公开(公告)号：US06682871B2

公开(公告)日：2004-01-27

申请号：US09789887

申请日：2001-02-21

Applicant: Nan Zhang

Inventor： Nan Zhang

IPC: G03F700

CPC classification number: G02B6/357 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00182 ,  B81C2201/0109 ,  B81C2203/0136 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/3584 ,  H02N1/008

Abstract: A MEMS-based optical switch having improved characteristics and methods for manufacturing the same are provided. In accordance with one embodiment, an optical switch includes a single comb drive actuator having a deflecting beam structure and a mirror coupled to the actuator. The mirror is capable of being moved between an extended position interposed between waveguide channels and a retracted position apart from the waveguide channels. The actuator applies a force capable of deflecting the beam structure and moving the mirror to one of the extended positions or the retracted position and the beam structure returns the mirror to the other of the extended position or the retracted position in the absence of the application of force.

Abstract translation: 提供了具有改进的特性的MEMS基光开关及其制造方法。 根据一个实施例，光学开关包括具有偏转梁结构的单个梳状驱动致动器和耦合到致动器的反射镜。 镜子能够在介于波导通道之间的延伸位置与离开波导通道的缩回位置之间移动。 致动器施加能够使梁结构偏转并且将反射镜移动到延伸位置或缩回位置中的一个的力，并且梁结构在没有应用的情况下将反射镜返回到延伸位置或缩回位置中的另一个 力。

公开(公告)号：US06666979B2

公开(公告)日：2003-12-23

申请号：US10046593

申请日：2001-10-29

Applicant: Jeffrey D. Chinn ,  Vidyut Gopal ,  Sofiane Soukane ,  Toi Yue Becky Leung

Inventor： Jeffrey D. Chinn ,  Vidyut Gopal ,  Sofiane Soukane ,  Toi Yue Becky Leung

IPC: H01L2100

CPC classification number: B81B3/0005 ,  B81B3/0008 ,  B81B2201/033 ,  B81C2201/016 ,  B81C2201/112

Abstract: The present invention pertains to a method of fabricating a surface within a MEM which is free moving in response to stimulation. The free moving surface is fabricated in a series of steps which includes a release method, where release is accomplished by a plasmaless etching of a sacrificial layer material. An etch step is followed by a cleaning step in which by-products from the etch step are removed along with other contaminants which may lead to stiction. There are a series of etch and then clean steps so that a number of “cycles” of these steps are performed. Between each etch step and each clean step, the process chamber pressure is typically abruptly lowered, to create turbulence and aid in the removal of particulates which are evacuated from the structure surface and the process chamber by the pumping action during lowering of the chamber pressure. The final etch/clean cycle may be followed by a surface passivation step in which cleaned surfaces are passivated and/or coated.

Abstract translation: 本发明涉及制造响应于刺激而自由移动的MEM内的表面的方法。 自由移动表面是在一系列步骤中制造的，其包括释放方法，其中通过牺牲层材料的无质子蚀刻来实现释放。 蚀刻步骤之后是清洁步骤，其中来自蚀刻步骤的副产物与可能导致静电的其它污染物一起被去除。 存在一系列蚀刻然后清洁步骤，使得执行这些步骤的许多“循环”。 在每个蚀刻步骤和每个清洁步骤之间，处理室压力通常突然降低，以产生湍流，并且有助于通过在降低腔室压力期间的泵送作用从结构表面和处理室排出的微粒去除。 最终的蚀刻/清洁循环之后可以是表面钝化步骤，其中清洁的表面被钝化和/或涂覆。

公开(公告)号：US20030080082A1

公开(公告)日：2003-05-01

申请号：US10046593

申请日：2001-10-29

Inventor： Jeffrey D. Chinn ,  Vidyut Gopal ,  Sofiane Soukane ,  Toi Yue Becky Leung

IPC: C23F001/00

CPC classification number: B81B3/0005 ,  B81B3/0008 ,  B81B2201/033 ,  B81C2201/016 ,  B81C2201/112

Abstract: The present invention pertains to a method of fabricating a surface within a MEM which is free moving in response to stimulation. The free moving surface is fabricated in a series of steps which includes a release method, where release is accomplished by a plasmaless etching of a sacrificial layer material. An etch step is followed by a cleaning step in which by-products from the etch step are removed along with other contaminants which may lead to stiction. There are a series of etch and then clean steps so that a number of nullcyclesnull of these steps are performed. Between each etch step and each clean step, the process chamber pressure is typically abruptly lowered, to create turbulence and aid in the removal of particulates which are evacuated from the structure surface and the process chamber by the pumping action during lowering of the chamber pressure. The final etch/clean cycle may be followed by a surface passivation step in which cleaned surfaces are passivated and/or coated.

公开(公告)号：US20020136485A1

公开(公告)日：2002-09-26

申请号：US09776166

申请日：2001-02-02

Inventor： Jason D. Reed ,  Kai Hu ,  Robert F. Miracky ,  Claude Hilbert

IPC: G02B006/35

CPC classification number: G02B6/357 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/055 ,  G02B6/3512 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/0875 ,  H01H59/0009 ,  H01H2001/0068

Abstract: An apparatus and method for a micro-electromechanical systems (MEMS) actuator such as a MEMS two-dimensional electrostatic comb drive having springs being advantageously configured to provide relatively large movements in first and second directions. In one embodiment, a comb drive apparatus includes a first set of comb pairs; a second set of comb pairs coupled to the first set of comb pairs; a stage coupled to the first and second sets of comb pairs; a first plurality of springs interposed between the second set of comb pairs and the stage and between the second set of comb pairs and the first set of comb pairs for movably coupling the second set of comb pairs to the stage and to the first set of comb pairs; and a second plurality of springs interposed between the first set of comb pairs and the stage and between the first set of comb pairs and the second set of comb pairs for movably coupling the first set of comb pairs to the stage and to the second set of comb pairs. In response to an appropriate electrostatic actuation force being applied to the MEMS two-dimensional electrostatic comb drive, the springs enable controlled displacement along both x-axis (horizontal direction) and y-axis (vertical direction).

Abstract translation: 用于微机电系统（MEMS）致动器的装置和方法，诸如具有弹簧的MEMS二维静电梳驱动器，其有利地构造成在第一和第二方向上提供较大的运动。 在一个实施例中，梳状驱动装置包括第一组梳子对; 耦合到所述第一组梳对的第二组梳对; 耦合到第一组和第二组梳子对的级; 插入在第二组梳子对之间的第一组弹簧和第二组梳子对之间以及第二组梳子对组合，用于将第二组梳子对可移动地连接到舞台和第一组梳子 对 以及插入在所述第一组梳对和所述台之间以及所述第一组梳形对组和所述第二组梳形对组之间的第二多个弹簧，用于将所述第一组梳子对可移动地联接到所述载物台和所述第二组梳子 梳子对。 响应于施加到MEMS二维静电梳驱动器的适当的静电致动力，弹簧使得能够沿着x轴（水平方向）和y轴（垂直方向）进行控制位移。

公开(公告)号：US20020008922A1

公开(公告)日：2002-01-24

申请号：US09769965

申请日：2001-01-24

Inventor： Robert A. Conant ,  Jocelyn T. Nee ,  Kam-Yin Lau

IPC: G02B007/182

CPC classification number: B81C1/00658 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81C1/00182 ,  B81C2201/0178 ,  B81C2203/032 ,  G02B26/0841

Abstract: A micromirror for fast beam steering and method of fabricating the same. The micromirror of the present invention is lightweight and optically flat, and includes a tensile membrane that is stretched under high tension across a rigid single-crystal silicon support rib structure. A thin layer of gold may be deposited on the polysilicon membrane to improve reflectivity. The tensile stress in the membrane gives the micromirror a very high resonant frequency, thereby allowing the mirror to be scanned at high frequencies without exciting resonant nodes that may compromise the flatness of the optical surface and ruin its optical properties. The tensile stress also causes the optical surface to be stretched flat. The micromirror of the present invention may be actuated by a staggered torsional electrostatic combdrive.

Abstract translation: 一种用于快速光束转向的微镜及其制造方法。 本发明的微反射镜重量轻且光学平坦，并且包括在高刚性单晶硅支撑肋结构上拉伸的拉伸膜。 可以在多晶硅膜上沉积薄的金层以提高反射率。 膜中的拉伸应力使微镜具有非常高的谐振频率，从而允许在高频下扫描反射镜，而不激励谐振节点，这可能损害光学表面的平坦度并破坏其光学性质。 拉伸应力也使得光学表面被拉平。 本发明的微反射镜可以由交错的扭转静电梳形驱动器驱动。

公开(公告)号：US06330102B1

公开(公告)日：2001-12-11

申请号：US09536164

申请日：2000-03-25

Applicant: Michael J. Daneman ,  Behrang Behin ,  Satinderpall Pannu

Inventor： Michael J. Daneman ,  Behrang Behin ,  Satinderpall Pannu

IPC: G02B2600

CPC classification number: G02B6/3556 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81B2207/07 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3542 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: A beam steering module and switching system. The steering module is composed of a N×M array of single axis mirrors able to rotate about a particular axis (X-axis), a second N×M array of single axis mirrors able to rotate about an axis orthogonal to that of the first N×M array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.

Abstract translation: 光束转向模块和开关系统。 转向模块由能够围绕特定轴线（X轴）旋转的单轴镜的N×M阵列组成，能够围绕与第一N×M阵列阵列的轴正交的轴线旋转的单轴镜的第二N×M阵列 （Y轴）和设计成将第一反射镜阵列成像到第二反射镜阵列上的中继透镜，使得可以通过调整X中的适当反射镜的角度来控制X和Y轴两者的光束角度，以及 Y镜阵列。 可以组合两个转向模块以形成切换系统。 使用两个这样的转向模块，可以在输出光纤阵列的平面处完全确定从任何输入光纤出射的光束的位置和角度。

公开(公告)号：US20010048784A1

公开(公告)日：2001-12-06

申请号：US09751660

申请日：2000-12-28

Inventor： Behrang Behin ,  Michael J. Daneman ,  Meng-Hsiung Kiang ,  Kam-Yin Lau ,  Satinderpall Pannu

IPC: G02B006/35

CPC classification number: G02B6/3556 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81B2207/07 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3542 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the inner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process. Two-dimensional scanners may be used to produce fiber-optic switches.

Abstract translation: 二维扫描器由可旋转的万向架结构与垂直静电梳状驱动致动器和传感器组成。 扫描仪的两个旋转轴可以通过激活两组垂直梳齿驱动执行器来独立控制。 第一组垂直梳齿驱动致动器位于万向架结构的外框架和基座之间，第二组垂直梳齿驱动致动器定位在万向架结构的内部和外框之间 万向架结构。 万向节结构的内部可以包括反射表面，并且该装置可以用作反射镜。 此外，可以测量垂直梳状驱动器的电容以监视反射镜的角度位置，并且可以使用电容位置监视信号来实现镜角的闭环反馈控制。 二维扫描器可以在半导体工艺中制造。 二维扫描仪可用于生产光纤交换机。

公开(公告)号：US20010008457A1

公开(公告)日：2001-07-19

申请号：US09789887

申请日：2001-02-21

Applicant: ADC Telecommunications, Inc.

Inventor： Nan Zhang

IPC: G02F001/01 ,  G02F001/03 ,  G02F001/07 ,  G02B026/00

CPC classification number: G02B6/357 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00182 ,  B81C2201/0109 ,  B81C2203/0136 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/3584 ,  H02N1/008

Abstract: A MEMS-based optical switch having improved characteristics and methods for manufacturing the same are provided. In accordance with one embodiment, an optical switch includes a single comb drive actuator having a deflecting beam structure and a mirror coupled to the actuator. The mirror is capable of being moved between an extended position interposed between waveguide channels and a retracted position apart from the waveguide channels. The actuator applies a force capable of deflecting the beam structure and moving the mirror to one of the extended positions or the retracted position and the beam structure returns the mirror to the other of the extended position or the retracted position in the absence of the application of force.

公开(公告)号：US6091537A

公开(公告)日：2000-07-18

申请号：US209347

申请日：1998-12-11

Applicant: Decai Sun ,  Eric Peeters ,  Ross D. Bringans ,  Patrick Y. Maeda

Inventor： Decai Sun ,  Eric Peeters ,  Ross D. Bringans ,  Patrick Y. Maeda

IPC: B81B3/00 ,  G02B7/02 ,  G02B7/08 ,  G02B26/08 ,  G02B26/10 ,  H01S5/00 ,  H01S5/183 ,  G02F1/03

CPC classification number: G02B26/10 ,  B81B3/0062 ,  G02B26/0875 ,  G02B7/023 ,  G02B7/08 ,  B81B2201/033 ,  B81B2201/047 ,  B81B2203/051 ,  B81B2203/053 ,  H01S5/0071 ,  H01S5/0607 ,  H01S5/18388

Abstract: A micro-machined movable microlens assembly is formed on undoped or pure a semiconductor substrate. The movable microlens assemblies are to be actuated using force generators which cause various mechanical degrees of freedom depending upon the type of stage suspension and actuation used.

Abstract translation: 微加工的可移动微透镜组件形成在未掺杂或纯的半导体衬底上。 使用力发生器来致动可移动的微透镜组件，所述力发生器根据所使用的阶段悬架和致动器的类型而产生各种机械自由​​度。

公开(公告)号：US12132420B2

公开(公告)日：2024-10-29

申请号：US16725825

申请日：2019-12-23

Applicant: MEMS Drive (Nanjing) Co., Ltd.

Inventor： Xiaolei Liu ,  Guiqin Wang ,  Matthew Ng

IPC: H02N1/00 ,  B81B3/00 ,  B81B7/00 ,  B81B7/02 ,  G02B7/02 ,  G02B7/09 ,  G02B27/64 ,  H02N2/02 ,  H04N23/68 ,  H10N30/20

CPC classification number: H02N1/008 ,  B81B3/0021 ,  B81B3/0062 ,  B81B7/0006 ,  B81B7/008 ,  B81B7/02 ,  G02B7/09 ,  G02B27/646 ,  H02N2/02 ,  H04N23/687 ,  H10N30/20 ,  H10N30/2044 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/047 ,  B81B2203/0118 ,  B81B2203/0136 ,  B81B2203/05 ,  B81B2203/053

Abstract: A package for moving a platform in six degrees of freedom, is provided. The platform may include an optoelectronic device mounted thereon. The package includes an in-plane actuator which may be a MEMS actuator and an out-of-plane actuator which may be formed of a piezoelectric element. The in-plane MEMS actuator may be mounted on the out-of-plane actuator mounted on a recess in a PCB. The in-plane MEMS actuator includes a plurality comb structures in which fingers of opposed combs overlap one another, i.e. extend past each other's ends. The out-of-plane actuator includes a central portion and a plurality of surrounding stages that are connected to the central portion. The in-plane MEMS actuator is coupled to the out-of-plane Z actuator to provide three degrees of freedom to the payload which may be an optoelectronic device included in the package.