公开(公告)号：US09397585B2

公开(公告)日：2016-07-19

申请号：US13842832

申请日：2013-03-15

Applicant: DigitalOptics Corporation MEMS

Inventor： Xiaolei Liu ,  Xiaojun Huang ,  Robert J. Calvet

IPC: G02B7/02 ,  G02B26/08 ,  G02B26/00 ,  H02N1/00 ,  B81C3/00 ,  G02B7/08 ,  G03B3/10 ,  B81C1/00

CPC classification number: H02N1/008 ,  B81B2201/033 ,  B81C1/00825 ,  B81C3/00 ,  G02B7/08 ,  G03B3/10 ,  G03B2205/0007 ,  G03B2205/0053 ,  G03B2205/0061 ,  Y10T29/49002

Abstract: Techniques are disclosed for systems and methods to provide shock impact mitigation for MEMS structures. A MEMS structure may include one or more actuators. An actuator may include a first frame having a spine, where the spine includes a body and a tip. The actuator may include a second frame connected to the first frame and including a shock stop, where the shock stop includes a surface in proximity to the spine tip. An actuator may include a shock cushion spring fixed relative to the spine tip and situated substantially between the spine tip and the shock stop surface, where the shock cushion spring is adapted to protect the spine tip from contact with the shock stop surface.

Abstract translation: 公开了为MEMS结构提供减震冲击的系统和方法的技术。 MEMS结构可以包括一个或多个致动器。 致动器可以包括具有脊柱的第一框架，其中脊柱包括主体和尖端。 致动器可以包括连接到第一框架并且包括冲击停止件的第二框架，其中冲击停止件包括靠近脊尖的表面。 致动器可以包括相对于脊尖固定的冲击缓冲弹簧，其基本上位于脊柱末端和冲击阻止表面之间，其中冲击缓冲弹簧适于保护脊尖不与冲击阻止表面接触。

公开(公告)号：US09383382B2

公开(公告)日：2016-07-05

申请号：US13779002

申请日：2013-02-27

Applicant: STMicroelectronics S.r.l.

Inventor： Barbara Simoni ,  Carlo Valzasina

IPC: G01P15/125 ,  B81C1/00 ,  G01P15/08 ,  B81B3/00

CPC classification number: G01P15/125 ,  B81B3/0094 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/033 ,  B81B2203/04 ,  B81B2203/058 ,  B81C1/00198 ,  G01P15/0802

Abstract: A microelectromechanical sensor that in one embodiment includes a supporting structure, having a substrate and electrode structures anchored to the substrate; and a sensing mass, movable with respect to the supporting structure so that a distance between the sensing mass and the substrate is variable. The sensing mass is provided with movable electrodes capacitively coupled to the electrode structures. Each electrode structure comprises a first fixed electrode and a second fixed electrode mutually insulated by a dielectric region and arranged in succession in a direction substantially perpendicular to a face of the substrate.

Abstract translation: 一种微机电传感器，其在一个实施例中包括支撑结构，其具有衬底和锚定到衬底的电极结构; 以及相对于支撑结构可移动的感测质量，使得感测质量块和衬底之间的距离是可变的。 感测质量体具有与电极结构电容耦合的可动电极。 每个电极结构包括第一固定电极和第二固定电极，所述第一固定电极和第二固定电极通过电介质区域相互绝缘并且在基本上垂直于衬底的表面的方向上相继布置。

公开(公告)号：US20150338246A1

公开(公告)日：2015-11-26

申请号：US14720282

申请日：2015-05-22

Applicant: Commissariat a L'Energie Atomique et aux Energies Alternatives

Inventor： Philippe ROBERT ,  Loic JOET

IPC: G01D5/241 ,  B81C1/00

CPC classification number: G01D5/2417 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2203/051 ,  B81C1/00134 ,  G01P15/125 ,  G01P2015/0814 ,  H01G5/14 ,  H01G5/16

Abstract: A device with a mobile element extending along a given plane comprising at least one first, one second and one third layers extending in planes parallel to the given plane, with the first layer forming a support, the second layer comprising all or a portion of the mobile element and means for suspending the mobile element with respect to the support and the third layer comprising all or a portion of the capacitive means of which the capacitance varies according to the relative position of the mobile element with respect to the support, said capacitive means comprising at least one mobile electrode integral with one of the faces of the mobile element parallel to the given plane, and at least one fixed electrode with respect to the support, with the fixed and mobile electrodes being arranged at least partially in the same plane parallel to the given plane and at least partially above and/or below the mobile element.

Abstract translation: 一种具有沿着给定平面延伸的移动元件的装置，包括在与所述给定平面平行的平面中延伸的至少一个第一，第二和第三层，所述第一层形成支撑件，所述第二层包括全部或一部分 移动元件和用于使移动元件相对于支撑件悬挂的装置，并且第三层包括根据移动元件相对于支撑件的相对位置电容变化的电容装置的全部或一部分，所述电容装置 包括与所述移动元件的平行于所述给定平面的所述面中的一个一体化的至少一个移动电极以及相对于所述支撑件的至少一个固定电极，所述固定电极和所述移动电极至少部分地布置在同一平面内 到达给定平面并且至少部分地在移动元件上方和/或下方。

公开(公告)号：US20150316581A1

公开(公告)日：2015-11-05

申请号：US14314243

申请日：2014-06-25

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Matti LIUKKU ,  Ville Pekka RYTKÖNEN

IPC: G01P15/125

CPC classification number: G01P15/125 ,  B81B3/0078 ,  B81B2201/0235 ,  B81B2201/033 ,  G01P15/0802 ,  G01P15/131 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/0871

Abstract: The invention relates to a capacitive micromechanical sensor structure comprising a stator structure rigidly anchored to a substrate and a rotor structure movably anchored by means of spring structures to the substrate. The stator structure has a plurality of stator finger support beams and the rotor structure has a plurality of rotor finger support beams. Stator fingers along the stator finger support beam of the stator structure extend into rotor gaps along the rotor finger support beam of the rotor structure, and rotor fingers along the rotor finger support beam of the rotor structure extend into stator gaps along the stator finger support beam of the stator structure.

Abstract translation: 本发明涉及一种电容微机械传感器结构，其包括刚性地锚定到基底的定子结构和通过弹簧结构可移动地锚定到基底的转子结构。 定子结构具有多个定子指状支撑梁，转子结构具有多个转子手指支撑梁。 沿着定子结构的定子指状支撑梁的定子指状物沿着转子结构的转子指状支撑梁延伸到转子间隙中，沿着转子结构的转子指状支撑梁的转子指状物沿着定子指状支撑梁延伸到定子间隙中 的定子结构。

公开(公告)号：US20150217990A1

公开(公告)日：2015-08-06

申请号：US14607714

申请日：2015-01-28

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto Carminati ,  Sebastiano Conti

IPC: B81B3/00 ,  G03B21/14 ,  G03B21/20 ,  G03B21/28

CPC classification number: B81B3/0062 ,  B81B3/0043 ,  B81B7/008 ,  B81B2201/018 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  G02B26/0841 ,  G03B21/142 ,  G03B21/2033 ,  G03B21/28

Abstract: The MEMS device has a suspended mass supported via a pair of articulation arms by a supporting region. An electrostatic driving system, coupled to the articulation arms, has mobile electrodes and fixed electrodes that are coupled to each other. The electrostatic driving system is formed by two pairs of actuation assemblies, arranged on opposite sides of a respective articulation arm and connected to the articulation arm through connection elements. Each actuation assembly extends laterally to the suspended mass and has an auxiliary arm carrying a respective plurality of mobile electrodes. Each auxiliary arm is parallel to the articulation arms. The connection elements may be rigid or formed by linkages.

Abstract translation: MEMS器件具有通过支撑区域经由一对关节臂支撑的悬挂质量。 耦合到关节臂的静电驱动系统具有彼此耦合的移动电极和固定电极。 静电驱动系统由两对致动组件形成，这两对致动组件布置在相应的关节臂的相对侧上，并通过连接元件连接到关节臂上。 每个致动组件横向延伸到悬挂质量块，并具有一个载有相应多个移动电极的辅助臂。 每个辅助臂平行于铰接臂。 连接元件可以是刚性的或通过连杆形成。

公开(公告)号：US08915158B2

公开(公告)日：2014-12-23

申请号：US11757321

申请日：2007-06-01

Applicant: Harold L. Stalford

Inventor： Harold L. Stalford

IPC: B81B3/00 ,  G02B26/08

CPC classification number: G02B26/0833 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/037 ,  Y10T74/18056 ,  Y10T74/18304

Abstract: Methods and systems for micro transmissions for a micro machine may comprise an input shaft assembly coupled to a micro actuator, an output shaft assembly coupled to a micro shaft, and one or more power conversion elements operable to convert a first type of movement from the micro actuator into a second, disparate type of movement for the micro shaft.

Abstract translation: 用于微型机器的微型变速器的方法和系统可以包括耦合到微型致动器的输入轴组件，耦合到微型轴的输出轴组件和可操作以将来自微型机械的第一类型的运动转换的一个或多个功率转换元件 致动器成为微型轴的第二种不同类型的运动。

公开(公告)号：US08729770B1

公开(公告)日：2014-05-20

申请号：US12781766

申请日：2010-05-17

Applicant: Veljko Milanovic

Inventor： Veljko Milanovic

IPC: H02N1/00 ,  H02N1/04

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2203/0118 ,  B81B2203/058 ,  G02B7/1821

Abstract: A MEMS system comprises a first rotational actuator having a first drive mechanism configured to drive rotation of a first rotator about a first axis, a second rotational actuator having a second drive mechanism configured to drive rotation of a second rotator about a second axis, first and second flexible linkages, a first drive beam coupled to the first rotator and to the first flexible linkage, a second drive beam coupled to the second rotator and to the second flexible linkage, and one or more device mounts coupled to the first and second flexible linkages. The one or more device mounts are configured to provide distributed points of attachment of a device. The rotation of the first and second rotators causes the device mount to rotate or piston.

Abstract translation: MEMS系统包括具有第一驱动机构的第一旋转致动器，第一驱动机构被配置为驱动围绕第一轴线旋转第一旋转器，第二旋转致动器具有第二驱动机构，该第二驱动机构构造成驱动第二旋转器围绕第二轴线的旋转， 第二柔性连接件，耦合到第一旋转器和第一柔性连接件的第一驱动梁，耦合到第二旋转器和第二柔性连杆的第二驱动梁，以及联接到第一和第二柔性连杆的一个或多个装置安装件 。 一个或多个设备安装件被配置为提供设备的分布式附着点。 第一和第二转子的旋转导致装置安装件旋转或活塞。

公开(公告)号：US08679887B2

公开(公告)日：2014-03-25

申请号：US13456990

申请日：2012-04-26

Applicant: Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

Inventor： Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

IPC: H01L21/58

CPC classification number: H01L21/76898 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C1/00896 ,  B81C2201/019 ,  G02B6/357 ,  G02B6/3584

Abstract: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.

Abstract translation: 一种具有支撑部件和操作部件的微电子机械装置的制造方法，包括提供具有第一层半导体材料的第一半导体晶片和布置在第一层顶部的第二半导体材料层，形成 在第二层中的装置的第一支撑部分和第一操作部分，在第一层中形成临时锚固件，以及将第一晶片结合到第二晶片，第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后，所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。

公开(公告)号：US20130181893A1

公开(公告)日：2013-07-18

申请号：US13449198

申请日：2012-04-17

Applicant: Justin Phelps Black ,  Ravindra V. Shenoy ,  Jon Bradley Lasiter ,  Philip Jason Stephanou

Inventor： Justin Phelps Black ,  Ravindra V. Shenoy ,  Jon Bradley Lasiter ,  Philip Jason Stephanou

IPC: G06T1/00 ,  H05K3/00 ,  G06F3/01 ,  G01L1/10 ,  G06F3/038

CPC classification number: B81B3/0021 ,  B81B2201/033 ,  B81B2201/047 ,  G02B26/001 ,  G02B26/0841 ,  H02N1/008

Abstract: This disclosure provides systems, methods and apparatus for glass electromechanical systems (EMS) electrostatic devices. In one aspect, a glass EMS electrostatic device includes sidewall electrodes. Structural components of a glass EMS electrostatic device such as stationary support structures, movable masses, coupling flexures, and sidewall electrode supports, can be formed from a single glass body. The glass body can be a photochemically etched. In some implementations, pairs of sidewall electrodes can be arranged in interdigitated comb or parallel plate configurations and can include plated metal layers and narrow capacitive gap spacing.

Abstract translation: 本公开提供了用于玻璃机电系统（EMS）静电装置的系统，方法和装置。 一方面，玻璃EMS静电装置包括侧壁电极。 可以由单个玻璃体形成诸如固定支撑结构，可移动质量块，耦合弯曲部和侧壁电极支架的玻璃EMS静电装置的结构部件。 玻璃体可以光化学蚀刻。 在一些实施方式中，侧壁电极对可以以叉指梳状或平行板结构布置，并且可以包括电镀金属层和窄电容间隙。

公开(公告)号：US08426931B2

公开(公告)日：2013-04-23

申请号：US12907252

申请日：2010-10-19

Applicant: Toma Fujita ,  Hironobu Kawauchi ,  Haruhiko Nishikage

Inventor： Toma Fujita ,  Hironobu Kawauchi ,  Haruhiko Nishikage

IPC: H01L29/84

CPC classification number: B81B3/0086 ,  B81B2201/0235 ,  B81B2201/033 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  H01L29/84

Abstract: To provide a semiconductor device prevented from giving a limitation on the sensitivity of HEMS devices due to isolation regions thereof and a method of fabricating the same. The semiconductor device includes: a semiconductor substrate with a recess portion formed in an upper surface; a supporting body provided around the recess portion on the semiconductor substrate; a beam-type movable portion which includes a movable electrode provided above the recess portion and is fixed to the supporting body at a position away from the movable electrode; a beam-type fixed electrode provided above the recess portion to be opposed to the movable electrode and fixed to the supporting body; and isolation regions each including a separation column made of a semiconductor and a separation insulating film provided on a side surface of the separation column, the isolation regions being provided between the movable electrode and the supporting body and between the fixed electrode and the supporting body to electrically separate the movable and fixed electrodes from the supporting body.

Abstract translation: 提供一种半导体器件及其制造方法，防止了HEMS器件的隔离区域的灵敏度受到限制。 半导体器件包括：具有形成在上表面的凹部的半导体衬底; 设置在所述半导体衬底上的所述凹部周围的支撑体; 梁状可动部，其包括设置在所述凹部上方的可动电极，并且在远离所述可动电极的位置固定于所述支撑体; 设置在与所述可动电极相对并固定在所述支撑体上的所述凹部的上方的光束型固定电极， 以及隔离区域，每个隔离区域包括由半导体制成的分离柱和设置在分离柱的侧表面上的分离绝缘膜，隔离区域设置在可动电极和支撑体之间以及固定电极和支撑体之间， 将可移动和固定的电极与支撑体电分离。