Abstract:
A MEMS transducer includes a first substrate and a second substrate facing the first substrate. The first substrate includes a piezoelectric diaphragm and a conductive contact structure. The conductive contact structure is electrically connected to the piezoelectric diaphragm, and protrudes beyond a principal surface of the first substrate. The second substrate includes a conductive receiving feature and an active device. The conductive receiving feature is aligned with and further bonded to the conductive contact structure. The active device is electrically connected to the piezoelectric diaphragm through the conductive receiving feature and the conductive contact structure.
Abstract:
A microphone array-based audio system that supports representations of auditory scenes using second-order (or higher) harmonic expansions based on the audio signals generated by the microphone array. In one embodiment, a plurality of audio sensors are mounted on the surface of an acoustically rigid polyhedron that approximates a sphere. The number and location of the audio sensors on the polyhedron are designed to enable the audio signals generated by those sensors to be decomposed into a set of eigenbeams having at least one eigenbeam of order two (or higher). Beamforming (e.g., steering, weighting, and summing) can then be applied to the resulting eigenbeam outputs to generate one or more channels of audio signals that can be utilized to accurately render an auditory scene.
Abstract:
In various embodiments, a method for manufacturing microphone structures is provided. The method may include: Providing a substrate having a front side and a back side, the backside facing away from the front side, and having an inner area and an outer area laterally surrounding the inner area, with the inner area comprising a plurality of microphone areas each microphone are being provided for one microphone of the plurality of microphones; Forming a plurality of layers for the plurality of microphones in the microphone areas on the front side of the substrate; Forming a recess from the backside of the substrate with the recess laterally overlapping the entire inner area; Forming a plurality of cavities into a bottom of the recess with each cavity of the plurality of cavities being formed in one of the microphone areas; Processing the layers to form the plurality of microphone structures, wherein each microphone structure comprises at least one layer of the plurality of layers and one cavity; and Separating the plurality of microphone structures from each other.
Abstract:
According to an embodiment, an interface circuit includes a current replicator and a receiver. The current replicator includes a power terminal coupled to a first reference node, an output terminal configured to output a signal proportional to a signal received from a transducer, and an interface terminal coupled to the transducer. Using a single interface terminal, the current replicator may be configured to provide power to the transducer and receive output signals from the transducer. The receiver may include a first input terminal coupled to the output terminal, a second input terminal coupled to a second reference node, and a current converter circuit coupled to the first input terminal.
Abstract:
An electronics chip includes a charge pump and at least one high voltage (HV) electro-static discharge (ESD) module. The charge pump is configured to provide a predetermined voltage across a microphone. The devices described herein are implemented in a standard low voltage CMOS process and has a circuit topology that provides an inherent ESD protection level (when it is powered down), which is higher than the operational (predetermined) DC level. At least one high voltage (HV) electro-static discharge (ESD) module is coupled to the output of the charge pump. The HV ESD module is configured to provide ESD protection for the charge pump and a microelectromechanical system (MEMS) microphone that is coupled to the chip. The at least one HV ESD module includes a plurality of PMOS or NMOS transistors having at least one high voltage NWELL/DNWELL region formed within selected ones of the PMOS or NMOS transistors. The at least one high voltage NWELL/DNWELL region has a breakdown voltage sufficient to allow a low voltage process to be used to construct the chip and still allow the HV ESD module to provide ESD protection for the chip.
Abstract:
A microphone or a microphone sensor system operates with a sensor interface that receives a supply voltage at a supply terminal. The sensor interface detects a command at the supply terminal based on a change in the supply voltage and communicates the command or data related to the command to a component of the sensor system. The supply terminal is a bidirectional terminal that further communicates data related to the sensor system via the supply terminal.
Abstract:
An approach to processing of acoustic signals acquired at a user's device include one or both of acquisition of parallel signals from a set of closely spaced microphones, and use of a multi-tier computing approach in which some processing is performed at the user's device and further processing is performed at one or more server computers in communication with the user's device. The acquired signals are processed using time versus frequency estimates of both energy content as well as direction of arrival. In some examples, a non-negative matrix or tensor factorization approach is used to identify multiple sources each associated with a corresponding direction of arrival of a signal from that source. In some examples, data characterizing direction of arrival information is passed from the user's device to a server computer where direction-based processing is performed.
Abstract:
In one embodiment, the invention is a microphone system with an internal test circuit. The system includes a microphone having a housing with an acoustic port, a first transducer, a second transducer, a controller, and a current source. The system also includes an acoustic assembly with a cover and an acoustic pressure source positioned in the cover. When the acoustic assembly is positioned over the acoustic port, an acoustic chamber is formed, and a signal can be applied to the acoustic pressure source such that a first set of measurements can be taken. The acoustic assembly can be removed and replaced with an acoustic cover to take a second set of measurements. Based on the first and second measurements, sensitivities of the first and second transducers can be determined. In another embodiment, the invention provides a method for calibrating the sensitivity of a microphone.
Abstract:
A wearable electronic device is discussed. The device has a housing and a processor in the housing. The processor can enable the wearer of the device to select different operations from an onscreen display. The device also has a communication circuit in the housing to transmit wirelessly to another device cooperating with the electronic device. The device has a microphone hole penetrating the housing to a microphone, a microphone seal component, and a waterproof material in the housing. The microphone seal component has channels and when compressed against the waterproof material can i) allow sound waves in air to pass through to the microphone inside the housing behind the waterproof material and the microphone seal component, ii) form a water tight seal for the microphone hole penetrating the housing, and iii) provide an air pressure equalization mechanism between internal pressure inside the housing and atmospheric pressure external to the housing.
Abstract:
A microphone structure of an MEMS device has a layer construction including: a base substrate; a deflectable microphone diaphragm at least partly spanning a through-opening in the substrate; a deflectable electrode of a microphone condenser system; a stationary counter-element having ventilation openings situated in the layer construction over the microphone diaphragm and acting as a bearer for a stationary electrode of the microphone condenser system. The diaphragm is bonded into the layer construction on the substrate via a flexible beam. The otherwise free edge region of the diaphragm is curved in a pan shape, so that it extends both vertically and also in some regions laterally beyond the edge region of the through-opening, and the edge region of the through-opening forms a lower stop for the diaphragm movement.