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    MEMS DEVICE, PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT
    241.
    发明申请
    MEMS DEVICE, PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT 审中-公开
    MEMS器件，压力传感器，高精度计，电子设备和移动物体

    公开(公告)号：US20150217989A1

    公开(公告)日：2015-08-06

    申请号：US14601615

    申请日：2015-01-21

    Applicant: Seiko Epson Corporation

    Inventor： Yusuke MATSUZAWA

    IPC: B81B3/00

    CPC classification number: B81B3/0054 ,  B81B2201/0264 ,  B81B2201/0292 ,  G01L9/0054

    Abstract: A MEMS device includes: a substrate; a sensor element (functional element) that is disposed above the substrate; a surrounding wall that is disposed above one surface side of the substrate and surrounds the sensor element in a plan view; a covering layer that overlaps the substrate in the plan view and is connected to the surrounding wall; and a reinforcing layer that is arranged between the covering layer and the sensor element. The surrounding wall includes a substrate-side surrounding wall, and a covering layer-side surrounding wall that is located on the covering layer side of the substrate-side surrounding wall and at least a portion of which is disposed above the inside of the substrate-side surrounding wall in the plan view.

    Abstract translation: MEMS器件包括：衬底; 设置在所述基板上方的传感器元件（功能元件） 设置在所述基板的一个表面侧的周围的壁，并且在俯视图中围绕所述传感器元件; 在平面图中与基板重叠并连接到周围壁的覆盖层; 以及布置在所述覆盖层和所述传感器元件之间的加强层。 周围壁包括基板侧围绕壁和覆盖层侧围壁，其位于基板侧围壁的覆盖层侧，并且至少一部分设置在基板侧周围壁的内侧， 侧面的围墙在平面图。

    Laser rangefinder
    242.
    发明授权
    Laser rangefinder 有权
    激光测距仪

    公开(公告)号：US09030650B2

    公开(公告)日：2015-05-12

    申请号：US13176757

    申请日：2011-07-06

    Applicant: Chih-Chen Lai

    Inventor： Chih-Chen Lai

    IPC: G01C3/08 ,  B81B7/04 ,  G01S7/48 ,  G01S17/42 ,  G01S7/481

    CPC classification number: G01C3/08 ,  B81B7/04 ,  B81B2201/0292 ,  B81B2201/047 ,  B81B2203/0154 ,  B81B2207/053 ,  G01S7/4814 ,  G01S7/4817 ,  G01S17/42

    Abstract: A laser rangefinder includes a laser emitter for emitting parallel laser beams, a micro electro mechanical system reflector including a plurality of micro reflecting units and configured for reflecting the parallel laser beams toward different points on an object, a micro electro mechanical system photoreceiver configured for receiving the laser beams reflected by and from the different points on the object, a time interval counter configured for recording the time intervals between a first time when the laser emitter emitting the parallel laser beams and second times when the laser beams are received by the micro electro mechanical system photoreceiver, and a processor configured for calculating the distances to the different points of the object based on the time intervals.

    Abstract translation: 激光测距仪包括用于发射平行激光束的激光发射器，包括多个微反射单元并构造成用于将平行激光束反射到物体上的不同点的微机电系统反射器，微机电系统光接收器，被配置为接收 由物体上的不同点反射的激光束，被配置为记录发射平行激光束的激光发射器的第一次之间的时间间隔的时间间隔计数器，以及激光束被微电子接收时的第二次的时间间隔计数器 机械系统光接收器和被配置为基于时间间隔计算到对象的不同点的距离的处理器。

    CMOS-compatible movable microstructure based devices
    246.
    发明授权
    CMOS-compatible movable microstructure based devices 失效
    CMOS兼容移动微结构的器件

    公开(公告)号：US08552464B2

    公开(公告)日：2013-10-08

    申请号：US12422280

    申请日：2009-04-12

    Applicant: Long-Sheng Fan

    Inventor： Long-Sheng Fan

    IPC: H01L23/00

    CPC classification number: B81C1/00246 ,  B81B2201/0292 ,  B81B2201/038 ,  B81B2203/056 ,  B81C2203/0714 ,  B81C2203/0742 ,  H01L27/0617

    Abstract: The present invention addresses the aims and issues of making multi layer microstructures including “metal-shell-oxide-core” structures and “oxide-shell-metal-core” structures, and mechanically constrained structures and the constraining structures using CMOS (complimentary metal-oxide-semiconductor transistors) materials and layers processed during the standard CMOS process and later released into constrained and constraining structures by etching away those CMOS materials used as sacrificial materials. The combinations of possible constrained structures and methods of fabrication are described.

    Abstract translation: 本发明解决了制造多层微观结构的目的和问题，包括“金属 - 壳 - 氧化物 - 氧化物 - 核心”结构和“氧化物 - 壳 - 金属 - 芯”结构，机械约束结构和使用CMOS（互补金属 - 氧化物半导体晶体管）在标准CMOS工艺期间处理的材料和层，然后通过蚀刻掉用作牺牲材料的那些CMOS材料而释放到约束和约束结构中。 描述了可能的约束结构和制造方法的组合。

    Force, pressure, or stiffness measurement or calibration using graphene or other sheet membrane
    248.
    发明授权
    Force, pressure, or stiffness measurement or calibration using graphene or other sheet membrane 失效
    使用石墨烯或其他薄膜进行力，压力或刚度测量或校准

    公开(公告)号：US08418547B2

    公开(公告)日：2013-04-16

    申请号：US13057701

    申请日：2009-08-06

    Applicant: Jeffrey William Kysar ,  James C. Hone ,  Changgu Lee ,  Xiaoding Wei

    Inventor： Jeffrey William Kysar ,  James C. Hone ,  Changgu Lee ,  Xiaoding Wei

    IPC: G01L5/04 ,  G01L7/08

    CPC classification number: B81C99/003 ,  B81B2201/0292

    Abstract: Force, pressure, or stiffness measurement or calibration can be provided, such as by using a graphene or other sheet membrane, which can provide a specified number of monolayers suspended over a substantially circular well. In an example, the apparatus can include a substrate, including a substantially circular well. A deformable sheet membrane can be suspended over the well. The membrane can be configured to include a specified integer number of one or more monolayers. A storage medium can comprise accompanying information about the suspended membrane or the substrate that, with a deflection displacement response of the suspended membrane to an applied force or pressure, provides a measurement of the applied force or pressure.

    Abstract translation: 可以提供力，压力或刚度测量或校准，例如通过使用石墨烯或其它片膜，其可以提供悬浮在基本圆形孔上的指定数量的单层。 在一个示例中，该装置可以包括基底，包括基本圆形的孔。 可变形的薄膜可以悬挂在井上。 膜可以被配置为包括指定整数的一个或多个单层。 存储介质可以包括关于悬浮的膜或基底的附带信息，其中悬浮膜的偏转位移响应到施加的力或压力，提供所施加的力或压力的测量。

    Fabrication method of carbon nanotube film and sensor based on carbon nanotube film
    249.
    发明授权
    Fabrication method of carbon nanotube film and sensor based on carbon nanotube film 有权
    基于碳纳米管膜的碳纳米管膜和传感器的制造方法

    公开(公告)号：US08399279B2

    公开(公告)日：2013-03-19

    申请号：US13176019

    申请日：2011-07-05

    Applicant: Geunbae Lim ,  Taechang An

    Inventor： Geunbae Lim ,  Taechang An

    IPC: H01L21/02

    CPC classification number: B82Y40/00 ,  B81B3/0021 ,  B81B2201/0292 ,  B82Y10/00 ,  H01L51/0049 ,  H01L51/0508

    Abstract: A method for fabricating a carbon nanotube film floating on a bottom is provided. The fabrication method of a carbon nanotube film comprises: forming electrodes on a substrate; arranging a suspension comprising a plurality of carbon nanotubes on the electrodes; and arranging the carbon nanotubes on the electrodes by applying a voltage to the electrodes.

    Abstract translation: 提供一种制造浮动在底部上的碳纳米管膜的方法。 碳纳米管膜的制造方法包括：在基板上形成电极; 在电极上设置包含多个碳纳米管的悬浮液; 以及通过向电极施加电压将碳纳米管布置在电极上。

    MEMS-BASED MICRO AND NANO GRIPPERS WITH TWO AXIS FORCE SENSORS
    250.
    发明申请
    MEMS-BASED MICRO AND NANO GRIPPERS WITH TWO AXIS FORCE SENSORS 有权
    具有双轴力传感器的基于MEMS的微型和纳米拖板

    公开(公告)号：US20130037512A1

    公开(公告)日：2013-02-14

    申请号：US13652851

    申请日：2012-10-16

    Applicant: Yu SUN ,  Keekyoung KIM

    Inventor： Yu SUN ,  Keekyoung KIM

    IPC: H05K13/00

    CPC classification number: B81C99/002 ,  B25J9/104 ,  B81B2201/0292 ,  B81B2201/031 ,  B81B2201/033

    Abstract: The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sixes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.

    Abstract translation: 本发明涉及一种微抓爪的设计和微细加工方法，该方法能够抓住六点和二轴力感测能力的大范围的微纳米物体。 夹持运动由一个或多个电热致动器产生。 沿x和y方向的集成力传感器可以测量夹紧力以及沿着法向方向施加在微夹臂末端的力，并且分辨率低至纳摩顿。 微加工方法可实现致动器和力传感器的整体集成。

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