面的颜色的元件。

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