公开(公告)号：US20060279741A1

公开(公告)日：2006-12-14

申请号：US11443344

申请日：2006-05-31

Applicant: Takaaki Hirata ,  Minoru Maeda

Inventor： Takaaki Hirata ,  Minoru Maeda

IPC: G01B9/02

CPC classification number: G01J4/04 ,  G01B9/02003 ,  G01B9/02004 ,  G01B9/02007 ,  G01B2290/45 ,  G01B2290/70 ,  G01J3/10 ,  G01J3/4338 ,  G01J3/453 ,  G01M11/0235 ,  G01M11/0292 ,  G01N21/21 ,  G02B27/283 ,  H04J14/0227 ,  H04J14/0246 ,  H04J14/0279 ,  H04J14/06

Abstract: An optical characteristic measuring apparatus includes: a light source section which sweeps wavelengths of a first input light and a second input light respectively, frequencies of the first and second input lights being different from each other and polarized states of the first and second input lights being perpendicular to each other, and outputs the first and second input light; an interference section which inputs one branched light of the first and second input lights to a measuring object, makes output light from the measuring object interfere with other branched light of the first and second input lights, and outputs a plurality of interference lights; a plurality of light receiving sections which are respectively provided for the interference lights, receives the interference lights respectively, and outputs signals in accordance with optical powers of the interference lights respectively; and a low-pass filter for filtering the outputted signals.

公开(公告)号：US20060209413A1

公开(公告)日：2006-09-21

申请号：US11206900

申请日：2005-08-19

Applicant: Hong Kim ,  Zhijun Sun ,  Yun Jung

Inventor： Hong Kim ,  Zhijun Sun ,  Yun Jung

IPC: G02B27/00

CPC classification number: G02B6/1225 ,  B82Y20/00 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/0259 ,  G01J3/1804 ,  G01J3/26 ,  G01J3/2803 ,  G01J3/2823 ,  G01J4/04 ,  G01J2003/1213 ,  G01N21/6452 ,  G01N2021/6439 ,  G02B5/1857 ,  G02B5/284 ,  Y10S977/932

Abstract: A Fabry-Perot cavity filter includes a first mirror and a second mirror. A gap between the first and the second mirror monotonically varies as a function of width of the filter. This filter may be used with photodetector and a channel selection filter in an optical device, such as a spectrum analyzer. The channel selection filter may be a metal nanooptic filter array which includes plurality of subwavelength apertures in a metal film or between metal islands.

Abstract translation: 法布里 - 珀罗腔滤波器包括第一反射镜和第二反射镜。 第一和第二镜之间的间隙根据滤光片的宽度而单调变化。 该滤光器可以与诸如光谱分析仪的光学装置中的光电检测器和通道选择滤光器一起使用。 通道选择滤光器可以是金属纳滤光器阵列，其包括在金属膜中或金属岛之间的多个亚波长孔。

公开(公告)号：US20060176558A1

公开(公告)日：2006-08-10

申请号：US11347011

申请日：2006-02-03

Applicant: James Plant

Inventor： James Plant

IPC: G02B27/28

CPC classification number: G01J4/04 ,  G01J1/04 ,  G01J1/0425 ,  G02B5/3066 ,  G02B27/285

Abstract: A polarization filter utilizing Brewster's angle. The polarization filter includes a stimulus receiving body having more than one facet. At least two of the more than one facet being arranged at Brewster's angle (relative to the plane of polarization of the incident stimulus) and positioned in different radial orientations (relative to the incident stimulus) which are adapted to provide differential transmission or reflection of polarized electro-magnetic radiation coming from a common source.

公开(公告)号：US20060170932A1

公开(公告)日：2006-08-03

申请号：US11345220

申请日：2006-02-02

Applicant: Naoto Hayashi ,  Yoshiyuki Kuramoto

Inventor： Naoto Hayashi ,  Yoshiyuki Kuramoto

IPC: G01B9/02

CPC classification number: G01J4/04 ,  G01J9/02

Abstract: A measuring apparatus is disclosed which includes an interferometer for measuring a wavefront of light transmitted through a test object by interference between light under test passed through the test object and reference light, and measures a polarization characteristic of the test object. The measuring apparatus has a measuring unit for measuring a polarization characteristic matrix in a pupil plane of the test object while the reference light is blocked or fringe scan is performed.

Abstract translation: 本发明公开了一种测量装置，其包括：干涉仪，用于通过被测对象的光与参考光之间的干涉测量透过测试对象的光的波前，并测量被测对象的极化特性。 测量装置具有测量单元，用于在参考光被阻挡或进行边缘扫描时测量测试对象的光瞳平面中的偏振特性矩阵。

公开(公告)号：US07061613B1

公开(公告)日：2006-06-13

申请号：US10758619

申请日：2004-01-13

Applicant: Chunsheng Huang ,  Pablo I. Rovira ,  Jaime Poris

Inventor： Chunsheng Huang ,  Pablo I. Rovira ,  Jaime Poris

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01N21/211 ,  G01N2021/213

Abstract: An ellipsometer with a variable retarder, which introduces a spatial dependence in the beam, includes a polarizing beam splitter to produce two beams with orthogonal polarization states. The beam splitter may be, e.g., a polarizing displacer or polarizing beam splitter. The intensities of the two beams are measured, e.g., using separate detectors or separate detector elements in an array. The intensity from the two beams may be summed and used as a reference to normalize intensity of the produced beam.

Abstract translation: 具有可变延迟器的椭圆光度计，其在光束中引入空间依赖性，包括偏振分束器，以产生具有正交偏振状态的两个光束。 分束器可以是例如偏振置换器或偏振分束器。 测量两个光束的强度，例如使用阵列中的分离的检测器或单独的检测器元件。 来自两个光束的强度可以相加并用作标准化所产生的光束的强度的参考。

公开(公告)号：US20060103844A1

公开(公告)日：2006-05-18

申请号：US11269204

申请日：2005-11-08

Applicant: Jon Opsal

Inventor： Jon Opsal

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01N21/211

Abstract: An optical inspection device includes a light source for generating a probe beam. The probe beam is focused onto a sample to create a spread of angles of incidence. After reflecting from the sample, the light is imaged onto a two dimensional array of photodetectors. Prior to reaching the detector array, the beam is passed through a rotating compensator. A processor functions to evaluate the sample by analyzing the output of the photodetectors lying along one or more azimuthal angles and at different compensator positions.

Abstract translation: 光学检查装置包括用于产生探测光束的光源。 探测光束被聚焦到样品上以产生入射角的扩展。 从样品反射后，将光成像到二维阵列的光电探测器上。 在到达检测器阵列之前，光束通过旋转补偿器。 处理器用于通过分析沿着一个或多个方位角并且处于不同补偿器位置的光电探测器的输出来评估样本。

公开(公告)号：US07038789B1

公开(公告)日：2006-05-02

申请号：US10370312

申请日：2003-02-13

Applicant: Arthur H. Carrieri

Inventor： Arthur H. Carrieri

IPC: G01B9/02

CPC classification number: G01N21/21 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/0291 ,  G01J3/2823 ,  G01J3/453 ,  G01J4/04 ,  G01N21/35 ,  G01N21/3504 ,  G01N2201/1296

Abstract: A passive interferometer chemical sensor and photopolarimeter communicator includes collector and collimator optics, shared solid-state interferometer/photopolarimeter phase-modulation optics, and a lens imager system. The passive interferometer locates, identifies, and tracks an infrared-absorbing vapor in an open panorama by measuring vibration spectrum moiety. The communicator includes a communications beam that is modulated by the shared projected into the same object space from which chemical imaging is preformed. The communications beam provides detection data that is binary encrypted by Mueller matrix-element encoding.

Abstract translation: 无源干涉仪化学传感器和光偏振计通信器包括收集器和准直器光学器件，共享固态干涉仪/光偏振计相位调制光学器件和透镜成像器系统。 被动干涉仪通过测量振动光谱部分来定位，识别和跟踪开放全景中的红外线吸收蒸气。 通信器包括被共享的调制的通信波束投射到从其进行化学成像的相同物体空间中。 通信波束提供通过Mueller矩阵元素编码进行二进制加密的检测数据。

公开(公告)号：US07030973B2

公开(公告)日：2006-04-18

申请号：US10736514

申请日：2003-12-17

Applicant: Jens C. Rasmussen ,  George Ishikawa ,  Takafumi Terahara ,  Hiroki Ooi

Inventor： Jens C. Rasmussen ,  George Ishikawa ,  Takafumi Terahara ,  Hiroki Ooi

IPC: G01N21/00

CPC classification number: G01J4/00 ,  G01J4/04 ,  H04B10/2569

Abstract: The degree of polarization of an optical signal is measured by a polarimeter and used for providing a feedback signal to adjust adaptive optics of a polarization mode dispersion compensator. The polarization properties of the polarimeter are determined with high accuracy to match the polarimeter through calibration and used to produce the feedback signal.

Abstract translation: 光信号的偏振度由偏振计测量，用于提供反馈信号以调整偏振模色散补偿器的自适应光学元件。 以高精度确定偏光仪的偏振特性，以通过校准匹配偏光计，并用于产生反馈信号。

公开(公告)号：US07015456B2

公开(公告)日：2006-03-21

申请号：US10429742

申请日：2003-05-06

Applicant: Seiji Takeuchi ,  Yasuhiro Kishikawa

Inventor： Seiji Takeuchi ,  Yasuhiro Kishikawa

IPC: H01J40/14

CPC classification number: G03F7/7085 ,  G01J4/04 ,  G03F7/70566

Abstract: A polarization state detecting system includes a first dividing device for dividing incident light into two light beams having the same polarization state as the incident light, a detector for detecting one of the two light beams from the first dividing device, through a polarizer, and an acquisition device for acquiring information regarding the polarization state of the incident light on the basis of an output of the detector. The first dividing device includes a first element, a second element and a third element. The second element is disposed so that a p-polarization component reflected by the first element is reflected by the second element as an s-polarization component. The third element is disposed so that a p-polarization component transmitted through the first element is reflected by the third element as an s-polarization component, and one of the two light beams is light reflected by the first element and reflected by the second element, while the other of the two light beams is light transmitted through the first element and transmitted through the third element.

Abstract translation: 偏振态检测系统包括：第一分割装置，用于将入射光分成具有与入射光相同的偏振状态的两个光束;检测器，用于通过偏振器检测来自第一分割装置的两个光束中的一个;以及 获取装置，用于基于检测器的输出获取关于入射光的偏振状态的信息。 第一分割装置包括第一元件，第二元件和第三元件。 第二元件设置成使得由第一元件反射的p偏振分量作为s偏振分量被第二元件反射。 第三元件设置成使得透过第一元件的p偏振分量被第三元件作为s偏振分量反射，并且两个光束中的一个被第一元件反射并由第二元件反射 而两个光束中的另一个光透过第一元件透过第三元件。

公开(公告)号：US20060012788A1

公开(公告)日：2006-01-19

申请号：US10893542

申请日：2004-07-19

Applicant: Cristian Presura

Inventor： Cristian Presura

IPC: G01J4/00 ,  G01B11/00

CPC classification number: G01N21/211 ,  G01J4/04 ,  G01N21/23

Abstract: An ellipsometer includes an optical component and a detector. The optical component has two birefringent parts in optical communication via a border surface. Light incident on the border surface is split into two reflected and two transmitted components. The detector is configured to measure a property of at least three out of the four components. Based on the measured properties, a state of polarization of the incident light may be determined.

Abstract translation: 椭偏仪包括光学部件和检测器。 光学部件具有通过边界表面光学连通的两个双折射部件。 入射在边界表面的光被分成两个反射的和两个透射的部分。 检测器被配置为测量四个部件中的至少三个的属性。 基于测量的特性，可以确定入射光的偏振状态。