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    Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing
    211.
    发明授权
    Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing 有权
    微电机械开关梁结构，最小化波束失真和构造方法

    公开(公告)号：US08368490B2

    公开(公告)日：2013-02-05

    申请号：US12755285

    申请日：2010-04-06

    Applicant: Raymond Goggin ,  Padraig Fitzgerald

    Inventor： Raymond Goggin ,  Padraig Fitzgerald

    IPC: H01H51/22

    CPC classification number: H01H57/00 ,  B81B7/0012 ,  B81B2201/014 ,  H01H59/0009

    Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor, an anchor beam interface and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate. The anchor beam interface coupling the anchor to the hinge. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a voltage differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

    Abstract translation: 公开了一种微电子机械开关，其包括耦合到衬底的具有栅极连接的衬底，源极连接，漏极连接和开关结构。 开关结构包括梁构件，锚固件，锚梁接口和铰链。 所述梁构件具有足以突出所述栅极连接和所述排出连接的长度。 将开关结构连接到基板上。 将锚杆与铰链连接的锚梁接口。 铰链将梁构件沿着锚定件的长度在相应位置处联接到锚固件，铰链响应于门和梁构件之间建立的电压差而弯曲。 开关结构在接近铰链的区域中在基板和锚之间具有间隙。

    ACTUATION SIGNAL FOR MICROACTUATOR BOUNCE AND RING SUPPRESSION
    212.
    发明申请
    ACTUATION SIGNAL FOR MICROACTUATOR BOUNCE AND RING SUPPRESSION 有权
    微处理器和环形抑制的启动信号

    公开(公告)号：US20120175230A1

    公开(公告)日：2012-07-12

    申请号：US13311728

    申请日：2011-12-06

    Applicant: Jonathan Hale Hammond ,  Philippe Gorisse

    Inventor： Jonathan Hale Hammond ,  Philippe Gorisse

    IPC: H02N1/00 ,  H01H59/00

    CPC classification number: H01H59/0009 ,  B81B7/008 ,  B81B2201/014 ,  B81B2203/0118 ,  H01H1/0036 ,  H01H1/50 ,  Y10T307/76

    Abstract: The present disclosure provides a system and method for controlling positioning of a movable member of a MEMS microactuator to reduce bouncing and ringing. The system includes control circuitry in communication with the MEMS microactuator. The control circuitry is adapted to linearly increase an actuation signal from a first state to a second state to urge the movable member from a first position to a second position and hold the movable member in the second position. The control circuitry is further adapted to linearly decrease the actuation signal from the second state to the first state to release the movable member to the first position. A transition time is not less than the inverse of one quarter of a natural frequency of the movable member as the movable member moves to the first position.

    Abstract translation: 本公开提供了一种用于控制MEMS微致动器的可移动部件的定位以减少弹跳和振铃的系统和方法。 该系统包括与MEMS微致动器通信的控制电路。 控制电路适于将致动信号从第一状态线性地增加到第二状态，以将可动构件从第一位置推动到第二位置，并将可动构件保持在第二位置。 控制电路还适于将致动信号从第二状态线性地减小到第一状态，以将可移动部件释放到第一位置。 转动时间不小于当可移动部件移动到第一位置时可移动部件的固有频率的四分之一的倒数。

    MEMS DEVICES
    213.
    发明申请
    MEMS DEVICES 有权
    MEMS设备

    公开(公告)号：US20120043188A1

    公开(公告)日：2012-02-23

    申请号：US13203624

    申请日：2010-03-04

    Applicant: Martijn Goossens ,  Hilco Suy ,  Peter Gerard Steeneken ,  Jozef Thomas Martinus van Beek

    Inventor： Martijn Goossens ,  Hilco Suy ,  Peter Gerard Steeneken ,  Jozef Thomas Martinus van Beek

    IPC: H01H59/00 ,  H01H11/00

    CPC classification number: B81B3/0078 ,  B81B2201/014 ,  B81B2201/016 ,  H01G5/011 ,  H01G5/16

    Abstract: A MEMS device comprises first and second opposing electrode arrangements (22,28), wherein the second electrode arrangement (28) is electrically movable to vary the electrode spacing between facing sides of the first and second electrode arrangements. At least one of the facing sides has a non-flat surface with at least one peak and at least one trough. The height of the peak and depth of the trough is between 0.01t and 0.1t where t is the thickness of the movable electrode.

    Abstract translation: MEMS器件包括第一和第二相对电极布置（22,28），其中第二电极布置（28）可电可移动以改变第一和第二电极布置的相对侧之间的电极间距。 至少一个相对侧具有具有至少一个峰和至少一个槽的非平坦表面。 槽的高度和深度在0.01t到0.1t之间，其中t是可动电极的厚度。

    MICRO-ELECTRO-MECHANICAL SWITCH BEAM CONSTRUCTION WITH MINIMIZED BEAM DISTORTION AND METHOD FOR CONSTRUCTING
    216.
    发明申请
    MICRO-ELECTRO-MECHANICAL SWITCH BEAM CONSTRUCTION WITH MINIMIZED BEAM DISTORTION AND METHOD FOR CONSTRUCTING 有权
    具有最小波束失真的微机电开关梁结构和构造方法

    公开(公告)号：US20100155202A1

    公开(公告)日：2010-06-24

    申请号：US12338767

    申请日：2008-12-18

    Applicant: Denis ELLIS ,  Padraig FITZGERALD ,  Jo-ey WONG ,  Raymond GOGGIN ,  Richard Tarik Gereon ECKL

    Inventor： Denis ELLIS ,  Padraig FITZGERALD ,  Jo-ey WONG ,  Raymond GOGGIN ,  Richard Tarik Gereon ECKL

    IPC: H01H59/00 ,  H01H11/00

    CPC classification number: H01H11/00 ,  B81B3/0081 ,  B81B2201/014 ,  H01H1/0036 ,  H01H59/0009 ,  Y10T29/49002 ,  Y10T29/49105

    Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

    Abstract translation: 公开了一种微电子机械开关，其包括耦合到衬底的具有栅极连接的衬底，源极连接，漏极连接和开关结构。 开关结构包括梁构件，锚和铰链。 所述梁构件具有足以突出所述栅极连接和所述排出连接的长度。 所述锚将所述开关结构耦合到所述基底，所述锚具有宽度。 铰链将梁构件沿着锚固件的长度在相应位置处联接到锚固件，铰链响应于门和梁构件之间建立的电荷差异而弯曲。 开关结构在靠近铰链的区域中在基板和锚之间具有间隙。

    Large area organic electroluminescent display using bimorph MEMS devices
    217.
    发明授权
    Large area organic electroluminescent display using bimorph MEMS devices 有权
    使用双压电晶片MEMS器件的大面积有机电致发光显示器

    公开(公告)号：US07714514B1

    公开(公告)日：2010-05-11

    申请号：US11744246

    申请日：2007-05-04

    Applicant: James C. Rutherford

    Inventor： James C. Rutherford

    IPC: G09G3/10

    CPC classification number: G09G3/3225 ,  B81B7/04 ,  B81B2201/014 ,  B81B2201/032 ,  B81B2207/053 ,  G09G3/2014 ,  G09G3/3266 ,  G09G3/3283 ,  G09G2300/08 ,  G09G2300/0809 ,  G09G2310/0256 ,  G09G2310/0259 ,  G09G2310/066 ,  G09G2330/04

    Abstract: An active matrix organic LED display having a matrix of multiple light emitting pixels and electronic drive circuitry for selectively addressing the pixels, each pixel containing an organic LED. The electronic drive circuitry includes row scan electrodes and column data electrodes that interconnect the matrix of pixels. The circuitry also includes a MEMS switching device and a memory capacitor for each pixel, the MEMS switching device connecting the memory capacitor to a column data electrode during addressing of a pixel and connecting the memory capacitor to the organic LED of each pixel during light emission.

    Abstract translation: 一种具有多个发光像素矩阵的有源矩阵有机LED显示器和用于选择性寻址像素的电子驱动电路，每个像素包含有机LED。 电子驱动电路包括互连像素矩阵的行扫描电极和列数据电极。 电路还包括用于每个像素的MEMS开关器件和存储器电容器，MEMS开关器件在寻址像素期间将存储器电容器连接到列数据电极，并且在发光期间将存储器电容器连接到每个像素的有机LED。

    Interconnect structure using through wafer vias and method of fabrication
    218.
    发明授权
    Interconnect structure using through wafer vias and method of fabrication 有权
    通过晶片通孔和制造方法的互连结构

    公开(公告)号：US07675162B2

    公开(公告)日：2010-03-09

    申请号：US11541774

    申请日：2006-10-03

    Applicant: John S. Foster ,  Steven H. Hovey ,  Paul J. Rubel ,  Kimon Rybnicek

    Inventor： John S. Foster ,  Steven H. Hovey ,  Paul J. Rubel ,  Kimon Rybnicek

    IPC: H01L23/10

    CPC classification number: B81B7/007 ,  B81B2201/014 ,  B81B2207/092

    Abstract: A device and a method are described which hermetically seals at least one microstructure within a cavity. Electrical access to the at least one microstructure is provided by through wafer vias formed through a via substrate which supports the at least one microstructure on its front side. The via substrate and a lid wafer may form a hermetic cavity which encloses the at least one microstructure. The through wafer vias are connected to bond pads located outside the cavity by an interconnect structure formed on the back side of the via substrate. Because they are outside the cavity, the bond pads may be placed inside the perimeter of the bond line forming the cavity, thereby greatly reducing the area occupied by the device. The through wafer vias also shorten the circuit length between the microstructure and the interconnect, thus improving heat transfer and signal loss in the device.

    Abstract translation: 描述了一种在空腔内气密地密封至少一个微结构的装置和方法。 通过通过在其前侧支撑至少一个微结构的通孔基板形成的通过晶片通孔提供对至少一个微结构的电接触。 通孔基板和盖子晶片可以形成封闭至少一个微结构的密封腔。 贯通晶片通孔通过形成在通孔基板的背面上的互连结构连接到位于空腔外部的接合焊盘。 因为它们在空腔外部，所以接合焊盘可以放置在形成空腔的接合线的周边内部，从而大大减小了器件所占据的面积。 贯通晶片通孔也缩短了微结构与互连之间的电路长度，从而改善了器件中的传热和信号损失。

    MICROFABRICATED CANTILEVER SLIDER WITH ASYMMETRIC SPRING CONSTANT
    219.
    发明申请
    MICROFABRICATED CANTILEVER SLIDER WITH ASYMMETRIC SPRING CONSTANT 有权
    带不对称弹簧的MICROFABRICATED CANTILEVER滑盖

    公开(公告)号：US20090127082A1

    公开(公告)日：2009-05-21

    申请号：US12274312

    申请日：2008-11-19

    Applicant: Huantong Zhang ,  Daniel Hyman

    Inventor： Huantong Zhang ,  Daniel Hyman

    IPC: H01H57/00

    CPC classification number: H01H1/0036 ,  B81B3/0013 ,  B81B2201/014 ,  H01H59/0009 ,  H01H2059/0072

    Abstract: Mechanical springs and sliders as used in microfabricated actuators to provide an asymmetric spring constant are described. The asymmetric spring constant provides a propensity for deflection towards one direction, and a propensity for separation (i.e. restoration) towards the other direction. The asymmetry and slider system provides a passive mechanical means to achieve faster switching times and higher switch restoring forces.

    Abstract translation: 描述了用于微加工致动器中的机械弹簧和滑块以提供非对称弹簧常数。 不对称弹簧常数提供向一个方向偏转的倾向，以及朝着另一个方向分离（即恢复）的倾向。 不对称和滑块系统提供了一种无源机械装置，以实现更快的切换时间和更高的开关恢复力。

    HIGH-FREQUENCY CIRCUIT COMPONENTS
    220.
    发明申请
    HIGH-FREQUENCY CIRCUIT COMPONENTS 有权
    高频电路组件

    公开(公告)号：US20090084593A1

    公开(公告)日：2009-04-02

    申请号：US12326793

    申请日：2008-12-02

    Applicant: YOSHIHIKO SUZUKI ,  Hiroshi Konishi ,  Madoka Nishiyama

    Inventor： YOSHIHIKO SUZUKI ,  Hiroshi Konishi ,  Madoka Nishiyama

    IPC: H05K1/18

    CPC classification number: H01F17/0006 ,  B81B7/0003 ,  B81B2201/014 ,  H01F27/06 ,  H01G5/18 ,  H05K1/147 ,  H05K1/165 ,  H05K3/4691

    Abstract: High-frequency circuit components are disclosed in which parasitic capacitance between a high-frequency circuit element and a substrate is reduced and mechanical strength is improved. An exemplary component has a conductive substrate, a coil as the high-frequency circuit-element, a mounting board including a thin dielectric film on which the coil is mounted, and a support board that couples the mounting board to the substrate. The mounting board is coupled so that it floats relative to the substrate as a result of deliberate warping of the support board.

    Abstract translation: 公开了高频电路部件，其中降低了高频电路元件与基板之间的寄生电容，提高了机械强度。 示例性部件具有导电基板，作为高频电路元件的线圈，包括安装有线圈的薄电介质膜的安装基板和将安装基板耦合到基板的支撑板。 由于支撑板的故意翘曲，安装板被联接以使其相对于基板漂浮。

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