公开(公告)号：US07038355B2

公开(公告)日：2006-05-02

申请号：US10814619

申请日：2004-03-31

Applicant: Guillaume Bouche ,  Pascal Ancey ,  Grégory Caruyer

Inventor： Guillaume Bouche ,  Pascal Ancey ,  Grégory Caruyer

IPC: H02N2/00 ,  H01L41/00

CPC classification number: B81B3/0078 ,  B81B2201/0271 ,  B81B2201/032 ,  B81B2203/0109 ,  H01G5/16 ,  H03H9/172 ,  H03H2009/02181

Abstract: A device comprising a resonator formed of a piezoelectric layer sandwiched between two metal electrodes, the resonator being laid on a suspended beam, the device comprising means for deforming said beam by the difference in thermal expansion coefficients.

Abstract translation: 一种包括由夹在两个金属电极之间的压电层形成的谐振器的装置，所述谐振器被放置在悬挂梁上，所述装置包括用于使所述光束变形所述热膨胀系数差的装置。

公开(公告)号：US20050162806A1

公开(公告)日：2005-07-28

申请号：US10850904

申请日：2004-05-20

Applicant: Neil Sarkar ,  Aaron Geisberger

Inventor： Neil Sarkar ,  Aaron Geisberger

IPC: B81B3/00 ,  H01G7/00 ,  H01L27/14

CPC classification number: B81B3/0086 ,  B81B3/0024 ,  B81B2201/032 ,  H01G5/16 ,  H01G7/00

Abstract: A method of manufacturing an RF device including, in one embodiment, forming a deformable conductor over a substrate and plastically deforming the conductor via exposure to thermal energy to tune an electrical characteristic of the RF device. In another embodiment, the deformable conductor may also be elastically deformed to tune the electrical characteristic.

Abstract translation: 一种制造RF器件的方法，在一个实施例中包括在衬底上形成可变形导体并通过暴露于热能使导体塑性变形以调谐RF器件的电特性。 在另一个实施例中，可变形导体也可以弹性变形以调谐电特性。

公开(公告)号：US20050040808A1

公开(公告)日：2005-02-24

申请号：US10950886

申请日：2004-09-27

Applicant: Patrick Herbert ,  Jeffrey Annis ,  Jun Yao ,  Winfred Morris ,  Henric Larsson ,  Richard Harris ,  Robert Kretschmann

Inventor： Patrick Herbert ,  Jeffrey Annis ,  Jun Yao ,  Winfred Morris ,  Henric Larsson ,  Richard Harris ,  Robert Kretschmann

IPC: B81B3/00 ,  G01R15/18 ,  G01R17/08 ,  G01R19/20 ,  H03H9/46 ,  G01R17/06

CPC classification number: H03H9/462 ,  B81B3/0072 ,  B81B2201/032 ,  B81B2203/0109 ,  B81B2203/051

Abstract: In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion.

Abstract translation: 在使用由横臂支撑的光束的MEMS装置中，通过制造工艺引起的横向臂的电位弯曲，来自电阻损耗的温度或局部自加热由横向臂的柔性端接来适应。 或者，该弯曲被控制以便在光束运动的感测中提供对光束的选择偏置或机械优点。

公开(公告)号：US06805390B2

公开(公告)日：2004-10-19

申请号：US10406844

申请日：2003-04-04

Applicant: Yoshikazu Nakayama ,  Seiji Akita ,  Akio Harada ,  Takashi Okawa

Inventor： Yoshikazu Nakayama ,  Seiji Akita ,  Akio Harada ,  Takashi Okawa

IPC: B25J1512

CPC classification number: B25J7/00 ,  B81B2201/032 ,  B81B2201/12 ,  B81B2203/0118 ,  B81C99/002 ,  B82B3/00 ,  G01Q80/00 ,  Y10S977/732 ,  Y10S977/734 ,  Y10S977/742 ,  Y10S977/778 ,  Y10S977/78 ,  Y10S977/837 ,  Y10S977/842 ,  Y10S977/858 ,  Y10S977/863 ,  Y10S977/875 ,  Y10S977/876 ,  Y10S977/89 ,  Y10S977/901 ,  Y10S977/962

Abstract: To provide nanotweezers and a nanomanipulator which allow great miniaturization of the component and are capable of gripping various types of nano-substances such as insulators, semiconductors and conductors and of gripping nano-substances of various shapes. Electrostatic nanotweezers 2 are characterized in that the nanotweezers 2 are comprised of a plurality of nanotubes whose base end portions are fastened to a holder 6 so that the nanotubes protrude from the holder 6, coating films which insulate and cover the surfaces of the nanotubes, and lead wires 10, 10 which are connected to two of the nanotubes 8, 9; and the tip ends of the two nanotubes are freely opened and closed by means of an electrostatic attractive force generated by applying a voltage across these lead wires. Furthermore, by way of forming a piezo-electric film 32 on the surface of the nanotube 9, and the tip ends of the nanotubes are freely opened and closed by expanding and contracting the piezo-electric film, thus allowing any desired nano-substances to be handled regardless of whether the nano-substances are insulators, semiconductors or conductors. Furthermore, if by way of designing three nanotubes so as to be freely opened and closed by an electrostatic system, nano-substances of various shapes such as spherical, rod-form, etc. can be handled. Moreover, a nanomanipulator that is constructed by combining the nanotweezers with a three-dimensional driving mechanism facilitates the gripping, moving and releasing of nano-substances.

Abstract translation: 提供纳米扫描器和纳米管操纵器，其允许部件的极小化，并且能够夹持各种类型的纳米物质，例如绝缘体，半导体和导体，并且夹持各种形状的纳米物质。静电纳米尺寸器2的特征在于纳米晶体管 2由多个纳米管构成，其基端部固定在支架6上，使得纳米管从支架6突出，绝缘并覆盖纳米管的表面的涂膜和与导线10,10连接的导线10,10 两个纳米管8,9; 并且通过在这些引线上施加电压而产生的静电吸引力自由地打开和闭合两个纳米管的末端。 此外，通过在纳米管9的表面上形成压电膜32，通过使压电膜膨胀收缩来使纳米管的前端自由地开闭，从而使任何所需的纳米物质 无论纳米物质是绝缘体，半导体还是导体，都要进行处理。 此外，如果通过设计三个纳米管以通过静电系统自由地打开和关闭，则可以处理诸如球形，棒状等各种形状的纳米物质。 此外，通过将纳米技术人员与三维驱动机构组合而构成的纳米机械手有利于纳米物质的夹持，移动和释放。

公开(公告)号：US06802549B2

公开(公告)日：2004-10-12

申请号：US10406845

申请日：2003-04-04

Applicant: Yoshikazu Nakayama ,  Seiji Akita ,  Akio Harada ,  Takashi Okawa

Inventor： Yoshikazu Nakayama ,  Seiji Akita ,  Akio Harada ,  Takashi Okawa

IPC: B25J1512

CPC classification number: B25J7/00 ,  B81B2201/032 ,  B81B2201/12 ,  B81B2203/0118 ,  B81C99/002 ,  B82B3/00 ,  G01Q80/00 ,  Y10S977/732 ,  Y10S977/734 ,  Y10S977/742 ,  Y10S977/778 ,  Y10S977/78 ,  Y10S977/837 ,  Y10S977/842 ,  Y10S977/858 ,  Y10S977/863 ,  Y10S977/875 ,  Y10S977/876 ,  Y10S977/89 ,  Y10S977/901 ,  Y10S977/962

Abstract: To provide nanotweezers and a nanomanipulator which allow great miniaturization of the component and are capable of gripping various types of nano-substances such as insulators, semiconductors and conductors and of gripping nano-substances of various shapes. Electrostatic nanotweezers 2 are characterized in that the nanotweezers 2 are comprised of a plurality of nanotubes whose base end portions are fastened to a holder 6 so that the nanotubes protrude from the holder 6, coating films which insulate and cover the surfaces of the nanotubes, and lead wires 10, 10 which are connected to two of the nanotubes 8, 9; and the tip ends of the two nanotubes are freely opened and closed by means of an electrostatic attractive force generated by applying a voltage across these lead wires. Furthermore, by way of forming a piezo-electric film 32 on the surface of the nanotube 9, and the tip ends of the nanotubes are freely opened and closed by expanding and contracting the piezo-electric film, thus allowing any desired nano-substances to be handled regardless of whether the nano-substances are insulators, semiconductors or conductors. Furthermore, if by way of designing three nanotubes so as to be freely opened and closed by an electrostatic system, nano-substances of various shapes such as spherical, rod-form, etc. can be handled. Moreover, a nanomanipulator that is constructed by combining the nanotweezers with a three-dimensional driving mechanism facilitates the gripping, moving and releasing of nano-substances.

公开(公告)号：US20040061543A1

公开(公告)日：2004-04-01

申请号：US10669428

申请日：2003-09-25

Inventor： Yun-Woo Nam ,  Suk-Han Lee

IPC: G06G007/18 ,  G06G007/19 ,  G06F007/64

CPC classification number: H01L41/45 ,  B81B2201/0257 ,  B81B2201/032 ,  B81B2203/0118 ,  B81B2203/0127 ,  B81C1/00182 ,  H01L41/094 ,  H01L41/0973 ,  H04R1/406 ,  H04R17/02 ,  H04R2420/07

Abstract: A flexible wireless MEMS microphone includes a substrate of a flexible polymeric material, a flexible MEMS transducer structure formed on the substrate by PECVD, an antenna printed on the substrate for communicating with an outside source, a wire and interface circuit embedded in the substrate to electrically connect the flexible MEMS transducer and the antenna, a flexible battery layer electrically connected to the substrate for supplying power to the MEMS transducer, and a flexible bluetooth module layer electrically connected to the battery layer. The flexible MEMS transducer includes a flexible substrate, a membrane layer deposited on the substrate, a lower electrode layer formed on the membrane layer, an active layer formed by depositing a piezopolymer on the lower electrode layer, an upper electrode layer formed on the active layer, and a first and a second connecting pad electrically connected to the lower and upper electrode layers, respectively.

Abstract translation: 灵活的无线MEMS麦克风包括柔性聚合物材料的基底，通过PECVD在基底上形成的柔性MEMS换能器结构，印刷在基底上用于与外部源连通的天线，嵌入在基底中的电线和接口电路， 连接柔性MEMS换能器和天线，电连接到基板的用于向MEMS换能器供电的柔性电池层以及电连接到电池层的柔性蓝牙模块层。 柔性MEMS换能器包括柔性基板，沉积在基板上的膜层，形成在膜层上的下电极层，通过在下电极层上沉积压电聚合物形成的有源层，形成在有源层上的上电极层 以及分别电连接到下电极层和上电极层的第一和第二连接焊盘。

公开(公告)号：US06684699B1

公开(公告)日：2004-02-03

申请号：US09660676

申请日：2000-09-13

Applicant: Daniel Lapadatu ,  Terju Kvisteroy ,  Henrik Jakobsen

Inventor： Daniel Lapadatu ,  Terju Kvisteroy ,  Henrik Jakobsen

IPC: G01P1510

CPC classification number: B81B7/0048 ,  B81B3/0072 ,  B81B2201/032 ,  B81B2203/0109 ,  G01C19/5755 ,  G01P1/006 ,  G01P15/0802 ,  G01P2015/0828 ,  Y10S73/01

Abstract: A pedestal structure and its fabrication method stress release assembly of micromechanical sensors, in particular acceleration sensor, angular rate sensors, inclination sensors or angular acceleration. At least one silicon seismic mass is used as sensing element. The at least one silicon seismic mass is joined to the silicon frame via at least one assembly pedestal, the surface of which is bonded to a covering wafer, either glass or silicon.

Abstract translation: 基座结构及其制造方法微机械传感器的应力释放组件，特别是加速度传感器，角速度传感器，倾斜传感器或角加速度。 至少有一个硅质地震块被用作感测元件。 所述至少一个硅抗震块经由至少一个组件基座接合到所述硅框架，所述组件基座的表面与玻璃或硅的覆盖晶片结合。

公开(公告)号：US06669256B2

公开(公告)日：2003-12-30

申请号：US10009471

申请日：2001-11-07

Applicant: Yoshikazu Nakayama ,  Seiji Akita ,  Akio Harada ,  Takashi Okawa

Inventor： Yoshikazu Nakayama ,  Seiji Akita ,  Akio Harada ,  Takashi Okawa

IPC: B25J1512

CPC classification number: B25J7/00 ,  B81B2201/032 ,  B81B2201/12 ,  B81B2203/0118 ,  B81C99/002 ,  B82B3/00 ,  G01Q80/00 ,  Y10S977/732 ,  Y10S977/734 ,  Y10S977/742 ,  Y10S977/778 ,  Y10S977/78 ,  Y10S977/837 ,  Y10S977/842 ,  Y10S977/858 ,  Y10S977/863 ,  Y10S977/875 ,  Y10S977/876 ,  Y10S977/89 ,  Y10S977/901 ,  Y10S977/962

Abstract: To provide nanotweezers and a nanomanipulator which allow great miniaturization of the component and are capable of gripping various types of nano-substances such as insulators, semiconductors and conductors and of gripping nano-substances of various shapes. Electrostatic nanotweezers 2 are characterized in that the nanotweezers 2 are comprised of a plurality of nanotubes whose base end portions are fastened to a holder 6 so that the nanotubes protrude from the holder 6, coating films which insulate and cover the surfaces of the nanotubes, and lead wires 10, 10 which are connected to two of the nanotubes 8, 9; and the tip ends of the two nanotubes are freely opened and closed by means of an electrostatic attractive force generated by applying a voltage across these lead wires. Furthermore, by way of forming a piezo-electric film 32 on the surface of the nanotube 9, and the tip ends of the nanotubes are freely opened and closed by expanding and contracting the piezo-electric film, thus allowing any desired nano-substances to be handled regardless of whether the nano-substances are insulators, semiconductors or conductors. Furthermore, if by way of designing three nanotubes so as to be freely opened and closed by an electrostatic system, nano-substances of various shapes such as spherical, rod-form, etc. can be handled. Moreover, a nanomanipulator that is constructed by combining the nanotweezers with a three-dimensional driving mechanism facilitates the gripping, moving and releasing of nano-substances.

公开(公告)号：US06653239B2

公开(公告)日：2003-11-25

申请号：US09682894

申请日：2001-10-30

Applicant: Kyle Lebouitz

Inventor： Kyle Lebouitz

IPC: H01L21306

CPC classification number: G01J5/40 ,  B81B3/0081 ,  B81B2201/0278 ,  B81B2201/032 ,  B81B2203/0118 ,  G01J5/02 ,  G01J5/0225 ,  G01J5/023 ,  G01J5/06

Abstract: This invention relates to the construction of microfabricated devices and, in particular, to types of microfabricated devices requiring thermal isolation from the substrates upon which they are built. This invention discloses vertical thermal isolators and methods of fabricating the vertical thermal isolators. Vertical thermal isolators offer an advantage over thermal isolators of the prior art, which were substantially horizontal in nature, in that less wafer real estate is required for the use of the vertical thermal isolators, thereby allowing a greater density per unit area of the microfabricated devices.

公开(公告)号：US20030210115A1

公开(公告)日：2003-11-13

申请号：US10063762

申请日：2002-05-10

Applicant: XEROX CORPORATION

Inventor： Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

IPC: H01H051/22

CPC classification number: G02B6/3508 ,  B81B3/0054 ,  B81B2201/032 ,  G02B6/3546 ,  G02B6/3568 ,  G02B6/3582 ,  G02B6/3596 ,  H01H2001/0042

Abstract: A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.

Abstract translation: 基于双稳态微机电系统（MEMS）的系统包括具有第一稳定状态的微加工梁，其中梁基本上无应力且具有特定的非线性形状和第二稳定状态。 弯曲形状可以包括简单曲线或复合曲线。 在实施例中，梁的边界条件是固定的边界条件，轴承边界条件，弹簧边界条件或其组合。 系统还可以包括致动器，其被布置成在第一和第二稳定状态之间移动梁，以及根据梁在第一和第二稳定状态之间的移动而在第一位置和第二位置之间移动的可动元件。 致动器可以包括热致动器，静电致动器，压电致动器和磁致动器中的一个。 致动器还可以包括热冲击致动器或拉链静电致动器。